CN102869949B - 具有光学监测系统的表面感测装置 - Google Patents

具有光学监测系统的表面感测装置 Download PDF

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Publication number
CN102869949B
CN102869949B CN201180022447.3A CN201180022447A CN102869949B CN 102869949 B CN102869949 B CN 102869949B CN 201180022447 A CN201180022447 A CN 201180022447A CN 102869949 B CN102869949 B CN 102869949B
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China
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optical
stylus
light
sensing device
surface sensing
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Chinese (zh)
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CN102869949A (zh
Inventor
托马斯·延森
克努特·西尔克斯
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Leica Geosystems AG
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Leica Geosystems AG
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
CN201180022447.3A 2010-05-05 2011-04-27 具有光学监测系统的表面感测装置 Active CN102869949B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP10162017A EP2385339A1 (en) 2010-05-05 2010-05-05 Surface sensing device with optical monitoring system
EP10162017.7 2010-05-05
PCT/EP2011/056689 WO2011138206A1 (en) 2010-05-05 2011-04-27 Surface sensing device with optical monitoring system

Publications (2)

Publication Number Publication Date
CN102869949A CN102869949A (zh) 2013-01-09
CN102869949B true CN102869949B (zh) 2017-02-15

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CN201180022447.3A Active CN102869949B (zh) 2010-05-05 2011-04-27 具有光学监测系统的表面感测装置

Country Status (9)

Country Link
US (1) US9316473B2 (enExample)
EP (2) EP2385339A1 (enExample)
JP (1) JP5629818B2 (enExample)
KR (1) KR101495670B1 (enExample)
CN (1) CN102869949B (enExample)
AU (1) AU2011250101B2 (enExample)
BR (1) BR112012028084B1 (enExample)
CA (1) CA2798370C (enExample)
WO (1) WO2011138206A1 (enExample)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2194357A1 (de) * 2008-12-03 2010-06-09 Leica Geosystems AG Optisches Sensorelement für eine Messmaschine, und messmaschinenseitiges Kupplungselement hierfür
EP2413090B1 (en) * 2009-03-24 2018-06-06 Konica Minolta Opto, Inc. Shape measuring device
DE102012003223A1 (de) * 2012-02-20 2013-08-22 Carl Zeiss 3D Automation Gmbh Kugel-Schaft-Verbindung
US8786866B2 (en) * 2012-03-02 2014-07-22 Baker Hughes Incorporated Apparatus and method for determining inner profiles of hollow devices
US8910391B2 (en) * 2013-01-24 2014-12-16 Faro Technologies, Inc. Non-articulated portable CMM
US10156488B2 (en) * 2013-08-29 2018-12-18 Corning Incorporated Prism-coupling systems and methods for characterizing curved parts
DE102013015237A1 (de) * 2013-09-13 2015-03-19 Blum-Novotest Gmbh Rauheits-Messinstrument zum Einsatz in einer Werkzeugmaschine und Verfahren zur Rauheitsmessung in einer Werkzeugmaschine
JP6065875B2 (ja) * 2014-06-02 2017-01-25 横河電機株式会社 偏光検査装置
US9919958B2 (en) 2014-07-17 2018-03-20 Corning Incorporated Glass sheet and system and method for making glass sheet
WO2016038492A1 (en) * 2014-09-08 2016-03-17 Koninklijke Philips N.V. Detection of surface contact with optical shape sensing
US9803972B2 (en) 2015-12-17 2017-10-31 Mitutoyo Corporation Optical configuration for measurement device
US9791262B2 (en) * 2015-12-17 2017-10-17 Mitutoyo Corporation Measurement device with multiplexed position signals
CN108700705B (zh) * 2015-12-29 2021-01-08 生物辐射实验室股份有限公司 具有光采样的光学检测系统
FR3048077B1 (fr) * 2016-02-23 2020-05-22 Mesure-Systems3D Dispositif de controle tridimensionnel sans contact d'une piece creuse a surface interne de revolution, procede, produit programme d'ordinateur et medium de stockage correspondants
ITUB20161099A1 (it) * 2016-02-26 2017-08-26 Marposs Spa Dispositivo inseguitore per la misura del profilo di un pezzo meccanico
CN105783772B (zh) * 2016-03-07 2018-06-26 合肥工业大学 单传感器式三维微纳米接触触发测量探头
WO2017212929A1 (ja) * 2016-06-08 2017-12-14 ソニー株式会社 撮像制御装置および方法、並びに車両
US10101141B2 (en) 2016-12-07 2018-10-16 Mitutoyo Corporation Trigger counter for measurement device with count values stored in flash memory
US10006757B1 (en) * 2017-06-16 2018-06-26 Mitutoyo Corporation Optical configuration for measurement device using emitter material configuration with quadrant photodetectors
US10473451B2 (en) * 2017-08-07 2019-11-12 Apre Instruments, Inc. Measuring the position of objects in space
CN109637064B (zh) * 2019-01-29 2021-06-11 深圳市汉明电子有限公司 物体变形预警监测系统和方法
KR102143388B1 (ko) * 2019-05-29 2020-08-11 한국산업기술시험원 레일 하부에 지지대가 구성된 측정 장치 및 방법
KR102175321B1 (ko) * 2020-05-25 2020-11-06 주식회사 대연 측정기용 탐침
JP7530272B2 (ja) * 2020-11-06 2024-08-07 株式会社ミツトヨ 形状測定装置および異常検出方法
KR102446916B1 (ko) * 2022-06-03 2022-09-23 주식회사 보나 광융착 광파이버를 이용한 광 산란 기반의 광학식 전자펜
KR102486202B1 (ko) * 2022-09-15 2023-01-10 주식회사 보나 광 산란제 펜팁을 구비한 광학식 전자펜
JP2024140995A (ja) * 2023-03-28 2024-10-10 株式会社東京精密 プローブ及び形状測定装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2220748A (en) * 1988-07-05 1990-01-17 Nat Res Dev Probe
US5103572A (en) * 1989-06-24 1992-04-14 Wild Leitz Messtechnik Gmbh Feeler pin using an optical contact sensor
US5118956A (en) * 1989-08-30 1992-06-02 Renishaw Touch probe including a waveguide
DE4244240A1 (de) * 1992-12-24 1994-06-30 Zeiss Carl Fa Taststift
US5390424A (en) * 1990-01-25 1995-02-21 Renishaw Metrology Limited Analogue probe
US6633051B1 (en) * 1999-04-06 2003-10-14 Renishaw Plc Surface sensing device with optical sensor
CN101163939A (zh) * 2005-04-20 2008-04-16 罗莫公司 具有多个铰接轴线的铰接臂三维测量装置
CN101166948A (zh) * 2005-04-26 2008-04-23 瑞尼斯豪公司 带有光学传感器的表面检测装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3164663A (en) * 1960-10-27 1965-01-05 Beckman Instruments Inc Probe for colorimetric measurement
US3448277A (en) * 1967-01-16 1969-06-03 Crete Charles A Photoelectric absorption measurer having plunger for enclosing variable beam path lengths
EP0478007A3 (en) * 1987-11-18 1992-07-08 Vax Appliances (Australia) Pty Limited Suction cleaning head
GB8803847D0 (en) 1988-02-18 1988-03-16 Renishaw Plc Mounting for surface-sensing device
JPH0224075A (ja) 1988-07-13 1990-01-26 Mitsubishi Electric Corp 産業用ロボット
JPH0587548A (ja) * 1991-05-01 1993-04-06 Hitachi Electron Eng Co Ltd 姿勢角検出装置
US5327657A (en) * 1991-07-11 1994-07-12 Renishaw Metrology Ltd. Touch probe
US6112423A (en) * 1999-01-15 2000-09-05 Brown & Sharpe Manufacturing Co. Apparatus and method for calibrating a probe assembly of a measuring machine
JP4660779B2 (ja) * 2000-08-18 2011-03-30 学校法人 中央大学 移動装置の位置誤差評価方法およびその評価結果に基づく移動精度向上方法
DE10108774A1 (de) * 2001-02-23 2002-09-05 Zeiss Carl Koordinatenmessgerät zum Antasten eines Werkstücks, Tastkopf für ein Koordinatenmessgerät und Verfahren zum Betrieb eines Koordinatenmessgerätes
JP4117600B2 (ja) * 2002-06-05 2008-07-16 財団法人大阪産業振興機構 光放射圧によりトラップした微粒子プローブを用いた測定装置及び方法
GB0508395D0 (en) * 2005-04-26 2005-06-01 Renishaw Plc Method for scanning the surface of a workpiece
EP1983297B1 (en) * 2007-04-18 2010-04-07 Hexagon Metrology AB Scanning probe with constant scanning speed
US20110080588A1 (en) * 2009-10-02 2011-04-07 Industrial Optical Measurement Systems Non-contact laser inspection system

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2220748A (en) * 1988-07-05 1990-01-17 Nat Res Dev Probe
US5103572A (en) * 1989-06-24 1992-04-14 Wild Leitz Messtechnik Gmbh Feeler pin using an optical contact sensor
US5118956A (en) * 1989-08-30 1992-06-02 Renishaw Touch probe including a waveguide
US5390424A (en) * 1990-01-25 1995-02-21 Renishaw Metrology Limited Analogue probe
DE4244240A1 (de) * 1992-12-24 1994-06-30 Zeiss Carl Fa Taststift
US6633051B1 (en) * 1999-04-06 2003-10-14 Renishaw Plc Surface sensing device with optical sensor
CN101163939A (zh) * 2005-04-20 2008-04-16 罗莫公司 具有多个铰接轴线的铰接臂三维测量装置
CN101166948A (zh) * 2005-04-26 2008-04-23 瑞尼斯豪公司 带有光学传感器的表面检测装置

Also Published As

Publication number Publication date
AU2011250101A1 (en) 2012-10-25
EP2567185A1 (en) 2013-03-13
WO2011138206A1 (en) 2011-11-10
KR20130016358A (ko) 2013-02-14
JP5629818B2 (ja) 2014-11-26
AU2011250101B2 (en) 2013-08-15
JP2013528794A (ja) 2013-07-11
BR112012028084A2 (pt) 2016-08-02
US9316473B2 (en) 2016-04-19
EP2385339A1 (en) 2011-11-09
KR101495670B1 (ko) 2015-02-25
CA2798370A1 (en) 2011-11-10
EP2567185B1 (en) 2021-06-09
CA2798370C (en) 2015-06-16
US20130050701A1 (en) 2013-02-28
CN102869949A (zh) 2013-01-09
BR112012028084B1 (pt) 2020-02-04

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