JP5662733B2 - Cutting blade mounting method - Google Patents

Description

The present invention relates to a mounting method of a cutting blade in a cutting apparatus for cutting a workpiece such as a semiconductor wafer.

  For example, in a semiconductor device manufacturing process, devices such as IC and LSI are formed in a number of regions partitioned by dividing lines called streets formed in a lattice shape on the surface of a semiconductor wafer having a substantially disk shape, Individual devices are manufactured by dividing each region in which the devices are formed along a street. As a dividing device for dividing a semiconductor wafer, a cutting device is generally used. The cutting apparatus includes a cutting means having a chuck table for holding a workpiece and a cutting blade for cutting the workpiece held on the chuck table as disclosed in Patent Document 1 below, The workpiece is cut by rotating and feeding the chuck table while rotating the cutting blade. (For example, refer to Patent Document 1.)

  The cutting means includes a rotating spindle, a flange portion that is attached to an end portion of the rotating spindle and has a clamping surface on a side surface of the outer peripheral portion, and a cylindrical mounting portion that is formed to protrude laterally from the center portion of the flange portion. A cutting blade having a blade mount having a fitting base, an annular base having a fitting hole that fits into a cylindrical mounting portion of the blade mount, and a grindstone blade attached to the outer peripheral side surface of the base; The blade mount includes a clamping nut having a clamping surface that is screwed onto a male screw formed on a cylindrical mounting portion and clamps a cutting blade base.

  However, in the cutting means described above, when the cutting blade is mounted on the blade mount, the annular base of the cutting blade is fitted to the cylindrical mounting portion of the blade mount, and the cylindrical mounting portion is formed. When the holding nut is screwed onto the male screw, relative rotation occurs between the holding surface of the flange portion constituting the blade mount and the annular base of the cutting blade, and the contact surface between the holding surface of the flange portion and the annular base Slides. When the clamping surface of the flange portion constituting the blade mount and the contact surface of the annular base constituting the cutting blade slide, the annular base constituting the cutting blade is formed of aluminum, and the blade mount is made of stainless steel. Therefore, aluminum fine particles forming an annular base adhere to the sandwiching surface of the flange portion constituting the blade mount. For this reason, when the attachment and detachment of the cutting blade is repeated, aluminum fine particles are deposited on the sandwiching surfaces of the flange portions constituting the blade mount. Therefore, when a new cutting blade is mounted, the annular base constituting the cutting blade and the clamping surface of the flange portion constituting the blade mount are not in close contact with each other, and the cutting blade is slightly tilted and rotational blurring occurs. There is a problem.

  On the other hand, a flange end surface correcting jig for grinding and correcting the sandwiching surface of the flange portion constituting the blade mount to improve the adhesion of the sandwiching surface is disclosed in Patent Document 2 below.

Japanese Patent Laid-Open No. 4-252048 JP-A-8-339977

  Although the above-mentioned problem can be solved by removing the aluminum particles deposited on the sandwiching surface of the flange portion constituting the blade mount using the flange end surface correcting jig disclosed in Patent Document 2, the flange end surface There is a problem that it takes time to correct the clamping surface of the flange portion constituting the blade mount using the correction jig, and this correction operation must be performed periodically, resulting in poor productivity.

The present invention has been made in view of the above-mentioned facts, and its main technical problem is that metal fine particles such as aluminum forming an annular base of the cutting blade adhere to the sandwiching surface of the flange portion constituting the blade mount. and to provide a method of mounting the switching cutting blade can be prevented from.

In order to solve the main technical problem , according to the present invention, a chuck table for holding a workpiece, and a cutting means including a cutting blade for cutting the workpiece held on the chuck table, A blade mount in which the cutting means has a rotating spindle, a flange portion mounted on an end portion of the rotating spindle and having a clamping surface on a side surface, and a mounting portion formed to project laterally from the center portion of the flange portion; A cutting blade having an annular base having a fitting hole for fitting to the mounting portion of the blade mount, and a grindstone blade mounted on the outer peripheral side surface of the base, and the mounting portion in the blade mount A cutting blade mounting method in a cutting apparatus, comprising a clamping nut having a clamping surface that is screwed into a male screw formed on the blade and clamps the front surface of the base of the cutting blade There is,
The clamping nut and the flange of the blade mount are screwed between the clamping surface of the clamping nut and the front surface of the base of the cutting blade via a lubricant made of alcohol or water. The base of the cutting blade is sandwiched between and fixed to the part,
A cutting blade mounting method is provided.

The lubricant made of alcohol or water is applied to the clamping surface of the clamping nut. The lubricant made of alcohol or water is applied to the front surface of the cutting blade base.

In the cutting blade mounting method according to the present invention, the clamping nut and the clamping nut are screwed between the clamping surface of the clamping nut and the front surface of the cutting blade base via a lubricant made of alcohol or water. Since the cutting blade base is clamped and fixed between the flange portion of the blade mount, when the cutting blade is mounted on the blade mount, the front surface of the cutting blade base and the holding nut However, relative rotation does not occur between the rear surface of the base and the holding surface of the flange portion constituting the blade mount. Accordingly, since the rear surface of the base does not slide with respect to the sandwiching surface of the flange portion, fine metal powder is not generated from the base, and therefore the metal that forms the base on the sandwiching surface of the flange portion that constitutes the blade mount. The fine powder does not adhere, and even if the cutting blade is repeatedly attached and detached, the fine metal powder does not accumulate on the clamping surface of the flange portion constituting the blade mount.

The perspective view of the cutting device comprised according to this invention. The disassembled perspective view of the spindle unit with which the cutting apparatus shown in FIG. 1 is equipped. Sectional drawing of the spindle unit with which the cutting apparatus shown in FIG. 1 is equipped. Sectional drawing of the clamping nut which comprises the spindle unit with which the cutting apparatus shown in FIG. 1 is equipped. Sectional drawing of the cutting blade which comprises the spindle unit with which the cutting apparatus shown in FIG. 1 is equipped.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a cutting apparatus and a cutting blade mounting method equipped with a cutting blade constructed according to the present invention will be described in more detail with reference to the accompanying drawings.

  FIG. 1 shows a perspective view of a cutting device constructed in accordance with the present invention. The cutting device in the illustrated embodiment includes a device housing 2 having a substantially rectangular parallelepiped shape. In the apparatus housing 2, a chuck table 3 for holding a workpiece is disposed so as to be movable in a direction indicated by an arrow X that is a cutting feed direction. The chuck table 3 includes a suction chuck support 31 and a suction chuck 32 disposed on the suction chuck support 31. A workpiece is illustrated on a holding surface which is the upper surface of the suction chuck 32. Suction holding is performed by operating a suction means that does not. The chuck table 3 is configured to be rotatable by a rotation mechanism (not shown). The chuck table 3 is provided with a clamp 33 for fixing a support frame for supporting a semiconductor wafer, which will be described later, as a workpiece through a protective tape. The chuck table 3 configured as described above can be moved in a cutting feed direction indicated by an arrow X by a cutting feed means (not shown).

  The cutting apparatus in the illustrated embodiment includes a spindle unit 4 as cutting means. The spindle unit 4 is mounted on a moving base (not shown) and is adjusted to move in a direction indicated by an arrow Y that is an indexing direction and a direction indicated by an arrow Z that is a cutting direction. The rotary spindle 42 is supported, and the cutting blade 5 is attached to the front end of the rotary spindle 42.

  The cutting blade 5 and its mounting structure will be described with reference to FIGS. The cutting blade 5 shown in FIGS. 2 and 3 includes an annular base 51 and a grindstone blade 52 mounted on the outer peripheral side surface of the annular base 51. The annular base 51 is provided with a fitting hole 511 that fits into a blade mount mounting portion, which will be described later, in the center, and a blade mounting portion 512 on the outer peripheral side. As shown in FIG. 3, the blade mounting portion 512 is formed in a triangular shape whose cross section tapers toward the outer peripheral edge, and the right side surface (rear surface) in FIG. 3 is a grindstone blade mounting surface 512a. The base 51 configured as described above is made of aluminum in the illustrated embodiment.

  The grindstone blade 52 is formed in an annular shape by bonding abrasive grains made of diamond or the like with a binder, and is mounted on the grindstone blade mounting surface 512 a of the blade mounting portion 512 constituting the base 51. The grindstone blade 52 may be a resinoid blade obtained by kneading abrasive grains into a resin bond material and molding and firing them in an annular shape, or a metal blade obtained by kneading abrasive grains into metal bond materials and molding them into an annular shape and firing them. An electroformed blade or the like in which abrasive grains are bonded to the grindstone blade mounting surface 512a of the blade mounting portion 512 by metal plating such as nickel is used.

  The cutting blade 5 configured as described above is mounted on a blade mount 6 attached to a rotary spindle 42 that is rotatably supported by a spindle housing 41 of a cutting apparatus as shown in FIGS. The cutting blade 5 is clamped and fixed by a blade mount 6 and a clamping nut 7.

  The blade mount 6 attached to the rotary spindle 42 is made of stainless steel in the illustrated embodiment. As shown in FIGS. 2 and 3, an annular flange portion 61 and a center portion of the flange portion 61 are provided. It consists of a cylindrical mounting portion 62 that protrudes laterally. On the side surface of the flange portion 61 on the side of the mounting portion 62, an outer peripheral portion (an outer peripheral portion continuous with the blade mounting portion 512) on the rear surface 51 a (the right side surface in FIG. 3) of the annular base 51 constituting the cutting blade 5. A clamping surface 611 is provided to abut against the. In the mounting portion 62, a support portion 621 that supports the annular base 51 constituting the cutting blade 5 is formed with a diameter corresponding to the fitting hole 511 formed in the annular base 51. A male screw 622 is formed on the outer peripheral surface. The blade mount 6 configured in this manner has a tapered mounting hole 631 formed at the center for mounting on the tapered portion 421 of the rotary spindle 42 and a female formed at the tip of the rotary spindle 42. An insertion hole 632 through which the tightening bolt 8 that is screwed into the screw 422 is inserted is formed. As shown in FIG. 3, the blade mount 6 configured as described above is a fastening bolt that is provided by fitting a tapered mounting hole 631 into the tapered portion 421 of the rotary spindle 42 and inserting the insertion hole 632. 8 is screwed into a female screw 422 formed at the tip of the rotary spindle 42 so that it can be attached to the rotary spindle 42.

  As described above, the base 51 constituting the cutting blade 5 is attached to the attachment portion 62 of the blade mount 6 attached to the rotary spindle 42. That is, the fitting hole 511 formed in the annular base 51 is fitted into the support portion 621 of the mounting portion 62 of the blade mount 6, and the annular base 51 is sandwiched and fixed by the sandwiching nut 7.

  The clamping nut 7 is made of stainless steel or titanium alloy, and has an annular clamping surface 71 on the outer peripheral side surface (the right side surface in FIGS. 3 and 4) as shown in FIGS. A lubricant 710 having a smaller friction coefficient than that of the clamping surface 611 of the flange portion 61 constituting the blade mount 6 is attached to the annular clamping surface 71. The lubricant 710 is preferably formed by coating the annular holding surface 71 with diamond-like carbon (DLC) or a fluororesin. Diamond-like carbon or fluororesin may coat the entire clamping nut 7. The clamping nut 7 configured in this way is cut as shown in FIG. 3 by screwing the female screw portion 72 with the male screw 622 formed at the tip of the mounting portion 62 constituting the blade mount 6. An annular base 51 constituting the blade 5 is sandwiched and fixed by the flange portion 61 of the blade mount 6 (cutting blade mounting step). In this cutting blade mounting step, a rotational force acts on the annular base 51 by the screwing of the clamping nut 7. However, since the lubricant 710 attached to the annular clamping surface 71 of the clamping nut 7 has a smaller coefficient of friction than the clamping surface 611 of the flange portion 61 constituting the blade mount 6, Relative rotation occurs between them, but relative rotation does not occur between the rear surface 51 a of the annular base 51 and the clamping surface 611 of the flange portion 61 constituting the blade mount 6. For this reason, since the rear surface 51a of the annular base 51 does not slide with respect to the clamping surface 611 of the flange portion 61 constituting the blade mount 6 of the flange portion, the fine powder of aluminum forming the annular base 51 Therefore, even if the cutting blade 5 is repeatedly attached and detached, the flange portion 61 constituting the blade mount 6 does not adhere to the clamping surface 611 of the flange portion 61 constituting the blade mount 6. The aluminum fine powder forming the annular base 51 is not deposited on the clamping surface 611. Therefore, even if the cutting blade 5 is newly attached to the blade mount 6, it does not tilt and can always be attached in an appropriate state. In the cutting blade mounting step, as described above, relative rotation occurs between the lubricant 710 mounted on the annular clamping surface 71 of the clamping nut 7 and the front surface 51b of the annular base 51. Aluminum fine powder forming the annular base 51 is generated from the front surface 51 b of the annular base 51, and the aluminum fine powder adheres to the clamping surface 611 of the flange portion 61 constituting the blade mount 6. There is no.

Next, another embodiment of the cutting blade mounting method will be described with reference to FIG.
In the embodiment shown in FIG. 5, a lubricant 610 having a friction coefficient smaller than that of the holding surface 611 of the flange portion 61 constituting the blade mount 6 is attached to the front surface 51 b of the annular base 51 constituting the cutting blade 5. Yes. The lubricant 610 is preferably formed by coating the annular holding surface 71 with diamond-like carbon or a fluororesin. By attaching the lubricant 610 to the front surface 51b of the annular base 51 constituting the cutting blade 5 in this way, the annular base 51 of the annular base 51 is screwed in when the clamping nut 7 is screwed. Relative rotation occurs between the lubricant 610 attached to the front surface 51 b and the clamping nut 7, but between the rear surface 51 a of the annular base 51 and the clamping surface 611 of the flange portion 61 constituting the blade mount 6. Does not cause relative rotation. For this reason, since the rear surface 51a of the annular base 51 does not slide with respect to the clamping surface 611 of the flange portion 61 constituting the blade mount 6 of the flange portion, the fine powder of aluminum forming the annular base 51 Therefore, even if the cutting blade 5 is repeatedly attached and detached, the flange portion 61 constituting the blade mount 6 does not adhere to the clamping surface 611 of the flange portion 61 constituting the blade mount 6. The aluminum fine powder forming the annular base 51 is not deposited on the clamping surface 611.

  As a mounting method of the cutting blade, alcohol having high volatility as a lubricant or water that does not adversely affect the workpiece even when scattered can be used. That is, alcohol or water is applied between the clamping surface of the clamping nut 7 and the front surface 51b of the annular base 51 constituting the cutting blade 5 when the clamping nut 7 is screwed in the cutting blade mounting step. Thus, relative rotation is generated between the front surface 51 b of the annular base 51 and the sandwiching nut 7, and the rear surface 51 a of the annular base 51 and the sandwiching surface 611 of the flange portion 61 constituting the blade mount 6. Relative rotation can be suppressed.

  The spindle unit 4 as the cutting means configured as described above is moved in the index feed direction indicated by the arrow Y in FIG. 1 by the index feed means (not shown), and at the arrow Z in FIG. 1 by the notch feed means (not shown). It can be moved in the infeed direction shown.

  1, the cutting apparatus in the illustrated embodiment images the surface of the workpiece held on the chuck table 3 and detects the area to be cut by the cutting blade 5. Alignment means 11 is provided. The alignment unit 11 includes an imaging unit including an optical unit such as a microscope or a CCD camera. In addition, the cutting apparatus includes a display unit 12 that displays an image captured by the alignment unit 11.

  In the cassette mounting area 13a of the apparatus housing 2, a cassette mounting table 13 for mounting a cassette for storing a workpiece is disposed. The cassette mounting table 13 is configured to be movable in the vertical direction by lifting means (not shown). On the cassette mounting table 13, a cassette 14 for storing the workpiece W is mounted. The workpiece W accommodated in the cassette 14 has a grid-like street formed on the surface of the wafer, and capacitors, LEDs, circuits, and other devices are formed in a plurality of rectangular areas partitioned by the grid-like street. Has been. The workpiece W formed in this way is accommodated in the cassette 14 with the back surface adhered to the front surface of the protective tape T mounted on the annular support frame F.

  Further, the cutting device in the illustrated embodiment is supported by a workpiece W (an annular frame F, which is accommodated in a cassette 14 placed on a cassette placing table 13 via a protective tape T). ) And the unloading / loading means 16 for loading the processed workpiece W returned to the temporary table 15 into the cassette 14, and the workpiece unloaded to the temporary table 15. The first conveying means 17 for conveying the workpiece W onto the chuck table 3, the cleaning means 18 for cleaning the workpiece W cut on the chuck table 3, and the workpiece W cut on the chuck table 3. A second conveying means 19 for conveying the workpiece W to the cleaning means 18 is provided.

The operation of the cutting apparatus configured as described above will be briefly described with reference to FIG.
The workpiece W accommodated in a predetermined position of the cassette 14 placed on the cassette placement table 13 is positioned at the carry-out position when the cassette placement table 13 is moved up and down by lifting means (not shown). Next, the unloading / loading means 16 moves forward and backward to unload the workpiece W positioned at the unloading position onto the temporary table 15. The workpiece W carried out to the temporary placement table 15 is transferred onto the chuck table 3 by the turning operation of the first transfer means 17. When the workpiece W is placed on the chuck table 3, suction means (not shown) is operated to suck and hold the workpiece W on the chuck table 3. Further, the support frame F that supports the workpiece W via the protective tape T is fixed by the clamp 33. The chuck table 3 holding the workpiece W in this way is moved to a position directly below the alignment means 11. When the chuck table 3 is positioned immediately below the alignment means 11, the street formed on the workpiece W is detected by the alignment means 11, and the spindle unit 4 is moved and adjusted in the direction of the arrow Y, which is the indexing direction. A precision alignment operation with the cutting blade 5 is performed.

  Thereafter, the cutting blade 5 is cut and fed by a predetermined amount in the direction indicated by the arrow Z and rotated in the predetermined direction, while the chuck table 3 holding the workpiece W is sucked and held in the direction indicated by the arrow X (cutting blade). The workpiece W held on the chuck table 3 is cut along a predetermined street by the cutting blade 5 by moving at a predetermined cutting feed speed in a direction orthogonal to the rotation axis 5 (cutting process). ). In this cutting process, the cutting blade 5 is mounted in an appropriate state without being inclined to the blade mount 6 as described above, so that the workpiece W can be cut accurately and efficiently along the street. Can do. When the workpiece W is cut along the predetermined street in this way, the chuck table 3 is indexed and fed in the direction indicated by the arrow Y by the street interval, and the above cutting operation is performed. When the cutting operation is performed along all the streets extending in the predetermined direction of the workpiece W, the chuck table 3 is rotated 90 degrees to extend in a direction perpendicular to the predetermined direction of the workpiece W. By performing a cutting operation along existing streets, all the streets formed in a lattice shape on the workpiece W are cut and divided into individual chips. The divided chips do not fall apart due to the action of the protective tape T, and the state of the wafer supported by the frame F is maintained.

  As described above, when the cutting operation is completed along the street of the workpiece W, the chuck table 3 holding the workpiece W is returned to the position where the workpiece W is first sucked and held. Then, the suction holding of the workpiece W is released. Next, the workpiece W is transferred to the cleaning unit 18 by the second transfer unit 19. The workpiece W conveyed to the cleaning means 18 is cleaned and dried here. The workpiece W thus cleaned and dried is carried out to the temporary table 15 by the first conveying means 17. Then, the workpiece W is stored in a predetermined position of the cassette 14 by the unloading / loading means 16.

2: Device housing 3: Chuck table 4: Spindle unit 41: Spindle housing 42: Rotating spindle 5: Cutting blade 51: Annular base 52: Grinding wheel blade 6: Blade mount 61: Flange portion 62: Mounting portion 7: Clamping Nut 8: Tightening bolt 11: Alignment means 12: Display means 13: Cassette placement table 14: Cassette 15: Temporary placement table 16: Unloading / loading means 17: First transport means 18: Cleaning means 19: Second transport means
W: Workpiece
F: Annular support frame
T: Protective tape

Claims (3)

A chuck table for holding a workpiece and a cutting means having a cutting blade for cutting the workpiece held on the chuck table, the cutting means being mounted on a rotary spindle and an end of the rotary spindle A blade mount having a flange portion provided with a clamping surface on a side surface and a mounting portion formed to project laterally from the center portion of the flange portion, and a fitting hole for fitting to the mounting portion of the blade mount. A cutting blade having an annular base and a grindstone blade mounted on the side surface of the outer periphery of the base; and a male screw formed on the mounting portion of the blade mount; A mounting method of a cutting blade in a cutting apparatus, comprising a clamping nut having a clamping surface for clamping the front surface of the base,
The clamping nut and the flange of the blade mount are screwed between the clamping surface of the clamping nut and the front surface of the base of the cutting blade via a lubricant made of alcohol or water. The base of the cutting blade is sandwiched between and fixed to the part,
A cutting blade mounting method characterized by the above. Lubricant consisting of the alcohol or water is applied to the clamping face of該挟lifting nut, a method of mounting a cutting blade according to claim 1, wherein. Lubricant consisting of the alcohol or water is applied to the base stand front of the cutting blade, the mounting method of the cutting blade of claim 1, wherein.

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