JP5675242B2 - 大面積のモジュール式センサアレイ組立体および同組立体を作製する方法 - Google Patents

大面積のモジュール式センサアレイ組立体および同組立体を作製する方法 Download PDF

Info

Publication number
JP5675242B2
JP5675242B2 JP2010208824A JP2010208824A JP5675242B2 JP 5675242 B2 JP5675242 B2 JP 5675242B2 JP 2010208824 A JP2010208824 A JP 2010208824A JP 2010208824 A JP2010208824 A JP 2010208824A JP 5675242 B2 JP5675242 B2 JP 5675242B2
Authority
JP
Japan
Prior art keywords
interposer
transducer
module
input
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010208824A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011078755A5 (enExample
JP2011078755A (ja
Inventor
ロバート・ギデオン・ウォドニッキ
レイット・アン・フィッシャー
チャールズ・ジェラード・ウォイチック
シュビュラ・バンサル
アルバート・テーサング・ビュン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of JP2011078755A publication Critical patent/JP2011078755A/ja
Publication of JP2011078755A5 publication Critical patent/JP2011078755A5/ja
Application granted granted Critical
Publication of JP5675242B2 publication Critical patent/JP5675242B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B23K1/0016—Soldering of electronic components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52079—Constructional features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/106—Number of transducers one or more transducer arrays

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Radiology & Medical Imaging (AREA)
  • Medical Informatics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Gynecology & Obstetrics (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Remote Sensing (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP2010208824A 2009-09-20 2010-09-17 大面積のモジュール式センサアレイ組立体および同組立体を作製する方法 Active JP5675242B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US24406909P 2009-09-20 2009-09-20
US61/244,069 2009-09-20
US12/714,239 US8345508B2 (en) 2009-09-20 2010-02-26 Large area modular sensor array assembly and method for making the same
US12/714,239 2010-02-26

Publications (3)

Publication Number Publication Date
JP2011078755A JP2011078755A (ja) 2011-04-21
JP2011078755A5 JP2011078755A5 (enExample) 2013-10-24
JP5675242B2 true JP5675242B2 (ja) 2015-02-25

Family

ID=43757222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010208824A Active JP5675242B2 (ja) 2009-09-20 2010-09-17 大面積のモジュール式センサアレイ組立体および同組立体を作製する方法

Country Status (3)

Country Link
US (1) US8345508B2 (enExample)
JP (1) JP5675242B2 (enExample)
KR (1) KR20110031406A (enExample)

Families Citing this family (81)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8345508B2 (en) * 2009-09-20 2013-01-01 General Electric Company Large area modular sensor array assembly and method for making the same
US8830689B2 (en) * 2010-09-16 2014-09-09 Samsung Electro-Mechanics Co., Ltd. Interposer-embedded printed circuit board
KR101761817B1 (ko) * 2011-03-04 2017-07-26 삼성전자주식회사 대면적 엑스선 검출기
US8622752B2 (en) * 2011-04-13 2014-01-07 Teradyne, Inc. Probe-card interposer constructed using hexagonal modules
KR101460692B1 (ko) * 2011-06-09 2014-11-13 삼성전자주식회사 2차원 트랜스듀서-어레이를 구동시키는 장치, 의료영상시스템 및 2차원 트랜스듀서-어레이를 구동시키는 방법
US8659212B2 (en) * 2012-02-16 2014-02-25 General Electric Company Ultrasound transducer and method for manufacturing an ultrasound transducer
KR101387225B1 (ko) * 2012-02-24 2014-04-21 경북대학교 산학협력단 2d 배열형 초음파 프로브의 소형화 기술
KR101378012B1 (ko) 2012-03-14 2014-03-24 삼성전자주식회사 멀티 어레이형 초음파 프로브 장치 및 멀티 어레이형 초음파 프로브 장치의 제조 방법
US8742646B2 (en) 2012-03-29 2014-06-03 General Electric Company Ultrasound acoustic assemblies and methods of manufacture
JP6102075B2 (ja) * 2012-03-30 2017-03-29 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
KR101383298B1 (ko) 2012-04-25 2014-04-09 삼성전자주식회사 초음파 프로브 장치 및 초음파 프로브 장치의 제조 방법
US9180490B2 (en) * 2012-05-22 2015-11-10 General Electric Company Ultrasound transducer and method for manufacturing an ultrasound transducer
KR101931358B1 (ko) 2012-06-25 2018-12-31 삼성전자주식회사 지그 및 그 제작방법과 지그를 이용한 초음파 프로브용 칩의 플립 칩 본딩방법
KR101984695B1 (ko) 2012-08-29 2019-09-03 삼성전자주식회사 그래핀 소자 및 그 제조방법
US9136293B2 (en) * 2012-09-07 2015-09-15 Taiwan Semiconductor Manufacturing Company, Ltd. Methods and apparatus for sensor module
KR20140033992A (ko) * 2012-09-11 2014-03-19 삼성전자주식회사 초음파 변환기
KR101919013B1 (ko) * 2012-09-13 2019-02-08 삼성전자주식회사 미세가공 초음파 변환기 어레이
EP2938440B1 (en) * 2012-12-28 2020-12-02 Koninklijke Philips N.V. Acoustic probe with components of acoustic elements having different pitches than each other
CN105188960A (zh) * 2013-02-05 2015-12-23 声音技术公司 超声设备
WO2014123922A1 (en) 2013-02-05 2014-08-14 Butterfly Network, Inc. Cmos ultrasonic transducers and related apparatus and methods
US9470710B2 (en) 2013-02-27 2016-10-18 Texas Instruments Incorporated Capacitive MEMS sensor devices
US9351081B2 (en) 2013-02-27 2016-05-24 Texas Instruments Incorporated Capacitive micromachined ultrasonic transducer (CMUT) with through-substrate via (TSV) substrate plug
EP2969914B1 (en) 2013-03-15 2020-01-01 Butterfly Network Inc. Complementary metal oxide semiconductor (cmos) ultrasonic transducers and methods for forming the same
KR20220097541A (ko) 2013-03-15 2022-07-07 버터플라이 네트워크, 인크. 모놀리식 초음파 이미징 디바이스, 시스템 및 방법
US9667889B2 (en) 2013-04-03 2017-05-30 Butterfly Network, Inc. Portable electronic devices with integrated imaging capabilities
AU2014293274B2 (en) * 2013-07-23 2018-11-01 Butterfly Network, Inc. Interconnectable ultrasound transducer probes and related methods and apparatus
WO2015028311A1 (en) 2013-08-26 2015-03-05 Koninklijke Philips N.V. Ultrasound transducer assembly and method for manufacturing an ultrasound transducer assembly
US20150087988A1 (en) * 2013-09-20 2015-03-26 General Electric Company Ultrasound transducer arrays
EP3069382B1 (en) * 2013-11-15 2021-09-29 Koninklijke Philips N.V. Integrated circuit array and method for manufacturing an array of integrated circuits
CN106456115B (zh) 2014-04-18 2020-03-20 蝴蝶网络有限公司 超声成像压缩方法及设备
TWI687710B (zh) 2014-04-18 2020-03-11 美商蝴蝶網路公司 單基板超音波成像裝置的架構、相關設備及方法
TWI661534B (zh) 2014-04-18 2019-06-01 美商蝴蝶網路公司 在互補式金屬氧化物半導體晶圓中的超音波轉換器及相關設備和方法
CN105023877B (zh) * 2014-04-28 2019-12-24 联华电子股份有限公司 半导体晶片、封装结构与其制作方法
US9067779B1 (en) 2014-07-14 2015-06-30 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
JP6528376B2 (ja) * 2014-08-27 2019-06-12 富士通株式会社 撮像装置及びその製造方法
US9613246B1 (en) * 2014-09-16 2017-04-04 Apple Inc. Multiple scan element array ultrasonic biometric scanner
US9952095B1 (en) 2014-09-29 2018-04-24 Apple Inc. Methods and systems for modulation and demodulation of optical signals
US9607203B1 (en) 2014-09-30 2017-03-28 Apple Inc. Biometric sensing device with discrete ultrasonic transducers
US9984271B1 (en) 2014-09-30 2018-05-29 Apple Inc. Ultrasonic fingerprint sensor in display bezel
US9747488B2 (en) 2014-09-30 2017-08-29 Apple Inc. Active sensing element for acoustic imaging systems
US9824254B1 (en) 2014-09-30 2017-11-21 Apple Inc. Biometric sensing device with discrete ultrasonic transducers
US10133904B2 (en) 2014-09-30 2018-11-20 Apple Inc. Fully-addressable sensor array for acoustic imaging systems
US9979955B1 (en) 2014-09-30 2018-05-22 Apple Inc. Calibration methods for near-field acoustic imaging systems
US9904836B2 (en) 2014-09-30 2018-02-27 Apple Inc. Reducing edge effects within segmented acoustic imaging systems
JP6759209B2 (ja) * 2014-12-15 2020-09-23 コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. 直接同軸取付けを備えるコンパクトな超音波変換器
US10695034B2 (en) 2015-05-15 2020-06-30 Butterfly Network, Inc. Autonomous ultrasound probe and related apparatus and methods
JP6608185B2 (ja) * 2015-06-18 2019-11-20 キヤノン株式会社 積層型イメージセンサおよび撮像装置
US11048902B2 (en) 2015-08-20 2021-06-29 Appple Inc. Acoustic imaging system architecture
US10527592B2 (en) * 2015-09-16 2020-01-07 Samsung Medison Co., Ltd. Ultrasonic probe, ultrasonic imaging apparatus including the same, and method for controlling the ultrasonic imaging apparatus
US10275638B1 (en) 2015-09-29 2019-04-30 Apple Inc. Methods of biometric imaging of input surfaces
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
US10856840B2 (en) 2016-06-20 2020-12-08 Butterfly Network, Inc. Universal ultrasound device and related apparatus and methods
AU2017281280B2 (en) * 2016-06-20 2022-01-06 Butterfly Network, Inc. Electrical contact arrangement for microfabricated ultrasonic transducer
US11712221B2 (en) 2016-06-20 2023-08-01 Bfly Operations, Inc. Universal ultrasound device and related apparatus and methods
GB201617255D0 (en) * 2016-10-11 2016-11-23 Oxford University Innovation Limited Modular ultrasound apparatus and methods
US10196261B2 (en) 2017-03-08 2019-02-05 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
US10856843B2 (en) 2017-03-23 2020-12-08 Vave Health, Inc. Flag table based beamforming in a handheld ultrasound device
US11531096B2 (en) 2017-03-23 2022-12-20 Vave Health, Inc. High performance handheld ultrasound
US11446003B2 (en) 2017-03-27 2022-09-20 Vave Health, Inc. High performance handheld ultrasound
US10469846B2 (en) 2017-03-27 2019-11-05 Vave Health, Inc. Dynamic range compression of ultrasound images
EP3642611B1 (en) 2017-06-21 2024-02-14 Butterfly Network, Inc. Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
US20190069880A1 (en) * 2017-09-04 2019-03-07 Canon Medical Systems Corporation Ultrasound probe and ultrasound probe manufacturing method
JP7168662B2 (ja) * 2017-10-31 2022-11-09 コーニンクレッカ フィリップス エヌ ヴェ 超音波スキャナアセンブリ
US10802651B2 (en) 2018-01-30 2020-10-13 Apple Inc. Ultrasonic touch detection through display
JP7187165B2 (ja) * 2018-04-18 2022-12-12 キヤノンメディカルシステムズ株式会社 超音波プローブ及び超音波診断装置
US11498096B2 (en) 2018-11-06 2022-11-15 Siemens Medical Solutions Usa, Inc. Chip-on-array with interposer for a multidimensional transducer array
US11432800B2 (en) * 2019-03-25 2022-09-06 Exo Imaging, Inc. Handheld ultrasound imager
US12109591B2 (en) 2019-09-09 2024-10-08 GE Precision Healthcare LLC Ultrasound transducer array architecture and method of manufacture
US12673346B2 (en) * 2019-11-12 2026-07-07 Siemens Medical Solutions Usa, Inc. Interposer for an ultrasound transducer array
US11950512B2 (en) 2020-03-23 2024-04-02 Apple Inc. Thin-film acoustic imaging system for imaging through an exterior surface of an electronic device housing
US11656355B2 (en) 2020-07-15 2023-05-23 Siemens Medical Solutions Usa, Inc. Direct chip-on-array for a multidimensional transducer array
JP2022077181A (ja) 2020-11-11 2022-05-23 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置及び電子機器
US12159850B2 (en) 2020-12-25 2024-12-03 Yibu Semiconductor Co., Ltd. Semiconductor packaging method, semiconductor assembly and electronic device comprising semiconductor assembly
CN112908873A (zh) * 2021-01-18 2021-06-04 上海易卜半导体有限公司 半导体组件组装方法、半导体组件和电子设备
US12154884B2 (en) 2021-02-01 2024-11-26 Yibu Semiconductor Co., Ltd. Semiconductor packaging method, semiconductor assembly and electronic device comprising semiconductor assembly
US12500203B2 (en) 2021-02-22 2025-12-16 Yibu Semiconductor Co., Ltd. Semiconductor packaging method, semiconductor assembly and electronic device comprising semiconductor assembly
US12000967B2 (en) 2021-03-31 2024-06-04 Apple Inc. Regional gain control for segmented thin-film acoustic imaging systems
US12039800B2 (en) 2021-03-31 2024-07-16 Apple Inc. Signal processing for segmented thin-film acoustic imaging systems for portable electronic devices
US12661088B2 (en) 2023-01-04 2026-06-23 Siemens Medical Solutions Usa, Inc. Connection for a multi-dimensional matrix transducer
US20240245389A1 (en) * 2023-01-23 2024-07-25 GE Precision Healthcare LLC Methods and systems for modular transducer probe with reduced footprint
US12693439B2 (en) * 2023-05-09 2026-07-28 Redlen Technologies, Inc. Direct attach radiation detector structures including pixelated sensors and read-out circuitry having varying pitch

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05123317A (ja) * 1991-11-08 1993-05-21 Toshiba Corp 2次元アレイ超音波プローブ
WO1995002197A1 (de) 1993-07-08 1995-01-19 Siemens Aktiengesellschaft Ultraschallabbildungssystem mit einer reduzierten anzahl von leitungen zwischen hauptgerät und applikator
US5527741A (en) 1994-10-11 1996-06-18 Martin Marietta Corporation Fabrication and structures of circuit modules with flexible interconnect layers
US7500952B1 (en) 1995-06-29 2009-03-10 Teratech Corporation Portable ultrasound imaging system
JPH09238924A (ja) * 1996-03-12 1997-09-16 Toshiba Corp 処置具及びこの処置具を備えた医用複合診断システム
US5732706A (en) 1996-03-22 1998-03-31 Lockheed Martin Ir Imaging Systems, Inc. Ultrasonic array with attenuating electrical interconnects
US6541896B1 (en) 1997-12-29 2003-04-01 General Electric Company Method for manufacturing combined acoustic backing and interconnect module for ultrasonic array
US6013032A (en) 1998-03-13 2000-01-11 Hewlett-Packard Company Beamforming methods and apparatus for three-dimensional ultrasound imaging using two-dimensional transducer array
US6380766B2 (en) 1999-03-19 2002-04-30 Bernard J Savord Integrated circuitry for use with transducer elements in an imaging system
US6282963B1 (en) 1999-10-12 2001-09-04 General Electric Company Numerical optimization of ultrasound beam path
US6359367B1 (en) 1999-12-06 2002-03-19 Acuson Corporation Micromachined ultrasonic spiral arrays for medical diagnostic imaging
US6346079B1 (en) 2000-05-25 2002-02-12 General Electric Company Method and apparatus for adaptive frame-rate adjustment in ultrasound imaging system
JP4646465B2 (ja) 2000-09-05 2011-03-09 キヤノン株式会社 記録媒体搬送装置及び該記録媒体搬送装置を備えた記録装置
US6506160B1 (en) 2000-09-25 2003-01-14 General Electric Company Frequency division multiplexed wireline communication for ultrasound probe
US6491634B1 (en) 2000-10-13 2002-12-10 Koninklijke Philips Electronics N.V. Sub-beamforming apparatus and method for a portable ultrasound imaging system
US6589180B2 (en) 2001-06-20 2003-07-08 Bae Systems Information And Electronic Systems Integration, Inc Acoustical array with multilayer substrate integrated circuits
US6984210B2 (en) * 2002-12-18 2006-01-10 Barbara Ann Karmanos Cancer Institute Diagnostic analysis of ultrasound data
US7053530B2 (en) 2002-11-22 2006-05-30 General Electric Company Method for making electrical connection to ultrasonic transducer through acoustic backing material
US6831394B2 (en) 2002-12-11 2004-12-14 General Electric Company Backing material for micromachined ultrasonic transducer devices
AU2003280172A1 (en) 2002-12-11 2004-06-30 Koninklijke Philips Electronics N.V. Miniaturized ultrasonic transducer
US7353056B2 (en) 2003-03-06 2008-04-01 General Electric Company Optimized switching configurations for reconfigurable arrays of sensor elements
US7257051B2 (en) 2003-03-06 2007-08-14 General Electric Company Integrated interface electronics for reconfigurable sensor array
US6865140B2 (en) 2003-03-06 2005-03-08 General Electric Company Mosaic arrays using micromachined ultrasound transducers
US7052464B2 (en) 2004-01-01 2006-05-30 General Electric Company Alignment method for fabrication of integrated ultrasonic transducer array
JP2008520316A (ja) * 2004-11-22 2008-06-19 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 超音波ビームフォーマプローブのためのハイブリッドic
US7375420B2 (en) 2004-12-03 2008-05-20 General Electric Company Large area transducer array
US7518251B2 (en) 2004-12-03 2009-04-14 General Electric Company Stacked electronics for sensors
CN101102853B (zh) 2005-01-11 2010-12-08 皇家飞利浦电子股份有限公司 用于(多个)微束形成器的重分布互连和医学超声系统
JP2008545501A (ja) * 2005-06-07 2008-12-18 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 超音波センサ組立体に対するバッキングブロック
US7775979B2 (en) 2005-06-29 2010-08-17 General Electric Company Transmit and receive interface array for highly integrated ultrasound scanner
JP5032075B2 (ja) * 2006-09-08 2012-09-26 株式会社東芝 超音波プローブシステム及び超音波診断装置
US7687976B2 (en) 2007-01-31 2010-03-30 General Electric Company Ultrasound imaging system
WO2008124841A2 (en) * 2007-04-10 2008-10-16 C. R. Bard, Inc. Low power ultrasound system
US7892176B2 (en) 2007-05-02 2011-02-22 General Electric Company Monitoring or imaging system with interconnect structure for large area sensor array
US20080315331A1 (en) 2007-06-25 2008-12-25 Robert Gideon Wodnicki Ultrasound system with through via interconnect structure
US20090182229A1 (en) 2008-01-10 2009-07-16 Robert Gideon Wodnicki UltraSound System With Highly Integrated ASIC Architecture
US20090182233A1 (en) 2008-01-10 2009-07-16 Robert Gideon Wodnicki Ultrasound System With Integrated Control Switches
US8345508B2 (en) * 2009-09-20 2013-01-01 General Electric Company Large area modular sensor array assembly and method for making the same

Also Published As

Publication number Publication date
US8345508B2 (en) 2013-01-01
JP2011078755A (ja) 2011-04-21
KR20110031406A (ko) 2011-03-28
US20110071397A1 (en) 2011-03-24

Similar Documents

Publication Publication Date Title
US8345508B2 (en) Large area modular sensor array assembly and method for making the same
US8659148B2 (en) Tileable sensor array
US7892176B2 (en) Monitoring or imaging system with interconnect structure for large area sensor array
CN101199434B (zh) 模块化传感器组件及其制造方法
US7795784B2 (en) Redistribution interconnect for microbeamforming(s) and a medical ultrasound system
US6589180B2 (en) Acoustical array with multilayer substrate integrated circuits
US7687976B2 (en) Ultrasound imaging system
RU2449418C2 (ru) Межсоединение по методу перевернутого кристалла через сквозные отверстия в микросхеме
JP6147532B2 (ja) 超音波プローブ
US20060133198A1 (en) Large area transducer array
WO2003001571A2 (en) Acoustical array with multilayer substrate integrated circuits
US8169125B2 (en) Transducer arrays for medical ultrasound and method of making the same
CN104955586B (zh) 具有彼此不同间距的声学元件的部件的声学探头
EP3432030B1 (en) Interposer, ultrasound probe using the same, and method of manufacturing interposer
JP2016120183A (ja) 光音響波用プローブ、超音波トランスデューサユニット、及び被検体情報取得装置
US20240245389A1 (en) Methods and systems for modular transducer probe with reduced footprint
JP2024122948A (ja) 多用途超音波マトリクスアレイシグナルプロセッサ
Woychik et al. Packaging High Density Capactive Micro-Machined Ultrasonic Transducer (cMUT) Sensor Arrays Using Hyperbga Technology

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130909

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130909

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140328

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140408

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140702

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20141202

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20141224

R150 Certificate of patent or registration of utility model

Ref document number: 5675242

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350