KR101495670B1 - 광학 모니터링 시스템을 갖는 표면 감지 장치 - Google Patents

광학 모니터링 시스템을 갖는 표면 감지 장치 Download PDF

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KR101495670B1
KR101495670B1 KR1020127031904A KR20127031904A KR101495670B1 KR 101495670 B1 KR101495670 B1 KR 101495670B1 KR 1020127031904 A KR1020127031904 A KR 1020127031904A KR 20127031904 A KR20127031904 A KR 20127031904A KR 101495670 B1 KR101495670 B1 KR 101495670B1
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South Korea
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optical
stylus
return
light
probe head
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Korean (ko)
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KR20130016358A (ko
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토마스 옌센
크누트 지에르크스
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라이카 게오시스템스 아게
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
KR1020127031904A 2010-05-05 2011-04-27 광학 모니터링 시스템을 갖는 표면 감지 장치 Expired - Fee Related KR101495670B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP10162017.7 2010-05-05
EP10162017A EP2385339A1 (en) 2010-05-05 2010-05-05 Surface sensing device with optical monitoring system
PCT/EP2011/056689 WO2011138206A1 (en) 2010-05-05 2011-04-27 Surface sensing device with optical monitoring system

Publications (2)

Publication Number Publication Date
KR20130016358A KR20130016358A (ko) 2013-02-14
KR101495670B1 true KR101495670B1 (ko) 2015-02-25

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KR1020127031904A Expired - Fee Related KR101495670B1 (ko) 2010-05-05 2011-04-27 광학 모니터링 시스템을 갖는 표면 감지 장치

Country Status (9)

Country Link
US (1) US9316473B2 (enExample)
EP (2) EP2385339A1 (enExample)
JP (1) JP5629818B2 (enExample)
KR (1) KR101495670B1 (enExample)
CN (1) CN102869949B (enExample)
AU (1) AU2011250101B2 (enExample)
BR (1) BR112012028084B1 (enExample)
CA (1) CA2798370C (enExample)
WO (1) WO2011138206A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102446916B1 (ko) * 2022-06-03 2022-09-23 주식회사 보나 광융착 광파이버를 이용한 광 산란 기반의 광학식 전자펜
KR102486202B1 (ko) * 2022-09-15 2023-01-10 주식회사 보나 광 산란제 펜팁을 구비한 광학식 전자펜

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2194357A1 (de) 2008-12-03 2010-06-09 Leica Geosystems AG Optisches Sensorelement für eine Messmaschine, und messmaschinenseitiges Kupplungselement hierfür
KR20120006979A (ko) * 2009-03-24 2012-01-19 코니카 미놀타 옵토 인코포레이티드 형상 측정 장치
DE102012003223A1 (de) * 2012-02-20 2013-08-22 Carl Zeiss 3D Automation Gmbh Kugel-Schaft-Verbindung
US8786866B2 (en) * 2012-03-02 2014-07-22 Baker Hughes Incorporated Apparatus and method for determining inner profiles of hollow devices
US8910391B2 (en) * 2013-01-24 2014-12-16 Faro Technologies, Inc. Non-articulated portable CMM
US10156488B2 (en) * 2013-08-29 2018-12-18 Corning Incorporated Prism-coupling systems and methods for characterizing curved parts
DE102013015237A1 (de) * 2013-09-13 2015-03-19 Blum-Novotest Gmbh Rauheits-Messinstrument zum Einsatz in einer Werkzeugmaschine und Verfahren zur Rauheitsmessung in einer Werkzeugmaschine
JP6065875B2 (ja) * 2014-06-02 2017-01-25 横河電機株式会社 偏光検査装置
US9919958B2 (en) 2014-07-17 2018-03-20 Corning Incorporated Glass sheet and system and method for making glass sheet
US20170231699A1 (en) * 2014-09-08 2017-08-17 Koninklijke Philips N.V Detection of surface contact with optical shape sensing
US9803972B2 (en) 2015-12-17 2017-10-31 Mitutoyo Corporation Optical configuration for measurement device
US9791262B2 (en) * 2015-12-17 2017-10-17 Mitutoyo Corporation Measurement device with multiplexed position signals
EP3398000B1 (en) * 2015-12-29 2023-03-29 Bio-Rad Laboratories, Inc. Optical detection system with light sampling
FR3048077B1 (fr) * 2016-02-23 2020-05-22 Mesure-Systems3D Dispositif de controle tridimensionnel sans contact d'une piece creuse a surface interne de revolution, procede, produit programme d'ordinateur et medium de stockage correspondants
ITUB20161099A1 (it) * 2016-02-26 2017-08-26 Marposs Spa Dispositivo inseguitore per la misura del profilo di un pezzo meccanico
CN105783772B (zh) * 2016-03-07 2018-06-26 合肥工业大学 单传感器式三维微纳米接触触发测量探头
JP6819681B2 (ja) * 2016-06-08 2021-01-27 ソニー株式会社 撮像制御装置および方法、並びに車両
US10101141B2 (en) 2016-12-07 2018-10-16 Mitutoyo Corporation Trigger counter for measurement device with count values stored in flash memory
US10006757B1 (en) * 2017-06-16 2018-06-26 Mitutoyo Corporation Optical configuration for measurement device using emitter material configuration with quadrant photodetectors
US10473451B2 (en) * 2017-08-07 2019-11-12 Apre Instruments, Inc. Measuring the position of objects in space
CN109637064B (zh) * 2019-01-29 2021-06-11 深圳市汉明电子有限公司 物体变形预警监测系统和方法
KR102143388B1 (ko) * 2019-05-29 2020-08-11 한국산업기술시험원 레일 하부에 지지대가 구성된 측정 장치 및 방법
KR102175321B1 (ko) * 2020-05-25 2020-11-06 주식회사 대연 측정기용 탐침
EP3954966A1 (en) * 2020-08-14 2022-02-16 Hexagon Technology Center GmbH Rotary table compensation
JP7530272B2 (ja) * 2020-11-06 2024-08-07 株式会社ミツトヨ 形状測定装置および異常検出方法
JP2024140995A (ja) * 2023-03-28 2024-10-10 株式会社東京精密 プローブ及び形状測定装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5103572A (en) 1989-06-24 1992-04-14 Wild Leitz Messtechnik Gmbh Feeler pin using an optical contact sensor
US5118956A (en) 1989-08-30 1992-06-02 Renishaw Touch probe including a waveguide
US5390424A (en) 1990-01-25 1995-02-21 Renishaw Metrology Limited Analogue probe
US6633051B1 (en) 1999-04-06 2003-10-14 Renishaw Plc Surface sensing device with optical sensor

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3164663A (en) * 1960-10-27 1965-01-05 Beckman Instruments Inc Probe for colorimetric measurement
US3448277A (en) * 1967-01-16 1969-06-03 Crete Charles A Photoelectric absorption measurer having plunger for enclosing variable beam path lengths
ATE81956T1 (de) * 1987-11-18 1992-11-15 Vax Appliances Australia Reinigungskopf.
GB8803847D0 (en) 1988-02-18 1988-03-16 Renishaw Plc Mounting for surface-sensing device
GB8815984D0 (en) 1988-07-05 1988-08-10 Univ Brunel Probes
JPH0224075A (ja) 1988-07-13 1990-01-26 Mitsubishi Electric Corp 産業用ロボット
JPH0587548A (ja) * 1991-05-01 1993-04-06 Hitachi Electron Eng Co Ltd 姿勢角検出装置
US5327657A (en) * 1991-07-11 1994-07-12 Renishaw Metrology Ltd. Touch probe
DE4244240B4 (de) * 1992-12-24 2005-07-07 Carl Zeiss Industrielle Messtechnik Gmbh Taststift
US6112423A (en) * 1999-01-15 2000-09-05 Brown & Sharpe Manufacturing Co. Apparatus and method for calibrating a probe assembly of a measuring machine
JP4660779B2 (ja) * 2000-08-18 2011-03-30 学校法人 中央大学 移動装置の位置誤差評価方法およびその評価結果に基づく移動精度向上方法
DE10108774A1 (de) * 2001-02-23 2002-09-05 Zeiss Carl Koordinatenmessgerät zum Antasten eines Werkstücks, Tastkopf für ein Koordinatenmessgerät und Verfahren zum Betrieb eines Koordinatenmessgerätes
JP4117600B2 (ja) * 2002-06-05 2008-07-16 財団法人大阪産業振興機構 光放射圧によりトラップした微粒子プローブを用いた測定装置及び方法
FR2884910B1 (fr) * 2005-04-20 2007-07-13 Romer Sa Appareil de mesure tridimensionnelle a bras articules comportant une pluralite d'axes d'articulation
GB0508388D0 (en) * 2005-04-26 2005-06-01 Renishaw Plc Surface sensing device with optical sensor
GB0508395D0 (en) * 2005-04-26 2005-06-01 Renishaw Plc Method for scanning the surface of a workpiece
EP1983297B1 (en) * 2007-04-18 2010-04-07 Hexagon Metrology AB Scanning probe with constant scanning speed
US20110080588A1 (en) * 2009-10-02 2011-04-07 Industrial Optical Measurement Systems Non-contact laser inspection system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5103572A (en) 1989-06-24 1992-04-14 Wild Leitz Messtechnik Gmbh Feeler pin using an optical contact sensor
US5118956A (en) 1989-08-30 1992-06-02 Renishaw Touch probe including a waveguide
US5390424A (en) 1990-01-25 1995-02-21 Renishaw Metrology Limited Analogue probe
US6633051B1 (en) 1999-04-06 2003-10-14 Renishaw Plc Surface sensing device with optical sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102446916B1 (ko) * 2022-06-03 2022-09-23 주식회사 보나 광융착 광파이버를 이용한 광 산란 기반의 광학식 전자펜
CN117215419A (zh) * 2022-06-03 2023-12-12 博纳株式会社 利用光学熔接光纤且基于光散射的光学式电子笔
CN117215419B (zh) * 2022-06-03 2024-05-03 博纳株式会社 利用光学熔接光纤且基于光散射的光学式电子笔
KR102486202B1 (ko) * 2022-09-15 2023-01-10 주식회사 보나 광 산란제 펜팁을 구비한 광학식 전자펜

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Publication number Publication date
AU2011250101B2 (en) 2013-08-15
CN102869949A (zh) 2013-01-09
EP2567185A1 (en) 2013-03-13
BR112012028084A2 (pt) 2016-08-02
JP5629818B2 (ja) 2014-11-26
CN102869949B (zh) 2017-02-15
BR112012028084B1 (pt) 2020-02-04
US20130050701A1 (en) 2013-02-28
AU2011250101A1 (en) 2012-10-25
KR20130016358A (ko) 2013-02-14
CA2798370C (en) 2015-06-16
US9316473B2 (en) 2016-04-19
EP2385339A1 (en) 2011-11-09
WO2011138206A1 (en) 2011-11-10
EP2567185B1 (en) 2021-06-09
JP2013528794A (ja) 2013-07-11
CA2798370A1 (en) 2011-11-10

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