JP5617065B2 - 剥離方法、プログラム、コンピュータ記憶媒体及び剥離システム - Google Patents
剥離方法、プログラム、コンピュータ記憶媒体及び剥離システム Download PDFInfo
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- JP5617065B2 JP5617065B2 JP2011197705A JP2011197705A JP5617065B2 JP 5617065 B2 JP5617065 B2 JP 5617065B2 JP 2011197705 A JP2011197705 A JP 2011197705A JP 2011197705 A JP2011197705 A JP 2011197705A JP 5617065 B2 JP5617065 B2 JP 5617065B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/19—Delaminating means
- Y10T156/1911—Heating or cooling delaminating means [e.g., melting means, freezing means, etc.]
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Weting (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
7 検査装置
30 剥離装置
31 第1の洗浄装置
32 第2の搬送装置
40 接合面洗浄装置
41 非接合面洗浄装置
42 反転装置
194 カップ
203 溶剤ノズル
220 酢酸ノズル
350 制御部
400 防錆剤ノズル
410 アルカリ供給管
420 アルカリノズル
430 酢酸ガス供給管
G 接着剤
S 支持ウェハ
T 重合ウェハ
W 被処理ウェハ
Claims (20)
- 被処理基板と支持基板が接着剤で接合された重合基板を、被処理基板と支持基板に剥離する剥離方法であって、
重合基板を加熱しながら当該重合基板を被処理基板と支持基板に剥離する剥離工程と、
その後、前記剥離工程で剥離された被処理基板の表面に有機溶剤を供給し、被処理基板の表面の接着剤を除去する接着剤除去工程と、
その後、前記接着剤除去工程で接着剤が除去された被処理基板の表面に酸を供給し、被処理基板の表面の所定のパターン上に形成された酸化膜を除去する酸化膜除去工程と、を有することを特徴とする、剥離方法。 - 前記酸化膜除去工程後、被処理基板を検査する検査工程を有することを特徴とする、請求項1に記載の剥離方法。
- 前記検査工程において被処理基板の表面の所定のパターン上に酸化膜が残存していると確認された場合、その後、当該被処理基板の表面に酸を供給し、被処理基板の表面の所定のパターン上に形成された酸化膜を除去する他の酸化膜除去工程を有することを特徴とする、請求項2に記載の剥離方法。
- 前記酸化膜除去工程後、被処理基板の表面に防錆剤を供給する防錆剤供給工程を有することを特徴とする、請求項1〜3のいずれかに記載の剥離方法。
- 前記酸は酢酸であることを特徴とする、請求項1〜4のいずれかに記載の剥離方法。
- 前記酸は所定の濃度以上の水溶液であることを特徴とする、請求項1〜5のいずれかに記載の剥離方法。
- 前記酸の廃液をアルカリ水溶液で中和することを特徴とする、請求項6に記載の剥離方法。
- 前記酸は気体状であることを特徴とする、請求項1〜5のいずれかに記載の剥離方法。
- 請求項1〜8のいずれかに記載の剥離方法を剥離システムによって実行させるために、当該剥離システムを制御する制御部のコンピュータ上で動作するプログラム。
- 請求項9に記載のプログラムを格納した読み取り可能なコンピュータ記憶媒体。
- 被処理基板と支持基板が接着剤で接合された重合基板を、被処理基板と支持基板に剥離する剥離システムであって、
重合基板を加熱しながら当該重合基板を被処基板と支持基板に剥離する剥離装置と、
前記剥離装置において剥離された被処理基板の表面に有機溶剤を供給し、被処理基板の表面の接着剤を除去する溶剤供給部と、
前記溶剤供給部によって接着剤が除去された被処理基板の表面に酸を供給し、被処理基板の表面の所定のパターン上に形成された酸化膜を除去する酸供給部と、を有することを特徴とする、剥離システム。 - 前記酸供給部によって酸化膜が除去された被処理基板を検査する検査装置を有することを特徴とする、請求項11に記載の剥離システム。
- 前記検査装置において被処理基板の表面の所定のパターン上に酸化膜が残存していると確認された場合、当該被処理基板の表面に酸を供給し、被処理基板の表面の所定のパターン上に形成された酸化膜を除去する他の酸供給部を有することを特徴とする、請求項12に記載の剥離システム。
- 前記酸供給部によって酸化膜が除去された被処理基板の表面に防錆剤を供給する防錆剤供給部を有することを特徴とする、請求項11〜13のいずれかに記載の剥離システム。
- 前記酸は酢酸であることを特徴とする、請求項11〜14のいずれかに記載の剥離システム。
- 前記酸は所定の濃度以上の水溶液であることを特徴とする、請求項11〜15のいずれかに記載の剥離システム。
- アルカリ水溶液を供給し、前記酸の廃液を中和するアルカリ供給部を有することを特徴とする、請求項16に記載の剥離システム。
- 前記アルカリ供給部は、前記酸の廃液を回収する回収部に前記アルカリ水溶液を供給することを特徴とする、請求項17に記載の剥離システム。
- 前記アルカリ供給部は、被処理基板の表面に前記アルカリ水溶液を供給することを特徴とする、請求項17に記載の剥離システム。
- 前記酸は気体状であることを特徴とする、請求項11〜15のいずれかに記載の剥離システム。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2011197705A JP5617065B2 (ja) | 2011-09-09 | 2011-09-09 | 剥離方法、プログラム、コンピュータ記憶媒体及び剥離システム |
US14/343,598 US10008419B2 (en) | 2011-09-09 | 2012-08-22 | Separation method, computer storage medium, and separation system |
PCT/JP2012/071750 WO2013035590A1 (en) | 2011-09-09 | 2012-08-22 | Separation method, computer storage medium, and separation system |
TW101131375A TWI517203B (zh) | 2011-09-09 | 2012-08-29 | 剝離方法、電腦記憶媒體及剝離系統 |
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JP2011197705A JP5617065B2 (ja) | 2011-09-09 | 2011-09-09 | 剥離方法、プログラム、コンピュータ記憶媒体及び剥離システム |
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JP2013058711A JP2013058711A (ja) | 2013-03-28 |
JP5617065B2 true JP5617065B2 (ja) | 2014-11-05 |
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US (1) | US10008419B2 (ja) |
JP (1) | JP5617065B2 (ja) |
TW (1) | TWI517203B (ja) |
WO (1) | WO2013035590A1 (ja) |
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WO2016180456A1 (en) * | 2015-05-08 | 2016-11-17 | Imec Vzw | Method for manufacturing device substrate and semiconductor device |
EP3113215A1 (en) * | 2015-06-30 | 2017-01-04 | IMEC vzw | Method and device for inspection of a semiconductor device |
CN106710442B (zh) * | 2015-10-21 | 2021-01-22 | 京东方科技集团股份有限公司 | 背光源分离设备 |
JP7009306B2 (ja) * | 2018-05-21 | 2022-01-25 | 株式会社ディスコ | 切削装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH05129170A (ja) * | 1991-10-30 | 1993-05-25 | Fujitsu Ltd | 半導体装置の製造方法 |
JPH06275717A (ja) * | 1993-01-22 | 1994-09-30 | Mitsubishi Electric Corp | ウエハはがし方法 |
KR0165467B1 (ko) | 1995-10-31 | 1999-02-01 | 김광호 | 웨이퍼 디본더 및 이를 이용한 웨이퍼 디본딩법 |
US8092707B2 (en) * | 1997-04-30 | 2012-01-10 | 3M Innovative Properties Company | Compositions and methods for modifying a surface suited for semiconductor fabrication |
JPH11274018A (ja) * | 1998-10-09 | 1999-10-08 | Canon Inc | 複合部材の分離方法および半導体基体の作製方法 |
US6932915B2 (en) * | 2001-01-11 | 2005-08-23 | Texas Instruments Incorporated | System and method for integrated oxide removal and processing of a semiconductor wafer |
IL145649A0 (en) * | 2001-09-25 | 2002-06-30 | Nira Sciences Ltd | Method and apparatus for real-time dynamic chemical analysis |
JP5016321B2 (ja) * | 2007-02-22 | 2012-09-05 | 東京応化工業株式会社 | サポートプレートの処理方法 |
US20100112728A1 (en) * | 2007-03-31 | 2010-05-06 | Advanced Technology Materials, Inc. | Methods for stripping material for wafer reclamation |
US20100320081A1 (en) * | 2009-06-17 | 2010-12-23 | Mayer Steven T | Apparatus for wetting pretreatment for enhanced damascene metal filling |
US8742009B2 (en) * | 2010-06-04 | 2014-06-03 | Shin-Etsu Chemical Co., Ltd. | Temporary adhesive composition, and method of producing thin wafer |
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- 2012-08-22 US US14/343,598 patent/US10008419B2/en active Active
- 2012-08-22 WO PCT/JP2012/071750 patent/WO2013035590A1/en active Application Filing
- 2012-08-29 TW TW101131375A patent/TWI517203B/zh active
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TW201334025A (zh) | 2013-08-16 |
US20140335633A1 (en) | 2014-11-13 |
TWI517203B (zh) | 2016-01-11 |
WO2013035590A1 (en) | 2013-03-14 |
US10008419B2 (en) | 2018-06-26 |
JP2013058711A (ja) | 2013-03-28 |
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