JP5690073B2 - 超音波探触子用の音響積層体を形成する音響積層体形成方法 - Google Patents
超音波探触子用の音響積層体を形成する音響積層体形成方法 Download PDFInfo
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Description
102 送信器
104 素子
106 探触子
108 受信器
110 ビームフォーマ
112 RFプロセッサ
114 メモリ
116 プロセッサモジュール
118 ディスプレイ
120 探触子ポート
122 メモリ
124 ユーザインターフェース
130 小型超音波システム
132 探触子
134 ユーザインターフェース
136 一体型ディスプレイ
138 外部デバイス
140 ネットワーク
142 ディスプレイ
144 移動式超音波イメージングシステム
146 可動基部
148 ユーザインターフェース
150 探触子ポート
152 制御ボタン
154 キーボード
156 トラックボール
170 ポケットサイズ超音波イメージングシステム
172 ディスプレイ
174 ユーザインターフェース
176 医用画像
178 探触子
180 キーボード
182 ボタン
184 多機能制御ボタン
186 ラベル表示領域
188 制御ボタン
200 単結晶材料用に最適化された条件で第1のダイシングをする
202 切り溝を切り溝充填材料で充填する
204 キャリア層を除去する
206 単結晶複合体を金属化し、スクライブする
208 単結晶複合体に1層または複数層の整合層を取り付ける
210 積層材料を可撓性回路に取り付ける
212 積層材料に基づく条件で第2のダイシングをする
240 単結晶片
242 切り溝
244 幅
246 単結晶複合体
248 距離
250 外縁部
252 距離
254 外縁部
256 キャリア層
260 分離スクライビング部
262 分離スクライビング部
264 信号領域
266 グランド領域
268 グランド領域
270 上面図
272 端面図
274 導電性材料
280 整合層
282 第2の整合層
290 可撓性回路
292 可撓性絶縁層
294 上部トレース
296 下部トレース
298 ビア
300 縁部アライメントマーク
302 縁部アライメントマーク
304 縁部アライメントマーク
306 縁部アライメントマーク
308 中央領域
310 外側領域
312 外側領域
314 ダイシングアライメントマーク
316 ダイシングアライメントマーク
318 ダイシングアライメントマーク
320 ダイシングアライメントマーク
322 中央部分
324 外側部分
326 外側部分
328 距離
330 信号線
332 グランド線
334 グランド線
340 整合解除層
350 バッキングブロック
352 幅
360 切り溝
370 音響積層体
372 厚さ
374 厚さ
400 第1組の切り溝
402 単結晶ストリップ
404 単結晶複合体
410 複合体片
412 第2組の切り溝
414 幅
416 幅
Claims (8)
- 超音波探触子(106)用の音響積層体(370)を形成する音響積層体形成方法であって、
その1つの面に沿ってキャリア層(256)を有する単結晶圧電材料をダイシングして、複数の切り溝(242)によって分離された複数の単結晶片(240)を形成するステップ(200)と、
前記切り溝(242)を切り溝充填材料で充填して、単結晶複合体(246)を形成するステップ(202)と、
前記キャリア層(256)を除去するステップ(204)と、
前記単結晶複合体(246)に少なくとも1層の整合層(280)を取り付けるステップ(208)と、
その1つの面に配置された少なくとも1つのアライメントマーク(300)を備える可撓性回路(290)を準備するステップと、
前記少なくとも1層の整合層(280)を、前記可撓性回路(290)上の前記少なくとも1つのアライメントマーク(300)と位置合わせするステップと、
前記少なくとも1つのアライメントマーク(300)からの所定の距離(328)において、前記切り溝(242)内でダイシングして、前記単結晶複合体(246)から別々の音響積層体(370)を形成するステップ(212)と
を含む音響積層体形成方法。 - 前記少なくとも1つのアライメントマーク(300)が少なくとも1つの縁部アライメントマーク(300)を含み、
前記少なくとも1層の整合層(280)を、前記少なくとも1つのアライメントマーク(300)と位置合わせするステップが、前記少なくとも1層の整合層(280)の少なくとも1つの縁部を、前記少なくとも1つの縁部アライメントマーク(300)と位置合わせすることを含むことを特徴とする請求項1記載の音響積層体形成方法。 - 前記可撓性回路(290)が少なくとも1つのダイシングアライメントマーク(314)を備え、
前記切り溝(242)の少なくとも1つを、前記少なくとも1つのダイシングアライメントマーク(314)と位置合わせするステップであって、前記切り溝(242)を貫通してダイシングする前記ステップが、前記少なくとも1つのダイシングアライメントマーク(314)に基づく、位置合わせするステップを含むことを特徴とする請求項1記載の音響積層体形成方法。 - 前記切り溝充填材料が、有機材料であることを特徴とする請求項1乃至3のいずれかに記載の音響積層体形成方法。
- 前記単結晶片(240)を形成する前に、前記単結晶圧電材料を、少なくとも1つの切り溝(400)によって分離された単結晶ストリップ(402)を形成するように一部ダイシングするステップと、
前記少なくとも1つの切り溝(400)を、音響的に最適化された材料で充填するステップであって、前記単結晶片(240)が、前記単結晶圧電材料および前記音響的に最適化された材料を備えるステップと
をさらに含むことを特徴とする請求項1乃至4のいずれかに記載の音響積層体形成方法。 - 前記可撓性回路(290)が、超音波システム(100)から信号およびグランドを受け取るように構成されたトレース(294、296)を備えることを特徴とする請求項1乃至5のいずれかに記載の音響積層体形成方法。
- 前記音響積層体(370)が、前記切り溝(242)内でのダイシングにより形成された第2組の切り溝(360)によって各片に分離される整合解除層(340)を備えることを特徴とする請求項1乃至6のいずれかに記載の音響積層体形成方法。
- 単結晶複合体(246)を、前記複数の切り溝(242)に対し垂直の方向に延びる切り溝(412)によって分離された複合体片410を形成するようにダイシングするステップを含む請求項1乃至7のいずれかに記載の音響積層体形成方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US12/406,704 US8978216B2 (en) | 2009-03-18 | 2009-03-18 | Method for forming an acoustical stack for an ultrasound probe |
US12/406,704 | 2009-03-18 |
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JP2010214118A JP2010214118A (ja) | 2010-09-30 |
JP5690073B2 true JP5690073B2 (ja) | 2015-03-25 |
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US (1) | US8978216B2 (ja) |
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FR (1) | FR2943461B1 (ja) |
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US20120153776A1 (en) * | 2010-12-16 | 2012-06-21 | General Electric Company | Ultrasound Transducer with Improved Adhesion Between Layers |
US8450910B2 (en) | 2011-01-14 | 2013-05-28 | General Electric Company | Ultrasound transducer element and method for providing an ultrasound transducer element |
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US9289188B2 (en) * | 2012-12-03 | 2016-03-22 | Liposonix, Inc. | Ultrasonic transducer |
CA2895821A1 (en) | 2012-12-21 | 2014-06-26 | Volcano Corporation | Focused rotational ivus transducer using single crystal composite material |
AU2017299584B2 (en) | 2016-07-19 | 2022-03-31 | Shifamed Holdings, Llc | Medical devices and methods of use |
AU2018244063A1 (en) | 2017-03-30 | 2019-10-17 | Shifamed Holdings, Llc | Medical tool positioning devices, systems, and methods of use and manufacture |
US11497889B2 (en) | 2018-08-23 | 2022-11-15 | Nuvera Medical, Inc. | Medical tool positioning devices, systems, and methods of use and manufacture |
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US11435461B2 (en) | 2019-07-19 | 2022-09-06 | GE Precision Healthcare LLC | Method and system to prevent depoling of ultrasound transducer |
US11464494B2 (en) | 2019-07-19 | 2022-10-11 | GE Precision Healthcare LLC | Method and system to revert a depoling effect exhibited by an ultrasound transducer |
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-
2009
- 2009-03-18 US US12/406,704 patent/US8978216B2/en active Active
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2010
- 2010-03-16 FR FR1051860A patent/FR2943461B1/fr active Active
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US8978216B2 (en) | 2015-03-17 |
FR2943461B1 (fr) | 2017-05-26 |
US20100240998A1 (en) | 2010-09-23 |
JP2010214118A (ja) | 2010-09-30 |
FR2943461A1 (fr) | 2010-09-24 |
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