JP5702125B2 - 静電誘導型変換素子 - Google Patents
静電誘導型変換素子 Download PDFInfo
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- JP5702125B2 JP5702125B2 JP2010269990A JP2010269990A JP5702125B2 JP 5702125 B2 JP5702125 B2 JP 5702125B2 JP 2010269990 A JP2010269990 A JP 2010269990A JP 2010269990 A JP2010269990 A JP 2010269990A JP 5702125 B2 JP5702125 B2 JP 5702125B2
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- 238000006243 chemical reaction Methods 0.000 title claims description 52
- 230000006698 induction Effects 0.000 title claims description 44
- 230000010287 polarization Effects 0.000 claims description 49
- 239000000463 material Substances 0.000 claims description 36
- 239000013078 crystal Substances 0.000 claims description 23
- 239000004020 conductor Substances 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims description 6
- 229910052797 bismuth Inorganic materials 0.000 claims description 5
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 25
- 238000000034 method Methods 0.000 description 19
- 238000010248 power generation Methods 0.000 description 17
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 8
- 229920005989 resin Polymers 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 5
- 230000005621 ferroelectricity Effects 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 241000877463 Lanio Species 0.000 description 2
- 229910004121 SrRuO Inorganic materials 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000005686 electrostatic field Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- 230000028161 membrane depolarization Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- -1 polytetrafluoroethylene Polymers 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 229910018503 SF6 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- YPQJHZKJHIBJAP-UHFFFAOYSA-N [K].[Bi] Chemical compound [K].[Bi] YPQJHZKJHIBJAP-UHFFFAOYSA-N 0.000 description 1
- WOIHABYNKOEWFG-UHFFFAOYSA-N [Sr].[Ba] Chemical compound [Sr].[Ba] WOIHABYNKOEWFG-UHFFFAOYSA-N 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- FSAJRXGMUISOIW-UHFFFAOYSA-N bismuth sodium Chemical compound [Na].[Bi] FSAJRXGMUISOIW-UHFFFAOYSA-N 0.000 description 1
- 229910002115 bismuth titanate Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 208000028659 discharge Diseases 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- QNZFKUWECYSYPS-UHFFFAOYSA-N lead zirconium Chemical compound [Zr].[Pb] QNZFKUWECYSYPS-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- UYLYBEXRJGPQSH-UHFFFAOYSA-N sodium;oxido(dioxo)niobium Chemical compound [Na+].[O-][Nb](=O)=O UYLYBEXRJGPQSH-UHFFFAOYSA-N 0.000 description 1
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
- H01G7/06—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture having a dielectric selected for the variation of its permittivity with applied voltage, i.e. ferroelectric capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
- H01G7/02—Electrets, i.e. having a permanently-polarised dielectric
- H01G7/025—Electrets, i.e. having a permanently-polarised dielectric having an inorganic dielectric
- H01G7/026—Electrets, i.e. having a permanently-polarised dielectric having an inorganic dielectric with ceramic dielectric
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/06—Influence generators
- H02N1/08—Influence generators with conductive charge carrier, i.e. capacitor machines
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Description
前記誘電分極体が結晶配向性を有する強誘電体からなる(不可避不純物を含んでもよい)ことを特徴とするものである。
配向率Fは、下記式で表される。
F(%)=(P−P0)/(1−P0)×100・・・(i)
式(i)中、Pは、配向面からの反射強度の合計と全反射強度の合計の比である。(001)配向の場合、Pは、(00l)面からの反射強度I(00l)の合計ΣI(00l)と、各結晶面(hkl)からの反射強度I(hkl)の合計ΣI(hkl)との比({ΣI(00l)/ΣI(hkl)})である。例えば、ペロブスカイト結晶において(001)配向の場合、P=I(001)/[I(001)+I(100)+I(101)+I(110)+I(111)]である。
P0は、完全にランダムな配向をしている試料のPである。
完全にランダムな配向をしている場合(P=P0)にはF=0%であり、完全に配向をしている場合(P=1)にはF=100%である。
対向電極22としては、導体であれば特に制限されず、通常電極として使用される金属等を適宜用いることができる。対向電極22としては、Au,Pt,Ir,Al,Ta,Cr,Fe,Ni,Ti,Cu,IrO2,RuO2,LaNiO3,及びSrRuO3等の金属又は金属酸化物、及びこれらの組合せが挙げられる。
非鉛系では、チタン酸バリウム(BTO)、チタン酸ストロンチウムバリウム、チタン酸ビスマスナトリウム、チタン酸ビスマスカリウム、ニオブ酸ナトリウム、ニオブ酸カリウム、ニオブ酸リチウム等、及びこれらの混晶系、BiFeO3(BFO)等下記一般式(PX)で表される組成を有するペロブスカイト型酸化物(不可避不純物を含んでもよい)等が挙げられる。
(Bix,A1−x)(By,C1−y)O3・・・(PX)
(式(PX)中、AはPb以外の平均イオン価数が2価のAサイト元素、Bは平均イオン価数が3価のBサイト元素,Cは平均イオン価数が3価より大きいBサイト元素であり、A,BおよびCは各々1種又は複数種の金属元素である。Oは酸素。B及びCは互いに異なる組成である。0.6≦x≦1.0、x−0.2≦y≦x。Aサイト元素の総モル数及びBサイト元素の総モル数の、酸素原子のモル数に対する比は、それぞれ1:3が標準であるが、ペロブスカイト構造を取り得る範囲内で1:3からずれてもよい。)
静電誘導型変換素子1は、以上のように構成されている。
本発明は上記実施の形態に限定されるものではなく、発明の要旨を変更しない限りにおいて、種々変更することが可能である。
10 エレクトレット(強誘電体)
21 下部電極(基材)
22 対向電極(電極)
30 負荷
A 対向面積
Claims (10)
- 電気エネルギーと運動エネルギーとを変換する静電誘導型変換素子であって、
一主面が導体からなる基材と、
該主面上に形成された誘電分極体と、
該誘電分極体の前記主面と反対側の表面と対向配置され、前記表面との対向面積が変化するように前記誘電分極体と相対運動する電極とを備え、
前記誘電分極体が結晶配向性を有する強誘電体からなり(不可避不純物を含んでもよい)、
前記強誘電体の厚み方向の残留分極値が10μC/cm 2 以上であり、比誘電率が400以下である静電誘導型変換素子。 - 前記強誘電体の分極方向が略一様である請求項1に記載の静電誘導型変換素子。
- 前記分極方向が、前記強誘電体の厚み方向である請求項2に記載の静電誘導型変換素子。
- 前記強誘電体が、単結晶である請求項1〜3のいずれか1項記載の静電誘導型変換子。
- 前記電極が前記表面と平行な方向に相対運動する請求項1〜4のいずれか1項記載の静電誘導型変換素子。
- 前記強誘電体の結晶構造がペロブスカイト構造、ビスマス層状構造、タングステンブロンズ構造のいずれかである請求項1〜5のいずれか1項記載の静電誘導型変換素子。
- 前記強誘電体が、鉛を含まないペロブスカイト型酸化物を主成分とする請求項1〜6のいずれか1項記載の静電誘導型変換素子。
- 前記強誘電体が、ビスマス含有ペロブスカイト型酸化物を主成分とする請求項7に記載の静電誘導型変換素子。
- 前記強誘電体が、MPB組成を除く前記ペロブスカイト型酸化物を主成分とする請求項7又は8記載の静電誘導型変換素子。
- 前記強誘電体が、前記基材上に成膜された強誘電体膜である請求項1〜9のいずれかに記載の静電誘導型変換素子。
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JP2010269990A JP5702125B2 (ja) | 2010-12-03 | 2010-12-03 | 静電誘導型変換素子 |
PCT/JP2011/006569 WO2012073465A1 (ja) | 2010-12-03 | 2011-11-25 | 静電誘導型変換素子 |
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US9929679B2 (en) | 2013-03-19 | 2018-03-27 | Sendai Smart Machines Co., Ltd. | Electrostatic induction-type vibration power generation device and method of manufacturing the same |
EP3133375B1 (en) * | 2014-04-18 | 2021-09-15 | Beijing Institute of Nanoenergy and Nanosystems | Sensor and power generator based on electrostatic induction, and sensing method and power generation method |
JP6338071B2 (ja) * | 2016-11-29 | 2018-06-06 | 国立大学法人 東京大学 | 振動発電デバイス |
JP7297280B2 (ja) * | 2018-08-29 | 2023-06-26 | 国立大学法人千葉大学 | 振動発電器及びエレクトレット |
JP7426647B2 (ja) | 2019-12-13 | 2024-02-02 | 株式会社デンソー | エレクトレット |
DE102020132741A1 (de) | 2019-12-13 | 2021-06-17 | Denso Corporation | Elektret |
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JPH02219478A (ja) * | 1989-02-17 | 1990-09-03 | Seiko Epson Corp | エレクトレット発電機 |
JPH08264020A (ja) * | 1995-03-27 | 1996-10-11 | Tokuyama Corp | 強誘電性材料 |
JP2003146660A (ja) * | 2001-11-13 | 2003-05-21 | Fuji Electric Co Ltd | 強誘電体および誘電体薄膜コンデンサ、圧電素子 |
JP2005144594A (ja) * | 2003-11-14 | 2005-06-09 | Ricoh Co Ltd | アクチュエータ装置、アクチュエータ、液滴吐出装置、液滴吐出ヘッド |
JP2009224740A (ja) * | 2008-03-19 | 2009-10-01 | Fujifilm Corp | 積層構造体とそれを用いたデバイス、デバイスの製造方法,液体吐出装置 |
JP2010175475A (ja) * | 2009-01-30 | 2010-08-12 | Sumitomo Electric Ind Ltd | 車輪速センサ及び車載センサ |
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