JP5629869B2 - ロープ状炭素構造物及びその製法 - Google Patents
ロープ状炭素構造物及びその製法 Download PDFInfo
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- JP5629869B2 JP5629869B2 JP2010079136A JP2010079136A JP5629869B2 JP 5629869 B2 JP5629869 B2 JP 5629869B2 JP 2010079136 A JP2010079136 A JP 2010079136A JP 2010079136 A JP2010079136 A JP 2010079136A JP 5629869 B2 JP5629869 B2 JP 5629869B2
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 493
- 238000004519 manufacturing process Methods 0.000 title claims description 30
- 239000002041 carbon nanotube Substances 0.000 claims description 362
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 361
- 239000003054 catalyst Substances 0.000 claims description 281
- 238000009826 distribution Methods 0.000 claims description 226
- 239000002245 particle Substances 0.000 claims description 133
- 239000000758 substrate Substances 0.000 claims description 77
- 239000012018 catalyst precursor Substances 0.000 claims description 71
- 230000015572 biosynthetic process Effects 0.000 claims description 36
- 238000003786 synthesis reaction Methods 0.000 claims description 32
- 150000002736 metal compounds Chemical class 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 19
- 239000002904 solvent Substances 0.000 claims description 17
- 229910052799 carbon Inorganic materials 0.000 claims description 16
- 238000000576 coating method Methods 0.000 claims description 15
- 238000001035 drying Methods 0.000 claims description 14
- 230000003197 catalytic effect Effects 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 239000011248 coating agent Substances 0.000 claims description 12
- 239000002994 raw material Substances 0.000 claims description 12
- 230000002194 synthesizing effect Effects 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 9
- 239000002071 nanotube Substances 0.000 claims description 7
- -1 oxoacid salt Chemical class 0.000 claims description 7
- 239000000523 sample Substances 0.000 claims description 5
- 150000003839 salts Chemical class 0.000 claims description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 claims description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 claims description 3
- 229910002651 NO3 Inorganic materials 0.000 claims description 3
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 2
- 239000000243 solution Substances 0.000 description 60
- 230000000052 comparative effect Effects 0.000 description 46
- MVFCKEFYUDZOCX-UHFFFAOYSA-N iron(2+);dinitrate Chemical compound [Fe+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MVFCKEFYUDZOCX-UHFFFAOYSA-N 0.000 description 33
- 238000000034 method Methods 0.000 description 30
- 238000001878 scanning electron micrograph Methods 0.000 description 26
- 239000007789 gas Substances 0.000 description 24
- 239000010408 film Substances 0.000 description 20
- 238000006243 chemical reaction Methods 0.000 description 14
- 238000010586 diagram Methods 0.000 description 12
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 12
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 11
- 238000003917 TEM image Methods 0.000 description 11
- 238000005229 chemical vapour deposition Methods 0.000 description 11
- 230000007423 decrease Effects 0.000 description 9
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 5
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 5
- 239000004744 fabric Substances 0.000 description 5
- 238000005240 physical vapour deposition Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 4
- 238000004220 aggregation Methods 0.000 description 4
- 230000002776 aggregation Effects 0.000 description 4
- 229910003481 amorphous carbon Inorganic materials 0.000 description 4
- 238000000089 atomic force micrograph Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000003575 carbonaceous material Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000005315 distribution function Methods 0.000 description 4
- 239000002048 multi walled nanotube Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005411 Van der Waals force Methods 0.000 description 3
- BTANRVKWQNVYAZ-UHFFFAOYSA-N butan-2-ol Chemical compound CCC(C)O BTANRVKWQNVYAZ-UHFFFAOYSA-N 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- QZRHHEURPZONJU-UHFFFAOYSA-N iron(2+) dinitrate nonahydrate Chemical compound O.O.O.O.O.O.O.O.O.[Fe+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O QZRHHEURPZONJU-UHFFFAOYSA-N 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 230000000717 retained effect Effects 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 150000002334 glycols Chemical class 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 239000012046 mixed solvent Substances 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000002798 polar solvent Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000002109 single walled nanotube Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000001628 carbon nanotube synthesis method Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 150000001860 citric acid derivatives Chemical class 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012024 dehydrating agents Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000635 electron micrograph Methods 0.000 description 1
- 238000001017 electron-beam sputter deposition Methods 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
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- 230000008570 general process Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
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- 239000012535 impurity Substances 0.000 description 1
- 150000004715 keto acids Chemical class 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 150000003891 oxalate salts Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
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- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000009958 sewing Methods 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
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- 238000001308 synthesis method Methods 0.000 description 1
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- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 238000007039 two-step reaction Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010079136A JP5629869B2 (ja) | 2010-03-30 | 2010-03-30 | ロープ状炭素構造物及びその製法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010079136A JP5629869B2 (ja) | 2010-03-30 | 2010-03-30 | ロープ状炭素構造物及びその製法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011207724A JP2011207724A (ja) | 2011-10-20 |
| JP2011207724A5 JP2011207724A5 (de) | 2013-03-28 |
| JP5629869B2 true JP5629869B2 (ja) | 2014-11-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010079136A Active JP5629869B2 (ja) | 2010-03-30 | 2010-03-30 | ロープ状炭素構造物及びその製法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5629869B2 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9512545B2 (en) | 2004-11-09 | 2016-12-06 | Board Of Regents, The University Of Texas System | Nanofiber ribbons and sheets and fabrication and application thereof |
| US9784249B2 (en) | 2012-08-01 | 2017-10-10 | The Board Of Regents, The University Of Texas System | Coiled and non-coiled twisted nanofiber yarn torsional and tensile actuators |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0757904A (ja) * | 1993-08-13 | 1995-03-03 | Kobe Steel Ltd | ダイヤモンド半導体装置 |
| JP5802992B2 (ja) * | 2011-09-28 | 2015-11-04 | 大陽日酸株式会社 | 湿式触媒を用いた配向ｃｎｔ製造方法 |
| JP5829544B2 (ja) * | 2012-02-13 | 2015-12-09 | ニッタ株式会社 | カーボンナノチューブ集合体およびその製造方法 |
| JP6173236B2 (ja) * | 2014-02-21 | 2017-08-02 | 伊佐男 安田 | 海流発電システム |
| JP6097783B2 (ja) * | 2014-04-14 | 2017-03-15 | ツィンファ ユニバーシティ | カーボンナノチューブアレイの転移方法及びカーボンナノチューブ構造体の製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4931168B2 (ja) * | 2005-01-06 | 2012-05-16 | 国立大学法人名古屋大学 | 高純度２層〜５層カーボンナノチューブの製造方法 |
| EP1797950A1 (de) * | 2005-12-14 | 2007-06-20 | Nanocyl S.A. | Katalysator zur Herstellung von mehrwandigen Kohlenstoffnanoröhrchen |
| US8034738B2 (en) * | 2007-03-14 | 2011-10-11 | Taiyo Nippon Sanso Corporation | Process for producing catalyst body for production of brush-shaped carbon nanostructure |
| KR101171499B1 (ko) * | 2007-09-21 | 2012-08-06 | 다이요 닛산 가부시키가이샤 | 카본나노구조물 성장용 촉매층 형성방법, 촉매층 형성용 액 및 카본나노구조물 제조방법 |
-
2010
- 2010-03-30 JP JP2010079136A patent/JP5629869B2/ja active Active
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9512545B2 (en) | 2004-11-09 | 2016-12-06 | Board Of Regents, The University Of Texas System | Nanofiber ribbons and sheets and fabrication and application thereof |
| US9605363B2 (en) | 2004-11-09 | 2017-03-28 | The Board Of Regents, The University Of Texas System | Fabrication of nanofiber ribbons and sheets |
| US9845554B2 (en) | 2004-11-09 | 2017-12-19 | Board Of Regents, The University Of Texas System | Fabrication and application of nanofiber ribbons and sheets and twisted and non-twisted nanofiber yarns |
| US9944529B2 (en) | 2004-11-09 | 2018-04-17 | Board Of Regents, The University Of Texas System | Fabrication and application of nanofiber ribbons and sheets and twisted and non-twisted nanofiber yarns |
| US10196271B2 (en) | 2004-11-09 | 2019-02-05 | The Board Of Regents, The University Of Texas System | Fabrication and application of nanofiber ribbons and sheets and twisted and non-twisted nanofiber yarns |
| US9784249B2 (en) | 2012-08-01 | 2017-10-10 | The Board Of Regents, The University Of Texas System | Coiled and non-coiled twisted nanofiber yarn torsional and tensile actuators |
| US9903350B2 (en) | 2012-08-01 | 2018-02-27 | The Board Of Regents, The University Of Texas System | Coiled and non-coiled twisted polymer fiber torsional and tensile actuators |
| US10480491B2 (en) | 2012-08-01 | 2019-11-19 | The Board Of Regents, The University Of Texas System | Coiled, twisted nanofiber yarn and polymer fiber torsional actuators |
| US11143169B2 (en) | 2012-08-01 | 2021-10-12 | Board Of Regents, The University Of Texas System | Coiled and twisted nanofiber yarn and polymer fiber actuators |
| US11149720B2 (en) | 2012-08-01 | 2021-10-19 | Board Of Regents, The University Of Texas System | Thermally-powered coiled polymer fiber tensile actuator system and method |
| US11629705B2 (en) | 2012-08-01 | 2023-04-18 | The Board Of Regents, The University Of Texas System | Polymer fiber actuators |
| US12060868B2 (en) | 2012-08-01 | 2024-08-13 | The Board Of Regents, The University Of Texas System | Thermally-powered polymer fiber tensile actuators and articles including same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011207724A (ja) | 2011-10-20 |
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