JPH10305248A - Liquid jetting device using ultrasonic wave - Google Patents
Liquid jetting device using ultrasonic waveInfo
- Publication number
- JPH10305248A JPH10305248A JP13041097A JP13041097A JPH10305248A JP H10305248 A JPH10305248 A JP H10305248A JP 13041097 A JP13041097 A JP 13041097A JP 13041097 A JP13041097 A JP 13041097A JP H10305248 A JPH10305248 A JP H10305248A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- nozzle
- vibrator
- port
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 62
- 238000002347 injection Methods 0.000 claims abstract description 11
- 239000007924 injection Substances 0.000 claims abstract description 11
- 238000007599 discharging Methods 0.000 claims abstract description 4
- 230000000644 propagated effect Effects 0.000 abstract description 2
- 239000000243 solution Substances 0.000 abstract description 2
- 230000010355 oscillation Effects 0.000 abstract 1
- 230000005284 excitation Effects 0.000 description 6
- 238000005406 washing Methods 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 238000010411 cooking Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Special Spraying Apparatus (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】この発明は、液体噴射装置、
詳しくは液体中に超音波を伝搬させて、そのエネルギー
によって液体を噴射させる装置に属する。The present invention relates to a liquid ejecting apparatus,
More specifically, the present invention belongs to a device that propagates an ultrasonic wave into a liquid and ejects the liquid with its energy.
【0002】[0002]
【従来の技術】液体に超音波エネルギーを与えて液体を
加速する技術が、加湿器、洗浄機などに利用されてい
る。これは、液体を超音波振動子と接触させ、液体中に
超音波を伝搬させることによって行われる。2. Description of the Related Art Techniques for accelerating a liquid by applying ultrasonic energy to the liquid are used in humidifiers, washing machines, and the like. This is done by contacting the liquid with an ultrasonic transducer and propagating ultrasonic waves through the liquid.
【0003】例えば、液体噴射式洗浄機は、電子部品や
精密器械などの洗浄に用いられるもので、図2に示すよ
うに重力方向の下向きに固定されたノズル1と、ノズル
1の噴射口11と対向する閉塞部に装着された振動子2
と、ノズル1の側面に接続されて液体を供給する供給配
管3とを備える。そして、供給配管3からノズル1内に
供給された洗浄液を振動子2の励振とともに重力以上に
加速して対象物に向かって噴射する。従って、洗浄機の
場合、液体に超音波を有効に作用させ洗浄能力を十分に
発揮させるためには、励振時に振動子2の接液面2aが
常に液体に接していなければならない。もし、接液面2
aが液体に接しない状態で振動子を励振させると、洗浄
能力が不十分となるばかりか、振動子が空炊き状態とな
ってその寿命を縮める。空炊きを続けると、振動子が破
損する。[0003] For example, a liquid jet type washing machine is used for washing electronic parts and precision instruments. As shown in FIG. 2, a nozzle 1 fixed downward in the direction of gravity and an injection port 11 of the nozzle 1 are provided. Vibrator 2 attached to the closed part facing
And a supply pipe 3 connected to a side surface of the nozzle 1 for supplying a liquid. Then, the cleaning liquid supplied into the nozzle 1 from the supply pipe 3 is accelerated to a level higher than the gravity together with the excitation of the vibrator 2 and jetted toward the object. Therefore, in the case of the washing machine, the liquid contact surface 2a of the vibrator 2 must always be in contact with the liquid at the time of excitation in order to effectively apply ultrasonic waves to the liquid and sufficiently exert the cleaning ability. If wetted surface 2
If the vibrator is excited in the state where a does not come into contact with the liquid, not only the cleaning ability becomes insufficient, but also the vibrator becomes empty and shortens its life. If you continue to cook in the empty state, the vibrator will be damaged.
【0004】しかし、現実にはノズル1や供給配管3内
に残留していた空気や、液体中に発生した気泡は、液体
が十分に供給されていても噴射口11から完全には抜け
ずに接液面に溜まる。通常、ノズル1は噴射口11を下
向きにして使用され、噴射口11や供給配管接続口10
よりも振動子2のほうが高い位置にあるから、ノズル1
内に気泡が溜まると、その気泡は逃げることができずに
接液面と接触し続ける。However, in reality, air remaining in the nozzle 1 and the supply pipe 3 and bubbles generated in the liquid do not completely escape from the injection port 11 even if the liquid is sufficiently supplied. Collects on the wetted surface. Usually, the nozzle 1 is used with the injection port 11 facing downward, and the nozzle 11 and the supply pipe connection port 10 are used.
Since the vibrator 2 is higher than the vibrator 2, the nozzle 1
When air bubbles accumulate inside, the air bubbles cannot escape and keep in contact with the liquid contact surface.
【0005】そこで、従来の液体噴射式洗浄機にあって
は、振動子2の空炊きを防止するために、振動子2の励
振を止めて噴射口11を上に向けて気泡を抜かなければ
ならなかった。この場合、気泡が多量に溜まってから気
泡を抜いていては空炊きを防止するには遅すぎるので、
少量の段階で小刻みに抜く必要がある。Therefore, in the conventional liquid jet type washer, in order to prevent the vibrator 2 from being cooked idly, it is necessary to stop excitation of the vibrator 2 and move the injection port 11 upward to remove air bubbles. did not become. In this case, removing bubbles after a large amount of bubbles accumulates is too slow to prevent empty cooking,
It is necessary to pull it out in small steps.
【0006】[0006]
【発明が解決しようとする課題】しかし、少量の気泡を
検出するのは困難であるし、かといって定期的に頻繁に
振動子の励振を止めて抜いていては噴射効率が悪い。ま
た、洗浄方法によっては、フッ酸やアンモニア等の薬剤
を混合することが要請されることもあるが、薬剤の混合
時に気泡が発生しやすいので、従来の液体噴射式洗浄機
を薬液に使用することはできなかった。それ故、この発
明の目的は、気泡が発生し難く、万一発生しても振動子
の励振を止めずに気泡を除去することができる液体噴射
装置を提供することにある。However, it is difficult to detect a small amount of air bubbles. However, if the excitation of the vibrator is periodically stopped and removed periodically, the injection efficiency is poor. In addition, depending on the cleaning method, it may be required to mix a chemical such as hydrofluoric acid or ammonia. However, since bubbles are easily generated when mixing the chemicals, a conventional liquid jet cleaning machine is used for the chemical. I couldn't do that. Therefore, an object of the present invention is to provide a liquid ejecting apparatus in which air bubbles are hardly generated, and even if they are generated, air bubbles can be removed without stopping excitation of the vibrator.
【0007】[0007]
【課題を解決するための手段】その目的を達成するため
に、この発明の液体噴射装置は、ノズルと、ノズルの噴
射口と対向する閉塞部に装着された振動子と、ノズル内
に液体を供給する供給配管を接続するためにノズルの側
面に設けられた接続口とを備え、供給配管より供給され
た液体中に振動子から超音波を伝搬させて液体を噴射さ
せる装置において、ノズルの供給配管接続口と対向する
側面に液体の過多量を排出する排出口を設けたことを特
徴とする。In order to achieve the object, a liquid ejecting apparatus according to the present invention comprises a nozzle, a vibrator mounted on a closed portion facing an ejection port of the nozzle, and a liquid in the nozzle. A connection port provided on a side surface of the nozzle for connecting a supply pipe for supply, and a device for ejecting a liquid by transmitting ultrasonic waves from a vibrator into a liquid supplied from the supply pipe and ejecting the liquid. A discharge port for discharging an excessive amount of liquid is provided on a side surface facing the pipe connection port.
【0008】この特徴を備えることにより、供給配管よ
り供給された液体のうち噴射に必要な大部分は噴射口よ
り噴射され、残部が排出口より排出される。そして、ノ
ズル内の気泡は排出口より流出する液体によって押し出
される。With this feature, of the liquid supplied from the supply pipe, most of the liquid required for injection is injected from the injection port, and the remainder is discharged from the discharge port. Then, the bubbles in the nozzle are pushed out by the liquid flowing out from the outlet.
【0009】前記振動子は、その接液面を含む仮想平面
が排出口と交差するように装着されていると好ましい。
そうすれば、噴射口を下向きにして装置を使用すると
き、排出口の位置が接液面と同じ又はそれより高くなる
ので、気泡の浮力が排出口の方向に働き、気泡が出やす
くなる。It is preferable that the vibrator is mounted so that a virtual plane including a liquid contact surface thereof intersects a discharge port.
Then, when the apparatus is used with the injection port facing downward, the position of the discharge port is the same as or higher than the liquid contact surface, so that the buoyancy of the bubbles works in the direction of the discharge port, and the bubbles are easily generated.
【0010】[0010]
【発明の実施の形態】この発明の好ましい実施形態の液
体噴射装置を図面に基づいて説明する。図1は、液体噴
射装置を示す断面図である。DESCRIPTION OF THE PREFERRED EMBODIMENTS A liquid ejecting apparatus according to a preferred embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a sectional view showing the liquid ejecting apparatus.
【0011】この液体噴射装置は、ノズル1と、ノズル
1の噴射口11と対向する閉塞部に装着された振動子2
と、ノズル1の側面に接続されてノズル内に液体を供給
するた供給配管3とを備える超音波洗浄機である。この
装置は、図面のように噴射口11を下向きにし、その下
方に洗浄対象物9を固定し、供給配管3より供給された
液体中に振動子2から超音波を伝搬させて噴射口11よ
り対象物に向かって液体を噴射させる。The liquid ejecting apparatus includes a nozzle 1 and a vibrator 2 mounted on a closing portion of the nozzle 1 facing the ejection port 11.
And a supply pipe 3 connected to a side surface of the nozzle 1 and supplying a liquid into the nozzle. In this apparatus, as shown in the drawing, the ejection port 11 faces downward, the object 9 to be cleaned is fixed below the ejection port 11, and ultrasonic waves are propagated from the vibrator 2 into the liquid supplied from the supply pipe 3 so that the ultrasonic wave is transmitted from the ejection port 11. The liquid is ejected toward the object.
【0012】そして、ノズル1の供給配管接続口10と
対向する側面に液体の過多量を排出する排出口12が設
けられている。排出口12に排出配管4が接続されてい
る。振動子2は、ノズル1の後端面7よりカラー6によ
って適当な距離を保って固定されている。また、振動子
2とカラー6との間に介在するパッキン5によって液体
が振動子2の後方に漏れないようにされている。液体が
振動子2の後ろに漏れるとカラー6で囲まれる空間内で
リード8が短絡するからである。更に、振動子2と排出
口12との位置関係は、接液面2aを含む仮想上の平面
が排出口12と交差するように設定されている。従っ
て、図面のように噴射口11が下向きになっているとき
は、排出口12の上端縁のほうが振動子の接液面2aよ
りも若干上位にある。A discharge port 12 for discharging an excessive amount of liquid is provided on a side of the nozzle 1 opposite to the supply pipe connection port 10. The discharge pipe 4 is connected to the discharge port 12. The vibrator 2 is fixed at a proper distance from the rear end face 7 of the nozzle 1 by a collar 6. The packing 5 interposed between the vibrator 2 and the collar 6 prevents liquid from leaking to the rear of the vibrator 2. This is because if the liquid leaks behind the vibrator 2, the lead 8 short-circuits in the space surrounded by the collar 6. Further, the positional relationship between the vibrator 2 and the outlet 12 is set such that a virtual plane including the liquid contact surface 2 a intersects the outlet 12. Therefore, when the injection port 11 is downward as shown in the drawing, the upper end edge of the discharge port 12 is slightly higher than the liquid contact surface 2a of the vibrator.
【0013】この装置においては、噴射口11より液体
が噴射されている間、供給された液体の一部が常時排出
口12より排出される。従って、ノズル1内の気泡は発
生直後に排出口12より流出する液体によって押し出さ
れる。しかも、排出口12の上端縁の位置が接液面2a
より高いので、気泡は自らの浮力も協力して容易に排出
口12から脱出する。よって、ノズル1内に気泡が滞留
することはない。In this apparatus, a part of the supplied liquid is constantly discharged from the discharge port 12 while the liquid is being injected from the discharge port 11. Therefore, the bubbles in the nozzle 1 are pushed out by the liquid flowing out from the discharge port 12 immediately after generation. In addition, the position of the upper edge of the discharge port 12 is
Since it is higher, the air bubbles easily escape from the outlet 12 in cooperation with their buoyancy. Therefore, bubbles do not stay in the nozzle 1.
【0014】[0014]
【発明の効果】この発明の液体噴射装置は、気泡が発生
し難く、万一発生しても振動子の励振を止めずに気泡を
素早く除去することができるので、振動子を長持ちさせ
ることができる。また、洗浄機として用いたときは洗浄
効率に優れる、薬液の使用が可能である等、有益であ
る。According to the liquid ejecting apparatus of the present invention, bubbles are hardly generated, and even if they are generated, the bubbles can be quickly removed without stopping the excitation of the vibrator. it can. In addition, when used as a washing machine, it is advantageous in that it has excellent washing efficiency and that a chemical solution can be used.
【図1】 実施形態の液体噴射装置を示す断面図であ
る。FIG. 1 is a cross-sectional view illustrating a liquid ejecting apparatus according to an embodiment.
【図2】 従来の液体噴射装置を示す断面図である。FIG. 2 is a cross-sectional view illustrating a conventional liquid ejecting apparatus.
1 ノズル 2 振動子 3 供給配管 4 排出配管 2a 接液面 9 洗浄対象物 DESCRIPTION OF SYMBOLS 1 Nozzle 2 Oscillator 3 Supply pipe 4 Discharge pipe 2a Liquid contact surface 9 Object to be cleaned
Claims (2)
部に装着された振動子と、ノズル内に液体を供給する供
給配管を接続するためにノズルの側面に設けられた接続
口とを備え、供給配管より供給された液体中に振動子か
ら超音波を伝搬させて液体を噴射させる装置において、 ノズルの供給配管接続口と対向する側面に液体の過多量
を排出する排出口を設けたことを特徴とする液体噴射装
置。A nozzle, a vibrator mounted on a closed portion facing an injection port of the nozzle, and a connection port provided on a side surface of the nozzle for connecting a supply pipe for supplying a liquid into the nozzle. In a device for ejecting liquid by transmitting ultrasonic waves from a vibrator into a liquid supplied from a supply pipe, a discharge port for discharging an excessive amount of liquid is provided on a side of the nozzle opposite to a supply pipe connection port. A liquid ejecting apparatus characterized in that:
が排出口と交差するように装着されている請求項1に記
載の液体噴射装置。2. The liquid ejecting apparatus according to claim 1, wherein the vibrator is mounted such that a virtual plane including a liquid contact surface thereof intersects a discharge port.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13041097A JP3374043B2 (en) | 1997-05-02 | 1997-05-02 | Liquid jet type washing machine by ultrasonic wave |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13041097A JP3374043B2 (en) | 1997-05-02 | 1997-05-02 | Liquid jet type washing machine by ultrasonic wave |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH10305248A true JPH10305248A (en) | 1998-11-17 |
JP3374043B2 JP3374043B2 (en) | 2003-02-04 |
Family
ID=15033611
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13041097A Expired - Fee Related JP3374043B2 (en) | 1997-05-02 | 1997-05-02 | Liquid jet type washing machine by ultrasonic wave |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3374043B2 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6223996B1 (en) | 1999-09-23 | 2001-05-01 | Excel Engineering Co., Ltd. | Ultrasonic liquid injection device |
KR100521624B1 (en) * | 2003-12-09 | 2005-10-12 | 웅진코웨이주식회사 | Nozzle part of ultrasonic cleaner |
JP2010091774A (en) * | 2008-10-08 | 2010-04-22 | Shin-Etsu Chemical Co Ltd | Cleaning method and cleaning fluid supplying apparatus |
JP2013145386A (en) * | 2013-02-25 | 2013-07-25 | Shin Etsu Chem Co Ltd | Cleaning method and cleaning fluid supplying apparatus |
JP5610360B1 (en) * | 2013-09-26 | 2014-10-22 | ヤマトテクノス有限会社 | Liquid jet cleaning machine using ultrasonic waves |
US8956463B2 (en) | 2008-10-08 | 2015-02-17 | Shin-Etsu Chemical Co., Ltd. | Method for cleaning photomask-related substrate, cleaning method, and cleaning fluid supplying apparatus |
CN112941826A (en) * | 2019-11-26 | 2021-06-11 | 青岛海尔滚筒洗衣机有限公司 | Spraying assembly of clothes treating apparatus and spraying control method thereof |
-
1997
- 1997-05-02 JP JP13041097A patent/JP3374043B2/en not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6223996B1 (en) | 1999-09-23 | 2001-05-01 | Excel Engineering Co., Ltd. | Ultrasonic liquid injection device |
KR100521624B1 (en) * | 2003-12-09 | 2005-10-12 | 웅진코웨이주식회사 | Nozzle part of ultrasonic cleaner |
JP2010091774A (en) * | 2008-10-08 | 2010-04-22 | Shin-Etsu Chemical Co Ltd | Cleaning method and cleaning fluid supplying apparatus |
US8956463B2 (en) | 2008-10-08 | 2015-02-17 | Shin-Etsu Chemical Co., Ltd. | Method for cleaning photomask-related substrate, cleaning method, and cleaning fluid supplying apparatus |
JP2013145386A (en) * | 2013-02-25 | 2013-07-25 | Shin Etsu Chem Co Ltd | Cleaning method and cleaning fluid supplying apparatus |
JP5610360B1 (en) * | 2013-09-26 | 2014-10-22 | ヤマトテクノス有限会社 | Liquid jet cleaning machine using ultrasonic waves |
CN112941826A (en) * | 2019-11-26 | 2021-06-11 | 青岛海尔滚筒洗衣机有限公司 | Spraying assembly of clothes treating apparatus and spraying control method thereof |
Also Published As
Publication number | Publication date |
---|---|
JP3374043B2 (en) | 2003-02-04 |
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