JP5651985B2 - 紫外線照射装置 - Google Patents

紫外線照射装置 Download PDF

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Publication number
JP5651985B2
JP5651985B2 JP2010085005A JP2010085005A JP5651985B2 JP 5651985 B2 JP5651985 B2 JP 5651985B2 JP 2010085005 A JP2010085005 A JP 2010085005A JP 2010085005 A JP2010085005 A JP 2010085005A JP 5651985 B2 JP5651985 B2 JP 5651985B2
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Japan
Prior art keywords
light source
light
space
liquid crystal
ultraviolet irradiation
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Expired - Fee Related
Application number
JP2010085005A
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English (en)
Japanese (ja)
Other versions
JP2011215463A (ja
Inventor
法隆 竹添
法隆 竹添
佐藤　伸吾
伸吾 佐藤
真一 遠藤
真一 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP2010085005A priority Critical patent/JP5651985B2/ja
Priority to TW100105643A priority patent/TWI504970B/zh
Priority to CN201110073302.8A priority patent/CN102213867B/zh
Priority to KR1020110028192A priority patent/KR101454951B1/ko
Publication of JP2011215463A publication Critical patent/JP2011215463A/ja
Application granted granted Critical
Publication of JP5651985B2 publication Critical patent/JP5651985B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76853—Barrier, adhesion or liner layers characterized by particular after-treatment steps
    • H01L21/76861—Post-treatment or after-treatment not introducing additional chemical elements into the layer
    • H01L21/76862—Bombardment with particles, e.g. treatment in noble gas plasmas; UV irradiation

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Liquid Crystal (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Plasma & Fusion (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mathematical Physics (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP2010085005A 2010-04-01 2010-04-01 紫外線照射装置 Expired - Fee Related JP5651985B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010085005A JP5651985B2 (ja) 2010-04-01 2010-04-01 紫外線照射装置
TW100105643A TWI504970B (zh) 2010-04-01 2011-02-21 Ultraviolet radiation device
CN201110073302.8A CN102213867B (zh) 2010-04-01 2011-03-25 紫外线照射装置
KR1020110028192A KR101454951B1 (ko) 2010-04-01 2011-03-29 자외선 조사 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010085005A JP5651985B2 (ja) 2010-04-01 2010-04-01 紫外線照射装置

Publications (2)

Publication Number Publication Date
JP2011215463A JP2011215463A (ja) 2011-10-27
JP5651985B2 true JP5651985B2 (ja) 2015-01-14

Family

ID=44745238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010085005A Expired - Fee Related JP5651985B2 (ja) 2010-04-01 2010-04-01 紫外線照射装置

Country Status (4)

Country Link
JP (1) JP5651985B2 (ko)
KR (1) KR101454951B1 (ko)
CN (1) CN102213867B (ko)
TW (1) TWI504970B (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013154263A (ja) * 2012-01-26 2013-08-15 Gs Yuasa Corp 紫外線照射装置
JP5630457B2 (ja) * 2012-04-19 2014-11-26 ウシオ電機株式会社 太陽電池試験用光照射装置
JP6171632B2 (ja) * 2013-07-01 2017-08-02 東芝ライテック株式会社 液晶パネルの製造装置及び液晶パネルの製造方法
JP6164072B2 (ja) 2013-12-06 2017-07-19 東芝ライテック株式会社 液晶パネルの製造装置及び液晶パネルの製造方法
JP6164142B2 (ja) 2014-03-31 2017-07-19 東芝ライテック株式会社 液晶パネルの製造装置及び液晶パネルの製造方法
JP2016007832A (ja) * 2014-06-26 2016-01-18 株式会社東通研 紫外線硬化樹脂の硬化装置
JP6844292B2 (ja) * 2017-02-09 2021-03-17 ウシオ電機株式会社 光照射器および光照射装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5097136A (en) 1990-05-29 1992-03-17 Ultra-Lum, Inc. Apparatus for curing photosensitive coatings
JPH06267512A (ja) * 1993-03-10 1994-09-22 Iwasaki Electric Co Ltd 高出力形紫外線照射用光源
JP3975506B2 (ja) * 1997-04-22 2007-09-12 ソニー株式会社 液晶表示装置及び液晶表示装置のランプ部の冷却方法
JP4197404B2 (ja) * 2001-10-02 2008-12-17 シャープ株式会社 液晶表示装置およびその製造方法
JP4063042B2 (ja) * 2002-10-23 2008-03-19 ウシオ電機株式会社 光配向用偏光光照射装置
KR100916963B1 (ko) * 2005-12-22 2009-09-14 주식회사 에이디피엔지니어링 합착기판 자외선 경화장치
JP5181138B2 (ja) * 2006-11-02 2013-04-10 友達光電股▲ふん▼有限公司 液晶パネル製造装置及び液晶パネルの製造方法
JP5195051B2 (ja) * 2008-06-09 2013-05-08 ウシオ電機株式会社 紫外線照射装置

Also Published As

Publication number Publication date
KR20110110717A (ko) 2011-10-07
KR101454951B1 (ko) 2014-10-27
CN102213867B (zh) 2016-04-13
TWI504970B (zh) 2015-10-21
JP2011215463A (ja) 2011-10-27
CN102213867A (zh) 2011-10-12
TW201213930A (en) 2012-04-01

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