JP5691185B2 - レンズアレイ、波面センサ及び波面収差測定装置 - Google Patents

レンズアレイ、波面センサ及び波面収差測定装置 Download PDF

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JP5691185B2
JP5691185B2 JP2010027062A JP2010027062A JP5691185B2 JP 5691185 B2 JP5691185 B2 JP 5691185B2 JP 2010027062 A JP2010027062 A JP 2010027062A JP 2010027062 A JP2010027062 A JP 2010027062A JP 5691185 B2 JP5691185 B2 JP 5691185B2
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lens
shape
lens array
lens element
outer periphery
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JP2011164360A5 (enrdf_load_stackoverflow
JP2011164360A (ja
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大瀧　達朗
達朗 大瀧
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Nikon Corp
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JP2010027062A 2010-02-10 2010-02-10 レンズアレイ、波面センサ及び波面収差測定装置 Active JP5691185B2 (ja)

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JP2011164360A JP2011164360A (ja) 2011-08-25
JP2011164360A5 JP2011164360A5 (enrdf_load_stackoverflow) 2013-03-21
JP5691185B2 true JP5691185B2 (ja) 2015-04-01

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105403171A (zh) * 2015-12-24 2016-03-16 吉林大学 汽车形貌测量系统光栅式畸变系数测量仪
CN106500968A (zh) * 2016-11-16 2017-03-15 中国科学院云南天文台 一种基于杨氏双缝干涉理论检测望远镜成像质量的方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104198164B (zh) * 2014-09-19 2017-02-15 中国科学院光电技术研究所 一种基于哈特曼波前检测原理的检焦方法
CN105352452B (zh) * 2015-12-24 2017-11-03 吉林大学 汽车形貌测量系统电子式畸变系数测量仪
CN105371783B (zh) * 2015-12-24 2017-09-15 吉林大学 汽车形貌测量系统刻度式畸变系数测量仪
JP6797279B2 (ja) * 2017-02-28 2020-12-09 富士フイルム株式会社 熱可塑性樹脂フィルム及び熱可塑性樹脂フィルムの製造方法
KR102098228B1 (ko) 2018-05-31 2020-04-07 한국생산기술연구원 생산수 경도 자동제어 시스템

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06265881A (ja) * 1993-03-11 1994-09-22 Mitsubishi Electric Corp 投写型表示装置
JP2006163263A (ja) * 2004-12-10 2006-06-22 Arisawa Mfg Co Ltd 透過型スクリーン
JP2006215400A (ja) * 2005-02-04 2006-08-17 Nikon Corp パターン形成方法、光学素子の製造方法、マイクロレンズアレイの製造方法、投影露光装置の照明装置、投影露光装置、及び収差測定装置
JP2011085658A (ja) * 2009-10-13 2011-04-28 Denso Corp 照明装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105403171A (zh) * 2015-12-24 2016-03-16 吉林大学 汽车形貌测量系统光栅式畸变系数测量仪
CN105403171B (zh) * 2015-12-24 2017-10-03 吉林大学 汽车形貌测量系统光栅式畸变系数测量仪
CN106500968A (zh) * 2016-11-16 2017-03-15 中国科学院云南天文台 一种基于杨氏双缝干涉理论检测望远镜成像质量的方法
CN106500968B (zh) * 2016-11-16 2019-07-02 中国科学院云南天文台 一种基于杨氏双缝干涉理论检测望远镜成像质量的方法

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