JP5616789B2 - 色補正された反射屈折対物系及びそれを含む投影露光装置 - Google Patents

色補正された反射屈折対物系及びそれを含む投影露光装置 Download PDF

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JP5616789B2
JP5616789B2 JP2010523311A JP2010523311A JP5616789B2 JP 5616789 B2 JP5616789 B2 JP 5616789B2 JP 2010523311 A JP2010523311 A JP 2010523311A JP 2010523311 A JP2010523311 A JP 2010523311A JP 5616789 B2 JP5616789 B2 JP 5616789B2
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objective
image
lens
wavelength
plane
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JP2010538328A5 (enExample
JP2010538328A (ja
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アレクサンダー エプレ
アレクサンダー エプレ
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カール・ツァイス・エスエムティー・ゲーエムベーハー
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0892—Catadioptric systems specially adapted for the UV
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2010523311A 2007-09-05 2008-09-01 色補正された反射屈折対物系及びそれを含む投影露光装置 Expired - Fee Related JP5616789B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/896,689 2007-09-05
US11/896,689 US7760425B2 (en) 2007-09-05 2007-09-05 Chromatically corrected catadioptric objective and projection exposure apparatus including the same
PCT/EP2008/007123 WO2009030444A2 (en) 2007-09-05 2008-09-01 Chromatically corrected catadioptric objective and projection exposure apparatus including the same

Publications (3)

Publication Number Publication Date
JP2010538328A JP2010538328A (ja) 2010-12-09
JP2010538328A5 JP2010538328A5 (enExample) 2011-07-14
JP5616789B2 true JP5616789B2 (ja) 2014-10-29

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JP2010523311A Expired - Fee Related JP5616789B2 (ja) 2007-09-05 2008-09-01 色補正された反射屈折対物系及びそれを含む投影露光装置

Country Status (5)

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US (2) US7760425B2 (enExample)
JP (1) JP5616789B2 (enExample)
KR (1) KR101500784B1 (enExample)
CN (1) CN101849205B (enExample)
WO (1) WO2009030444A2 (enExample)

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JP2010091751A (ja) * 2008-10-07 2010-04-22 Canon Inc 投影光学系及び露光装置
DE102009037077B3 (de) 2009-08-13 2011-02-17 Carl Zeiss Smt Ag Katadioptrisches Projektionsobjektiv
DE102009048553A1 (de) * 2009-09-29 2011-03-31 Carl Zeiss Smt Gmbh Katadioptrisches Projektionsobjektiv mit Umlenkspiegeln und Projektionsbelichtungsverfahren
DE102009045217B3 (de) * 2009-09-30 2011-04-07 Carl Zeiss Smt Gmbh Katadioptrisches Projektionsobjektiv
CA2799072C (en) * 2010-05-18 2019-02-19 Itres Research Limited A compact, light-transfer system for use in image relay devices, hyperspectral imagers and spectrographs
JP2013029569A (ja) * 2011-07-27 2013-02-07 Seiko Epson Corp 投写光学系及びこれを備えるプロジェクター
US9473865B2 (en) * 2012-03-01 2016-10-18 Conexant Systems, Inc. Integrated motion detection using changes in acoustic echo path
DE102012211256A1 (de) 2012-06-29 2014-01-02 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Projektionslithographie
JP6496977B2 (ja) * 2013-03-13 2019-04-10 株式会社リコー 投射光学系、およびプロジェクタ装置
CN103268008B (zh) * 2013-05-16 2015-05-13 西北工业大学 一种长焦距高分辨率光学系统
US9703085B2 (en) 2013-11-22 2017-07-11 Nikon Corporation Catadioptric imaging systems for digital scanner
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DE102014112199B4 (de) * 2014-08-26 2024-10-10 Carl Zeiss Microscopy Gmbh Mikroskopisches Abbildungssystem
CN105549190A (zh) * 2016-01-15 2016-05-04 青岛农业大学 一种智能的折返射投射物镜
CN106443993B (zh) * 2016-11-28 2019-06-21 中国航空工业集团公司洛阳电光设备研究所 一种紧凑型双光路三视场长波红外系统
DE102017207582A1 (de) * 2017-05-05 2018-11-08 Carl Zeiss Smt Gmbh Projektionsobjektiv, Projektionsbelichtungsanlage und Projektionsbelichtungsverfahren
CN108255023B (zh) * 2018-02-23 2023-11-24 苏州大学 一种用于紫外光刻机的高分辨率投影光学成像方法及其系统
EP3811141A4 (en) * 2018-08-27 2022-03-23 KLA Corporation STEAM AS A PROTECTIVE AND LIFE EXTENDED IN OPTICAL SYSTEMS
CN111381346B (zh) * 2018-12-30 2021-05-11 上海微电子装备（集团）股份有限公司 一种光刻投影物镜
CN109765685B (zh) * 2019-03-28 2021-12-24 西安应用光学研究所 一种双视场透射式多传感器单孔径光学系统
US12066616B2 (en) * 2020-01-31 2024-08-20 The Regents Of The University Of California Reflective microscope objective lens for all colors

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US5537260A (en) * 1993-01-26 1996-07-16 Svg Lithography Systems, Inc. Catadioptric optical reduction system with high numerical aperture
JPH1184248A (ja) * 1997-09-12 1999-03-26 Nikon Corp 反射屈折縮小光学系
JP4235778B2 (ja) * 1998-05-21 2009-03-11 株式会社ニコン 投影光学系、投影光学装置、走査型露光装置、光加工方法および露光方法
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US7301605B2 (en) * 2000-03-03 2007-11-27 Nikon Corporation Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices
DE10104177A1 (de) * 2001-01-24 2002-08-01 Zeiss Carl Katadioptrisches Reduktionsobjektiv
DE10127227A1 (de) * 2001-05-22 2002-12-05 Zeiss Carl Katadioptrisches Reduktionsobjektiv
DE10210899A1 (de) * 2002-03-08 2003-09-18 Zeiss Carl Smt Ag Refraktives Projektionsobjektiv für Immersions-Lithographie
JP4292497B2 (ja) * 2002-04-17 2009-07-08 株式会社ニコン 投影光学系、露光装置および露光方法
JP2004126520A (ja) * 2002-08-05 2004-04-22 Nikon Corp 投影光学系、露光装置、及び回路パターンの形成方法
CN1307456C (zh) 2003-05-23 2007-03-28 佳能株式会社 投影光学系统、曝光装置及器件的制造方法
JP2007508591A (ja) 2003-10-17 2007-04-05 カール・ツァイス・エスエムティー・アーゲー 反射屈折投影対物レンズ
KR101179350B1 (ko) * 2004-01-14 2012-09-11 칼 짜이스 에스엠티 게엠베하 반사굴절식 투영 대물렌즈
JP2006138940A (ja) * 2004-11-10 2006-06-01 Canon Inc 反射屈折型投影光学系及び投影反射屈折型投影光学系を有する露光装置、デバイス製造方法
US7760425B2 (en) * 2007-09-05 2010-07-20 Carl Zeiss Smt Ag Chromatically corrected catadioptric objective and projection exposure apparatus including the same

Also Published As

Publication number Publication date
US20090059358A1 (en) 2009-03-05
US7760425B2 (en) 2010-07-20
CN101849205B (zh) 2013-06-26
KR101500784B1 (ko) 2015-03-09
US8004756B2 (en) 2011-08-23
US20110007387A1 (en) 2011-01-13
CN101849205A (zh) 2010-09-29
WO2009030444A2 (en) 2009-03-12
KR20100052515A (ko) 2010-05-19
JP2010538328A (ja) 2010-12-09
WO2009030444A3 (en) 2009-06-04

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