JP5673601B2 - 半導体基板の製造方法 - Google Patents
半導体基板の製造方法 Download PDFInfo
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- JP5673601B2 JP5673601B2 JP2012116822A JP2012116822A JP5673601B2 JP 5673601 B2 JP5673601 B2 JP 5673601B2 JP 2012116822 A JP2012116822 A JP 2012116822A JP 2012116822 A JP2012116822 A JP 2012116822A JP 5673601 B2 JP5673601 B2 JP 5673601B2
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- 239000004065 semiconductor Substances 0.000 title claims description 140
- 239000000758 substrate Substances 0.000 title claims description 135
- 238000004519 manufacturing process Methods 0.000 title claims description 88
- 239000010410 layer Substances 0.000 claims description 160
- 238000005530 etching Methods 0.000 claims description 73
- 238000000034 method Methods 0.000 claims description 62
- 238000010438 heat treatment Methods 0.000 claims description 45
- 238000011084 recovery Methods 0.000 claims description 45
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 32
- 239000007789 gas Substances 0.000 claims description 32
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 18
- 238000001312 dry etching Methods 0.000 claims description 18
- 229910052736 halogen Inorganic materials 0.000 claims description 18
- 150000002367 halogens Chemical class 0.000 claims description 18
- 229910052710 silicon Inorganic materials 0.000 claims description 18
- 239000010703 silicon Substances 0.000 claims description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 17
- 238000003486 chemical etching Methods 0.000 claims description 14
- 238000001039 wet etching Methods 0.000 claims description 14
- 239000002344 surface layer Substances 0.000 claims description 13
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 11
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 claims description 10
- 238000005121 nitriding Methods 0.000 claims description 9
- 230000001590 oxidative effect Effects 0.000 claims description 9
- 239000011259 mixed solution Substances 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 8
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 7
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 7
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims description 7
- 229910017604 nitric acid Inorganic materials 0.000 claims description 7
- 229910052731 fluorine Inorganic materials 0.000 claims description 6
- 239000011737 fluorine Substances 0.000 claims description 6
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 6
- 230000003252 repetitive effect Effects 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 150000002431 hydrogen Chemical group 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 claims description 4
- 125000001153 fluoro group Chemical group F* 0.000 claims 1
- 230000007547 defect Effects 0.000 description 46
- 239000000460 chlorine Substances 0.000 description 13
- 238000000137 annealing Methods 0.000 description 7
- 239000013078 crystal Substances 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
- 210000000746 body region Anatomy 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 5
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 4
- 229910052801 chlorine Inorganic materials 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 230000000779 depleting effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical group [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
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- H—ELECTRICITY
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
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- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/66734—Vertical DMOS transistors, i.e. VDMOS transistors with a step of recessing the gate electrode, e.g. to form a trench gate electrode
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
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Description
また、第2ダメージ層の結晶性を回復するためには、1050℃以上で3分以上熱処理することが好ましい。尚、熱処理時間の上限は、トレンチの側壁形状が変形しない時間内で、適宜設定することができる。
pnコラムを有した上記縦型MOSFETの構造によって、図1(b)に示す半導体装置100は、高耐圧で低オン抵抗が可能な半導体装置となっている。尚、図1(b)の半導体装置100を例えば600V耐圧とする場合には、図1(a)に示す半導体基板10のトレンチT1のサイズ、すなわち、p導電型領域3pとn導電型領域2nの幅が5μmで、深さが50μm程度である。
2 エピタキシャル層
3 エピタキシャル層
T1 トレンチ
M2 酸化膜
D1 第1ダメージ層
D2 第2ダメージ層
2n n導電型領域
3p p導電型領域
100 半導体装置
Claims (22)
- ドライエッチングにより半導体基板にトレンチを形成するトレンチ形成工程と、
前記トレンチ形成工程の後、ケミカルエッチングにより前記トレンチの表層部を50nm以上エッチングして、熱処理では結晶性を回復できない第1ダメージ層を除去する第1ダメージ層除去工程と、
前記第1ダメージ層除去工程の後、前記半導体基板を非酸化性かつ非窒化性の雰囲気下において1050℃以上で熱処理を行い、前記第1ダメージ層の下層に存在する第2ダメージ層の結晶性を回復する第2ダメージ層回復工程とを有してなることを特徴とする半導体基板の製造方法。 - 前記第1ダメージ層除去工程におけるエッチング量をE[nm]とし、前記第2ダメージ層回復工程における熱処理温度をA[℃]としたとき、
E≧100, A≧−0.3×E+1100
であることを特徴とする請求項1に記載の半導体基板の製造方法。 - 前記第1ダメージ層除去工程におけるケミカルエッチングが、ラジカルを主体としたエッチングであることを特徴とする請求項1または2に記載の半導体基板の製造方法。
- 前記ラジカルを主体としたエッチングが、120℃以下で行うケミカルドライエッチング(CDE)であることを特徴とする請求項3に記載の半導体基板の製造方法。
- 前記CDEのエッチャントが、ハロゲン元素のラジカルであることを特徴とする請求項4に記載の半導体基板の製造方法。
- 前記ハロゲン元素が、四フッ化炭素(CF4)と酸素(O2)の混合ガスを放電で分解してできるフッ素(F)のラジカルであることを特徴とする請求項5に記載の半導体基板の製造方法。
- 前記CDEの処理温度が、60℃以上、100℃以下であることを特徴とする請求項6に記載の半導体基板の製造方法。
- 前記CDEの雰囲気圧力が、0.01Torr以上、10Torr以下であることを特徴とする請求項6または7
に記載の半導体基板の製造方法。 - 前記CDEの雰囲気圧力が、0.1Torr以上、1Torr以下であることを特徴とする請求項8に記載の半導体基板の製造方法。
- 前記第1ダメージ層除去工程におけるケミカルエッチングが、等方性のウエットエッチングであることを特徴とする請求項1または2に記載の半導体基板の製造方法。
- 前記ウエットエッチングのエッチャントが、フッ硝酸(フッ酸と硝酸の混合液)あるいは前記フッ硝酸と酢酸の混合液であることを特徴とする請求項10に記載の半導体基板の製造方法。
- 前記第1ダメージ層除去工程におけるケミカルエッチングが、ハロゲン系ガスを用いたベーパ処理によるエッチングであることを特徴とする請求項1または2に記載の半導体基板の製造方法。
- 前記ハロゲン系ガスが、フッ化水素ガス、塩化水素ガス、または塩素ガスであることを特徴とする請求項12に記載の半導体基板の製造方法。
- 前記熱処理の温度が、1080℃以上、1200℃以下であることを特徴とする請求項1乃至13のいずれか一項に記載の半導体基板の製造方法。
- 前記熱処理の時間が、3分以上であることを特徴とする請求項1乃至14のいずれか一項に記載の半導体基板の製造方法。
- 前記熱処理の雰囲気が、水素(H2)雰囲気であることを特徴とする請求項1乃至15のいずれか一項に記載の半導体基板の製造方法。
- 前記トレンチ形成工程におけるマスクが、酸化膜または窒化膜であり、
前記第2ダメージ層回復工程の前に、ウエットエッチングにより、前記マスクを除去しておくことを特徴とする請求項1乃至16のいずれか一項に記載の半導体基板の製造方法。 - 前記トレンチ形成工程で形成される前記トレンチが、順テーパ形状を有してなることを特徴とする請求項1乃至17のいずれか一項に記載の半導体基板の製造方法。
- 前記第2ダメージ層回復工程の後、前記トレンチ内にエピタキシャル膜を形成して、トレンチをエピタキシャル膜で埋め込むトレンチ埋め込み工程を有してなることを特徴とする請求項1乃至18のいずれか一項に記載の半導体基板の製造方法。
- 前記第2ダメージ層回復工程と前記トレンチ埋め込み工程を、同一炉内で連続実施することを特徴とする請求項19に記載の半導体基板の製造方法。
- 前記半導体基板が、第1導電型のシリコン基板であり、
前記トレンチ形成工程において、前記トレンチを、基板面において所定のピッチで繰り返し配置されてなる繰り返しパターンで形成し、
前記トレンチ埋め込み工程において、第2導電型のシリコンからなるエピタキシャル膜を形成することを特徴とする請求項19または20に記載の半導体基板の製造方法。 - 前記繰り返しパターンのピッチ方向におけるトレンチの幅が、0.5μm以上、15μm以下であり、
前記トレンチの深さが、20μm以上、100μm以下であることを特徴とする請求項21に記載の半導体基板の製造方法。
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JP2012116822A JP5673601B2 (ja) | 2011-07-10 | 2012-05-22 | 半導体基板の製造方法 |
DE102012211776.8A DE102012211776B4 (de) | 2011-07-10 | 2012-07-05 | Fertigungsverfahren eines halbleitersubstrats |
US13/541,885 US8853089B2 (en) | 2011-07-10 | 2012-07-05 | Manufacturing method of semiconductor substrate |
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US10181477B2 (en) | 2016-03-11 | 2019-01-15 | Toshiba Memory Corporation | Semiconductor device and method for manufacturing same |
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