JP2001038641A - Blade holding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the setting accuracy by suppressing the positional deviation or inclination of a blade. SOLUTION: In this blade holding device, a dicing blade 10 provided with a thin blade grinding wheel 3 on an aluminum base 11 is pressed against a reference surface 4b of a mount 4 by a press nut 12, and fixed thereto. A lubricating layer 17 which is formed of a Teflon (R) resin film, softer than a metal, and 0.2 μm or under in coefficient of friction is provided on a contact surface 12a with the base 11 of the press nut 12. A screw shaft 4a to be screwed in the press nut 12 through the base 11, and the reference surface 4b therearound are provided on the mount 4. The surface roughness R2 of a rough surface area 16 of a pressing surface 11a of the base 11 abutting on the reference surface 4b is set to satisfy the relation 2 μm<=R2<=10 μm. The press nut 12 is screwed in the screw shaft 4a, and pressed against the reference surface 4b of the mount 4 to hold the blade without less rotating the base 11.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a blade holding device used for pelletizing a semiconductor silicon wafer.

[0002]

2. Description of the Related Art Conventionally, as shown in FIG. 3, for example, a dicing blade 1 has a substantially trapezoidal shape in a vertical cross section and a substantially annular plate-like base (hub) 2 in a plan view. An electroformed thin blade grindstone 3 is attached to the periphery, and this base metal 2 is sandwiched between a mount 4 having a screw shaft 4a and a push nut 5, and the push nut 5 is screwed and fixed to the screw shaft 4a. Will be retained. The holding device 6 of the dicing blade 1 having such a configuration is connected to a driving source or the like and rotated at a high speed to manufacture a chip used for dicing a silicon wafer or the like. By the way, the pressing surface 2a of the base metal 2 is mirror-finished in order to mount the thin blade whetstone 3 such as a metal bond whetstone with high accuracy, and this pressing surface 2a is pressed against the reference surface 4b of the mount 4 and Positioning is performed. On the other hand, the surface of the base 2 facing the pressing surface 2 a is a contact surface 2 b, and the contact surface 5 a of the push nut 5 is pressed to clamp the dicing blade 1 with the mount 4 by the base 2. Then, the push nut 5 is screwed into the screw shaft 4 a inserted through the through hole 9 of the base 2, and is pressed against the contact surface 2 b of the base 2 so as to be firmly pressed against the contact surface 2 b of the base 2. The surface roughness of at least one of the contact surface 2b and the press contact surface 5a is set to be larger than the surface roughness of the pressing surface 2a of the base 2.

[0003]

However, the base 2
When the push nut 5 is firmly tightened to the screw shaft 4a in order to suppress the run-out, the base metal 2 is pressed through the contact surface 2b or the pressure contact surface 5a having a large surface roughness, which comes into contact with each other due to a large frictional resistance. It rotates with respect to the reference surface 4a of the mount 4. Then, since the base metal 2 is a material softer than the mount 4, a scratch k 1 may be generated on the mirror-finished pressing surface 2 a of the base metal 2 made of, for example, aluminum. It may adhere to the reference surface 4b. Since the dicing blade 1 is entirely formed in a thin plate shape, when the dicing blade 1 is fixed to the holding device 6 or exchanged and fixed, the pressing surface 2a of the base metal 2 is used.
When the dicing blade 1 is mounted and held, the dicing blade 1 tilts or shifts due to a small angle due to the protrusion m generated by the scratch k1 of the surface and the debris n adhered to the reference surface 4b of the mount 4, thereby causing the dicing. There is a disadvantage that the setting accuracy of the dicing blade 1 to the device 6 is reduced. In such a case, there is a problem that the pelletizing accuracy of the semiconductor silicon wafer is adversely affected and the dimensional accuracy of the chip is reduced.

SUMMARY OF THE INVENTION [0004] In view of the above problems, an object of the present invention is to provide a blade holding device capable of mounting a blade with high accuracy.

[0005]

SUMMARY OF THE INVENTION A blade holding device according to the present invention is a blade device in which a blade provided with a blade portion on a base metal is pressed against and fixed to a reference surface of a mount. The gold pressing surface is characterized by having a rough surface having fine irregularities having a large surface roughness. When the blade is pressed against the reference surface and fixed to the holding device, the pressing surface of the base metal may be damaged when the blade slides slightly with respect to the reference surface, but the surface roughness of the pressing surface is large. Because of this, the protrusions caused by the scratches can be deformed by being pressed into the concave portions of the rough surface formed on the pressing surface by the stress at the time of rotation, and the protrusions protrude on the pressing surface and the debris generated by the scratches are removed from the reference surface. Can be prevented from being displaced or inclined at the time of mounting or exchanging the base metal with respect to the reference surface.

Further, the blade holding device according to the present invention is a blade device in which a blade provided with a blade portion on a base metal is pressed against a reference surface of a mount and held between the mount and a fixing member. It is characterized in that the frictional resistance between the reference surface and the base metal is larger than the frictional resistance between the members. When the blade is fixed by pinching the blade against the reference surface of the mount by rotation by the fixing member, the base does not rotate in conjunction with the operation of the fixing member, and between the base and the reference surface Since the frictional resistance is large, the relative rotation of the base metal with respect to the reference surface is suppressed, so that it is possible to prevent the pressing surface of the base metal contacting the reference surface from being damaged.

Further, the blade holding device according to the present invention is a blade holding device in which a blade provided with a blade portion on a base metal is pressed against a reference surface of a mount and held between the mount and a fixing member. It is characterized in that the pressing surface of the base metal contacting the reference surface has a larger surface roughness than the contact surface of the member. Due to the difference in the surface roughness of both sides of the blade base, the base does not interlock even if the fixing member is operated by rotation, etc., and the base relative to the reference surface between the base and the reference surface. Rotation is suppressed, and it is possible to prevent scratches and the like from occurring on the pressing surface of the base metal in contact with the reference surface.

A lubricating layer softer than metal may be provided on at least one of the contact surfaces between the fixing member and the base.
By pressing the fixing member, the lubricating layer pressed against the base metal is compressed and deformed, and then the protrusion of the scratch generated on the pressing surface of the base metal pressed against the reference surface is crushed and deformed on the reference surface and becomes large. It is housed in a recess having a surface roughness. The surface roughness R4 or R5 of at least one of the contact surfaces between the base metal and the fixing member may be set to 1.5 μm or less. Further, the surface roughness R2 of the pressing surface of the base metal may be set to 2 μm or more and 10 μm or less. At that time, the surface roughness R3 of the reference surface of the mount may be set to 1 μm or less.

The pressing surface of the base metal has a small surface roughness R1 in a region where a blade portion such as a thin blade grindstone is to be mounted, and has a small mirror surface to increase the mounting accuracy, and the surface roughness of the rough surface region where the reference surface contacts. R2 may be increased to suppress the occurrence of scratches, and the protrusions caused by the scratches may be accommodated in recesses having a large surface roughness. The base may be made of a material softer than the mount. The blade may be a dicing blade.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings, and the same or similar parts and members as those of the above-described prior art will be described using the same reference numerals. FIG.
FIG. 2 is a sectional view of the dicing blade holding device according to the embodiment, and FIG. 2 is a partially enlarged view showing a mount reference surface of the holding device shown in FIG. In FIG. 1, a dicing blade 10 is provided with a thin blade grindstone 3 as a blade at an outer peripheral edge of a pressing surface 11a forming one end surface of a base metal (hub) 11 made of, for example, aluminum or an aluminum alloy. The thin blade 3 has an outer peripheral edge projecting radially outward from the pressing surface 11a. The base metal 11 has, for example, a substantially trapezoidal shape in a vertical cross section, and a through hole 9 is formed in the center thereof. The mount 4 is made of, for example, a material having a hardness higher than that of the base metal 11, for example, titanium, and has a substantially U-shape in vertical cross section. A screw shaft 4a is formed in the center, and the tip end surface of the protruding portion surrounding the periphery is a reference surface. 4b. The push nut 12, which is a fixing member, is made of a material having a hardness higher than that of the base metal 11, for example, titanium, and has a female screw portion 14 formed in a central hole.

The screw shaft 4a is inserted into the through hole 9 of the base metal 11.
And a mount 11 and a push nut 12
And press the female screw portion 14 of the push nut 12 to the screw shaft 4a.
The holding device 13 is configured by being screwed into and fixedly held. Holding device 13 for dicing blade 10
This is used for slicing and dicing by connecting it to a drive source and rotating it at high speed. The pressing surface 11a pressed against the mount 4 of the base metal 11 has, for example, an annular outer peripheral region 15 on which the thin blade grindstone 3 is mounted, having a surface roughness R1 = 0.3 to 1.5.
The mirror finish is in the range of μm, so that the thin blade whetstone 3 can be mounted with high precision. The reference surface 4b of the mount 4 is pressed against a substantially circular rough surface region 16 inside the outer peripheral region 15 of the pressing surface 11a, and the rough surface region 16 has a surface roughness smaller than that of the outer peripheral region 15. The surface roughness R2 is set so as to be in a range of 2 μm ≦ R2 ≦ 10 μm, for example, R2 = 5 μm, while the reference surface 4b
Is set to R3 ≦ 1 μm.

The contact surface 1 which is the other surface of the base metal 11
1b is mirror-finished and its surface roughness R4 is 0.3
μm ≦ R4 ≦ 1.5 μm. Further, a lubricating layer 17 which is softer than metal and has a thickness of, for example, about 0.1 μm is formed on the press contact surface 12a of the push nut 12 pressed against the contact surface 11b.
Is installed. The lubricating layer 17 is made of a resin layer, for example, a film or sheet of Teflon resin, and has a friction coefficient f of f ≦ 0.2 μm. Therefore, the contact surface 11b of the base 11 and the push nut 12 are smaller than the contact friction resistance between the reference surface 4b of the mount 4 and the pressing surface 11a of the base 11.
The contact friction resistance with the lubrication layer 17 is set smaller.

The blade holding device 13 according to the present embodiment
Is provided with the above-described configuration, so that the screw shaft 4a of the mount 4 is inserted into the through hole 9 of the base metal 11 when the dicing blade 10 is mounted and fixed to the holding device 13, so that the base surface 11b The pressing surface 11a is pressed, and the female screw portion 14 of the pressing nut 12 is screwed to the screw shaft 4a, and the pressing nut 12 is tightened. At this time, the lubricating layer 17 of the push nut 12 is brought into contact with the contact surface 11b of the base metal 11, and when the push nut 12 is further tightened, the contact surface 11b of the base metal 11 and the lubricating layer 17 of the push nut 12 are formed. Is smaller than the contact friction resistance between the reference surface 4b of the mount 4 and the pressing surface 11a of the base 11, so that the push nut 12 hardly rotates the base 11 and the contact surface 11b. The base 11 is pressed against the reference surface 4b of the mount 4 by sliding upward.

On the other hand, the pressing surface 11a of the base metal 11 has a surface roughness R.
2, the rotation of the push nut 12 is suppressed irrespective of the rotation of the push nut 12 due to the large size of the push nut 12. At this time, even if the base metal 11 is slightly rotated with respect to the reference surface 4b and a flaw k1 is generated on the pressing surface 11a, the base metal 11 is made of aluminum or an aluminum alloy and is softer than the mount 4. As shown in FIG. 2, the protrusion m of the wound k1 is raised by the rotation pressure of the base metal 11, and the concave portion 18 of the uneven portion 18 along the surface roughness R2 of the rough surface region 16 having a large surface roughness.
a, which can be plastically deformed and absorbed by being pushed into the inner surface a, and the debris n such as aluminum caused by the scratch k1 can be prevented from adhering to the reference surface 4b. Shake such as inclination and displacement can be prevented. Therefore, even if the dicing blade 10 is replaced and another is mounted on the holding device 13, no dust such as aluminum of the metal base 11 adheres to the reference surface 4b of the mount 4, so that the setting accuracy is good and the dicing blade 10 Falling and displacement can be prevented. In addition, the base metal 11 should be
Pressing surface 1 of base 11 even if some scratches are made by rotation of
It can be accommodated in the concave portion 18a of the uneven portion 18 in the rough surface region 16 of 1a, and does not adversely affect the setting accuracy.

As described above, according to this embodiment, the contact friction resistance between the base 11 and the push nut 12 is reduced, and the contact friction resistance between the base 11 and the reference surface 4b of the mount 4 is increased. , The dicing blade 10 in the holding device 13
The dicing blade 10 is less likely to rotate when the is mounted, so that scratches are less likely to occur between the reference surface 4b and the pressing surface 11a. Further, even if the protrusion m due to the scratch k1 occurs on the pressing surface 11a, the protrusion m can be accommodated in the concave portion 18a of the uneven portion 18 due to the large surface roughness R2 of the rough surface region 16 and absorbed when the dicing blade 10 is mounted. The displacement and inclination at the time of replacement can be prevented, and the setting accuracy can be increased.

In the above embodiment, the push nut 1
2, the lubricating layer 17 made of Teflon resin or the like was mounted on the pressing surface 12a. However, without being limited to this, the surface roughness R5 of the pressing surface 12a was set to, for example, 0.3 μm ≦ R
The mirror finish may be set to about 5 ≦ 5 μm. Accordingly, if the contact friction resistance between the push nut 12 and the base metal 11 is set smaller than the contact friction resistance between the mount 4 and the base metal 11, the same operation and effect can be obtained. Further, the large surface roughness R2 of the pressing surface 11a of the base metal 11 does not need to be set in the entire rough surface region 16, but may be at least only the region in contact with the reference surface 4b of the mount 4. still,
In the above description, the dicing blade 10 has been described, but the present invention is not limited to this, and can be applied to a slicing blade and the like.

[0017]

As described above, in the blade holding device according to the present invention, the pressing surface of the base metal contacting the reference surface is made to be a rough surface having fine irregularities with a large surface roughness. The protrusions of the scratches generated on the pressing surface of the base metal during fixing can be pressed into the concave part of the rough surface and deformed and housed in the concave part, and when mounting or replacing the blade, the positional deviation or inclination of the base metal with respect to the reference surface can be checked. Can be set and blade setting can be performed with high precision.

In the blade holding device according to the present invention, the frictional resistance between the reference surface and the base metal is larger than the frictional resistance between the base metal and the fixing member. When pressed against the reference surface and fixed, the base metal does not rotate in conjunction with the operation of the fixing member, and since the frictional resistance is large between the base metal and the reference surface, the base metal is Rotation is suppressed, and it is possible to prevent scratches and the like from occurring on the pressing surface of the base metal in contact with the reference surface.

In the blade holding device according to the present invention, the pressing surface of the base metal that contacts the reference surface has a greater surface roughness than the contact surface of the base metal and the fixing member. Due to the difference in roughness, the base is not linked even when the fixing member is operated, and the relative rotation of the base with respect to the reference plane is suppressed between the base and the reference plane, and the base is pressed against the reference plane. It is possible to prevent the surface from being damaged or the like, and even if the surface is damaged, it is possible to deform and push and absorb the projection formed by the wound in the concave part having a large surface roughness, so that the setting accuracy is high.

Since a lubricating layer softer than metal is provided on at least one of the contact surfaces between the fixing member and the base metal, the lubricating layer is compressed and deformed by pressing the fixing member, and then pressed against the reference surface. As a result, the projection of the flaw generated on the pressing surface of the base metal is crushed and deformed on the reference surface and is accommodated in the concave portion of the rough surface.

[Brief description of the drawings]

FIG. 1 is a sectional view of a main part of a dicing blade holding device according to an embodiment of the present invention.

FIG. 2 is an enlarged sectional view of a main part showing a contact state between a reference surface of a mount and a pressing surface of a base metal in the sectional view shown in FIG.

FIG. 3 is an exploded vertical sectional view of a conventional dicing blade holding device.

4 is an enlarged sectional view of a main part showing a contact state between a reference surface of a mount and a pressing surface of a base metal in the sectional view shown in FIG. 3;

[Explanation of symbols]

 Reference Signs List 3 Thin blade whetstone (blade part) 4 Mount 4a Screw shaft 4b Reference surface 10 Dicing blade (blade) 11 Base metal 12 Push nut (fixing member) 16 Rough surface area k1 scratch m protrusion

Claims (6)

[Claims] 1. A blade holding device in which a blade provided with a blade portion on a base metal is pressed and fixed to a reference surface of a mount, wherein the pressing surface of the base metal that comes into contact with the reference surface has a fine surface roughness. A blade holding device characterized by having a rough surface with various irregularities. 2. A blade device in which a blade provided with a blade portion on a base metal is pressed against a reference surface of a mount and held between a mount and a fixing member, wherein a frictional resistance between the base metal and the fixing member is determined. A blade holding device, wherein the frictional resistance between the reference surface and the base metal is larger. 3. A blade holding device in which a blade provided with a blade portion on a base metal is pressed against a reference surface of a mount and is sandwiched between the mount and a fixing member. A blade holding device, wherein a pressing surface of a base metal contacting a surface has a larger surface roughness. 4. The blade holding device according to claim 2, wherein a lubricating layer softer than a metal is provided on at least one of the contact surfaces of the fixing member and the base metal. 5. The blade holding device according to claim 2, wherein at least one surface roughness of the contact surface between the base metal and the fixing member is set to 1.5 μm or less. 6. The blade holding device according to claim 1, wherein a surface roughness of the pressing surface of the base metal is set to 2 μm or more and 10 μm or less.