JP5668345B2 - 光フィルター、光フィルターモジュール、分光測定器および光機器 - Google Patents

光フィルター、光フィルターモジュール、分光測定器および光機器 Download PDF

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Publication number
JP5668345B2
JP5668345B2 JP2010158876A JP2010158876A JP5668345B2 JP 5668345 B2 JP5668345 B2 JP 5668345B2 JP 2010158876 A JP2010158876 A JP 2010158876A JP 2010158876 A JP2010158876 A JP 2010158876A JP 5668345 B2 JP5668345 B2 JP 5668345B2
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Japan
Prior art keywords
wavelength
filter
bandpass filter
optical
substrate
Prior art date
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Expired - Fee Related
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JP2010158876A
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English (en)
Japanese (ja)
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JP2012022083A (ja
JP2012022083A5 (enExample
Inventor
野澤　武史
武史 野澤
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Seiko Epson Corp
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Seiko Epson Corp
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2010158876A priority Critical patent/JP5668345B2/ja
Priority to US13/114,400 priority patent/US8497990B2/en
Publication of JP2012022083A publication Critical patent/JP2012022083A/ja
Priority to US13/922,639 priority patent/US8982350B2/en
Publication of JP2012022083A5 publication Critical patent/JP2012022083A5/ja
Priority to US14/617,374 priority patent/US20150177510A1/en
Application granted granted Critical
Publication of JP5668345B2 publication Critical patent/JP5668345B2/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
    • G01J3/513—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters having fixed filter-detector pairs

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
JP2010158876A 2010-07-13 2010-07-13 光フィルター、光フィルターモジュール、分光測定器および光機器 Expired - Fee Related JP5668345B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010158876A JP5668345B2 (ja) 2010-07-13 2010-07-13 光フィルター、光フィルターモジュール、分光測定器および光機器
US13/114,400 US8497990B2 (en) 2010-07-13 2011-05-24 Optical filter, optical filter module, spectrometric measurement apparatus, and optical apparatus
US13/922,639 US8982350B2 (en) 2010-07-13 2013-06-20 Optical filter, optical filter module, spectrometric measurement apparatus, and optical apparatus
US14/617,374 US20150177510A1 (en) 2010-07-13 2015-02-09 Optical filter, optical filter module, spectrometric measurement apparatus, and optical apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010158876A JP5668345B2 (ja) 2010-07-13 2010-07-13 光フィルター、光フィルターモジュール、分光測定器および光機器

Related Child Applications (1)

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JP2014143362A Division JP5920411B2 (ja) 2014-07-11 2014-07-11 光フィルター、光フィルターモジュール、分光測定器および光機器

Publications (3)

Publication Number Publication Date
JP2012022083A JP2012022083A (ja) 2012-02-02
JP2012022083A5 JP2012022083A5 (enExample) 2013-08-22
JP5668345B2 true JP5668345B2 (ja) 2015-02-12

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JP2010158876A Expired - Fee Related JP5668345B2 (ja) 2010-07-13 2010-07-13 光フィルター、光フィルターモジュール、分光測定器および光機器

Country Status (2)

Country Link
US (3) US8497990B2 (enExample)
JP (1) JP5668345B2 (enExample)

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JP5720200B2 (ja) * 2010-11-25 2015-05-20 セイコーエプソン株式会社 光モジュール、および光測定装置
JP2013096883A (ja) * 2011-11-02 2013-05-20 Seiko Epson Corp 分光測定装置
JP2013181912A (ja) * 2012-03-02 2013-09-12 Seiko Epson Corp 成分分析装置
GB201207881D0 (en) 2012-05-04 2012-06-20 Isis Innovation Active chemical sensing using optical microcavity
FI125612B (en) 2012-05-08 2015-12-15 Teknologian Tutkimuskeskus Vtt Oy Fabry-Perot Interferometer
JP5987573B2 (ja) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 光学モジュール、電子機器、及び駆動方法
JP6036341B2 (ja) * 2013-01-29 2016-11-30 セイコーエプソン株式会社 光学モジュール、及び電子機器
US20140226988A1 (en) * 2013-02-12 2014-08-14 Avago Technologies General Ip (Singapore) Pte. Ltd Bidirectional optical data communications module having reflective lens
JP6119325B2 (ja) * 2013-03-14 2017-04-26 セイコーエプソン株式会社 干渉フィルター、干渉フィルターの製造方法、光学モジュール、電子機器、及び接合基板
WO2015026333A1 (en) * 2013-08-20 2015-02-26 Intel Corporation A display apparatus including mems devices
JP6311307B2 (ja) * 2013-12-27 2018-04-18 セイコーエプソン株式会社 光学モジュール、電子機器、及び光学モジュールの駆動方法
JP6390117B2 (ja) * 2014-02-26 2018-09-19 セイコーエプソン株式会社 光学モジュール、及び電子機器
JP6394189B2 (ja) 2014-08-29 2018-09-26 セイコーエプソン株式会社 分光画像取得装置、及び分光画像取得方法
JP2016161802A (ja) * 2015-03-03 2016-09-05 富士通株式会社 可変光減衰器及び光モジュール
JP6481423B2 (ja) * 2015-03-03 2019-03-13 富士通株式会社 光伝送装置及び波長制御方法
JP7090400B2 (ja) 2017-03-08 2022-06-24 浜松ホトニクス株式会社 半導体光検出素子
JP7142419B2 (ja) * 2017-05-01 2022-09-27 浜松ホトニクス株式会社 光計測制御プログラム、光計測システム及び光計測方法
JP7394319B2 (ja) * 2017-05-11 2023-12-08 ネオリティクス，インコーポレイテッド 自動ドリフト制御機能および高ダイナミックレンジを具備する補償光学アナライザ
CN109031649B (zh) 2017-06-09 2025-01-21 京东方科技集团股份有限公司 一种反射器件及显示装置
US11303356B1 (en) 2019-04-18 2022-04-12 Raytheon Company Methods and apparatus for maintaining receiver operating point with changing angle-of-arrival of a received signal
US11307395B2 (en) 2019-05-23 2022-04-19 Raytheon Company Methods and apparatus for optical path length equalization in an optical cavity
US11290191B2 (en) 2019-06-20 2022-03-29 Raytheon Company Methods and apparatus for tracking moving objects using symmetric phase change detection
US11159245B2 (en) * 2019-07-03 2021-10-26 Raytheon Company Methods and apparatus for cavity angle tuning for operating condition optimization
US11199754B2 (en) * 2019-07-15 2021-12-14 Raytheon Company Demodulator with optical resonator
US11287317B2 (en) 2019-08-27 2022-03-29 Viavi Solutions Inc. Optical measurement device including internal spectral reference

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Also Published As

Publication number Publication date
US8497990B2 (en) 2013-07-30
JP2012022083A (ja) 2012-02-02
US20130278933A1 (en) 2013-10-24
US8982350B2 (en) 2015-03-17
US20150177510A1 (en) 2015-06-25
US20120013905A1 (en) 2012-01-19

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