JP5691185B2 - レンズアレイ、波面センサ及び波面収差測定装置 - Google Patents

レンズアレイ、波面センサ及び波面収差測定装置 Download PDF

Info

Publication number
JP5691185B2
JP5691185B2 JP2010027062A JP2010027062A JP5691185B2 JP 5691185 B2 JP5691185 B2 JP 5691185B2 JP 2010027062 A JP2010027062 A JP 2010027062A JP 2010027062 A JP2010027062 A JP 2010027062A JP 5691185 B2 JP5691185 B2 JP 5691185B2
Authority
JP
Japan
Prior art keywords
lens
shape
lens array
lens element
outer periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010027062A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011164360A5 (enExample
JP2011164360A (ja
Inventor
大瀧　達朗
達朗 大瀧
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2010027062A priority Critical patent/JP5691185B2/ja
Publication of JP2011164360A publication Critical patent/JP2011164360A/ja
Publication of JP2011164360A5 publication Critical patent/JP2011164360A5/ja
Application granted granted Critical
Publication of JP5691185B2 publication Critical patent/JP5691185B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Testing Of Optical Devices Or Fibers (AREA)
JP2010027062A 2010-02-10 2010-02-10 レンズアレイ、波面センサ及び波面収差測定装置 Active JP5691185B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010027062A JP5691185B2 (ja) 2010-02-10 2010-02-10 レンズアレイ、波面センサ及び波面収差測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010027062A JP5691185B2 (ja) 2010-02-10 2010-02-10 レンズアレイ、波面センサ及び波面収差測定装置

Publications (3)

Publication Number Publication Date
JP2011164360A JP2011164360A (ja) 2011-08-25
JP2011164360A5 JP2011164360A5 (enExample) 2013-03-21
JP5691185B2 true JP5691185B2 (ja) 2015-04-01

Family

ID=44595105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010027062A Active JP5691185B2 (ja) 2010-02-10 2010-02-10 レンズアレイ、波面センサ及び波面収差測定装置

Country Status (1)

Country Link
JP (1) JP5691185B2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105403171A (zh) * 2015-12-24 2016-03-16 吉林大学 汽车形貌测量系统光栅式畸变系数测量仪
CN106500968A (zh) * 2016-11-16 2017-03-15 中国科学院云南天文台 一种基于杨氏双缝干涉理论检测望远镜成像质量的方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104198164B (zh) * 2014-09-19 2017-02-15 中国科学院光电技术研究所 一种基于哈特曼波前检测原理的检焦方法
CN105352452B (zh) * 2015-12-24 2017-11-03 吉林大学 汽车形貌测量系统电子式畸变系数测量仪
CN105371783B (zh) * 2015-12-24 2017-09-15 吉林大学 汽车形貌测量系统刻度式畸变系数测量仪
KR102175657B1 (ko) * 2017-02-28 2020-11-06 후지필름 가부시키가이샤 열가소성 수지 필름 및 열가소성 수지 필름의 제조 방법
KR102098228B1 (ko) 2018-05-31 2020-04-07 한국생산기술연구원 생산수 경도 자동제어 시스템

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06265881A (ja) * 1993-03-11 1994-09-22 Mitsubishi Electric Corp 投写型表示装置
JP2006163263A (ja) * 2004-12-10 2006-06-22 Arisawa Mfg Co Ltd 透過型スクリーン
JP2006215400A (ja) * 2005-02-04 2006-08-17 Nikon Corp パターン形成方法、光学素子の製造方法、マイクロレンズアレイの製造方法、投影露光装置の照明装置、投影露光装置、及び収差測定装置
JP2011085658A (ja) * 2009-10-13 2011-04-28 Denso Corp 照明装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105403171A (zh) * 2015-12-24 2016-03-16 吉林大学 汽车形貌测量系统光栅式畸变系数测量仪
CN105403171B (zh) * 2015-12-24 2017-10-03 吉林大学 汽车形貌测量系统光栅式畸变系数测量仪
CN106500968A (zh) * 2016-11-16 2017-03-15 中国科学院云南天文台 一种基于杨氏双缝干涉理论检测望远镜成像质量的方法
CN106500968B (zh) * 2016-11-16 2019-07-02 中国科学院云南天文台 一种基于杨氏双缝干涉理论检测望远镜成像质量的方法

Also Published As

Publication number Publication date
JP2011164360A (ja) 2011-08-25

Similar Documents

Publication Publication Date Title
JP5691185B2 (ja) レンズアレイ、波面センサ及び波面収差測定装置
JP4264465B2 (ja) 撮像用光検出装置
US8908087B2 (en) Multiband camera, and multiband image capturing method
US10234694B2 (en) Spectrally encoded probes
CN101816184B (zh) 摄像用光检测装置
JP5406383B2 (ja) 撮像装置
CN104244828B (zh) X射线设备
JP3689720B2 (ja) 三次元形状測定装置
JP5764747B2 (ja) 偏光撮像素子および内視鏡
JP3821614B2 (ja) 画像入力装置
CN102494873B (zh) 一种微透镜阵列焦距的测量方法
JPWO2012017577A1 (ja) 撮像装置および撮像方法
KR20100059896A (ko) 이미지 센서
JP4495942B2 (ja) 結像光学系・画像形成装置・プリンターおよび画像読取装置
JP6080427B2 (ja) シャック・ハルトマンセンサとそれを利用した波面計測方法
EP4044233A1 (en) Spectral element array, imaging element, and imaging device
US20150369589A1 (en) Positional shift amount measurement method, correction table generation apparatus, imaging apparatus, and projecting apparatus
JP2010164974A (ja) 正立等倍レンズアレイ
CN105445952A (zh) 高感光实时偏振成像的微偏阵列及其成像装置
WO2013114725A1 (ja) 立体視内視鏡光学系
CN114323310B (zh) 一种高分辨率哈特曼波前传感器
JP2015166686A (ja) 光電式エンコーダ
JP2008286816A (ja) 焦点検出光学系及びそれを用いた撮像装置
JPH0338570B2 (enExample)
JPWO2020071253A1 (ja) 撮像装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130201

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130201

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20131217

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140107

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140305

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20140305

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140930

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20141201

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150106

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150119

R150 Certificate of patent or registration of utility model

Ref document number: 5691185

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250