JP5629818B2 - 光学モニタリングシステムを有する表面粗さ測定装置 - Google Patents

光学モニタリングシステムを有する表面粗さ測定装置 Download PDF

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Publication number
JP5629818B2
JP5629818B2 JP2013508436A JP2013508436A JP5629818B2 JP 5629818 B2 JP5629818 B2 JP 5629818B2 JP 2013508436 A JP2013508436 A JP 2013508436A JP 2013508436 A JP2013508436 A JP 2013508436A JP 5629818 B2 JP5629818 B2 JP 5629818B2
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stylus
optical
surface roughness
measuring device
return
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Japanese (ja)
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JP2013528794A5 (enExample
JP2013528794A (ja
Inventor
イェンセン，トーマス
ジールクス，クヌート
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Leica Geosystems AG
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Leica Geosystems AG
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
JP2013508436A 2010-05-05 2011-04-27 光学モニタリングシステムを有する表面粗さ測定装置 Expired - Fee Related JP5629818B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP10162017A EP2385339A1 (en) 2010-05-05 2010-05-05 Surface sensing device with optical monitoring system
EP10162017.7 2010-05-05
PCT/EP2011/056689 WO2011138206A1 (en) 2010-05-05 2011-04-27 Surface sensing device with optical monitoring system

Publications (3)

Publication Number Publication Date
JP2013528794A JP2013528794A (ja) 2013-07-11
JP2013528794A5 JP2013528794A5 (enExample) 2014-04-03
JP5629818B2 true JP5629818B2 (ja) 2014-11-26

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JP2013508436A Expired - Fee Related JP5629818B2 (ja) 2010-05-05 2011-04-27 光学モニタリングシステムを有する表面粗さ測定装置

Country Status (9)

Country Link
US (1) US9316473B2 (enExample)
EP (2) EP2385339A1 (enExample)
JP (1) JP5629818B2 (enExample)
KR (1) KR101495670B1 (enExample)
CN (1) CN102869949B (enExample)
AU (1) AU2011250101B2 (enExample)
BR (1) BR112012028084B1 (enExample)
CA (1) CA2798370C (enExample)
WO (1) WO2011138206A1 (enExample)

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US8786866B2 (en) * 2012-03-02 2014-07-22 Baker Hughes Incorporated Apparatus and method for determining inner profiles of hollow devices
US8910391B2 (en) * 2013-01-24 2014-12-16 Faro Technologies, Inc. Non-articulated portable CMM
US10156488B2 (en) * 2013-08-29 2018-12-18 Corning Incorporated Prism-coupling systems and methods for characterizing curved parts
DE102013015237A1 (de) * 2013-09-13 2015-03-19 Blum-Novotest Gmbh Rauheits-Messinstrument zum Einsatz in einer Werkzeugmaschine und Verfahren zur Rauheitsmessung in einer Werkzeugmaschine
JP6065875B2 (ja) * 2014-06-02 2017-01-25 横河電機株式会社 偏光検査装置
US9919958B2 (en) 2014-07-17 2018-03-20 Corning Incorporated Glass sheet and system and method for making glass sheet
WO2016038492A1 (en) * 2014-09-08 2016-03-17 Koninklijke Philips N.V. Detection of surface contact with optical shape sensing
US9803972B2 (en) 2015-12-17 2017-10-31 Mitutoyo Corporation Optical configuration for measurement device
US9791262B2 (en) * 2015-12-17 2017-10-17 Mitutoyo Corporation Measurement device with multiplexed position signals
CN108700705B (zh) * 2015-12-29 2021-01-08 生物辐射实验室股份有限公司 具有光采样的光学检测系统
FR3048077B1 (fr) * 2016-02-23 2020-05-22 Mesure-Systems3D Dispositif de controle tridimensionnel sans contact d'une piece creuse a surface interne de revolution, procede, produit programme d'ordinateur et medium de stockage correspondants
ITUB20161099A1 (it) * 2016-02-26 2017-08-26 Marposs Spa Dispositivo inseguitore per la misura del profilo di un pezzo meccanico
CN105783772B (zh) * 2016-03-07 2018-06-26 合肥工业大学 单传感器式三维微纳米接触触发测量探头
WO2017212929A1 (ja) * 2016-06-08 2017-12-14 ソニー株式会社 撮像制御装置および方法、並びに車両
US10101141B2 (en) 2016-12-07 2018-10-16 Mitutoyo Corporation Trigger counter for measurement device with count values stored in flash memory
US10006757B1 (en) * 2017-06-16 2018-06-26 Mitutoyo Corporation Optical configuration for measurement device using emitter material configuration with quadrant photodetectors
US10473451B2 (en) * 2017-08-07 2019-11-12 Apre Instruments, Inc. Measuring the position of objects in space
CN109637064B (zh) * 2019-01-29 2021-06-11 深圳市汉明电子有限公司 物体变形预警监测系统和方法
KR102143388B1 (ko) * 2019-05-29 2020-08-11 한국산업기술시험원 레일 하부에 지지대가 구성된 측정 장치 및 방법
KR102175321B1 (ko) * 2020-05-25 2020-11-06 주식회사 대연 측정기용 탐침
JP7530272B2 (ja) * 2020-11-06 2024-08-07 株式会社ミツトヨ 形状測定装置および異常検出方法
KR102446916B1 (ko) * 2022-06-03 2022-09-23 주식회사 보나 광융착 광파이버를 이용한 광 산란 기반의 광학식 전자펜
KR102486202B1 (ko) * 2022-09-15 2023-01-10 주식회사 보나 광 산란제 펜팁을 구비한 광학식 전자펜
JP2024140995A (ja) * 2023-03-28 2024-10-10 株式会社東京精密 プローブ及び形状測定装置

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Also Published As

Publication number Publication date
AU2011250101A1 (en) 2012-10-25
EP2567185A1 (en) 2013-03-13
WO2011138206A1 (en) 2011-11-10
KR20130016358A (ko) 2013-02-14
AU2011250101B2 (en) 2013-08-15
JP2013528794A (ja) 2013-07-11
BR112012028084A2 (pt) 2016-08-02
US9316473B2 (en) 2016-04-19
EP2385339A1 (en) 2011-11-09
KR101495670B1 (ko) 2015-02-25
CA2798370A1 (en) 2011-11-10
EP2567185B1 (en) 2021-06-09
CA2798370C (en) 2015-06-16
US20130050701A1 (en) 2013-02-28
CN102869949B (zh) 2017-02-15
CN102869949A (zh) 2013-01-09
BR112012028084B1 (pt) 2020-02-04

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