JP5623015B2 - 流量センサ素子および流量センサ素子の自浄作用 - Google Patents

流量センサ素子および流量センサ素子の自浄作用 Download PDF

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Publication number
JP5623015B2
JP5623015B2 JP2008536984A JP2008536984A JP5623015B2 JP 5623015 B2 JP5623015 B2 JP 5623015B2 JP 2008536984 A JP2008536984 A JP 2008536984A JP 2008536984 A JP2008536984 A JP 2008536984A JP 5623015 B2 JP5623015 B2 JP 5623015B2
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JP
Japan
Prior art keywords
temperature measuring
flow sensor
ceramic
thin film
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008536984A
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English (en)
Japanese (ja)
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JP2009520180A5 (https=
JP2009520180A (ja
Inventor
カール−ハインツ　ヴィーナント
ヴィーナント カール−ハインツ
ウルリッヒ カールハインツ
ウルリッヒ カールハインツ
ムツィオール マティアス
ムツィオール マティアス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yageo Nexensos GmbH
Original Assignee
Heraeus Sensor Technology GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102005051182A external-priority patent/DE102005051182A1/de
Priority claimed from DE102006030786A external-priority patent/DE102006030786A1/de
Application filed by Heraeus Sensor Technology GmbH filed Critical Heraeus Sensor Technology GmbH
Publication of JP2009520180A publication Critical patent/JP2009520180A/ja
Publication of JP2009520180A5 publication Critical patent/JP2009520180A5/ja
Application granted granted Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/6983—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters adapted for burning-off deposits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP2008536984A 2005-10-24 2006-10-24 流量センサ素子および流量センサ素子の自浄作用 Expired - Fee Related JP5623015B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE102005051182.1 2005-10-24
DE102005051182A DE102005051182A1 (de) 2005-10-24 2005-10-24 Störmungssensorelement und dessen Selbstreinigung
DE102006030786.0 2006-06-30
DE102006030786A DE102006030786A1 (de) 2006-06-30 2006-06-30 Strömungssensorelement und dessen Selbstreinigung
PCT/EP2006/010232 WO2007048573A1 (de) 2005-10-24 2006-10-24 Strömungssensorelement und dessen selbstreinigung

Publications (3)

Publication Number Publication Date
JP2009520180A JP2009520180A (ja) 2009-05-21
JP2009520180A5 JP2009520180A5 (https=) 2012-01-26
JP5623015B2 true JP5623015B2 (ja) 2014-11-12

Family

ID=37606894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008536984A Expired - Fee Related JP5623015B2 (ja) 2005-10-24 2006-10-24 流量センサ素子および流量センサ素子の自浄作用

Country Status (4)

Country Link
US (1) US7739908B2 (https=)
EP (2) EP1941244B1 (https=)
JP (1) JP5623015B2 (https=)
WO (1) WO2007048573A1 (https=)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005016447A1 (de) * 2005-04-11 2006-10-12 Robert Bosch Gmbh Verfahren zum Betrieb von Heißfilmluftmassenmessern
DE102005016449A1 (de) * 2005-04-11 2006-10-12 Robert Bosch Gmbh Beheizter Heißfilmluftmassenmesser
DE102006030786A1 (de) * 2006-06-30 2008-01-03 Heraeus Sensor Technology Gmbh Strömungssensorelement und dessen Selbstreinigung
EP2251651A3 (de) * 2007-04-26 2012-02-22 Heraeus Sensor Technology Gmbh Anordnung eines Schichtwiderstandes einer anemometrischen Messeinrichtung in einem Abgasrohr
US7878056B2 (en) * 2007-12-19 2011-02-01 Siargo Ltd. Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the same
DE102008036837A1 (de) 2008-08-07 2010-02-18 Epcos Ag Sensorvorrichtung und Verfahren zur Herstellung
DE102008037206B4 (de) 2008-08-11 2014-07-03 Heraeus Sensor Technology Gmbh 300°C-Flowsensor
EP2187182B1 (en) * 2008-11-12 2015-08-05 Sensirion AG Method for operating a flow sensor being repetitively subjected to a thermal and/or chemical cleaning treatment, and flow measuring device
JP2012524261A (ja) * 2009-04-15 2012-10-11 アリザント ヘルスケア インク． 深部組織用温度プローブ構造体
DE102010033175B3 (de) * 2010-08-03 2011-12-08 Pierburg Gmbh Verfahren zur Bestimmung eines resultierenden Gesamtmassenstroms an einem Abgasmassenstromsensor
DE102011009754A1 (de) 2011-01-28 2012-08-02 Heraeus Sensor Technology Gmbh Strömungssensoren mit Stromdurchführung im Deckel und Sensorspitze als Zwischenprodukt
JP5915026B2 (ja) * 2011-08-26 2016-05-11 住友大阪セメント株式会社 温度測定用板状体及びそれを備えた温度測定装置
JP5609827B2 (ja) * 2011-09-07 2014-10-22 株式会社デンソー 空気流量測定装置
JP5477358B2 (ja) * 2011-10-31 2014-04-23 株式会社デンソー 空気流量測定装置
DE102011089608A1 (de) * 2011-12-22 2013-06-27 Horst Siedle Gmbh & Co. Kg Gehäuseteil für einen elektrischen Sensorsowie Verfahren zur Herstellung des Gehäuseteils
DE102012200121A1 (de) * 2012-01-05 2013-07-11 Robert Bosch Gmbh Vorrichtung zur Erfassung mindestens einer Strömungseigenschaft eines fluiden Mediums
JP6372097B2 (ja) * 2014-03-07 2018-08-15 株式会社リコー 検出装置、検出回路、センサモジュール及び画像形成装置
DE102014105483A1 (de) * 2014-04-17 2015-10-22 Heraeus Sensor Technology Gmbh Sensorelement, Sensormodul, Messanordnung und Abgasrückführsystem mit einem solchen Sensorelement sowie Herstellungsverfahren
DE102014008284A1 (de) * 2014-06-03 2015-12-03 Diehl Metering Gmbh Verfahren zur Bestimmung des Volumenflusses eines strömenden Mediums durch eine Messstrecke und zugeordnete Messeinrichtung
IT201700052447A1 (it) * 2017-05-15 2018-11-15 Sacmi Forni Spa Dispositivo per rilevare la portata dei gas in uscita da un camino di un forno per la cottura di prodotti ceramici e forno per la cottura di prodotti ceramici provvisto di tale dispositivo
EP3404405A1 (de) 2017-05-18 2018-11-21 Heraeus Sensor Technology GmbH Sensor zur bestimmung von gasparametern
EP3409467B1 (de) 2017-05-30 2019-07-03 Heraeus Nexensos GmbH Heizer mit einem co-gesinterten mehrschichtenaufbau
DE102017222495A1 (de) 2017-12-12 2019-06-13 Heraeus Sensor Technology Gmbh Sensor mit thermoschockbeständigem Substrat
JP2021131323A (ja) 2020-02-20 2021-09-09 サーパス工業株式会社 流量計および流量計の製造方法
CN112285378B (zh) * 2020-10-21 2025-07-11 中北大学 一种高灵敏度mems石墨烯风速风向传感器芯片
EP4083580A1 (de) * 2021-04-30 2022-11-02 Heraeus Nexensos GmbH Sensoreinheit zur detektion von gasströmen in einem batterieblock oder in einer batterieeinheit, batterieblock, batterieeinheit und verfahren zur detektion von gasströmen in einem batterieblock oder in einer batterieeinheit

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3040448A1 (de) * 1979-06-27 1982-05-27 Siemens AG, 1000 Berlin und 8000 München Mengendurchflussmesser fuer fluessigkeiten
DE3433368A1 (de) 1984-09-12 1986-03-20 Robert Bosch Gmbh, 7000 Stuttgart Verfahren und einrichtung zur durchfuehrung des verfahrens zur messung des durchsatzes eines stroemenden mediums, insbesondere in verbindung mit brennkraftmaschinen
JPS61122559A (ja) * 1984-11-20 1986-06-10 Nissan Motor Co Ltd 酸素濃度測定装置
JPS63177023A (ja) 1987-01-19 1988-07-21 Nippon Soken Inc 流量センサ
DE3844354C2 (de) 1988-12-30 1995-11-30 Bosch Gmbh Robert Meßvorrichtung zur Messung der Masse eines strömenden Mediums
US5247156A (en) * 1990-11-13 1993-09-21 Cableries Et Trefileries De Cossonay S.A. Apparatus for measuring physical properties of fluids
JP2839739B2 (ja) * 1991-03-13 1998-12-16 日本碍子株式会社 抵抗素子
JP2682349B2 (ja) 1992-09-18 1997-11-26 株式会社日立製作所 空気流量計及び空気流量検出方法
WO1995023338A1 (de) 1994-02-28 1995-08-31 Heraeus Sensor Gmbh Sensoranordnung für heissfilmanemometer
EP0987529A1 (de) 1998-09-14 2000-03-22 Heraeus Electro-Nite International N.V. Elektrischer Widerstand mit wenigstens zwei Anschlusskontaktfeldern auf einem Substrat mit wenigstens einer Ausnehmung sowie Verfahren zu dessen Herstellung
JP3587734B2 (ja) 1999-06-30 2004-11-10 株式会社日立製作所 熱式空気流量センサ
DE19953718A1 (de) 1999-11-09 2001-05-10 Pierburg Ag Anordnung zur Abgasregelung
DE19959870A1 (de) * 1999-12-10 2001-06-21 Heraeus Electro Nite Int Meßanordnung und Verfahren zur Überwachung der Funktionsfähigkeit eines Rußfilters
DE10124964B4 (de) 2001-05-21 2004-02-05 Forschungszentrum Karlsruhe Gmbh Sensor zur Messung von Strömungsgeschwindigkeiten und Verfahren zu dessen Betrieb
DE10225602A1 (de) 2002-06-07 2004-01-08 Heraeus Sensor-Nite Gmbh Halbleiterbauelement mit integrierter Schaltung, Kühlkörper und Temperatursensor
JP3817497B2 (ja) * 2002-06-10 2006-09-06 株式会社日立製作所 熱式流量計測装置
US6883370B2 (en) * 2002-06-28 2005-04-26 Heetronix Mass flow meter with chip-type sensors
EP1431718A3 (de) * 2002-12-20 2007-11-14 Heraeus Sensor Technology Gmbh Strömungssensorelement in Dünnfilmtechnik und seine Verwendung
DE102005051182A1 (de) 2005-10-24 2007-04-26 Heraeus Sensor Technology Gmbh Störmungssensorelement und dessen Selbstreinigung
US7878056B2 (en) * 2007-12-19 2011-02-01 Siargo Ltd. Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the same

Also Published As

Publication number Publication date
US20080264166A1 (en) 2008-10-30
EP1941244A1 (de) 2008-07-09
EP2759811A2 (de) 2014-07-30
EP2759811A3 (de) 2014-09-10
EP1941244B1 (de) 2015-01-28
WO2007048573A1 (de) 2007-05-03
JP2009520180A (ja) 2009-05-21
US7739908B2 (en) 2010-06-22

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