JP5641998B2 - 半導体装置の寿命推定方法 - Google Patents

半導体装置の寿命推定方法 Download PDF

Info

Publication number
JP5641998B2
JP5641998B2 JP2011067260A JP2011067260A JP5641998B2 JP 5641998 B2 JP5641998 B2 JP 5641998B2 JP 2011067260 A JP2011067260 A JP 2011067260A JP 2011067260 A JP2011067260 A JP 2011067260A JP 5641998 B2 JP5641998 B2 JP 5641998B2
Authority
JP
Japan
Prior art keywords
temperature
semiconductor device
lifetime
life
difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011067260A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012202801A (ja
JP2012202801A5 (enExample
Inventor
真一 井浦
真一 井浦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2011067260A priority Critical patent/JP5641998B2/ja
Priority to DE102011088728.8A priority patent/DE102011088728B4/de
Publication of JP2012202801A publication Critical patent/JP2012202801A/ja
Publication of JP2012202801A5 publication Critical patent/JP2012202801A5/ja
Application granted granted Critical
Publication of JP5641998B2 publication Critical patent/JP5641998B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/23Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2642Testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP2011067260A 2011-03-25 2011-03-25 半導体装置の寿命推定方法 Active JP5641998B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011067260A JP5641998B2 (ja) 2011-03-25 2011-03-25 半導体装置の寿命推定方法
DE102011088728.8A DE102011088728B4 (de) 2011-03-25 2011-12-15 Lebensdauerschätzverfahren für eine Halbleitervorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011067260A JP5641998B2 (ja) 2011-03-25 2011-03-25 半導体装置の寿命推定方法

Publications (3)

Publication Number Publication Date
JP2012202801A JP2012202801A (ja) 2012-10-22
JP2012202801A5 JP2012202801A5 (enExample) 2013-07-04
JP5641998B2 true JP5641998B2 (ja) 2014-12-17

Family

ID=46831742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011067260A Active JP5641998B2 (ja) 2011-03-25 2011-03-25 半導体装置の寿命推定方法

Country Status (2)

Country Link
JP (1) JP5641998B2 (enExample)
DE (1) DE102011088728B4 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103884927B (zh) * 2012-12-21 2016-05-25 中国科学院金属研究所 一种力电热多场耦合下微电子产品可靠性测试方法
CN108445371B (zh) * 2018-01-18 2021-02-19 国网浙江省电力公司舟山供电公司 绝缘栅双极型晶体管使用寿命预分拣方法
AT522383A1 (de) * 2019-03-12 2020-10-15 Schneider Electric Power Drives Gmbh Verfahren zur bewertung der thermischen belastung eines umrichters
CN111060798B (zh) * 2019-12-18 2021-10-15 中国测试技术研究院流量研究所 一种mos管自动功率老化测试系统及测试方法
JP2022077373A (ja) * 2020-11-11 2022-05-23 富士電機株式会社 寿命診断装置、半導体装置、寿命診断方法、
CN118676460B (zh) * 2024-07-04 2025-02-11 深圳永泰数能科技有限公司 一种具有防爆裂和寿命预测的电池模组及控制方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0392471B1 (en) * 1989-04-10 1997-01-02 Hitachi, Ltd. Method for evaluating life of connection
JP4591246B2 (ja) 2005-07-14 2010-12-01 株式会社日立製作所 電力変換器

Also Published As

Publication number Publication date
DE102011088728B4 (de) 2017-02-09
DE102011088728A1 (de) 2012-09-27
JP2012202801A (ja) 2012-10-22

Similar Documents

Publication Publication Date Title
JP5641998B2 (ja) 半導体装置の寿命推定方法
JP5343901B2 (ja) パワーサイクル寿命予測方法、寿命予測装置及び該寿命予測装置を備えた半導体装置
Durand et al. Power cycling reliability of power module: A survey
JP6104407B2 (ja) 半導体装置
US10705133B2 (en) Method and device for estimating level of damage or lifetime expectation of power semiconductor module
JP3501644B2 (ja) 半導体パッケージの熱抵抗計算方法および記録媒体および熱抵抗計算装置
Arya et al. Accurate online junction temperature estimation of IGBT using inflection point based updated I–V characteristics
CN110298126B (zh) 一种基于失效物理的多元Copula功率器件可靠性评价方法
CN113646647B (zh) 用于评估转换器的热负载的方法
CA3241205A1 (en) Method for state-of-health monitoring in electric vehicle drive systems and components
Otto et al. Investigating the mold compounds influence on power cycling lifetime of discrete power devices
Ghimire et al. Online chip temperature monitoring using υ ce-load current and IR thermography
US9589922B2 (en) Electronic module and method of manufacturing the same
Kundu et al. Power module thermal characterization considering aging towards online state-of-health monitoring
JP5464090B2 (ja) 半導体装置のシミュレーション方法及び装置
KR102469942B1 (ko) 인버터 스위칭 소자의 온도추정을 위한 파라미터 결정장치
CN112327125A (zh) 功率半导体器件结壳热阻状态监测方法、设备、存储介质
Kempiak et al. Accelerated qualification of highly reliable chip interconnect technology by power cycling under thermal overload
Banu et al. SiC Schottky diode surge current analysis and application design using behavioral SPICE models
Grams et al. A geometry-independent lifetime modelling method for aluminum heavy wire bond joints
JP6550761B2 (ja) 半導体集積回路の寿命予測装置
Kato et al. Evaluation of thermal resistance degradation of SiC power module corresponding to thermal cycle test
Vulli et al. A model-based approach for prognostics of power semiconductor modules
Kovacevic-Badstuebner et al. Modeling approach for design selection and reliability analysis of SiC power modules
Souza et al. Thermoelectric characterization of igbt power modules: An approach by static and dynamic methods

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130517

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130517

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140227

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140304

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140331

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140930

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20141028

R150 Certificate of patent or registration of utility model

Ref document number: 5641998

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250