JP5702562B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting device for cutting a workpiece such as a semiconductor wafer, a piezoelectric element substrate, or a ferrite substrate, and more particularly to a cutting device having a function capable of forming a cutting blade of a cutting blade for V-groove cutting. .

  In the semiconductor device manufacturing process, a plurality of regions are partitioned by dividing lines called streets arranged in a lattice pattern on the surface of a substantially wafer-shaped semiconductor wafer, and devices such as ICs, LSIs, etc. are partitioned in the partitioned regions. Form. Then, the semiconductor wafer is cut along the streets to divide the region in which the device is formed to manufacture individual semiconductor devices. Further, individual devices are manufactured by dividing a piezoelectric element substrate and a ferrite substrate formed in a rectangular shape along a street.

  The above-described cutting along a street of a workpiece such as a semiconductor wafer is usually performed by a cutting device called a dicer. This cutting apparatus has a holding table for holding a workpiece such as a wafer, a cutting means having a cutting blade for cutting the workpiece held on the holding table, and a holding table and the cutting means. A cutting feed means for cutting and feeding in the cutting feed direction, and an index feed means for indexing and feeding the holding table and the cutting means in an index feed direction relatively perpendicular to the cutting feed direction and rotating the cutting blade. The workpiece is cut along the street by relatively cutting and feeding the holding table holding the workpiece along the street.

  In addition, as a method of cutting a workpiece along a predetermined street and forming a chamfer on a cutting surface, a cutting method called a step cut is performed. In this step cut, first, a half cut is performed by forming a V groove having a predetermined depth with a cutting blade for cutting a V groove, and then the workpiece is completely cut along the V groove that has been half cut by the cutting blade for cutting. Disconnect.

  As described above, the V-groove cutting blade for forming the V-groove needs to form a V-shaped cross-sectional shape of the outer peripheral portion of the cutting edge. Therefore, it is desirable that the cutting apparatus has a dressing function capable of forming the cutting blade of the cutting blade mounted on the rotary spindle constituting the cutting means into a cutting blade for V-groove cutting.

  There has been proposed and put to practical use a cutting apparatus including an electric discharge molding unit for forming a cutting blade of a cutting blade mounted on a rotary spindle constituting a cutting means into an appropriate shape by electric discharge machining. (See Patent Document 1).

Japanese Patent Application No. 2001-54866

  Therefore, since the method of forming the cutting blade of the cutting blade disclosed in the above patent document into an appropriate shape is electric discharge machining, the cutting blade is applied to a cutting blade having conductivity like an electroformed blade. However, it cannot be applied to a cutting blade in which the cutting edge is formed by hardening abrasive grains with a resin bond or a vitrified bond.

  The present invention has been made in view of the above-mentioned facts, and the main technical problem thereof is not limited to a cutting blade having a conductive cutting blade, but even a cutting blade having a non-conductive cutting blade is V. It is providing the cutting device provided with the function which can be suitably shape | molded in the cutting blade for groove cutting.

In order to solve the main technical problem, according to the present invention, a cutting table having a holding table for holding a workpiece and a cutting blade having a cutting edge for cutting the workpiece held on the holding table. Means, a cutting feed means for cutting and feeding the holding table and the cutting means relative to each other in a cutting feed direction, and indexing and feeding the holding table and the cutting means relative to an index feed direction orthogonal to the cutting feed direction. In a cutting apparatus comprising an index feeding means,
The holding table includes a main holding portion that holds a workpiece, and an auxiliary holding portion that is provided adjacent to the main holding portion,
The said auxiliary holding portion, is disposed dress board holding member for holding in a planar state inclined dress board for forming the cutting edge of the cutting blade,
The dressboard holding member includes a mounting portion configured to be detachable from the auxiliary holding portion, and a dressboard holding portion having a holding surface for holding the dressboard in an inclined state, and the dressboard holding portion A plurality of suction ports communicating with the suction means are provided on the holding surface, and configured to suck and hold the dressboard on the holding surface;
A cutting device is provided.

In the cutting apparatus according to the present invention, the holding table includes a main holding portion for holding a workpiece and an auxiliary holding portion provided adjacent to the main holding portion, and the auxiliary holding portion includes a cutting blade. Since the dressboard holding member for holding the flat dressboard for forming the cutting blade in an inclined state is provided, the flat dressboard held in an inclined state by the dressboard holding member is used. Accordingly, the cutting blade is not limited to a conductive cutting blade, and even a cutting blade having a non-conductive cutting blade can be appropriately formed into a V-groove cutting blade when necessary. The dressboard holding member includes a mounting portion configured to be detachable from the auxiliary holding portion and a dressboard holding portion having a holding surface for holding the planar dressboard in an inclined state, and holds the dressboard. A plurality of suction ports communicating with the suction means are provided on the holding surface of the part, and the flat dressboard is configured to be sucked and held on the holding surface, so that the flat dressboard can be attached and detached very easily. The dressing operation can be performed efficiently.

The perspective view of the cutting device comprised by this invention. The principal part sectional drawing of the holding table with which the cutting apparatus shown in FIG. 1 is equipped. The perspective view of the dressboard holding member arrange | positioned at the holding table shown in FIG. Sectional drawing of the dressboard holding member shown in FIG. The disassembled perspective view of the spindle unit with which the cutting apparatus shown in FIG. 1 is equipped. Explanatory drawing of the dressing operation | work which shape | molds the cutting blade of a cutting blade into the cutting blade for V-groove cutting with the dressboard with which the dressboard holding member shown in FIG. 3 was mounted | worn. Explanatory drawing of the cutting process implemented by the cutting device shown in FIG. Sectional drawing which expands and shows the principal part of the workpiece in which the cutting process shown in FIG. 7 was implemented.

  Hereinafter, a preferred embodiment of a cutting device constituted by the present invention will be described in more detail with reference to the accompanying drawings.

FIG. 1 shows a perspective view of a cutting apparatus constructed according to the present invention.
The cutting apparatus shown in FIG. 1 includes a stationary base 2 and a holding table that holds a workpiece and is disposed on the stationary base 2 so as to be movable in a direction (X-axis direction) indicated by an arrow X that is a cutting feed direction. A mechanism 3, a spindle support mechanism 6 disposed on the stationary base 2 so as to be movable in an indexing feed direction (Y-axis direction) indicated by an arrow Y perpendicular to the X-axis direction, and the spindle support mechanism 6 including the holding table A spindle unit 7 serving as cutting means is provided so as to be movable in a cutting feed direction (Z-axis direction) indicated by an arrow Z perpendicular to the holding surface which is the upper surface of the holding table constituting the mechanism 3.

  The holding table mechanism 3 includes a holding table 4 that holds a workpiece, and a holding table moving mechanism 5 that supports the holding table 4 and moves it in the X-axis direction. The holding table moving mechanism 5 includes a pair of guide rails 51 and 51 disposed in parallel along the X-axis direction on the stationary base 2 and is arranged on the guide rails 51 and 51 so as to be movable in the X-axis direction. A holding table support base 52 provided, and a cutting feed means 53 for moving the holding table support base 52 along a pair of guide rails 51, 51 are provided.

  The holding table support base 52 is formed in a rectangular shape, and guided grooves 521 and 521 for fitting with the pair of guide rails 51 and 51 are formed on the lower surface thereof. By fitting the guided grooves 521 and 521 to the pair of guide rails 51 and 51, the holding table support base 52 is disposed so as to be movable along the pair of guide rails 51 and 51.

  The cutting feed means 53 includes a male screw rod 531 disposed in parallel between the pair of guide rails 51 and 51, and a drive source such as a servo motor 532 for rotationally driving the male screw rod 531. . One end of the male screw rod 531 is rotatably supported by a bearing block 533 fixed to the stationary base 2, and the other end is connected to the output shaft of the servo motor 532. The male screw rod 531 is screwed into a female screw 522 formed at the center of the holding table support base 52. Therefore, the holding table support base 52 is moved along the guide rails 51 and 51 in the X-axis direction by driving the male screw rod 531 forward and backward by the servo motor 532.

Next, the holding table 4 will be described with reference to FIGS.
As shown in FIG. 2, the holding table 4 in the illustrated embodiment is formed in a disk shape by a metal material such as stainless steel, and is adjacent to the main holding portion 41 that holds a workpiece. The auxiliary holding part 42 provided is provided. A rectangular fitting recess 411 corresponding to a workpiece to be described later is formed in the main holding portion 41 of the holding table 4, and an adsorption chuck 43 made of a porous ceramic plate is fitted into the fitting recess 411. The A suction passage 412 is opened in the fitting recess 411 formed in the holding table 4, and the suction passage 412 is connected to the suction means 44. The suction means 44 includes a suction source 441, a suction pipe 442 connecting the suction source 441 and the suction passage 412, and an electromagnetic opening / closing valve 443 disposed in the suction pipe 442. The electromagnetic on-off valve 443 is closed in the OFF state, and is configured to open when turned on. Therefore, when the electromagnetic opening / closing valve 443 is turned on to open the circuit, a negative pressure is applied from the suction source 441 to the fitting recess 411 via the suction pipe 442 and the suction passage 412. As a result, a negative pressure acts on the upper surface (holding surface) of the suction chuck 43 fitted in the fitting recess 411, and the workpiece can be sucked and held on the upper surface (holding surface) of the suction chuck 43.

  2, the auxiliary holding portion 42 of the holding table 4 is a dress for holding dress boards 451 and 452 for forming a cutting blade of a cutting blade, which will be described later, into a cutting edge for V-groove cutting. A board holding member 46 is provided. That is, a rectangular fitting recess 421 is formed in the auxiliary holding portion 42 of the holding table 4. A suction passage 422 is opened in the fitting recess 421, and the suction passage 422 is connected to the suction source 441 of the suction means 44 through a suction pipe 444. The suction pipe 444 is provided with an electromagnetic on-off valve 445. The electromagnetic on-off valve 445 is closed when it is OFF, and is open when it is turned ON.

  The dressboard holding member 46 includes a dressboard holding portion 47 formed in a triangular prism shape as shown in FIGS. 3 and 4 and a mounting portion 48 formed so as to protrude from the bottom surface 471 of the dressboard holding portion 47. ing. The mounting portion 48 of the dressboard holding member 46 is formed in a shape corresponding to the rectangular fitting recess 421 formed in the auxiliary holding portion 42 of the holding table 4. By fitting the mounting portion 48 into the fitting recess 421, the dressboard holding portion 47 is detachably mounted on the auxiliary holding portion 42 of the holding table 4 as shown in FIG. Note that the mounting portion 48 of the dressboard holding portion 47 communicates with the suction passage 422 formed in the auxiliary holding portion 42 of the holding table 4 in a state of being fitted in the fitting recess 421 as shown in FIG. A communication path 481 is provided.

  3 and 4, the dressboard holding portion 47 of the dressboard holding member 46 has holding surfaces 472 and 473 that are inclined at a predetermined angle α from both ends of the bottom surface 471 in the width direction. I have. Rectangular holding recesses 472a and 473a corresponding to the dressboards 451 and 452 are formed on the holding surfaces 472 and 473 of the dressboard holding part 47, respectively. 452 are fitted. A plurality of suction ports 472b and 473b are opened in the fitting recesses 472a and 473a formed in the holding surfaces 472 and 473 of the dressboard holding part 47, respectively. The suction passages 472c and 473c provided in the portion 47 communicate with each other. The suction passages 472c and 473c are formed so as to communicate with the communication passage 481 formed in the mounting portion 48. Accordingly, when the electromagnetic on-off valve 445 shown in FIG. 2 is turned on and opened, negative pressure acts on the plurality of suction ports 472b and 473b from the suction source 441 through the suction pipe 444, the communication passage 481, and the suction passages 472c and 473c. It is done. As a result, the dressboards 451 and 452 fitted in the fitting recesses 472a and 473a formed on the holding surfaces 472 and 473 of the dressboard holding part 47 can be detachably sucked and held at a predetermined inclination angle α. . The dressboard holding member 46 is prepared so that the holding surfaces 472 and 473 of the dressboard holding portion 47 are formed with an inclination angle α of, for example, 30 degrees, 45 degrees, and 60 degrees, and corresponds to the V-groove to be formed. It is desirable to attach appropriately.

  Returning to FIG. 1 and continuing the description, the holding table 4 described above is rotatably supported by a cylindrical support cylinder 55 disposed on the upper surface of the holding table support base 52. A cover plate 56 having a hole through which the holding table 4 is inserted is disposed at the upper end of the support cylinder 55. Thus, the holding table 4 rotatably supported by the support cylinder 55 is configured to be appropriately rotated by a rotation driving means (not shown).

  1, the spindle support mechanism 6 includes a pair of guide rails 61, 61 disposed in parallel along the Y-axis direction on the stationary base 2, and the guide rail 61, A movable support base 62 is provided on 61 so as to be movable in the Y-axis direction. The movable support base 62 includes a movement support portion 621 that is movably disposed on the guide rails 61, 61, and a mounting portion 622 that is attached to the movement support portion 621. A pair of guided grooves 621 a and 621 a that are fitted to the guide rails 61 and 61 are formed on the lower surface of the moving support portion 621. By fitting the guided grooves 621 a and 621 a to the guide rails 61 and 61, The movable support base 62 is configured to be movable along the guide rails 61 and 61. The mounting portion 622 is provided with a pair of guide rails 622a and 622a extending in the Z-axis direction on one side surface in parallel.

  The spindle support mechanism 6 in the illustrated embodiment includes index feed means 63 for moving the movable support base 62 along the pair of guide rails 61 and 61 in the Y-axis direction. The index feeding means 63 includes a male screw rod 631 disposed in parallel between the pair of guide rails 61, 61, and a drive source such as a pulse motor 632 for rotationally driving the male screw rod 631. One end of the male screw rod 631 is rotatably supported by a bearing block (not shown) fixed to the stationary base 2, and the other end is connected to the output shaft of the pulse motor 632. The male screw rod 631 is screwed into a female screw hole formed in a female screw block (not shown) provided on the lower surface of the central portion of the moving support portion 621 constituting the movable support base 62. Therefore, the movable support base 62 is moved in the Y-axis direction along the guide rails 61 and 61 by driving the male screw rod 631 forward and backward by the pulse motor 632.

  The spindle unit 7 in the illustrated embodiment includes a unit holder 71, a spindle housing 72 attached to the unit holder 71, and a rotating spindle 73 that is rotatably supported by the spindle housing 72. The unit holder 71 is provided with a pair of guided grooves 71a and 71a slidably fitted to a pair of guide rails 622a and 622a provided in the mounting portion 622. The guided grooves 71a and 71a By being fitted to the guide rails 622a and 622a, the guide rails 622a and 622a are supported so as to be movable in the Z-axis direction. The rotary spindle 73 is disposed so as to protrude from the tip of the spindle housing 72, and a cutting blade 74 is attached to the tip of the rotary spindle 73.

  The cutting blade 74 and its mounting structure will be described with reference to FIG. The cutting blade 74 shown in FIG. 5 includes an annular base 741 made of aluminum, and an annular cutting edge 742 mounted on the outer peripheral side surface of the annular base 741. The annular base 741 is provided with a fitting hole 741a that fits into a blade mount mounting portion, which will be described later, in the center, and a blade mounting portion 741b on the outer peripheral side. An annular cutting edge 742 is mounted on the blade mounting portion 741b.

  The annular cutting edge 742 is formed in an annular shape by bonding abrasive grains made of diamond or the like with a binder, and is mounted on the blade mounting portion 741 b constituting the base 741. As the annular cutting edge 742, a resinoid blade obtained by kneading abrasive grains into a resin bond material and molding and firing them in an annular shape, or a metal obtained by kneading abrasive grains into a metal bond material and molding them into an annular shape and firing them. A blade or an electroformed blade in which abrasive grains are bonded to the blade mounting portion 741b by metal plating such as nickel is used. The annular cutting edge 742 in the illustrated embodiment uses a non-conductive resinoid blade. In the illustrated embodiment, the annular cutting edge 742 made of the resinoid blade has a thickness of 1 mm.

  The cutting blade 74 configured as described above is attached to a blade mount 75 that is attached to a rotary spindle 73 that is rotatably supported by a spindle housing 72 of the spindle unit 7. The cutting blade 74 is clamped and fixed by a blade mount 75 and a clamping nut 76.

  The blade mount 75 attached to the rotary spindle 73 is made of stainless steel in the illustrated embodiment. As shown in FIG. 5, an annular flange portion 751 and a center portion of the flange portion 751 are formed laterally. It consists of a cylindrical mounting portion 752 that is formed to protrude. A base 741 constituting the cutting blade 74 is mounted on the mounting portion 752. That is, the fitting hole 741a formed in the annular base 741 is fitted into the mounting portion 752 of the blade mount 75, and the clamping nut 76 is screwed into the male screw formed at the distal end portion of the mounting portion 752. Thus, the annular base 741 is clamped and fixed by the annular flange 751 of the blade mount 75 and the clamping nut 76.

  Returning to FIG. 1, the description is continued. At the tip of the spindle housing 72 constituting the spindle unit 7, an image of the workpiece held on the holding table 4 is imaged and an area to be cut by the cutting blade 74. The image pickup means 77 for detecting is provided. The imaging means 77 is composed of optical means such as a microscope and a CCD camera, and sends the captured image signal to a control means (not shown).

  The spindle unit 7 in the illustrated embodiment includes a cutting feed means 78 for moving the unit holder 71 in the Z-axis direction along the pair of guide rails 622a and 622a. The cutting feed means 78 includes a male screw rod (not shown) disposed between the guide rails 622a and 622a and a pulse for rotationally driving the male screw rod, similarly to the cutting feed means 53 and the index feed means 63. A drive source such as a motor 782 is included, and a male screw rod (not shown) is rotated forward and reversely by a pulse motor 782, whereby the unit holder 71, the spindle housing 72, and the rotary spindle 73 are moved along the guide rails 622a and 622a along the guide rails 622a and 622a. Move in the infeed direction shown in the axial direction.

The cutting apparatus in the illustrated embodiment is configured as described above, and the operation thereof will be described below.
First, a dressing operation for forming an annular cutting edge 742 of the cutting blade 74 mounted on the blade mount 75 into a V-groove cutting edge will be described.

  To perform the dressing operation, the cutting feed means 53 and the index feed means 63 are operated to position the dressboard holding member 46 disposed in the auxiliary holding portion 42 of the holding table 4 in the imaging area of the imaging means 77. If the dressboard holding member 46 is positioned in the imaging region, it is checked whether or not the longitudinal direction of the dressboard holding member 46 is positioned parallel to the X-axis direction by the imaging unit 77 and a control unit (not shown). If the longitudinal direction of the dressboard holding member 46 is not positioned parallel to the X-axis direction, the holding table 4 is rotated so that the longitudinal direction of the dressboard holding member 46 is parallel to the X-axis direction. Adjust to.

Next, the cutting feed means 53 is operated to position the dressboard holding member 46 disposed in the auxiliary holding portion 42 of the holding table 4 in a cutting area below the cutting blade 74. Then, the index feeding means 63 is operated, and the cutting blade 74 is positioned directly above one dressboard 451 mounted on the holding surface 472 of the dressboard holding member 46. When the cutting blade 74 is positioned right above one dressboard 451 mounted on the holding surface 472 of the dressboard holding member 46 in this way, the cutting feed means 78 is operated while the cutting blade 74 is rotated and lowered. As shown in FIG. 6A, the outer peripheral portion of the annular cutting edge 742 of the cutting blade 74 is brought into contact. Then, the cutting feed means 53 is operated to move the holding table 4 in the X-axis direction (a direction perpendicular to the paper surface in FIG. 6A). As a result, one surface of the annular cutting edge 742 (the right surface in FIG. 6A) is formed at an angle corresponding to the inclination angle α of the dress board 451 (first dressing step).

When the first dressing step described above is performed, the cutting feed means 78 is operated to raise the cutting blade 74 and position it at a predetermined standby position. Next, the index feeding means 63 is operated, and the cutting blade 74 is positioned immediately above the other dressboard 452 mounted on the holding surface 473 of the dressboard holding member 46. When the cutting blade 74 is positioned immediately above the other dressboard 452 mounted on the holding surface 473 of the dressboard holding member 46 in this way, the cutting feed means 78 is operated while the cutting blade 74 is rotated and lowered. As shown in FIG. 6B, the outer peripheral portion of the annular cutting edge 742 of the cutting blade 74 is brought into contact. Then, the cutting feed means 53 is operated to move the holding table 4 in the X-axis direction (the direction perpendicular to the paper surface in FIG. 6B). As a result, the other surface of the annular cutting edge 742 (the surface on the left side in FIG. 6 (b)) is formed at an angle corresponding to the inclination angle α of the dress board 452 (second dressing process).

  By performing the first dressing process and the second dressing process described above, the edge angle β (180 degrees −2α) is formed on the outer periphery of the annular cutting edge 742 of the cutting blade 74 as shown in FIG. A cutting edge for V-groove cutting having an angle of) is formed. If the dressing operation for forming the cutting edge for cutting the V-groove on the annular cutting edge 742 of the cutting blade 74 is performed as described above. The cutting feed means 78 is operated to raise the cutting blade 74 to be positioned at a predetermined standby position, and the cutting feed means 53 is operated to position the holding table 4 in the workpiece attaching / detaching area shown in FIG.

  As described above, the dressing operation for forming the annular cutting edge 742 of the cutting blade 74 into the cutting edge for V-groove cutting is performed on the dressboard holding member 46 disposed in the auxiliary holding portion 42 of the holding table 4 with a predetermined amount. Since the cutting is performed by the dressboards 451 and 452 held in an inclined state with the angle α, the cutting edge 742 is not limited to a conductive cutting blade, but may be a cutting blade having a nonconductive cutting edge. A cutting blade for groove cutting can be formed.

Next, the cutting operation for forming the V-groove on the workpiece by the cutting blade 74 formed on the cutting edge for V-groove cutting as described above will be described.
When performing the cutting operation, the ferrite substrate 10 as a workpiece is placed on the suction chuck 43 disposed in the main holding portion 41 of the holding table 4 positioned at the workpiece attachment / detachment position shown in FIG. It is transported by a transport device (not shown). The ferrite substrate 10 is formed in a rectangular shape, and a lattice-like street 101 is formed on the surface. When the ferrite substrate 10 formed in this way is placed on the suction chuck 43 of the holding table 4, the electromagnetic on-off valve 443 of the suction means 44 shown in FIG. As described above, a negative pressure is applied to the upper surface (holding surface) of the suction chuck 43 to suck and hold the ferrite substrate 10 on the suction chuck 43.

  Next, the cutting feed means 53 is operated to move the holding table 4 to a position immediately below the imaging means 77. When the holding table 4 is positioned directly below the image pickup means 77, an alignment operation for detecting a processing region to be cut of the ferrite substrate 10 is executed by the image pickup means 77 and a control means (not shown). That is, the imaging unit 77 and the control unit (not shown) are images such as pattern matching for aligning the street 101 formed in a predetermined direction of the ferrite substrate 10 with the cutting blade 74 that cuts along the street 101. Execute the process and perform alignment of the machining area to be cut. Similarly, the alignment of the machining area to be cut is performed on the street 101 formed in the ferrite substrate 10 and extending in a direction orthogonal to the predetermined direction.

  As described above, when the alignment operation for detecting the machining area to be cut of the ferrite substrate 10 is executed, the cutting feed means 53 is operated to move the holding table 4 to the cutting area, and FIG. As shown in FIG. 7, one end of a predetermined street is positioned slightly on the right side in FIG. Then, while rotating the cutting blade 74 in the direction indicated by the arrow 74a, a predetermined amount is cut and fed in the direction indicated by the arrow Z1 from the standby position indicated by the two-dot chain line in FIG. 7A, and the cutting blade 74 is indicated by the solid line in FIG. Position it at the infeed position indicated by. Next, the cutting feed means 53 is operated to move the holding table 4 at a predetermined cutting feed speed in the direction indicated by the arrow X1 in FIG. 7A (cutting process). Then, when the other end of the predetermined street 101 of the ferrite substrate 10 held by the holding table 4 reaches slightly to the left from directly below the cutting blade 74 as shown in FIG. 7B, the chuck table 4 is moved. While stopping, the cutting blade 74 is raised in the direction indicated by the arrow Z2. As a result, a V-groove 110 is formed in the ferrite substrate 10 along a predetermined street 101 as shown in FIG.

  If the above-described cutting process is performed along all the streets 101 formed on the ferrite substrate 10 in a predetermined direction, the holding table 4 is rotated 90 degrees. And the cutting process mentioned above is implemented along all the streets 101 formed in the ferrite substrate 10 in the direction orthogonal to the predetermined direction. As a result, the V-groove 110 is formed in the ferrite substrate 10 along all the streets 101. The ferrite substrate 10 in which the V grooves 110 are formed along the streets 101 in this way is transported to a cutting process for cutting along the streets 101 where the V grooves 110 are formed.

2: stationary base 3: holding table mechanism 4: holding table 41: main holding unit 42: auxiliary holding unit 43: suction chuck 44: suction means 451, 452: dressboard 46: dressboard holding member 47: dressboard holding unit 48: mounting portion 5: holding table moving mechanism 52: holding table support base 53: cutting feed means 6: spindle support mechanism 62: movable support base 63: indexing feed means 7: spindle unit 73: rotating spindle 74: cutting blade 77: Imaging means 78: Cutting feed means

Claims (1)

Cutting means having a holding table for holding a workpiece, a cutting blade having a cutting blade for cutting the workpiece held on the holding table, and relatively cutting the holding table and the cutting means In a cutting apparatus comprising: a cutting feed means for cutting and feeding in a feeding direction; and an indexing feeding means for indexing and feeding the holding table and the cutting means in an indexing feeding direction that is relatively perpendicular to the cutting feeding direction.
The holding table includes a main holding portion that holds a workpiece, and an auxiliary holding portion that is provided adjacent to the main holding portion,
The said auxiliary holding portion, is disposed dress board holding member for holding in a planar state inclined dress board for forming the cutting edge of the cutting blade,
The dressboard holding member includes a mounting portion configured to be detachable from the auxiliary holding portion, and a dressboard holding portion having a holding surface for holding the dressboard in an inclined state, and the dressboard holding portion A plurality of suction ports communicating with the suction means are provided on the holding surface, and configured to suck and hold the dressboard on the holding surface;
The cutting device characterized by the above.

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