JP5610360B1 - Liquid jet cleaning machine using ultrasonic waves - Google Patents
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Abstract
【課題】本発明は気泡が発生しても、溜り室は気泡を寄り集められる一時待機する場所と成り溜り室を設ける事により気泡を容易に排出口に誘導する事ができる。また、振動子カバーの接液面から排出口の上部位置の長さ（L）により、排出口の上部位置を基点にして水平なA−Aの範囲内に接液面が在れば、ノズルの傾けられる角度(β)が任意に決める事ができる液体噴射式洗浄機を得ることにある。【解決手段】ノズル内の気泡は内圧で浮上して振動子カバーの接液面に滞留せず溜り室に入り溜り室は気泡を寄り集められる一時待機する場所と成り排出口に誘導して排出配管より排出する。また、接液面から排出口の上部位置の長さ（L）により排出口の上部位置を基点にして水平なA−Aの範囲内に接液面が在れば、ノズルの傾けられる角度(β)が決まるので、その角度(β) 内の傾きとで超音波による液体噴射式洗浄機を構成している。【選択図】 図１Even if bubbles are generated, the present invention provides a temporary standby place where bubbles are gathered and gathered, so that bubbles can be easily guided to a discharge port by providing a storage chamber. If the wetted surface is within the horizontal range AA with the upper position of the discharge port as the starting point, the nozzle (if the liquid contact surface of the vibrator cover is at the upper position of the discharge port (L)) The object is to obtain a liquid jet type washing machine in which the angle (β) of the tilt can be arbitrarily determined. The bubbles in the nozzle float by the internal pressure and do not stay on the liquid contact surface of the vibrator cover, enter the reservoir chamber, and the reservoir chamber becomes a temporary standby place where bubbles are gathered together and guided to the discharge port to be discharged. Discharge from piping. In addition, if the wetted surface is within the horizontal AA range from the upper position of the discharge port based on the length (L) of the upper position of the discharge port from the wetted surface, the angle at which the nozzle is tilted ( Since β) is determined, a liquid jet cleaning machine using ultrasonic waves is constituted by the inclination within the angle (β). [Selection] Figure 1
Description
本発明は、液体噴射式洗浄機、詳しくは洗浄液中に超音波を伝搬させて、そのエネルギーによって洗浄液をノズルから噴射させて洗浄する超音波による液体噴射式洗浄機に関する。 The present invention relates to a liquid-jet cleaning machine, and more particularly, to an ultrasonic liquid-jet cleaning machine in which ultrasonic waves are propagated in a cleaning liquid and cleaning is performed by spraying a cleaning liquid from a nozzle using the energy.
従来の超音波による液体噴射式洗浄機は例えば、基板等、電子部品や精密機器などの洗浄に用いられるもので、液体噴射式洗浄機は図３に示すように重力方向の下向きに固定されたノズル（１）と、ノズル（１）の噴射口（１１）と対向する閉塞部に装着された振動子（２）と、ノズル（１）内に洗浄液を供給する供給配管（３）を接続する供給口（１０）と対向する側面に洗浄液の過多量又は液中の気泡を排出する排出配管（４）を接続する排出口（１２）とをノズル（１）に備える。また、振動子（２）より下部の洗浄液が上部のケーブル（８）の方に漏れなくするシール部材（５）とで構成されている。Conventional ultrasonic liquid jet cleaning machines are used for cleaning electronic components and precision instruments such as substrates, for example, and the liquid jet cleaning machine is fixed downward in the direction of gravity as shown in FIG. The nozzle (1), the vibrator (2) attached to the closing portion facing the injection port (11) of the nozzle (1), and the supply pipe (3) for supplying the cleaning liquid into the nozzle (1) are connected. The nozzle (1) is provided with a discharge port (12) connected to a discharge pipe (4) for discharging an excessive amount of cleaning liquid or bubbles in the liquid on the side surface facing the supply port (10). Further, the cleaning liquid below the vibrator (2) is constituted by a seal member (5) that prevents the upper cable (8) from leaking.
その排出配管（４）の排出口（１２）の位置を振動子（２）の接液面（２ａ）と同じ又はそれより高くしているので、液中の気泡は浮力によって排出口（１２）より排出される。供給配管（３）からノズル（１）の中に供給された洗浄液は振動子（２）の励振と共に重力以上に加速して洗浄対象物（９）に向かって噴射する。従って、液体噴射式洗浄機の場合、洗浄液に超音波を有効に作用させ洗浄能力を十分に発揮させるためには、励振時に振動子（２）の接液面（２ａ）は洗浄液に常に接していなければならない。もし、接液面（２ａ）が洗浄液に接していない状態で振動子（２）を励振させると、洗浄能力を発揮できないばかりか、振動子が空励振状態となって寿命を縮める。また空励振状態を続けると振動子（２）が破損する等の問題があった。 Since the position of the discharge port (12) of the discharge pipe (4) is the same as or higher than the liquid contact surface (2a) of the vibrator (2), the bubbles in the liquid are discharged by the buoyancy. More discharged. The cleaning liquid supplied from the supply pipe (3) into the nozzle (1) is accelerated above the gravity with the excitation of the vibrator (2) and sprayed toward the cleaning object (9). Therefore, in the case of a liquid jet type cleaning machine, in order to effectively apply ultrasonic waves to the cleaning liquid and to fully display the cleaning ability, the liquid contact surface (2a) of the vibrator (2) is always in contact with the cleaning liquid during excitation. There must be. If the vibrator (2) is excited in a state where the liquid contact surface (2a) is not in contact with the cleaning liquid, not only the cleaning ability can be exhibited, but also the vibrator is in an idle excitation state and the life is shortened. Further, when the idling state is continued, there is a problem that the vibrator (2) is damaged.
しかし、供給配管（３）内に残留している気泡だけでなく、薬剤の混合により気泡が発生しやすい洗浄液、たとえばＮＨ４ＯＨ（アンモニア）＋Ｈ２Ｏ２（過酸化水素）＋Ｈ２Ｏ（純水）とかＨＣｌ（塩素）＋Ｈ２Ｏ２（過酸化水素）＋Ｈ２Ｏ（純水）等の過酸化水素（Ｈ２Ｏ２）等は常に気泡を発生しやすいので排出口（１２）に誘導する必要がある。又は洗浄対象物（９）に対して直角方向で洗浄している時、過渡的に気泡が多く発生した時に接液面（２ａ）上の気泡が一時待機する場所がないため接液面（２ａ）上に滞留するので、排出口（１２）に誘導する為に排出口（１２）の穴径を大きくして気泡を容易に誘導するのも良いが、薬剤の混合洗浄液を必要以上に放出するのはＰＲＴＲ法の対象となる特定化学物質の削減を鑑みると好ましくない。また、排出口（１２）は絞られているので既定量の排出しか出来ないため、気泡が過渡的に多く発生しても一時待機できる場所がない。更にノズル（１）を（図２）の用に傾斜させての洗浄が出来ない問題がある。However, not only bubbles remaining in the supply pipe (3) but also a cleaning liquid in which bubbles are likely to be generated due to mixing of chemicals, for example, NH4OH (ammonia) + H2O2 (hydrogen peroxide) + H2O (pure water) or HCl (chlorine). Since hydrogen peroxide (H 2 O 2) such as + H 2 O 2 (hydrogen peroxide) + H 2 O (pure water) always tends to generate bubbles, it must be guided to the outlet (12). Alternatively, when cleaning is performed in a direction perpendicular to the object to be cleaned (9), there is no place where the bubbles on the liquid contact surface (2a) temporarily wait when a large number of bubbles are transiently generated. ) Stays above, so that it is possible to easily induce bubbles by enlarging the hole diameter of the discharge port (12) in order to guide to the discharge port (12). This is not preferable in view of the reduction of specific chemical substances subject to the PRTR method. In addition, since the discharge port (12) is narrowed, only a predetermined amount can be discharged, so there is no place where it can stand by temporarily even if a large number of bubbles are generated transiently. In addition, there is a problem that the nozzle (1) cannot be cleaned by being inclined for (FIG. 2).
複数の薬剤を混合し、過渡的に気泡が多く発生する洗浄液の場合、気泡が接液面（２ａ）に少しでも滞留すること無く排出するには、ノズル（１）の角度を今より傾斜させて気泡を排出するしかないが、その角度を変えることは洗浄の質や洗浄能力が変化するので好ましくない。従来の液体噴射式洗浄機の如く、洗浄対象物（９）に対してノズル（１）が直角方向になっているものでは、過渡的に気泡が多く発生した時に気泡の一時待機できる場所がないと言う問題が生じる。また任意の角度に傾斜して洗浄が出来ないと言った問題もある。それ故この発明の目的は、傾斜しての洗浄を可能にして振動子の破損を防止することができる超音波による液体噴射式洗浄機を提供する事を目的としている。In the case of a cleaning liquid in which a plurality of chemicals are mixed and a large amount of bubbles are generated transiently, the nozzle (1) is inclined more than the angle of the nozzle (1) in order to discharge the bubbles without staying on the liquid contact surface (2a). However, it is not preferable to change the angle because the quality of cleaning and the cleaning ability change. In the case where the nozzle (1) is perpendicular to the object to be cleaned (9) as in the conventional liquid jet type washing machine, there is no place where the bubbles can be temporarily held when many bubbles are generated transiently. The problem that occurs. There is also a problem that it cannot be cleaned at an arbitrary angle. Therefore, an object of the present invention is to provide a liquid jet cleaning machine using ultrasonic waves that can be washed while being tilted to prevent damage to the vibrator.
上記の目的を達成するために、請求項１の本発明は、供給口（１０）からノズル（１）内に供給された洗浄液に振動子（２）によって超音波を伝搬させてその洗浄液を噴射口（１１）から噴射させながら、洗浄液から発生した気泡を洗浄液の過多量と共に排出口（１２）から排出するように構成した液体噴射式洗浄機において、ノズル（１）内に供給された洗浄液に振動子カバー（１４）の底板の接液面（２ａ）が接触する位置に設けた振動子カバー（１４）と、振動子カバー（１４）の底板の上面に設置した振動子（２）と、振動子カバー（１４）の側板とノズル内面との間に設けた円筒状の溜り室（１３）と、振動子カバー（１４）の側板上部とノズル（１）内面との間に設けられノズル（１）内に供給された洗浄液と振動子（２）との接触を防止するためのシール部材（５）と、を備え、洗浄液が流入する供給口（１０）よりも洗浄液が流出する排出口（１２）が上側に位置し、この排出口（１２）が円筒状の溜り室（１３）の上部に位置し、またこの排出口（１２）の少なくとも一部及び前記円筒状の溜り室（１３）の少なくとも一部の位置が、前記ノズル（１）の最大傾斜可能角度で、振動子カバー（１４）の接液面より高くなっており、供給口（１０）より供給された洗浄液に含まれた気泡及びノズル（１）内で発生した気泡は、上方に浮上して円筒状の溜り室（１３）に入り、この円筒状の溜り室（１３）を通して洗浄液とともに排出口を通して排出されることを特徴とする。In order to achieve the above object, the present invention according to claim 1 is directed to injecting the cleaning liquid by propagating ultrasonic waves by the vibrator (2) to the cleaning liquid supplied from the supply port (10) into the nozzle (1). In the liquid-jet cleaning machine configured to discharge air bubbles generated from the cleaning liquid from the discharge port (12) together with an excessive amount of the cleaning liquid while spraying from the mouth (11), the cleaning liquid supplied into the nozzle (1) A vibrator cover (14) provided at a position where the liquid contact surface (2a) of the bottom plate of the vibrator cover (14) contacts; a vibrator (2) installed on the top surface of the bottom plate of the vibrator cover (14); A cylindrical reservoir chamber (13) provided between the side plate of the vibrator cover (14) and the inner surface of the nozzle, and a nozzle provided between the upper side plate of the vibrator cover (14) and the inner surface of the nozzle (1) ( 1) The cleaning liquid supplied inside and the vibrator (2) A seal member (5) for preventing touching, and a discharge port (12) through which the cleaning liquid flows out is positioned above the supply port (10) through which the cleaning liquid flows, and the discharge port (12) is cylindrical. Located at the upper part of the cylindrical reservoir (13), and the positions of at least a part of the discharge port (12) and at least a part of the cylindrical reservoir (13) are the maximum inclination of the nozzle (1). At a possible angle, it is higher than the liquid contact surface of the vibrator cover (14), and bubbles contained in the cleaning liquid supplied from the supply port (10) and bubbles generated in the nozzle (1) float upward. Then, it enters the cylindrical reservoir chamber (13), and is discharged through the discharge port together with the cleaning liquid through the cylindrical reservoir chamber (13).
以上の説明から明らかなように、本説明にあっては次に列挙する効果が得られる。 As is clear from the above description, the effects listed below can be obtained in this description.
請求項１の液体噴射式洗浄機では、図１に示す気泡が発生してもノズル（１）内の圧力が上昇して振動子カバー（１４）の底板の接触面（２ａ）上の気泡が浮力によって接触面（２ａ）に滞留すること無く円筒状の溜り室（１３）に入り、この円筒状の溜り室（１３）を通して排出口（１２）から排出される。円筒状の溜り室（１３）を設ける事により気泡を集められる一時待機する場所と成り、気泡を排出口（１２）に誘導する溜り室（１３）として構成され、これにより、振動子（２）の破損を防止する事ができる。
また、排出口（１２）が供給口（１０）よりも上側に位置し、この排出口（１２）が円筒状の溜り室（１３）の上部に位置しているので、供給口（１０）より供給された洗浄液に含まれた気泡は、上方に浮上して円筒状の溜り室（１３）に入り、この円筒状の溜り室（１３）を通して洗浄液とともに排出口（１２）を通して排出する事ができる。 In the liquid jet cleaning machine according to the first aspect, even if the bubbles shown in FIG. 1 are generated, the pressure in the nozzle (1) rises and bubbles on the contact surface (2a) of the bottom plate of the vibrator cover (14) are formed. without cylindrical reservoir staying in the contact surface (2a) by buoyancy enters (13), is discharged from the discharge port (12) through the cylindrical reservoir chamber (13). A cylindrical storage chamber (13) become a place to temporarily waits collected bubbles by providing is configured as a reservoir chamber (13) to divert to the outlet (12) air bubbles, thereby, the vibrator (2) Can be prevented from being damaged.
Moreover, since the discharge port (12) is located above the supply port (10), and this discharge port (12) is located in the upper part of the cylindrical reservoir (13), it is from the supply port (10). Bubbles contained in the supplied cleaning liquid float upward and enter the cylindrical reservoir chamber (13), and can be discharged through the discharge port (12) together with the cleaning liquid through the cylindrical reservoir chamber (13). .
また、図２に示すノズル（１）の中に装着したＵ字型に成っている振動子カバー（１４）の下部に在る底板の接液面（２ａ）から排出口（１２）の上部位置の長さ（Ｌ）は任意に決まる事ができるが、接液面（２ａ）から排出口（１２）の上部位置の長さ（Ｌ）によりノズルの中心と洗浄対象物（９）の垂線との角度βは接液面（２ａ）が排出口（１２）の上部位置を基点にして水平なＡ−Ａの範囲内の傾きであれば振動子カバー（１４）の接液面（２ａ）に滞留することなく排出口（１２）の方に回り込み気泡が洗浄液と共に排出口（１２）から排出するため、ノズル（１）を傾斜する様に構成されているので、振動子（２）の破損を防止する事ができる。 Further, the upper position of the discharge port (12) from the liquid contact surface (2a) of the bottom plate located in the lower part of the U-shaped vibrator cover (14) mounted in the nozzle (1) shown in FIG. The length (L) of the nozzle can be determined arbitrarily, but the length of the upper position of the discharge port (12) from the liquid contact surface (2a) and the vertical line of the object to be cleaned (9) are determined by the length (L). If the liquid contact surface (2a) is inclined within the horizontal range AA with the upper position of the discharge port (12) as a base point, the angle β of the contact surface (2a) of the vibrator cover (14) The nozzle (1) is inclined so that the air bubbles flow toward the discharge port (12) without being retained and are discharged from the discharge port (12) together with the cleaning liquid, so that the vibrator (2) is damaged. It can be prevented.
以下、本発明の実施の形態を図に基づいて説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
図１は、本発明の実施例１の断面図であって、薬剤等を混合した気泡が発生する洗浄液は、図示しない供給タンクから送られ、供給配管（３）を通りノズル（１）の内に入ると噴射口（１１）から吐出するが、噴出口（１１）が絞られているのでノズル（１）内部の圧力が上昇するため、ノズル（１）を洗浄対象物（９）に対して直角にしても、また３６０度どの位置にした場合でも、接液面（２ａ）上の気泡が浮上して円筒状の溜り室（１３）に入るので、溜り室（１３）は気泡を集める一時待機場所と成りタンパー室の役目も果たす。また、溜り室（１３）を円筒状に構成しているとともに、図１に示すように排出口（１２）を溜り室（１３）の上部に位置させているので、気泡は浮上してこの溜り室（１３）を通して排出口（１２）の方に押し流され、絞られた排出口（１２）から気泡は洗浄液と共に排出配管（４）を通り排出される。また、図１に示すように、供給口（１０）よりも上側に排出口（１０）が位置しているので、供給口（１０）より供給された洗浄液に含まれた気泡は、上方に浮上して円筒状の溜り室（１３）に入り、この円筒状の溜り室（１３）を通して洗浄液とともに排出口（１２）を通して排出される。 FIG. 1 is a cross-sectional view of Embodiment 1 of the present invention, in which a cleaning liquid in which bubbles are mixed with a medicine and the like is sent from a supply tank (not shown), passes through a supply pipe (3), and enters the nozzle (1). When it enters, it discharges from the injection port (11), but since the injection port (11) is throttled, the pressure inside the nozzle (1) rises. Even if it is at a right angle and at any position of 360 degrees, the bubbles on the liquid contact surface (2a) float up and enter the cylindrical reservoir (13), so the reservoir (13) temporarily collects the bubbles. It becomes a waiting area and also serves as a tamper room. Further, the constituting reservoir (13) into a cylindrical shape, since the discharge port (12) is positioned on top of the reservoir (13) as shown in FIG. 1, bubbles emerged this reservoir The air is forced to flow through the chamber (13) toward the discharge port (12), and the bubbles are discharged through the discharge pipe (4) together with the cleaning liquid from the throttled discharge port (12). Further, as shown in FIG. 1, since the discharge port (10) is located above the supply port (10), the bubbles contained in the cleaning liquid supplied from the supply port (10) float upward. Then, it enters the cylindrical reservoir (13) and is discharged through the discharge port (12) together with the cleaning liquid through the cylindrical reservoir (13).
図２では、ノズル（１）内の振動子カバー（１４）の底板の接液面（２ａ）から排出口（１２）の上部位置の長さ（Ｌ）を変えると傾けられる角度（β）も変わる。またノズル（１）の排出口（１２）の上部位置を基点にして接液面（２ａ）が傾いている上部の接点までの水平な線Ａ−Ａが振動子（２）を発振するのに必要となる最低液面で、これによりノズル（１）の傾く角度（β）が決まる。 その傾きの角度（β）内であれば気泡が接液面（２ａ）に滞留せず浮上して溜り室（１３）の中で排出口（１２）の方に回り込み洗浄液と共に排出口（１２）から排出配管（４）より排出する。また、溜り室（１３）に気泡が過渡的により多く流れ溜り室（１３）からあふれて接液面（２ａ）に残留する場合は、長さ（Ｌ）を長く取るか、又は排出口（１２）の穴径を大きくして調節すると接液面（２ａ）に滞留せず排出口（１２）から気泡が洗浄液と共に排出配管（４）より排出することができる。In FIG. 2, when the length (L) of the upper position of the discharge port (12) is changed from the liquid contact surface (2a) of the bottom plate of the vibrator cover (14) in the nozzle (1), the angle (β) tilted is also changed. change. In addition, a horizontal line AA from the upper position of the discharge port (12) of the nozzle (1) to the upper contact where the liquid contact surface (2a) is inclined oscillates the vibrator (2). This determines the angle of inclination (β) of the nozzle (1) at the minimum liquid level required. If the angle is within the inclination angle (β), the air bubbles do not stay on the liquid contact surface (2a) but rise to the inside of the reservoir chamber (13) toward the discharge port (12) and the cleaning solution together with the cleaning solution (12). From the discharge pipe (4). Further, when more bubbles are transiently overflowing in the reservoir chamber (13) and overflow from the reservoir chamber (13) and remain on the liquid contact surface (2a), the length (L) is increased or the discharge port (12 When the hole diameter is adjusted to be large, bubbles do not stay on the liquid contact surface (2a) and bubbles can be discharged from the discharge port (12) through the discharge pipe (4) together with the cleaning liquid.
本発明は、超音波による液体噴射式洗浄機を製造する産業で利用される。 The present invention is used in an industry for manufacturing a liquid jet cleaning machine using ultrasonic waves.
１ ノズル
２ 振動子
３ 供給配管
４ 排出配管
５ シール部材
６ カラー
７ カバー
８ ケーブル
９ 洗浄対象物
１０ 供給口
１１ 噴射口
１２ 排出口
１３ 溜り室
１４ 振動子カバー
２ａ 接液面DESCRIPTION OF SYMBOLS 1 Nozzle 2 Vibrator 3 Supply piping 4 Discharge piping 5 Seal member 6 Collar 7 Cover 8 Cable 9 Cleaning object 10 Supply port 11 Injection port 12 Discharge port 13 Reservoir chamber 14 Vibrator cover 2a Wetted surface
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013199951A JP5610360B1 (en) | 2013-09-26 | 2013-09-26 | Liquid jet cleaning machine using ultrasonic waves |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2013199951A JP5610360B1 (en) | 2013-09-26 | 2013-09-26 | Liquid jet cleaning machine using ultrasonic waves |
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| JP5610360B1 true JP5610360B1 (en) | 2014-10-22 |
| JP2015066466A JP2015066466A (en) | 2015-04-13 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110947689A (en) * | 2019-12-12 | 2020-04-03 | 无锡市鹏振智能科技有限公司 | Cup cleaning device and cup cleaning system |
| CN110947689B (en) * | 2019-12-12 | 2024-05-31 | 无锡市鹏振智能科技有限公司 | Cup cleaning device and cup cleaning system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0556285U (en) * | 1992-01-07 | 1993-07-27 | 株式会社カイジョー | Ultrasonic cleaning equipment |
| JPH10223589A (en) * | 1997-02-06 | 1998-08-21 | Dainippon Screen Mfg Co Ltd | Treating-liquid discharge pipe, ultrasonic cleaning nozzle, and substrate-treating device |
| JPH10305248A (en) * | 1997-05-02 | 1998-11-17 | Excel Eng:Kk | Liquid jetting device using ultrasonic wave |
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2013
- 2013-09-26 JP JP2013199951A patent/JP5610360B1/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0556285U (en) * | 1992-01-07 | 1993-07-27 | 株式会社カイジョー | Ultrasonic cleaning equipment |
| JPH10223589A (en) * | 1997-02-06 | 1998-08-21 | Dainippon Screen Mfg Co Ltd | Treating-liquid discharge pipe, ultrasonic cleaning nozzle, and substrate-treating device |
| JPH10305248A (en) * | 1997-05-02 | 1998-11-17 | Excel Eng:Kk | Liquid jetting device using ultrasonic wave |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110947689A (en) * | 2019-12-12 | 2020-04-03 | 无锡市鹏振智能科技有限公司 | Cup cleaning device and cup cleaning system |
| CN110947689B (en) * | 2019-12-12 | 2024-05-31 | 无锡市鹏振智能科技有限公司 | Cup cleaning device and cup cleaning system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015066466A (en) | 2015-04-13 |
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