JP5639264B2 - 石英ガラスルツボを製造する方法 - Google Patents

石英ガラスルツボを製造する方法 Download PDF

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Publication number
JP5639264B2
JP5639264B2 JP2013511667A JP2013511667A JP5639264B2 JP 5639264 B2 JP5639264 B2 JP 5639264B2 JP 2013511667 A JP2013511667 A JP 2013511667A JP 2013511667 A JP2013511667 A JP 2013511667A JP 5639264 B2 JP5639264 B2 JP 5639264B2
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Japan
Prior art keywords
region
particle layer
layer
gas
quartz glass
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Active
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JP2013511667A
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English (en)
Japanese (ja)
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JP2013527113A (ja
Inventor
レーマン，ヴァルター
カイザー，トーマス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzglas GmbH and Co KG
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Heraeus Quarzglas GmbH and Co KG
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Publication of JP2013527113A publication Critical patent/JP2013527113A/ja
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/002—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)
JP2013511667A 2010-05-27 2011-05-25 石英ガラスルツボを製造する方法 Active JP5639264B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102010021694A DE102010021694A1 (de) 2010-05-27 2010-05-27 Quarzglastiegel und Verfahren für dessen Herstellung
DE102010021694.1 2010-05-27
PCT/EP2011/058530 WO2011147860A1 (de) 2010-05-27 2011-05-25 Quarzglastiegel und verfahren für dessen herstellung

Publications (2)

Publication Number Publication Date
JP2013527113A JP2013527113A (ja) 2013-06-27
JP5639264B2 true JP5639264B2 (ja) 2014-12-10

Family

ID=44246948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013511667A Active JP5639264B2 (ja) 2010-05-27 2011-05-25 石英ガラスルツボを製造する方法

Country Status (4)

Country Link
JP (1) JP5639264B2 (de)
CN (1) CN102906037B (de)
DE (2) DE102010021694A1 (de)
WO (1) WO2011147860A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5763027B2 (ja) * 2012-09-25 2015-08-12 コバレントマテリアル株式会社 シリコン単結晶引上げ用シリカガラスルツボの製造方法およびその製造装置
DE102012109181B4 (de) * 2012-09-27 2018-06-28 Heraeus Quarzglas Gmbh & Co. Kg Ziehen eines Halbleiter-Einkristalls nach dem Czochralski-Verfahren und dafür geeigneter Quarzglastiegel
CN103526280A (zh) * 2013-10-12 2014-01-22 南通路博石英材料有限公司 一种内表面具有凹槽拉晶用石英玻璃坩埚的制备方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4713104A (en) * 1986-03-31 1987-12-15 Gte Products Corporation Quartz glass crucibles
JPH0920586A (ja) * 1995-06-30 1997-01-21 Toshiba Ceramics Co Ltd シリコン単結晶引上げ用石英ガラスルツボの製造方法
DE19917288C2 (de) * 1999-04-16 2001-06-28 Heraeus Quarzglas Quarzglas-Tiegel
JP2002003228A (ja) * 2000-06-19 2002-01-09 Toshiba Ceramics Co Ltd 石英ガラスルツボ製造装置
JP4086283B2 (ja) * 2002-07-31 2008-05-14 信越石英株式会社 シリコン単結晶引上げ用石英ガラスルツボおよびその製造方法
JP4390461B2 (ja) 2003-02-21 2009-12-24 ジャパンスーパークォーツ株式会社 石英ガラスルツボ及びこれを用いたシリコン単結晶の引き上げ方法
KR100847500B1 (ko) * 2006-03-30 2008-07-22 코바렌트 마테리얼 가부시키가이샤 실리카 유리 도가니
JP5273512B2 (ja) * 2007-10-25 2013-08-28 株式会社Ｓｕｍｃｏ 石英ガラスルツボとその製造方法および用途
DE102008030310B3 (de) * 2008-06-30 2009-06-18 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Quarzglastiegels
JP4987029B2 (ja) * 2009-04-02 2012-07-25 ジャパンスーパークォーツ株式会社 シリコン単結晶引き上げ用石英ガラスルツボ

Also Published As

Publication number Publication date
DE112011101800A5 (de) 2013-05-08
WO2011147860A1 (de) 2011-12-01
DE112011101800B4 (de) 2016-01-21
DE102010021694A1 (de) 2011-12-01
CN102906037A (zh) 2013-01-30
JP2013527113A (ja) 2013-06-27
CN102906037B (zh) 2015-06-17

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