KR102317912B1 - Fluid tank - Google Patents

Abstract

An object of the present invention is to provide a chemical liquid tank capable of effectively collecting bubbles generated in the tank during the chemical recovery process and discharging it to the outside of the tank. The present invention for this purpose is a tank body having an internal space filled with a chemical solution, a first through hole for discharging bubbles in the ceiling portion, and a second through hole through the side wall portion through which the chemical solution flows; a bubble collecting pipe having one end coupled to the first through hole and having the other end submerged in the chemical liquid filled in the inner space; and a chemical recovery pipe having one end coupled to the second through hole and extending into the inner space, and the other end being inserted into the bubble collecting pipe while being spaced apart from the inner circumferential surface of the bubble collecting pipe. do.

Description

Chemical tank {FLUID TANK}

The present invention relates to a chemical liquid tank, and more particularly, to a chemical liquid tank capable of collecting bubbles generated inside the tank and discharging it to the outside of the tank.

In general, a substrate used for manufacturing an LCD display is manufactured by repeatedly performing unit processing processes such as deposition, pattern formation, etching, chemical mechanical polishing, cleaning, and drying.

In order to effectively treat the substrate during the substrate manufacturing process, a chemical solution prepared for a special purpose may be used, and the chemical solution may be stored in a chemical solution tank and, if necessary, may be supplied from the chemical solution tank to a place of use, and used The chemical solution may be recovered to the chemical solution tank again.

Bubbles may be generated in the chemical solution recovered to the chemical solution tank during substrate processing or flow, and these bubbles may be introduced into the chemical solution tank together with the chemical solution during the recovery process of the chemical solution. In addition, bubbles may be generated as the chemical liquids collide with the chemical liquid tank or chemical liquids in the process of flowing into the chemical liquid tank, and the bubbles generated in this way are continuously accumulated inside the chemical liquid tank.

As such, the bubbles present in the chemical tank may cause the following problems.

First, in the process of passing the pump for supplying or recovering the chemical solution contained in the chemical solution tank, mechanical damage may occur to the pump.

In addition, if a large amount of bubbles exist inside the chemical liquid tank, the sensitivity of the water level sensor provided in the chemical liquid tank may be affected, and the water level measurement inside the chemical liquid tank may be inaccurate.

A large amount of foam may also degrade the quality of the substrate being processed.

Republic of Korea Patent Publication No. 10-1638429 (2016.07.12. Announcement)

An object of the present invention is to solve the problems of the prior art, and the present invention is to provide a chemical liquid tank capable of effectively collecting bubbles generated in the tank during the chemical liquid recovery process and discharging it to the outside of the tank.

In order to achieve the above object of the present invention, the chemical liquid tank according to an embodiment of the present invention is provided with an internal space filled with a chemical, the ceiling is provided with a first through hole for discharging bubbles, the side wall is the chemical liquid The tank body provided with the second through-hole to be introduced; a bubble collecting pipe having one end coupled to the first through hole and having the other end submerged in the chemical liquid filled in the inner space; and a chemical recovery pipe having one end coupled to the second through hole and extending into the inner space, and the other end being inserted into the bubble collecting pipe while being spaced apart from the inner circumferential surface of the bubble collecting pipe. .

In the chemical solution tank according to an embodiment of the present invention, the chemical solution recovery pipe, a pipe fixing portion coupled through the second through hole; a horizontal extension part connected to the pipe fixing part and extending into the inner space; And it may include a vertical insertion portion connected to the horizontal extension is formed to extend upward so that at least a portion is inserted into the bubble collection pipe.

In the chemical liquid tank according to an embodiment of the present invention, the chemical recovery pipe may include: a horizontal expansion joint connecting the pipe fixing part and the horizontal extension part; And it may further include a vertical expansion joint connecting the horizontal extension portion and the vertical insertion portion.

In the chemical tank according to an embodiment of the present invention, the cartridge body coupled to the upper surface of the tank body so as to be connected to the first through-hole, and filled with the bubbles discharged from the bubble collection pipe may further include.

In the chemical liquid tank according to an embodiment of the present invention, the cartridge body, a side wall member coupled to the upper surface of the tank body; an upper cover detachably coupled to the upper surface of the side wall member so as to check the state of the bubble filled therein; and a handle coupled to the upper surface of the upper cover.

In the chemical liquid tank according to an embodiment of the present invention, the cartridge body may further include a pipe connection member disposed at a position spaced apart from the first through hole, and for discharging the bubbles filled therein to the outside.

In the chemical liquid tank according to an embodiment of the present invention, the end of the bubble collecting pipe is inserted so as to be in contact with a portion of the inner circumferential surface of the first through hole, and the other end of the inner circumferential surface of the first through hole to which the bubble collecting pipe is not in contact. It may be coupled to the first through hole through welding performed on the part.

According to the present invention, although the structure is very simple through the improved pipe structure, the bubbles present inside the tank can be effectively collected and discharged to the outside of the tank, and thus, mechanical damage of the pump for transferring the chemical can be prevented, It is possible to prevent malfunction of the water level measuring sensor and to improve the quality of the substrate to be treated with the chemical.

1 is an overall exemplary view showing a chemical liquid tank in a state in which some sidewalls of the tank body are removed so that the inside of the chemical liquid tank is visible in an embodiment of the present invention.
2 is a cross-sectional view of a chemical liquid tank according to an embodiment of the present invention.
3 is an overall exemplary view showing the chemical liquid tank in a state in which the tank body is removed according to an embodiment of the present invention.
Figure 4 is a partial cross-sectional exemplary view for showing the combined structure of the bubble collection pipe and the chemical solution recovery pipe according to an embodiment of the present invention.
Figure 5 is a partial cross-sectional exemplary view for showing the combined structure of the bubble collecting pipe and the tank body according to an embodiment of the present invention.
6 is an overall exemplary view showing the chemical liquid tank in a state in which the upper cover of the cartridge body according to the embodiment of the present invention is removed.

Hereinafter, preferred embodiments of the present invention in which the above-described problems to be solved can be specifically realized will be described with reference to the accompanying drawings. In describing the present embodiments, the same names and reference numerals may be used for the same components, and an additional description thereof may be omitted.

1 is an overall exemplary view showing a chemical liquid tank in a state in which a part of the side wall of the tank body is removed so that the inside of the chemical liquid tank is visible in an embodiment of the present invention, and FIG. 2 is a cross-sectional example of the chemical liquid tank according to an embodiment of the present invention 3 is an overall exemplary view showing the chemical liquid tank in a state in which the tank body is removed according to an embodiment of the present invention.

In addition, Figure 4 is a partial cross-sectional exemplary view for showing the coupling structure of the bubble collection pipe and the chemical solution recovery pipe according to an embodiment of the present invention, Figure 5 is a combined structure of the bubble collection pipe and the tank body according to an embodiment of the present invention It is a partial cross-sectional exemplary view for showing, and FIG. 6 is an overall exemplary view showing the chemical liquid tank with the upper cover of the cartridge body removed according to an embodiment of the present invention.

1 to 6 , the chemical liquid tank according to the embodiment of the present invention may include a tank body 10 , a bubble collection pipe 20 , and a chemical liquid recovery pipe 30 .

The tank body 10 may be provided with an internal space in which the chemical is filled, a first through hole 10a for discharging bubbles, and a second through hole 10b through which the chemical is introduced.

The first through-hole 10a may be formed in the ceiling portion of the tank body 10 , and the second through-hole 10b may be formed in the lower region of the side wall portion so as to be adjacent to the bottom portion of the tank body 10 . A bubble collection pipe 20 to be described later may be coupled to the first through hole 10a, and a chemical solution recovery pipe 30 to be described later may be coupled to the second through hole 10b.

In general, the chemical solution used in the plurality of substrate processing processes may be recovered into one chemical solution tank, and accordingly, the second through hole 10b corresponds to the quantity of the chemical solution recovery pipe 30 provided for recovering the chemical solution. The number may be provided, and the number of the first through-holes 10a may also be provided corresponding to the number of the second through-holes 10b. In the illustrated embodiment, two first through-holes (10a) and second through-holes (10b) to which two bubble collection pipes 20 and chemical solution recovery pipe 30 are respectively coupled are provided.

In addition, although not shown, the tank body 10 may be provided with a third through-hole to which the chemical solution supply pipe for supplying the received chemical to the place of use is coupled.

The bubble collection pipe 20 has one end coupled to the first through hole 10a and may be provided in a vertical direction in the inner space of the tank body 10 . The other end of the bubble collecting pipe 20 disposed in the vertical direction in the inner space of the tank body 10 is spaced apart from the bottom surface of the tank body 10 and has a sufficient length to be immersed in the chemical solution filled in the inner space. may be provided.

The bubble collection pipe 20 may be formed to have an inner circumferential surface of the same diameter, and according to the embodiment, although it shows a pipe having a circular cross-section, it may be formed to have various cross-sectional shapes such as a polygonal shape. .

The chemical recovery pipe 30 has one end coupled to the second through hole 10b and may be formed to extend into the inner space of the tank body 10 . The other end of the chemical recovery pipe 30 formed to extend into the inner space of the tank body 10 may be inserted into the lower end of the bubble collection pipe 20 . At this time, the insertion end of the chemical recovery pipe 30 so as to form a flow space D between the insertion end of the chemical recovery pipe 30 and the lower end of the bubble collection pipe 20 is from the inner peripheral surface of the lower end of the bubble collection pipe 20 It may be inserted and disposed in a spaced apart state.

The chemical recovery pipe 30 according to the embodiment may include a pipe fixing part 31 , a horizontal extension part 32 , and a vertical insertion part 33 .

The pipe fixing part 31 forms one end of the chemical recovery pipe 30 , and may be coupled to the tank body 10 through the second through hole 10b. A flange part 31a may be provided at one end of the pipe fixing part 31 exposed to the outside through the second through hole 10b, and the flange part 31a may be coupled to a chemical discharge pipe not shown. have.

The horizontal extension part 32 is formed to connect the pipe fixing part 31 and the vertical insertion part 33, has a predetermined diameter, and may be formed to extend in the horizontal direction.

The vertical insertion part 33 may be formed to extend in the vertical direction by being connected to the horizontal extension part 32 . At least a portion of the vertical insertion part 33 may be inserted into the lower end of the bubble collection pipe 20 .

That is, by maintaining the outer diameter of the vertical insertion part 33 is smaller than the inner diameter of the bubble collection pipe 20, the flow space D is formed between the vertical insertion part 33 and the bubble collection pipe 20. can

The size of the flow space (D) is sufficient as long as the flow of the chemical can be secured naturally, and if the flow space (D) is relatively large, bubbles can be introduced into the inner space of the tank body (10), If the flow space (D) is relatively too small, the smooth flow of the chemical may be hindered. The ratio of the inner diameter of the bubble collecting pipe 20 and the outer diameter of the vertical insertion part 33 according to the embodiment may be 10:9.

In addition, the insertion length (L) of the vertical insertion part (33) inserted into the bubble collection pipe (20) also satisfies the natural flow of the chemical to the flow space (D) side, while at the same time effectively blocking the entry of bubbles into the flow space (D) side. It may be formed to have a set length.

For example, if the insertion length (L) of the vertical insertion part 33 is set too high, in the process of filling the internal space of the tank body 10 with the chemical solution, the vertical insertion part 33 becomes submerged under the water surface. Since it takes time, a large amount of bubbles may be introduced into the inner space through the flow space D that is not filled with the initial chemical into which the chemical is introduced into the inner space of the tank body 10 .

In the end, the insertion length (L) of the vertical insertion part (33) maintains the lowest height so that the level of the chemical solution can be reached in a short time, but the natural flow of the chemical solution toward the flow space (D) is satisfied, and the flow space (D) It has a length that can effectively block the entry of bubbles to the side. The insertion length (L) of the vertical insertion part 33 according to the embodiment may be 20 to 40 mm, preferably 35 mm. And, the vertical length from the lower end of the bubble recovery pipe 20 to the upper part of the horizontal extension part 32 of the chemical recovery pipe 30 may be 30 mm.

As described above, the chemical liquid flowing in through the chemical recovery pipe 30 flows downward through the flow space D at the upper end of the vertical insertion part 33 and flows into the inner space of the tank body 10 . In this process, the bubbles are not moved toward the flow space (D) by the pressure of the chemical liquid filled in the flow space (D), but are moved upward in the bubble collecting pipe (20).

Meanwhile, the chemical recovery pipe 30 may further include a horizontal expansion joint 35 and a vertical expansion joint 36 .

The horizontal expansion joint 35 may be provided to connect the pipe fixing part 31 and the horizontal extension part 32 . Through this, it is possible to adjust the position of the horizontal extension part 32 while contracting or extending the horizontal expansion joint 35 in a state in which the pipe fixing part 31 is coupled to the tank body 10, and accordingly, horizontal The vertical insertion portion 33 coupled to the other end of the extension portion 32 may be maintained at a position coincident with the center line of the bubble collection pipe 20 .

A horizontally expandable bellows pipe may be applied as the horizontal expansion joint 35 , and a sleeve pipe in which both ends are slidably coupled to the pipe fixing part 31 and the horizontal extension part 32 may be applied.

The vertical expansion joint 36 may be provided to connect the horizontal extension part 32 and the vertical insertion part 33 . Through this, the position of the vertical insertion part 33 can be adjusted while contracting or extending the vertical expansion joint 36, and accordingly, the insertion length of the vertical insertion part 33 inserted into the bubble collection pipe 20 (L) can be adjusted.

As the vertical expansion joint 36 , a vertically expandable bellows pipe may be applied, and a sleeve pipe in which both ends are slidably coupled to the horizontal extension part 32 and the vertical insertion part 33 may be applied.

On the other hand, as described above, the vertical insertion part 33 can be directly connected to the horizontal extension part 32 without the vertical expansion joint part 36, and as another example, the vertical expansion joint part 36 is the vertical insertion part 33 ) may be substituted.

When the vertical expansion joint 36 replaces the configuration of the vertical insertion part 33, a portion of the vertical expansion joint 36 may be inserted and disposed inside the bubble collection pipe 20, at this time, the bubble collection A ratio of the inner diameter of the pipe 20 to the outer diameter of the vertical insertion part 33 may be in the range of 2:1 to 2:2.

Meanwhile, the chemical liquid tank according to the present invention may further include a cartridge body 40 .

The cartridge body 40 may be coupled to the upper surface of the tank body 10 so as to be connected to the first through hole 10a. As a result, the bubbles moving upward through the bubble collecting pipe 20 may be introduced into the cartridge body 40 .

The cartridge body 40 according to the embodiment connects a plurality of side wall members 41 coupled to the upper surface of the tank body 10, and the upper portion of the side wall member 41, but is detachably attached to the upper surface of the side wall member 41. It may include an upper cover 42 that is possibly coupled, and a handle 45 coupled to the upper surface of the upper cover 42 .

According to an embodiment, a welding flange 43 and a cover flange 44 coupled to the welding flange 43 may be further provided on the upper surface of the upper cover 42 , wherein the handle 45 is the cover flange (44). In addition, the cartridge body 40 may be made of a transparent PVC material so that the inside can be easily identified from the outside.

This cartridge body 40 can check the bubble state filled inside the cartridge body 40 in the state in which the upper cover 42 is opened, and perform maintenance such as cleaning in the state that the upper cover 42 is opened. can

In addition, the cartridge body 40 may be provided with a pipe connection member 45 for discharging the bubble filled therein to the outside. The pipe connection member 46 may be disposed at a position spaced apart from the first through-hole 10a, and when the first through-hole 10a is provided at one end of the cartridge body 40, the cartridge body 40 A pipe connection member 46 may be positioned at the other end.

As the cartridge body 40 is installed on the upper surface of the tank body 10 in which the first through-hole 10a is formed, the first through-hole 10a corresponds to the inlet of the bubble flowing into the cartridge body 40. can be Alternatively, a separate inlet through which bubbles are introduced into the cartridge body 40 may be provided on the upper surface of the first through hole 10a, in which case the inlet may be formed to be larger than the first through hole 10a. have. After all, the diameter ratio of the first through-hole 10a according to the embodiment and the bubble inlet flowing into the cartridge body 40 side may be 10 to 11:10, preferably 21:20.

Here, the distance from the bubble inlet to the side that flows into the cartridge body 40 according to the embodiment may be 7.5 mm or greater. In addition, the thickness of each wall forming the cartridge body 40 according to the embodiment may be formed within 12mm.

Meanwhile, referring to FIGS. 4 and 5 , the end of the bubble collection pipe 20 coupled to the first through hole 10a may be inserted into contact with a portion of the inner circumferential surface of the first through hole 10a, and the bubble collection pipe Welding may be performed on the other portion of the inner circumferential surface of the first through hole 10a that is not in contact with ( 20 ).

That is, by welding the end face of the bubble collecting pipe 20 and the first through hole 10a along the boundary of the inner circumferential surface, the bubble collecting pipe 20 is fixed to the first through hole 10a to obtain a vertical state. It can be accurately maintained, and a beautiful and uniform bead can be formed without exposing the weld bead formed after welding is completed to the outside of the first through hole 10a.

In addition, the inner circumferential surface of the first through-hole 10a and the outer circumferential surface of the bubble collecting pipe 20 may maintain a fine gap for welding, the radius of the first through-hole 10a according to the embodiment and the bubble collecting pipe ( 20) may be maintained in the range of 0.3 to 0.5 mm, preferably 0.3 mm.

In addition, a partial thickness of the inner circumferential surface of the first through hole 10a that is not in contact with the bubble collecting pipe 20 and the remaining thickness of the inner circumferential surface of the first through hole 10a that the bubble collecting pipe 20 is in contact with, that is, the bubble collecting pipe 20 ), the vertical distance from the tip to the upper surface of the tank body 10 and the thickness ratio of the tank body 10 may be 2-7:10, preferably 2:5. At this time, the vertical distance from the end of the bubble collecting pipe 20 to the upper surface of the tank body 10 may be 5 mm.

As described above, the chemical liquid tank according to the present invention effectively collects the bubbles present in the tank or generated during the chemical liquid inflow process with the minimal structural improvement of the chemical solution recovery pipe 30 and the bubble collection pipe 20 to the outside of the tank. can be discharged to the , and thus, it is possible to prevent mechanical damage to the pump for transferring the chemical, to prevent a malfunction of the water level measuring sensor, and to improve the quality of the substrate to be treated with the chemical.

Although the preferred embodiment of the present invention has been described with reference to the drawings as described above, those skilled in the art may vary the present invention in various ways without departing from the spirit and scope of the present invention as set forth in the following claims. may be modified or changed.

10: tank body
20: bubble collection pipe
30: chemical recovery pipe
40: cartridge body

Claims (9)

a tank body having an internal space filled with a chemical solution, a first through hole for discharging bubbles in the ceiling portion, and a second through hole through a side wall portion through which the chemical solution flows;
a bubble collecting pipe having one end coupled to the first through hole and having the other end submerged in the chemical solution filled in the inner space;
a chemical recovery pipe having one end coupled to the second through hole and extending into the inner space, the other end being inserted into the bubble collecting pipe while being spaced apart from the inner circumferential surface of the bubble collecting pipe; and
It is coupled to the upper surface of the tank body so as to be connected to the first through-hole and is filled with bubbles discharged from the bubble collection pipe, and is disposed at a position spaced apart from the first through-hole to discharge the filled bubbles to the outside. A chemical liquid tank comprising a; a cartridge body having a pipe connection member. According to claim 1,
The chemical recovery pipe,
a pipe fixing part coupled through the second through hole;
a horizontal extension part connected to the pipe fixing part and extending into the inner space; and
and a vertical insertion part connected to the horizontal extension part and extending upwardly so that at least a part of it is inserted into the bubble collection pipe. 3. The method of claim 2,
The chemical recovery pipe,
a horizontal expansion joint connecting the pipe fixing part and the horizontal extension part; and
The chemical liquid tank further comprising; a vertical expansion joint connecting the horizontal extension part and the vertical insertion part. delete According to claim 1,
The cartridge body,
a side wall member coupled to the upper surface of the tank body;
an upper cover detachably coupled to the upper surface of the side wall member so as to check the state of the bubble filled therein; and
A chemical liquid tank comprising a; a handle coupled to the upper surface of the upper cover. delete a tank body having an internal space filled with a chemical solution, a first through hole for discharging bubbles in the ceiling portion, and a second through hole through a side wall portion through which the chemical solution flows;
a bubble collecting pipe having one end coupled to the first through hole and having the other end submerged in the chemical solution filled in the inner space; and
A chemical recovery pipe having one end coupled to the second through-hole and extending into the inner space, and the other end being inserted into the bubble collecting pipe while being spaced apart from the inner circumferential surface of the bubble collecting pipe.
The end of the bubble collection pipe is inserted into contact with a portion of the inner circumferential surface of the first through hole, and the first through hole through welding performed on the other portion of the inner circumferential surface of the first through hole to which the bubble collection pipe is not in contact. Chemical liquid tank, characterized in that coupled to. According to claim 1,
The chemical solution tank, characterized in that the insertion length of the chemical recovery pipe inserted into the bubble collection pipe is 20 to 40 mm. According to claim 1,
The ratio of the inner diameter of the bubble collecting pipe to the outer diameter of the other end of the chemical recovery pipe inserted into the bubble collecting pipe is 10:9.

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