JP5670169B2 - 光導波路の製造方法 - Google Patents

光導波路の製造方法 Download PDF

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Publication number
JP5670169B2
JP5670169B2 JP2010279051A JP2010279051A JP5670169B2 JP 5670169 B2 JP5670169 B2 JP 5670169B2 JP 2010279051 A JP2010279051 A JP 2010279051A JP 2010279051 A JP2010279051 A JP 2010279051A JP 5670169 B2 JP5670169 B2 JP 5670169B2
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Japan
Prior art keywords
optical path
core layer
layer
path core
optical
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Application number
JP2010279051A
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English (en)
Japanese (ja)
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JP2012128153A (ja
JP2012128153A5 (enExample
Inventor
柳沢　賢司
賢司 柳沢
米倉　秀樹
秀樹 米倉
山本　貴功
貴功 山本
和尚 山本
和尚 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Industries Co Ltd
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Shinko Electric Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Priority to JP2010279051A priority Critical patent/JP5670169B2/ja
Priority to US13/316,810 priority patent/US9081159B2/en
Publication of JP2012128153A publication Critical patent/JP2012128153A/ja
Publication of JP2012128153A5 publication Critical patent/JP2012128153A5/ja
Application granted granted Critical
Publication of JP5670169B2 publication Critical patent/JP5670169B2/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
JP2010279051A 2010-12-15 2010-12-15 光導波路の製造方法 Active JP5670169B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010279051A JP5670169B2 (ja) 2010-12-15 2010-12-15 光導波路の製造方法
US13/316,810 US9081159B2 (en) 2010-12-15 2011-12-12 Optical waveguide and method of manufacturing the same, and optical waveguide device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010279051A JP5670169B2 (ja) 2010-12-15 2010-12-15 光導波路の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014255315A Division JP5976769B2 (ja) 2014-12-17 2014-12-17 光導波路及び光導波路装置

Publications (3)

Publication Number Publication Date
JP2012128153A JP2012128153A (ja) 2012-07-05
JP2012128153A5 JP2012128153A5 (enExample) 2013-08-08
JP5670169B2 true JP5670169B2 (ja) 2015-02-18

Family

ID=46234547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010279051A Active JP5670169B2 (ja) 2010-12-15 2010-12-15 光導波路の製造方法

Country Status (2)

Country Link
US (1) US9081159B2 (enExample)
JP (1) JP5670169B2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6105254B2 (ja) * 2012-10-29 2017-03-29 新光電気工業株式会社 光導波路積層配線基板、光モジュール及び光導波路積層配線基板の製造方法
JP2014109769A (ja) * 2012-12-04 2014-06-12 Sumitomo Bakelite Co Ltd 光導波路の製造方法
JP6098142B2 (ja) * 2012-12-04 2017-03-22 住友ベークライト株式会社 光導波路の製造方法
JP6084027B2 (ja) * 2012-12-20 2017-02-22 新光電気工業株式会社 光導波路装置及びその製造方法
US9568677B2 (en) * 2013-05-30 2017-02-14 Taiwan Semiconductor Manufacturing Co., Ltd. Waveguide structure and method for fabricating the same
US9721812B2 (en) * 2015-11-20 2017-08-01 International Business Machines Corporation Optical device with precoated underfill
US10503071B2 (en) * 2017-10-26 2019-12-10 Waymo Llc Method for manufacturing light guide elements
GB201721814D0 (en) * 2017-12-22 2018-02-07 Optoscribe Ltd Optical apparatus, optical assembly and methods of manufacture thereof
US11693181B2 (en) * 2018-05-08 2023-07-04 Ttm Technologies, Inc. High-density optical waveguide structure and printed circuit board and preparation method thereof
JP7280031B2 (ja) 2018-11-14 2023-05-23 新光電気工業株式会社 光導波路搭載基板、光通信装置及び光導波路搭載基板の製造方法
JP7071911B2 (ja) * 2018-12-20 2022-05-19 京セラ株式会社 光モジュール構造
US11125954B2 (en) * 2019-07-17 2021-09-21 Shinko Electric Industries Co., Ltd. Optical waveguide and optical waveguide device
US20230091050A1 (en) * 2021-09-20 2023-03-23 Intel Corporation Optical waveguides within a glass substrate to optically couple dies attached to the glass substrate
JP7736297B2 (ja) * 2022-01-07 2025-09-09 新光電気工業株式会社 光導波路搭載基板、光通信装置、及び光導波路搭載基板の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2352252A1 (en) * 1999-10-21 2001-04-26 Nhk Spring Co., Ltd. Optical component having positioning markers and method for making the same
TWI390264B (zh) * 2004-11-17 2013-03-21 Hitachi Chemical Co Ltd A photoelectric hybrid circuit mounting substrate and a transfer device using the same
US7991248B2 (en) * 2006-09-21 2011-08-02 Hitachi Chemical Co., Ltd. Optical waveguide substrate and substrate mounting photoelectric hybrid circuit
JP5064109B2 (ja) * 2007-05-11 2012-10-31 新光電気工業株式会社 光導波路及びその製造方法、並びに光電気混載基板及びその製造方法
JP2010191365A (ja) * 2009-02-20 2010-09-02 Hitachi Ltd 光インターコネクション実装回路

Also Published As

Publication number Publication date
JP2012128153A (ja) 2012-07-05
US20120155822A1 (en) 2012-06-21
US9081159B2 (en) 2015-07-14

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