JP5690711B2 - 弾性波素子 - Google Patents
弾性波素子 Download PDFInfo
- Publication number
- JP5690711B2 JP5690711B2 JP2011288230A JP2011288230A JP5690711B2 JP 5690711 B2 JP5690711 B2 JP 5690711B2 JP 2011288230 A JP2011288230 A JP 2011288230A JP 2011288230 A JP2011288230 A JP 2011288230A JP 5690711 B2 JP5690711 B2 JP 5690711B2
- Authority
- JP
- Japan
- Prior art keywords
- dielectric film
- electrode
- acoustic wave
- region
- piezoelectric substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims description 34
- 239000000463 material Substances 0.000 claims description 6
- 238000010897 surface acoustic wave method Methods 0.000 claims 4
- 230000007423 decrease Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
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- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011288230A JP5690711B2 (ja) | 2011-12-28 | 2011-12-28 | 弾性波素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011288230A JP5690711B2 (ja) | 2011-12-28 | 2011-12-28 | 弾性波素子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013138333A JP2013138333A (ja) | 2013-07-11 |
| JP2013138333A5 JP2013138333A5 (enExample) | 2014-01-09 |
| JP5690711B2 true JP5690711B2 (ja) | 2015-03-25 |
Family
ID=48913719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011288230A Active JP5690711B2 (ja) | 2011-12-28 | 2011-12-28 | 弾性波素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5690711B2 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012111121A1 (de) * | 2012-11-19 | 2014-05-22 | Epcos Ag | Elektroakustisches Bauelement und Verfahren zur Herstellung |
| WO2016039026A1 (ja) * | 2014-09-09 | 2016-03-17 | 株式会社村田製作所 | 弾性表面波装置 |
| JP6601503B2 (ja) * | 2015-10-23 | 2019-11-06 | 株式会社村田製作所 | 弾性波装置、高周波フロントエンド回路及び通信装置 |
| DE112016005980B4 (de) | 2015-12-25 | 2024-08-22 | Murata Manufacturing Co., Ltd. | Vorrichtung für elastische Wellen |
| JP6415469B2 (ja) | 2016-03-22 | 2018-10-31 | 太陽誘電株式会社 | 弾性波共振器、フィルタおよびマルチプレクサ並びに弾性波共振器の製造方法 |
| CN109075772B (zh) * | 2016-03-31 | 2022-07-22 | 株式会社村田制作所 | 复合滤波器装置、高频前端电路以及通信装置 |
| WO2018116602A1 (ja) * | 2016-12-20 | 2018-06-28 | 株式会社村田製作所 | 弾性波装置、高周波フロントエンド回路及び通信装置 |
| WO2020158673A1 (ja) * | 2019-01-31 | 2020-08-06 | 株式会社村田製作所 | 弾性波デバイスおよびマルチプレクサ |
| US11451212B2 (en) | 2019-06-19 | 2022-09-20 | Skyworks Solutions, Inc. | Acoustic wave resonator with transverse spurious mode for filter steepness |
| KR102479251B1 (ko) * | 2019-11-20 | 2022-12-20 | (주)와이솔 | 표면 탄성파 소자 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005010658A1 (de) * | 2005-03-08 | 2006-09-14 | Epcos Ag | Duplexer mit verbesserter Leistungsverträglichkeit |
| US8598968B2 (en) * | 2008-11-10 | 2013-12-03 | Panasonic Corporation | Elastic wave element and electronic device using the same |
| WO2011158445A1 (ja) * | 2010-06-17 | 2011-12-22 | パナソニック株式会社 | 弾性波素子 |
-
2011
- 2011-12-28 JP JP2011288230A patent/JP5690711B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013138333A (ja) | 2013-07-11 |
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