JP5684095B2 - 試験用キャリア - Google Patents
試験用キャリア Download PDFInfo
- Publication number
- JP5684095B2 JP5684095B2 JP2011250510A JP2011250510A JP5684095B2 JP 5684095 B2 JP5684095 B2 JP 5684095B2 JP 2011250510 A JP2011250510 A JP 2011250510A JP 2011250510 A JP2011250510 A JP 2011250510A JP 5684095 B2 JP5684095 B2 JP 5684095B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- test carrier
- die
- electronic component
- terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0491—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets for testing integrated circuits on wafers, e.g. wafer-level test cartridge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
- G01R1/0441—Details
- G01R1/0466—Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
- G01R1/0483—Sockets for un-leaded IC's having matrix type contact fields, e.g. BGA or PGA devices; Sockets for unpackaged, naked chips
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
11…収容空間
20…ベース部材
30…ベースフレーム
31…中央開口
40…ベースフィルム
40a…内側主面
40b…浮き上がり部分
401…第1の領域
402…第2の領域
41…フィルム本体
42…配線パターン
43…バンプ
43a…第1のバンプ
43b…第2のバンプ
44…外部端子
45…追加層
50…カバー部材
60…カバーフレーム
61…中央開口
70…カバーフィルム
80…接着部
81…接着剤
90…ダイ
91…電極パッド
92…外周縁
93…エッジ
Claims (4)
- 電子部品の電極にそれぞれ接触する複数の端子を有するフィルム状の第1の部材と、
前記第1の部材に重ねられて、前記電子部品を覆う第2の部材と、を備えており、
前記複数の端子は、
第1の端子と、
前記第1の端子よりも相対的に高い第2の端子と、を含んでおり、
前記第2の端子は、側面視において、前記第1の端子よりも前記電子部品の外周縁の近くに配置されていることを特徴とする試験用キャリア。 - 電子部品の電極に接触する端子を第1の主面に有するフィルム状の第1の部材と、
前記第1の部材に重ねられて、前記電子部品を覆う第2の部材と、を備えており、
前記第1の部材は、前記第1の主面側が部分的に厚くなっており、
前記第1の部材は、
第1の領域と、
前記第1の領域よりも相対的に厚い第2の領域と、を有しており、
前記第2の領域は、側面視において、少なくとも前記電子部品の外周縁の近傍に位置する前記電極に対応していることを特徴とする試験用キャリア。 - 請求項1又は2に記載の試験用キャリアであって、
前記電子部品は、半導体ウェハからダイシングされたダイであることを特徴とする試験用キャリア。 - 請求項1〜3の何れかに記載の試験用キャリアであって、
前記第1の部材と前記第2の部材との間に形成され、前記電子部品を収容する収容空間は、外気に比して減圧されていることを特徴とする試験用キャリア。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011250510A JP5684095B2 (ja) | 2011-11-16 | 2011-11-16 | 試験用キャリア |
TW101138182A TWI461697B (zh) | 2011-11-16 | 2012-10-17 | Test carrier |
KR1020120127936A KR101418751B1 (ko) | 2011-11-16 | 2012-11-13 | 시험용 캐리어 |
US13/677,653 US20130120015A1 (en) | 2011-11-16 | 2012-11-15 | Test carrier |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011250510A JP5684095B2 (ja) | 2011-11-16 | 2011-11-16 | 試験用キャリア |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013104833A JP2013104833A (ja) | 2013-05-30 |
JP5684095B2 true JP5684095B2 (ja) | 2015-03-11 |
Family
ID=48279981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011250510A Expired - Fee Related JP5684095B2 (ja) | 2011-11-16 | 2011-11-16 | 試験用キャリア |
Country Status (4)
Country | Link |
---|---|
US (1) | US20130120015A1 (ja) |
JP (1) | JP5684095B2 (ja) |
KR (1) | KR101418751B1 (ja) |
TW (1) | TWI461697B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6392010B2 (ja) * | 2014-07-03 | 2018-09-19 | 株式会社アドバンテスト | 試験用キャリア |
CN111693738A (zh) * | 2020-05-13 | 2020-09-22 | 中国科学院上海微系统与信息技术研究所 | 一种多通道高频芯片的低温测试结构 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6297653B1 (en) * | 1999-06-28 | 2001-10-02 | Micron Technology, Inc. | Interconnect and carrier with resistivity measuring contacts for testing semiconductor components |
KR100381052B1 (ko) * | 2000-02-23 | 2003-04-18 | 엘지.필립스 엘시디 주식회사 | 윈도우를 가지는 테이프 케리어 패키지 및 이를 접속한액정표시장치 |
JP2003234359A (ja) * | 2002-02-08 | 2003-08-22 | Hitachi Ltd | 半導体装置の製造方法 |
JP3958252B2 (ja) | 2003-05-30 | 2007-08-15 | 富士通株式会社 | 半導体集積回路装置の試験用キャリア |
JP3962414B2 (ja) * | 2004-10-21 | 2007-08-22 | 松下電器産業株式会社 | ウェハ一括検査装置及びそれに用いる検査用基板の製造方法 |
TW200737537A (en) * | 2006-03-17 | 2007-10-01 | Formosa Epitaxy Inc | Flip-chip LED package structure with anti-surge and electrostatic protection and manufacturing method thereof |
JP4860436B2 (ja) * | 2006-11-07 | 2012-01-25 | トッパン・フォームズ株式会社 | Icカードおよびその製造方法 |
JP4525734B2 (ja) * | 2007-11-02 | 2010-08-18 | セイコーエプソン株式会社 | 電子部品の実装構造 |
TWI464916B (zh) * | 2009-03-05 | 2014-12-11 | Epistar Corp | 發光裝置 |
JP2011086880A (ja) * | 2009-10-19 | 2011-04-28 | Advantest Corp | 電子部品実装装置および電子部品の実装方法 |
JP5368290B2 (ja) * | 2009-12-18 | 2013-12-18 | 株式会社アドバンテスト | キャリア組立装置 |
-
2011
- 2011-11-16 JP JP2011250510A patent/JP5684095B2/ja not_active Expired - Fee Related
-
2012
- 2012-10-17 TW TW101138182A patent/TWI461697B/zh not_active IP Right Cessation
- 2012-11-13 KR KR1020120127936A patent/KR101418751B1/ko not_active IP Right Cessation
- 2012-11-15 US US13/677,653 patent/US20130120015A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20130120015A1 (en) | 2013-05-16 |
KR101418751B1 (ko) | 2014-07-11 |
KR20130054164A (ko) | 2013-05-24 |
TWI461697B (zh) | 2014-11-21 |
TW201333470A (zh) | 2013-08-16 |
JP2013104833A (ja) | 2013-05-30 |
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