JP5703224B2 - 有機材料のための蒸発器、及び、蒸発器を用いて基板を有機材料で被覆するための方法 - Google Patents

有機材料のための蒸発器、及び、蒸発器を用いて基板を有機材料で被覆するための方法 Download PDF

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Publication number
JP5703224B2
JP5703224B2 JP2011528448A JP2011528448A JP5703224B2 JP 5703224 B2 JP5703224 B2 JP 5703224B2 JP 2011528448 A JP2011528448 A JP 2011528448A JP 2011528448 A JP2011528448 A JP 2011528448A JP 5703224 B2 JP5703224 B2 JP 5703224B2
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Japan
Prior art keywords
chamber
organic material
sublimation
evaporator
melamine
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Expired - Fee Related
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JP2011528448A
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English (en)
Japanese (ja)
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JP2012504188A5 (enExample
JP2012504188A (ja
Inventor
シュテファン ハイン，
シュテファン ハイン，
ゲルト ホフマン，
ゲルト ホフマン，
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Applied Materials Inc
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Applied Materials Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01B—BOILING; BOILING APPARATUS ; EVAPORATION; EVAPORATION APPARATUS
    • B01B1/00—Boiling; Boiling apparatus for physical or chemical purposes ; Evaporation in general
    • B01B1/005—Evaporation for physical or chemical purposes; Evaporation apparatus therefor, e.g. evaporation of liquids for gas phase reactions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP2011528448A 2008-09-29 2009-09-29 有機材料のための蒸発器、及び、蒸発器を用いて基板を有機材料で被覆するための方法 Expired - Fee Related JP5703224B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP08165434.5 2008-09-29
EP08165434A EP2168643A1 (en) 2008-09-29 2008-09-29 Evaporator for organic materials
PCT/IB2009/006990 WO2010035130A2 (en) 2008-09-29 2009-09-29 Evaporator for organic materials

Publications (3)

Publication Number Publication Date
JP2012504188A JP2012504188A (ja) 2012-02-16
JP2012504188A5 JP2012504188A5 (enExample) 2012-11-15
JP5703224B2 true JP5703224B2 (ja) 2015-04-15

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Family Applications (1)

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JP2011528448A Expired - Fee Related JP5703224B2 (ja) 2008-09-29 2009-09-29 有機材料のための蒸発器、及び、蒸発器を用いて基板を有機材料で被覆するための方法

Country Status (8)

Country Link
US (1) US20100080901A1 (enExample)
EP (1) EP2168643A1 (enExample)
JP (1) JP5703224B2 (enExample)
CN (1) CN102165091B (enExample)
MX (1) MX2011003339A (enExample)
RU (1) RU2524521C2 (enExample)
TW (1) TWI467040B (enExample)
WO (1) WO2010035130A2 (enExample)

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JP5179739B2 (ja) * 2006-09-27 2013-04-10 東京エレクトロン株式会社 蒸着装置、蒸着装置の制御装置、蒸着装置の制御方法および蒸着装置の使用方法
JP5718362B2 (ja) * 2010-12-14 2015-05-13 シャープ株式会社 蒸着装置、蒸着方法、並びに、有機エレクトロルミネッセンス表示装置の製造方法
US20130260501A1 (en) * 2010-12-21 2013-10-03 Sharp Kabushiki Kaisha Vapor deposition device, vapor deposition method, and method of manufacturing organic electroluminescent display device
CN103270189B (zh) * 2010-12-24 2015-09-23 夏普株式会社 蒸镀装置、蒸镀方法和有机电致发光显示装置的制造方法
US9748526B2 (en) * 2011-03-15 2017-08-29 Sharp Kabushiki Kaisha Vapor deposition device, vapor deposition method, and method for producing organic el display device
JP2013100581A (ja) * 2011-11-09 2013-05-23 Ulvac Japan Ltd 蒸着装置及び蒸着方法
EP2746423B1 (en) * 2012-12-20 2019-12-18 Applied Materials, Inc. Deposition arrangement, deposition apparatus and method of operation thereof
US20150079283A1 (en) * 2013-09-13 2015-03-19 LGS Innovations LLC Apparatus and method to deposit doped films
FR3024162A1 (fr) * 2014-07-28 2016-01-29 Nexcis Dispositif et procede pour la formation d'une couche mince sur un substrat
CN107217233A (zh) * 2017-04-24 2017-09-29 无锡市司马特贸易有限公司 聚合物真空镀膜机
US11946131B2 (en) * 2017-05-26 2024-04-02 Universal Display Corporation Sublimation cell with time stability of output vapor pressure
WO2019057272A1 (en) * 2017-09-20 2019-03-28 Applied Materials, Inc. METHOD AND TREATMENT SYSTEM FOR REGULATING A THICKNESS OF A CERAMIC LAYER ON A SUBSTRATE
WO2020082282A1 (en) * 2018-10-25 2020-04-30 China Triumph International Engineering Co., Ltd. Vapor deposition apparatus and use thereof
KR102859881B1 (ko) * 2020-11-18 2025-09-12 주식회사 엘지화학 유기발광다이오드의 증착장치
CN116964240A (zh) * 2021-02-16 2023-10-27 应用材料公司 坩埚、蒸发源、蒸发方法、蒸发系统和制造装置的方法
JP2024531190A (ja) 2021-08-12 2024-08-29 アプライド マテリアルズ インコーポレイテッド 有効表面積での蒸発のための蒸発器
JP2024539919A (ja) * 2021-10-27 2024-10-31 インテグリス・インコーポレーテッド 高蒸気圧送出システム

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DE3481293D1 (de) * 1983-10-07 1990-03-15 Johannes Zimmer Einrichtung zum gleichmaessigen verteilen fliessfaehiger medien in vorgegebener breite.
GB8708436D0 (en) * 1987-04-08 1987-05-13 British Telecomm Reagent source
RU2031187C1 (ru) * 1991-06-06 1995-03-20 Индивидуальное частное предприятие "Электрон-Вега" Испаритель
RU2051200C1 (ru) * 1991-10-01 1995-12-27 Владимир Григорьевич Белов Устройство для нанесения полимерных пленок в вакууме
EP0962260B1 (en) * 1998-05-28 2005-01-05 Ulvac, Inc. Material evaporation system
DE69836039T2 (de) 1998-05-28 2007-12-06 ULVAC, Inc., Chigasaki Verdampfungsquelle für organisches Material
US6275649B1 (en) 1998-06-01 2001-08-14 Nihon Shinku Gijutsu Kabushiki Kaisha Evaporation apparatus
US6503564B1 (en) 1999-02-26 2003-01-07 3M Innovative Properties Company Method of coating microstructured substrates with polymeric layer(s), allowing preservation of surface feature profile
JP4599727B2 (ja) * 2001-02-21 2010-12-15 株式会社デンソー 蒸着装置
ITMI20011216A1 (it) * 2001-06-08 2002-12-08 Eurotecnica Dev And Licensing Procedimento migliorato per la produzione con alte rese di melanina
US7112351B2 (en) 2002-02-26 2006-09-26 Sion Power Corporation Methods and apparatus for vacuum thin film deposition
JP2004055401A (ja) * 2002-07-22 2004-02-19 Sony Corp 有機膜形成装置
US7192486B2 (en) * 2002-08-15 2007-03-20 Applied Materials, Inc. Clog-resistant gas delivery system
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US20050271893A1 (en) * 2004-06-04 2005-12-08 Applied Microstructures, Inc. Controlled vapor deposition of multilayered coatings adhered by an oxide layer
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US7431807B2 (en) * 2005-01-07 2008-10-07 Universal Display Corporation Evaporation method using infrared guiding heater
JP5179739B2 (ja) * 2006-09-27 2013-04-10 東京エレクトロン株式会社 蒸着装置、蒸着装置の制御装置、蒸着装置の制御方法および蒸着装置の使用方法
JP5506147B2 (ja) * 2007-10-18 2014-05-28 キヤノン株式会社 成膜装置及び成膜方法
JP2009228091A (ja) * 2008-03-25 2009-10-08 Canon Inc 蒸着装置

Also Published As

Publication number Publication date
MX2011003339A (es) 2011-08-03
US20100080901A1 (en) 2010-04-01
CN102165091B (zh) 2013-08-14
EP2168643A1 (en) 2010-03-31
TW201020330A (en) 2010-06-01
JP2012504188A (ja) 2012-02-16
WO2010035130A3 (en) 2010-06-17
RU2011116917A (ru) 2012-11-10
CN102165091A (zh) 2011-08-24
RU2524521C2 (ru) 2014-07-27
WO2010035130A2 (en) 2010-04-01
TWI467040B (zh) 2015-01-01

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