JP5657540B2 - プロセスキット・シールド及びその使用方法 - Google Patents
プロセスキット・シールド及びその使用方法 Download PDFInfo
- Publication number
- JP5657540B2 JP5657540B2 JP2011525121A JP2011525121A JP5657540B2 JP 5657540 B2 JP5657540 B2 JP 5657540B2 JP 2011525121 A JP2011525121 A JP 2011525121A JP 2011525121 A JP2011525121 A JP 2011525121A JP 5657540 B2 JP5657540 B2 JP 5657540B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- kit shield
- process kit
- volume
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 187
- 230000008569 process Effects 0.000 title claims description 164
- 239000000463 material Substances 0.000 claims description 99
- 238000004140 cleaning Methods 0.000 claims description 42
- 239000000126 substance Substances 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 28
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 11
- 239000000356 contaminant Substances 0.000 claims description 10
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000010936 titanium Substances 0.000 claims description 7
- 239000010935 stainless steel Substances 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 2
- 229910017604 nitric acid Inorganic materials 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 9
- 229910052786 argon Inorganic materials 0.000 description 5
- 239000006227 byproduct Substances 0.000 description 5
- 238000005240 physical vapour deposition Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000005422 blasting Methods 0.000 description 4
- 239000013077 target material Substances 0.000 description 4
- 238000011282 treatment Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000011065 in-situ storage Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- -1 Argon cations Chemical class 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000011066 ex-situ storage Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
- H01J37/32495—Means for protecting the vessel against plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4407—Cleaning of reactor or reactor parts by using wet or mechanical methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
- H01J37/32504—Means for preventing sputtering of the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
- H01J37/3408—Planar magnetron sputtering
Description
102:プロセスチャンバ
103:処理容積
104:ターゲット
105:非処理容積
106:基板
108:支持体ペデスタル
110:プロセスキット・シールド
112:電源
114:プロセスガス供給源
116:プロセスガス源
118:第2のガス供給源
120:第1の質量流量コントローラ
122:窒素ガス源
124:ポンプ
126:第2の質量流量コントローラ
128:コントローラ
134:マグネトロン
202:第1の層
204:第2の層
Claims (13)
- 第1の層と、前記第1の層に結合された第2の層とを含む壁を有する本体を含み、前記第1の層は、処理中に該第1の層上に配置された材料を除去するのに用いられる洗浄用化学物質に耐性がある第1の材料を含み、前記第2の層は、該第1の材料とは異なり、該第1の材料の熱膨張係数とは実質的に類似した熱膨張係数を有する第2の材料を含み、
前記第1の材料の熱膨張係数と前記第2の材料の熱膨張係数との間の差異は、10パーセント未満であるか又はこれと等しく、
前記第2の材料はアルミニウム及びシリコンを含み、
前記熱膨張係数は、前記第2の材料のシリコン含有量を制御することにより調整される、
ことを特徴とするプロセスキット・シールド。 - 前記第2の層は、前記第1の層上に噴霧形成されることを特徴とする、請求項1に記載のプロセスキット・シールド。
- 前記本体は環状であることを特徴とする、請求項1又は請求項2に記載のプロセスキット・シールド。
- 前記第1の材料は、ステンレス鋼、ニッケル、タンタル、又はチタンのうちの少なくとも1つを含むことを特徴とする、請求項1から請求項3までのいずれかに記載のプロセスキット・シールド。
- 前記第1の層は、0.16ミクロンより大きい直径を有する粒子を保持することができる、処理に面するテクスチャ加工面を含むことを特徴とする、請求項1から請求項4までのいずれかに記載のプロセスキット・シールド。
- 基板を処理するための装置であって、
処理容積と、非処理容積とを有するプロセスチャンバと、
前記チャンバ内に配置され、前記処理容積を前記非処理容積から分離する、請求項1から請求項5までのいずれかに記載のプロセスキット・シールドと、
を含み、前記第1の層は前記処理容積に面し、前記第2の層は前記非処理容積に面することを特徴とする装置。 - 前記プロセスキット・シールドは、前記プロセスチャンバにおいて前記処理容積の下に配置された基板支持部ペデスタルを囲むことを特徴とする、請求項6に記載の装置。
- 基板を処理する方法であって、
処理容積及び非処理容積と、チャンバ内に配置され、前記処理容積を前記非処理容積から分離する、請求項1から請求項5までのいずれかに記載のプロセスキット・シールドとを有するプロセスチャンバを準備するステップを含み、第1の層は該処理容積に面し、第2の層は該非処理容積に面しており、さらに、
前記プロセスチャンバ内に基板を配置するステップと、
前記処理容積内にプラズマを形成するステップと、
前記基板を前記プラズマにさらすステップと、
を含むことを特徴とする方法。 - 前記第1の材料の熱膨張係数と前記第2の材料の熱膨張係数との間の差異は、10パーセント未満であるか又はこれと等しいことを特徴とする、請求項8に記載の方法。
- 前記第1の層は、0.016ミクロンより大きい直径を有する粒子を保持することができるテクスチャ加工面をさらに含むことを特徴とする、請求項8に記載の方法。
- プロセスキット・シールドを洗浄する方法であって、
請求項1から請求項6までのいずれかに記載のプロセスキット・シールドを準備するステップを含み、前記第1の層の上には汚染物質が配置され、さらに、
前記第1の層を洗浄用化学物質にさらして前記汚染物質を除去するステップを含むことを特徴とする方法。 - 前記洗浄用化学物質は、フッ化水素酸(HF)、硝酸(HNO3)、過酸化水素(H2O2)、アンモニウム(NH4)、又は水酸化カリウム(KOH)のうちの少なくとも1つを含むことを特徴とする、請求項11に記載の方法。
- 前記第1の層だけが前記洗浄用化学物質にさらされることを特徴とする、請求項11に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/200,141 US20100055298A1 (en) | 2008-08-28 | 2008-08-28 | Process kit shields and methods of use thereof |
US12/200,141 | 2008-08-28 | ||
PCT/US2009/054741 WO2010025104A2 (en) | 2008-08-28 | 2009-08-24 | Process kit shields and methods of use thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012501387A JP2012501387A (ja) | 2012-01-19 |
JP5657540B2 true JP5657540B2 (ja) | 2015-01-21 |
Family
ID=41722242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011525121A Active JP5657540B2 (ja) | 2008-08-28 | 2009-08-24 | プロセスキット・シールド及びその使用方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20100055298A1 (ja) |
JP (1) | JP5657540B2 (ja) |
KR (1) | KR101642037B1 (ja) |
CN (1) | CN102138198B (ja) |
SG (1) | SG193823A1 (ja) |
TW (1) | TWI533384B (ja) |
WO (1) | WO2010025104A2 (ja) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011066185A1 (en) | 2009-11-25 | 2011-06-03 | Gen9, Inc. | Microfluidic devices and methods for gene synthesis |
US9217144B2 (en) | 2010-01-07 | 2015-12-22 | Gen9, Inc. | Assembly of high fidelity polynucleotides |
US9834840B2 (en) * | 2010-05-14 | 2017-12-05 | Applied Materials, Inc. | Process kit shield for improved particle reduction |
US8591709B1 (en) * | 2010-05-18 | 2013-11-26 | WD Media, LLC | Sputter deposition shield assembly to reduce cathode shorting |
WO2012090421A1 (ja) * | 2010-12-28 | 2012-07-05 | キヤノンアネルバ株式会社 | プラズマcvd装置 |
US20130136864A1 (en) * | 2011-11-28 | 2013-05-30 | United Technologies Corporation | Passive termperature control of hpc rotor coating |
JP5860063B2 (ja) * | 2011-12-22 | 2016-02-16 | キヤノンアネルバ株式会社 | 基板処理装置 |
US20150009556A1 (en) * | 2011-12-30 | 2015-01-08 | Hoya Corporation | Optical element, optical thin film forming apparatus, and optical thin film forming method |
KR101283571B1 (ko) * | 2012-03-12 | 2013-07-08 | 피에스케이 주식회사 | 공정 처리부 및 기판 처리 장치, 그리고 이를 이용한 기판 처리 방법 |
US20130277203A1 (en) * | 2012-04-24 | 2013-10-24 | Applied Materials, Inc. | Process kit shield and physical vapor deposition chamber having same |
US10777387B2 (en) * | 2012-09-28 | 2020-09-15 | Semes Co., Ltd. | Apparatus for treating substrate |
US9633824B2 (en) | 2013-03-05 | 2017-04-25 | Applied Materials, Inc. | Target for PVD sputtering system |
TWI656596B (zh) * | 2014-08-26 | 2019-04-11 | 荷蘭商Asml控股公司 | 靜電夾具及其製造方法 |
CN106158717B (zh) * | 2015-03-31 | 2019-08-23 | 北京北方华创微电子装备有限公司 | 机械卡盘及半导体加工设备 |
KR20160124992A (ko) * | 2015-04-20 | 2016-10-31 | 삼성전자주식회사 | 기판 제조 장치, 및 그의 세라믹 박막 코팅 방법 |
US9773665B1 (en) * | 2016-12-06 | 2017-09-26 | Applied Materials, Inc. | Particle reduction in a physical vapor deposition chamber |
US10998172B2 (en) * | 2017-09-22 | 2021-05-04 | Applied Materials, Inc. | Substrate processing chamber having improved process volume sealing |
US11145496B2 (en) * | 2018-05-29 | 2021-10-12 | Varian Semiconductor Equipment Associates, Inc. | System for using O-rings to apply holding forces |
CN109935513B (zh) * | 2019-03-29 | 2021-08-06 | 江苏鲁汶仪器有限公司 | 一种离子束刻蚀系统 |
JPWO2020208801A1 (ja) * | 2019-04-12 | 2021-05-06 | 株式会社日立ハイテク | プラズマ処理装置およびプラズマ処理装置の内部部材ならびに当該内部部材の製造方法 |
WO2020231665A1 (en) * | 2019-05-13 | 2020-11-19 | Applied Materials, Inc. | Titanium liner to reduce metal contamination |
US11289312B2 (en) * | 2019-06-12 | 2022-03-29 | Applied Materials, Inc. | Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability |
US20210319989A1 (en) * | 2020-04-13 | 2021-10-14 | Applied Materials, Inc. | Methods and apparatus for processing a substrate |
US11881385B2 (en) * | 2020-04-24 | 2024-01-23 | Applied Materials, Inc. | Methods and apparatus for reducing defects in preclean chambers |
US20230073011A1 (en) * | 2021-09-03 | 2023-03-09 | Applied Materials, Inc. | Shutter disk for physical vapor deposition (pvd) chamber |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05235149A (ja) * | 1992-02-21 | 1993-09-10 | Toshiba Corp | 防着板及び内部治具 |
JPH05235016A (ja) * | 1992-02-25 | 1993-09-10 | Rohm Co Ltd | ヘテロ接合半導体装置およびその製造方法 |
US5748434A (en) * | 1996-06-14 | 1998-05-05 | Applied Materials, Inc. | Shield for an electrostatic chuck |
JPH1088316A (ja) * | 1996-09-19 | 1998-04-07 | Toshiba Corp | スパッタリング装置用防着部材およびスパッタリング装置 |
US6699375B1 (en) * | 2000-06-29 | 2004-03-02 | Applied Materials, Inc. | Method of extending process kit consumable recycling life |
US6613442B2 (en) * | 2000-12-29 | 2003-09-02 | Lam Research Corporation | Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof |
US6656535B2 (en) * | 2001-12-21 | 2003-12-02 | Applied Materials, Inc | Method of fabricating a coated process chamber component |
US6730175B2 (en) * | 2002-01-22 | 2004-05-04 | Applied Materials, Inc. | Ceramic substrate support |
US7026009B2 (en) * | 2002-03-27 | 2006-04-11 | Applied Materials, Inc. | Evaluation of chamber components having textured coatings |
JP2004232016A (ja) | 2003-01-30 | 2004-08-19 | Toshiba Corp | 真空成膜装置用部品およびそれを用いた真空成膜装置 |
US20060105182A1 (en) * | 2004-11-16 | 2006-05-18 | Applied Materials, Inc. | Erosion resistant textured chamber surface |
KR100597627B1 (ko) * | 2003-12-19 | 2006-07-07 | 삼성전자주식회사 | 플라즈마 반응 챔버 |
US7579067B2 (en) * | 2004-11-24 | 2009-08-25 | Applied Materials, Inc. | Process chamber component with layered coating and method |
US20070169703A1 (en) * | 2006-01-23 | 2007-07-26 | Brent Elliot | Advanced ceramic heater for substrate processing |
-
2008
- 2008-08-28 US US12/200,141 patent/US20100055298A1/en not_active Abandoned
-
2009
- 2009-08-24 JP JP2011525121A patent/JP5657540B2/ja active Active
- 2009-08-24 KR KR1020117006810A patent/KR101642037B1/ko active IP Right Grant
- 2009-08-24 SG SG2013064514A patent/SG193823A1/en unknown
- 2009-08-24 CN CN200980133993.7A patent/CN102138198B/zh active Active
- 2009-08-24 WO PCT/US2009/054741 patent/WO2010025104A2/en active Application Filing
- 2009-08-28 TW TW098129088A patent/TWI533384B/zh active
Also Published As
Publication number | Publication date |
---|---|
CN102138198A (zh) | 2011-07-27 |
JP2012501387A (ja) | 2012-01-19 |
TW201027653A (en) | 2010-07-16 |
KR101642037B1 (ko) | 2016-07-22 |
WO2010025104A2 (en) | 2010-03-04 |
US20100055298A1 (en) | 2010-03-04 |
CN102138198B (zh) | 2014-02-26 |
TWI533384B (zh) | 2016-05-11 |
WO2010025104A3 (en) | 2010-05-06 |
SG193823A1 (en) | 2013-10-30 |
KR20110063775A (ko) | 2011-06-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5657540B2 (ja) | プロセスキット・シールド及びその使用方法 | |
JP6737899B2 (ja) | プラズマ処理チャンバでのインシトゥチャンバ洗浄効率向上のためのプラズマ処理プロセス | |
TWI328411B (en) | Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor | |
US7732056B2 (en) | Corrosion-resistant aluminum component having multi-layer coating | |
KR100299569B1 (ko) | 알루미늄부재의표면처리방법및플라즈마처리장치 | |
KR101105996B1 (ko) | 챔버 부품 세척 방법 | |
US20070004208A1 (en) | Plasma etching apparatus and plasma etching method | |
JP2016520707A (ja) | フッ素プラズマに対する保護に適した保護コーティングを有するチャンバ構成要素 | |
WO2004048636A2 (en) | Method of cleaning a coated process chamber component | |
WO2005021173A1 (en) | Method of cleaning substrate processing chamber components having textured surfaces | |
TW200903600A (en) | Substrate cleaning chamber and cleaning and conditioning methods | |
JP2007227443A (ja) | プラズマエッチング装置及びプラズマ処理室内壁の形成方法 | |
JP2016103638A (ja) | プラズマエッチング装置 | |
US20230116437A1 (en) | Semiconductor chamber coatings and processes | |
TW202118357A (zh) | 薄膜沉積腔、多功能遮蔽盤以及多功能遮蔽盤的使用方法 | |
IL176591A (en) | Method of imitation of a conductive material exposed to a passive feature | |
US11898236B2 (en) | Methods and apparatus for processing a substrate | |
TW202338153A (zh) | 經由臭氧處理用於處理腔室部件的先進阻障氧化鎳(BNiO)塗佈發展 | |
JP2008078592A (ja) | 半導体ウェハー加熱用ステージヒーターの耐食処理 | |
WO2023059502A1 (en) | Advanced barrier nickel oxide (bnio) coating development for the process chamber components | |
JP2011137215A (ja) | 平行平板型プラズマcvd装置 | |
JP2002184703A (ja) | 半導体製造プロセス装置用シリコン部材およびその製造方法 | |
JP2007119924A (ja) | プラズマ処理容器内用高純度溶射皮膜被覆部材およびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120815 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130930 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131002 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20131227 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20140110 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140203 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140501 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140624 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20141027 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20141126 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5657540 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |