JP5626926B2 - リチウムイオン電池用電極 - Google Patents
リチウムイオン電池用電極 Download PDFInfo
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- JP5626926B2 JP5626926B2 JP2012521961A JP2012521961A JP5626926B2 JP 5626926 B2 JP5626926 B2 JP 5626926B2 JP 2012521961 A JP2012521961 A JP 2012521961A JP 2012521961 A JP2012521961 A JP 2012521961A JP 5626926 B2 JP5626926 B2 JP 5626926B2
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- metal film
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
- H01M4/66—Selection of materials
- H01M4/661—Metal or alloys, e.g. alloy coatings
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/20—Separation of the formed objects from the electrodes with no destruction of said electrodes
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
- C25F3/12—Etching of semiconducting materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0438—Processes of manufacture in general by electrochemical processing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0438—Processes of manufacture in general by electrochemical processing
- H01M4/045—Electrochemical coating; Electrochemical impregnation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/049—Manufacturing of an active layer by chemical means
- H01M4/0492—Chemical attack of the support material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/134—Electrodes based on metals, Si or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/139—Processes of manufacture
- H01M4/1395—Processes of manufacture of electrodes based on metals, Si or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/36—Selection of substances as active materials, active masses, active liquids
- H01M4/38—Selection of substances as active materials, active masses, active liquids of elements or alloys
- H01M4/386—Silicon or alloys based on silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M2220/00—Batteries for particular applications
- H01M2220/20—Batteries in motive systems, e.g. vehicle, ship, plane
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/60—Other road transportation technologies with climate change mitigation effect
- Y02T10/70—Energy storage systems for electromobility, e.g. batteries
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Cell Electrode Carriers And Collectors (AREA)
Description
Claims (9)
- リチウムイオンに対して不活性な金属の膜と、前記膜の少なくとも一方の平坦面に設けられ、前記膜から突出する複数のシリコンのナノワイヤとを有し、前記ナノワイヤの部分が前記金属の膜に囲まれて設けられ、前記ナノワイヤが前記金属の膜に係留される、リチウムイオン電池用電極。
- 少なくとも前記金属の膜に囲まれた前記シリコンのナノワイヤの部分は規則的に配置されて設けられた、請求項1に記載のリチウムイオン電池用電極。
- 前記金属の膜は少なくとも1マイクロメートルの厚さを有する、請求項1又は請求項2に記載のリチウムイオン電池用電極。
- 前記金属の膜に囲まれた前記シリコンのナノワイヤの部分が前記膜の厚さの全体を貫通して設けられた、請求項1乃至請求項3のいずれか一項に記載のリチウムイオン電池用電極。
- リチウムイオンに対して不活性な前記金属の膜は、銅、銀、金、プラチナ及びチタンから成るグループから選ばれたいずれか一の金属元素により設けられた、請求項1乃至請求項4のいずれか一項に記載のリチウムイオン電池用電極。
- 前記金属の膜から突出した前記シリコンのナノワイヤの長さは少なくとも5マイクロメートルである、請求項1乃至請求項5のいずれか一項に記載のリチウムイオン電池用電極。
- リチウムイオン電池用電極を製造する方法であって、
(a)予め選ばれた配置に所定の孔深さPまで孔を形成するためにシリコンのウエハを電気化学的にエッチングするステップと;
(b)前記孔をオーバーエッチングすることにより前記孔の壁を、所定の厚さを有する前記ウエハに取り付けられた起立したナノワイヤに変換するステップと;
(c)前記ウエハのエッチング面への電着により、リチウムイオンに対して不活性な金属で所定の厚さDの膜を形成するステップとを備え;
前記金属の膜は、前記ナノワイヤの取り付けられた端部を囲み、前記ナノワイヤは、前記ウエハにとは反対側の平坦面から約P−Dの長さだけ突出する;
方法。 - 前記金属の膜及び前記ナノワイヤが、前記ウエハから、前記金属の膜に係留される前記ナノワイヤを前記ウエハから脱離するに足る強さで剥離される、請求項7に記載の方法。
- 前記ウエハ上に配置された前記金属の膜を含む前記ウエハが加熱され、前記金属の膜が熱膨張により前記ウエハから剥離する、請求項8に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009035745A DE102009035745A1 (de) | 2009-08-01 | 2009-08-01 | Elektrode für Lithium-Ionen Akkumulatoren |
DE102009035745.9 | 2009-08-01 | ||
PCT/DE2010/000799 WO2011015174A1 (de) | 2009-08-01 | 2010-07-09 | Elektrode für lithium-ionen akkumulatoren |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013501309A JP2013501309A (ja) | 2013-01-10 |
JP5626926B2 true JP5626926B2 (ja) | 2014-11-19 |
Family
ID=43033292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012521961A Active JP5626926B2 (ja) | 2009-08-01 | 2010-07-09 | リチウムイオン電池用電極 |
Country Status (7)
Country | Link |
---|---|
US (2) | US9246159B2 (ja) |
EP (1) | EP2460214B1 (ja) |
JP (1) | JP5626926B2 (ja) |
KR (1) | KR101688525B1 (ja) |
CN (1) | CN102473895B (ja) |
DE (1) | DE102009035745A1 (ja) |
WO (1) | WO2011015174A1 (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11996550B2 (en) | 2009-05-07 | 2024-05-28 | Amprius Technologies, Inc. | Template electrode structures for depositing active materials |
US20100285358A1 (en) | 2009-05-07 | 2010-11-11 | Amprius, Inc. | Electrode Including Nanostructures for Rechargeable Cells |
WO2011060017A2 (en) | 2009-11-11 | 2011-05-19 | Amprius, Inc | Intermediate layers for electrode fabrication |
DE102009056530A1 (de) | 2009-12-04 | 2011-06-09 | Christian-Albrechts-Universität Zu Kiel | Nanodrahtstruktur mit freiliegenden, regelmäßig angeordneten Nanodrahtenden und Verfahren zur Herstellung einer solchen Struktur |
US9780365B2 (en) | 2010-03-03 | 2017-10-03 | Amprius, Inc. | High-capacity electrodes with active material coatings on multilayered nanostructured templates |
CN102844917B (zh) | 2010-03-03 | 2015-11-25 | 安普雷斯股份有限公司 | 用于沉积活性材料的模板电极结构 |
US9172088B2 (en) | 2010-05-24 | 2015-10-27 | Amprius, Inc. | Multidimensional electrochemically active structures for battery electrodes |
WO2012105901A1 (en) * | 2011-02-01 | 2012-08-09 | Qunano Ab | Lithium-ion battery comprising nanowires |
EP2727175A4 (en) * | 2011-07-01 | 2015-07-01 | Amprius Inc | ELECTRODE TEMPLATE STRUCTURES WITH IMPROVED ADHESION PROPERTIES |
CN103346070B (zh) * | 2013-06-13 | 2015-08-05 | 中国科学院半导体研究所 | 硅基iii-v族纳米线选区横向外延生长的方法 |
US9449855B2 (en) | 2013-07-12 | 2016-09-20 | Advanced Silicon Group, Inc. | Double-etch nanowire process |
KR20150029426A (ko) * | 2013-09-10 | 2015-03-18 | 삼성에스디아이 주식회사 | 음극 활물질 및 이를 채용한 리튬 전지 |
US10381651B2 (en) | 2014-02-21 | 2019-08-13 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Device and method of manufacturing high-aspect ratio structures |
US9923201B2 (en) | 2014-05-12 | 2018-03-20 | Amprius, Inc. | Structurally controlled deposition of silicon onto nanowires |
EP2995703B1 (de) | 2014-09-09 | 2019-08-28 | Christian-Albrechts-Universität zu Kiel | Verfahren zur Herstellung von Flächenableitelektroden und Halbzeug zur Durchführung des Verfahrens |
KR101773103B1 (ko) * | 2015-01-09 | 2017-08-30 | 주식회사 엘지화학 | 전극, 이의 제조방법, 이에 의해 제조된 전극 및 이를 포함하는 이차전지 |
EP3807945A4 (en) * | 2018-06-14 | 2022-03-23 | Saint-Gobain Ceramics&Plastics, Inc. | CATHODE LAYER AND ELECTROCHEMICAL DEVICE COMPRISING IT |
WO2021029458A1 (ko) * | 2019-08-13 | 2021-02-18 | 한국에너지기술연구원 | 다공성 전극을 포함하는 유연전극 기재 및 이의 제조방법 |
DE102020103469A1 (de) * | 2020-02-11 | 2021-08-12 | Christian-Albrechts-Universität Zu Kiel | Verfahren zur Herstellung einer zyklenstabilen Silizium-Anode für Sekundärbatterien |
DE102020103531A1 (de) | 2020-02-11 | 2021-08-12 | RENA Technologies GmbH | Elektrode, deren Verwendung, Akkumulator sowie Verfahren zur Herstellung einer Elektrode |
NL2030074B1 (en) * | 2021-12-08 | 2023-06-22 | Lionvolt B V | Electrode with embeded pillar structure |
Family Cites Families (11)
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US6465132B1 (en) * | 1999-07-22 | 2002-10-15 | Agere Systems Guardian Corp. | Article comprising small diameter nanowires and method for making the same |
US6340822B1 (en) | 1999-10-05 | 2002-01-22 | Agere Systems Guardian Corp. | Article comprising vertically nano-interconnected circuit devices and method for making the same |
CA2588548A1 (en) | 2004-12-09 | 2006-06-15 | Nanosys, Inc. | Nanowire-based membrane electrode assemblies for fuel cells |
CN100462706C (zh) * | 2005-01-06 | 2009-02-18 | 清华大学 | 标准漏孔 |
US20060216603A1 (en) | 2005-03-26 | 2006-09-28 | Enable Ipc | Lithium-ion rechargeable battery based on nanostructures |
KR101530379B1 (ko) | 2006-03-29 | 2015-06-22 | 삼성전자주식회사 | 다공성 글래스 템플릿을 이용한 실리콘 나노 와이어의제조방법 및 이에 의해 형성된 실리콘 나노 와이어를포함하는 소자 |
US7816031B2 (en) * | 2007-08-10 | 2010-10-19 | The Board Of Trustees Of The Leland Stanford Junior University | Nanowire battery methods and arrangements |
CN101302118A (zh) | 2008-03-31 | 2008-11-12 | 北京师范大学 | 一种硅纳米线阵列的制备方法 |
US20100108132A1 (en) * | 2008-10-30 | 2010-05-06 | General Electric Company | Nano-devices and methods of manufacture thereof |
CN101486439B (zh) | 2009-02-23 | 2011-01-19 | 施毅 | 锗纳米点/硅纳米线阵列结构薄膜的制备方法 |
US20100285358A1 (en) * | 2009-05-07 | 2010-11-11 | Amprius, Inc. | Electrode Including Nanostructures for Rechargeable Cells |
-
2009
- 2009-08-01 DE DE102009035745A patent/DE102009035745A1/de not_active Ceased
-
2010
- 2010-07-09 CN CN201080034248.XA patent/CN102473895B/zh active Active
- 2010-07-09 JP JP2012521961A patent/JP5626926B2/ja active Active
- 2010-07-09 WO PCT/DE2010/000799 patent/WO2011015174A1/de active Application Filing
- 2010-07-09 US US13/388,263 patent/US9246159B2/en active Active
- 2010-07-09 KR KR1020127002867A patent/KR101688525B1/ko active IP Right Grant
- 2010-07-09 EP EP10743011.8A patent/EP2460214B1/de active Active
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2016
- 2016-01-03 US US14/986,697 patent/US9716276B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2011015174A1 (de) | 2011-02-10 |
US20120164529A1 (en) | 2012-06-28 |
US20160118643A1 (en) | 2016-04-28 |
JP2013501309A (ja) | 2013-01-10 |
DE102009035745A1 (de) | 2011-02-17 |
CN102473895B (zh) | 2015-06-03 |
KR101688525B1 (ko) | 2016-12-21 |
EP2460214A1 (de) | 2012-06-06 |
US9246159B2 (en) | 2016-01-26 |
KR20120047247A (ko) | 2012-05-11 |
EP2460214B1 (de) | 2016-01-06 |
US9716276B2 (en) | 2017-07-25 |
CN102473895A (zh) | 2012-05-23 |
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