CN102165091B - 用于有机材料的蒸发器 - Google Patents

用于有机材料的蒸发器 Download PDF

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Publication number
CN102165091B
CN102165091B CN2009801391156A CN200980139115A CN102165091B CN 102165091 B CN102165091 B CN 102165091B CN 2009801391156 A CN2009801391156 A CN 2009801391156A CN 200980139115 A CN200980139115 A CN 200980139115A CN 102165091 B CN102165091 B CN 102165091B
Authority
CN
China
Prior art keywords
chamber
organic materials
nozzle
sublimation surface
vaporizer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009801391156A
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English (en)
Chinese (zh)
Other versions
CN102165091A (zh
Inventor
S·海恩
G·霍夫曼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of CN102165091A publication Critical patent/CN102165091A/zh
Application granted granted Critical
Publication of CN102165091B publication Critical patent/CN102165091B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01B—BOILING; BOILING APPARATUS ; EVAPORATION; EVAPORATION APPARATUS
    • B01B1/00—Boiling; Boiling apparatus for physical or chemical purposes ; Evaporation in general
    • B01B1/005—Evaporation for physical or chemical purposes; Evaporation apparatus therefor, e.g. evaporation of liquids for gas phase reactions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CN2009801391156A 2008-09-29 2009-09-29 用于有机材料的蒸发器 Expired - Fee Related CN102165091B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP08165434.5 2008-09-29
EP08165434A EP2168643A1 (en) 2008-09-29 2008-09-29 Evaporator for organic materials
PCT/IB2009/006990 WO2010035130A2 (en) 2008-09-29 2009-09-29 Evaporator for organic materials

Publications (2)

Publication Number Publication Date
CN102165091A CN102165091A (zh) 2011-08-24
CN102165091B true CN102165091B (zh) 2013-08-14

Family

ID=40640318

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009801391156A Expired - Fee Related CN102165091B (zh) 2008-09-29 2009-09-29 用于有机材料的蒸发器

Country Status (8)

Country Link
US (1) US20100080901A1 (enExample)
EP (1) EP2168643A1 (enExample)
JP (1) JP5703224B2 (enExample)
CN (1) CN102165091B (enExample)
MX (1) MX2011003339A (enExample)
RU (1) RU2524521C2 (enExample)
TW (1) TWI467040B (enExample)
WO (1) WO2010035130A2 (enExample)

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JP5179739B2 (ja) * 2006-09-27 2013-04-10 東京エレクトロン株式会社 蒸着装置、蒸着装置の制御装置、蒸着装置の制御方法および蒸着装置の使用方法
JP5718362B2 (ja) * 2010-12-14 2015-05-13 シャープ株式会社 蒸着装置、蒸着方法、並びに、有機エレクトロルミネッセンス表示装置の製造方法
JP5410618B2 (ja) * 2010-12-21 2014-02-05 シャープ株式会社 蒸着装置、蒸着方法、並びに、有機エレクトロルミネッセンス表示装置の製造方法
JP5330608B2 (ja) 2010-12-24 2013-10-30 シャープ株式会社 蒸着装置、蒸着方法、並びに、有機エレクトロルミネッセンス表示装置の製造方法
JP5367195B2 (ja) * 2011-03-15 2013-12-11 シャープ株式会社 蒸着装置、蒸着方法、及び有機ｅｌ表示装置の製造方法
JP2013100581A (ja) * 2011-11-09 2013-05-23 Ulvac Japan Ltd 蒸着装置及び蒸着方法
EP2746423B1 (en) * 2012-12-20 2019-12-18 Applied Materials, Inc. Deposition arrangement, deposition apparatus and method of operation thereof
US20150079283A1 (en) * 2013-09-13 2015-03-19 LGS Innovations LLC Apparatus and method to deposit doped films
FR3024162A1 (fr) * 2014-07-28 2016-01-29 Nexcis Dispositif et procede pour la formation d'une couche mince sur un substrat
CN107217233A (zh) * 2017-04-24 2017-09-29 无锡市司马特贸易有限公司 聚合物真空镀膜机
US11946131B2 (en) * 2017-05-26 2024-04-02 Universal Display Corporation Sublimation cell with time stability of output vapor pressure
KR20230035447A (ko) * 2017-09-20 2023-03-13 어플라이드 머티어리얼스, 인코포레이티드 기판 상의 세라믹 층의 두께를 제어하기 위한 방법 및 처리 시스템
WO2020082282A1 (en) * 2018-10-25 2020-04-30 China Triumph International Engineering Co., Ltd. Vapor deposition apparatus and use thereof
KR102859881B1 (ko) * 2020-11-18 2025-09-12 주식회사 엘지화학 유기발광다이오드의 증착장치
CN116964240A (zh) * 2021-02-16 2023-10-27 应用材料公司 坩埚、蒸发源、蒸发方法、蒸发系统和制造装置的方法
EP4384648A1 (en) 2021-08-12 2024-06-19 Applied Materials, Inc. Evaporator for effective surface area evaporation
WO2023076165A1 (en) * 2021-10-27 2023-05-04 Entegris, Inc. High vapor pressure delivery system

Citations (3)

* Cited by examiner, † Cited by third party
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US6101316A (en) * 1998-05-28 2000-08-08 Nihon Shinku Gijutsu Kabushiki Kaisha Evaporation apparatus, organic material evaporation source, and method of manufacturing thin organic film
CN1576385A (zh) * 2003-07-04 2005-02-09 应用菲林股份有限两合公司 局部涂覆分离剂的方法和装置
CN101094932A (zh) * 2004-09-21 2007-12-26 伊斯曼柯达公司 颗粒物质到蒸发源的输送

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EP0147536B1 (de) * 1983-10-07 1990-02-07 Johannes Zimmer Einrichtung zum gleichmässigen Verteilen fliessfähiger Medien in vorgegebener Breite
GB8708436D0 (en) * 1987-04-08 1987-05-13 British Telecomm Reagent source
RU2031187C1 (ru) * 1991-06-06 1995-03-20 Индивидуальное частное предприятие "Электрон-Вега" Испаритель
RU2051200C1 (ru) * 1991-10-01 1995-12-27 Владимир Григорьевич Белов Устройство для нанесения полимерных пленок в вакууме
DE69836039T2 (de) 1998-05-28 2007-12-06 ULVAC, Inc., Chigasaki Verdampfungsquelle für organisches Material
US6275649B1 (en) 1998-06-01 2001-08-14 Nihon Shinku Gijutsu Kabushiki Kaisha Evaporation apparatus
US6503564B1 (en) 1999-02-26 2003-01-07 3M Innovative Properties Company Method of coating microstructured substrates with polymeric layer(s), allowing preservation of surface feature profile
JP4599727B2 (ja) * 2001-02-21 2010-12-15 株式会社デンソー 蒸着装置
ITMI20011216A1 (it) * 2001-06-08 2002-12-08 Eurotecnica Dev And Licensing Procedimento migliorato per la produzione con alte rese di melanina
US7112351B2 (en) 2002-02-26 2006-09-26 Sion Power Corporation Methods and apparatus for vacuum thin film deposition
JP2004055401A (ja) * 2002-07-22 2004-02-19 Sony Corp 有機膜形成装置
US7192486B2 (en) * 2002-08-15 2007-03-20 Applied Materials, Inc. Clog-resistant gas delivery system
JP4041005B2 (ja) * 2003-04-02 2008-01-30 長州産業株式会社 薄膜堆積用分子線源とそれを使用した薄膜堆積方法
US20050271893A1 (en) * 2004-06-04 2005-12-08 Applied Microstructures, Inc. Controlled vapor deposition of multilayered coatings adhered by an oxide layer
KR100958778B1 (ko) * 2004-10-22 2010-05-18 황창훈 유기 박막 증착 공정용 증발원 연속 공급장치
US7431807B2 (en) * 2005-01-07 2008-10-07 Universal Display Corporation Evaporation method using infrared guiding heater
JP5179739B2 (ja) * 2006-09-27 2013-04-10 東京エレクトロン株式会社 蒸着装置、蒸着装置の制御装置、蒸着装置の制御方法および蒸着装置の使用方法
JP5506147B2 (ja) * 2007-10-18 2014-05-28 キヤノン株式会社 成膜装置及び成膜方法
JP2009228091A (ja) * 2008-03-25 2009-10-08 Canon Inc 蒸着装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6101316A (en) * 1998-05-28 2000-08-08 Nihon Shinku Gijutsu Kabushiki Kaisha Evaporation apparatus, organic material evaporation source, and method of manufacturing thin organic film
CN1576385A (zh) * 2003-07-04 2005-02-09 应用菲林股份有限两合公司 局部涂覆分离剂的方法和装置
CN101094932A (zh) * 2004-09-21 2007-12-26 伊斯曼柯达公司 颗粒物质到蒸发源的输送

Also Published As

Publication number Publication date
US20100080901A1 (en) 2010-04-01
RU2524521C2 (ru) 2014-07-27
WO2010035130A2 (en) 2010-04-01
CN102165091A (zh) 2011-08-24
TW201020330A (en) 2010-06-01
EP2168643A1 (en) 2010-03-31
JP2012504188A (ja) 2012-02-16
JP5703224B2 (ja) 2015-04-15
WO2010035130A3 (en) 2010-06-17
TWI467040B (zh) 2015-01-01
MX2011003339A (es) 2011-08-03
RU2011116917A (ru) 2012-11-10

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C53 Correction of patent of invention or patent application
CB02 Change of applicant information

Address after: American California

Applicant after: Applied Materials Inc.

Address before: American California

Applicant before: Applied Materials Inc.

C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130814

Termination date: 20190929