JP5599752B2 - 垂直磁気記録ヘッドおよびその製造方法 - Google Patents

垂直磁気記録ヘッドおよびその製造方法 Download PDF

Info

Publication number
JP5599752B2
JP5599752B2 JP2011103868A JP2011103868A JP5599752B2 JP 5599752 B2 JP5599752 B2 JP 5599752B2 JP 2011103868 A JP2011103868 A JP 2011103868A JP 2011103868 A JP2011103868 A JP 2011103868A JP 5599752 B2 JP5599752 B2 JP 5599752B2
Authority
JP
Japan
Prior art keywords
magnetic pole
air bearing
pole tip
main
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011103868A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011238343A5 (enExample
JP2011238343A (ja
Inventor
研一 ▲高▼野
宇辰 周
民 李
スミス ジョー
Original Assignee
ヘッドウェイテクノロジーズ インコーポレイテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ヘッドウェイテクノロジーズ インコーポレイテッド filed Critical ヘッドウェイテクノロジーズ インコーポレイテッド
Publication of JP2011238343A publication Critical patent/JP2011238343A/ja
Publication of JP2011238343A5 publication Critical patent/JP2011238343A5/ja
Application granted granted Critical
Publication of JP5599752B2 publication Critical patent/JP5599752B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
    • G11B5/314—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
    • G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
    • G11B5/315—Shield layers on both sides of the main pole, e.g. in perpendicular magnetic heads
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B2005/0002—Special dispositions or recording techniques
    • G11B2005/0005—Arrangements, methods or circuits
    • G11B2005/0024—Microwave assisted recording

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Heads (AREA)
  • Recording Or Reproducing By Magnetic Means (AREA)
JP2011103868A 2010-05-05 2011-05-06 垂直磁気記録ヘッドおよびその製造方法 Expired - Fee Related JP5599752B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/799,927 US8477453B2 (en) 2010-05-05 2010-05-05 Perpendicular magnetic recording write head with milling defined track width
US12/799,927 2010-05-05

Publications (3)

Publication Number Publication Date
JP2011238343A JP2011238343A (ja) 2011-11-24
JP2011238343A5 JP2011238343A5 (enExample) 2014-07-03
JP5599752B2 true JP5599752B2 (ja) 2014-10-01

Family

ID=44901777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011103868A Expired - Fee Related JP5599752B2 (ja) 2010-05-05 2011-05-06 垂直磁気記録ヘッドおよびその製造方法

Country Status (2)

Country Link
US (2) US8477453B2 (enExample)
JP (1) JP5599752B2 (enExample)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5451096B2 (ja) * 2009-02-04 2014-03-26 エイチジーエスティーネザーランドビーブイ 磁気ヘッド
US9305586B2 (en) * 2009-02-04 2016-04-05 HGST Netherlands B.V. Microwave-assisted magnetic recording device and method of formation thereof
US9013831B2 (en) * 2009-06-22 2015-04-21 Seagate Technology Llc Write pole fabricated using a carbon hard mask and method of making
WO2011132503A1 (ja) * 2010-04-20 2011-10-27 株式会社日立製作所 エネルギーアシスト型磁気記録ヘッド及び磁気記録装置
US8184399B2 (en) * 2010-09-27 2012-05-22 Headway Technologies, Inc. Magnetic write head with thin and thick portions for balancing writability and ate
US20120237878A1 (en) * 2011-03-18 2012-09-20 Western Digital (Fremont), Llc Method and system for providing a side shield for a perpendicular magnetic recording pole
US8233233B1 (en) * 2011-06-30 2012-07-31 Seagate Technology Llc Devices including a write pole tip with a convex shape
US8345384B1 (en) * 2011-12-02 2013-01-01 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording having a main pole and a shield
JP2013171594A (ja) * 2012-02-17 2013-09-02 Toshiba Corp 記録ヘッド、およびこれを備えたディスク装置
US8703397B1 (en) 2012-03-29 2014-04-22 Western Digital (Fremont), Llc Method for providing side shields for a magnetic recording transducer
US8520337B1 (en) * 2012-03-30 2013-08-27 Western Digital (Fremont), Llc Perpendicular magnetic recording writer pole with leading and trailing bevel side wall angles at air bearing surface
JP2013246851A (ja) * 2012-05-25 2013-12-09 Toshiba Corp 磁気記録ヘッドの製造方法
JP2014017030A (ja) * 2012-07-06 2014-01-30 Toshiba Corp 磁気ヘッド、その製造方法、及び磁気記録再生装置
US8553507B1 (en) * 2012-11-13 2013-10-08 HGST Netherlands B.V. Write track shift control in shingled-microwave-assisted magnetic recording (MAMR-SMR)
JP2014123414A (ja) * 2012-12-21 2014-07-03 Toshiba Corp 磁気記録ヘッド、およびこれを備えた磁気記録装置
JP6000866B2 (ja) * 2013-01-31 2016-10-05 株式会社日立製作所 磁気ヘッド及び磁気記録再生装置
US9202528B2 (en) 2013-09-27 2015-12-01 HGST Netherlands B.V. MAMR head with recessed STO
US8964332B1 (en) 2013-09-30 2015-02-24 HGST Netherlands B.V. Microwave-assisted magnetic recording head with asymmetric side gap for shingled magnetic recording
US9047894B2 (en) * 2013-10-03 2015-06-02 HGST Netherlands B.V. Magnetic write head having spin torque oscillator that is self aligned with write pole
US9390733B2 (en) 2013-10-10 2016-07-12 HGST Netherlans B.V. Microwave-assisted magnetic recording (MAMR) head with an inclined and recessed main pole structure
US8995088B1 (en) 2013-10-22 2015-03-31 HGST Netherlands B.V. Heat sink for a spin torque oscillator (STO) in microwave assisted magnetic recording (MAMR)
US9135933B2 (en) 2013-11-08 2015-09-15 HGST Netherlands B.V. Tapered write head for MAMR
US8988825B1 (en) * 2014-02-28 2015-03-24 Western Digital (Fremont, LLC Method for fabricating a magnetic writer having half-side shields
US9001467B1 (en) 2014-03-05 2015-04-07 Western Digital (Fremont), Llc Method for fabricating side shields in a magnetic writer
JP2015197940A (ja) * 2014-04-02 2015-11-09 Tdk株式会社 磁気ヘッド、磁気ヘッドアセンブリ及び磁気記録再生装置
US9001465B1 (en) * 2014-04-16 2015-04-07 HGST Netherlands B.V. Microwave-assisted magnetic recording head
US9406316B2 (en) 2014-05-15 2016-08-02 HGST Netherlands B.V. Asymmetric MAMR head with self-aligned spin torque oscillator along flare edge for shingled magnetic recording
US9171557B1 (en) * 2014-11-07 2015-10-27 Seagate Technology Llc Write pole paddle
US9230569B1 (en) 2014-11-26 2016-01-05 HGST Netherlands B.V. Low Bs spin-polarizer for spin torque oscillator
US9286919B1 (en) 2014-12-17 2016-03-15 Western Digital (Fremont), Llc Magnetic writer having a dual side gap
US9230573B1 (en) * 2015-01-21 2016-01-05 HGST Netherlands B.V. Magnetic recording head with non-magnetic bump structure formed on spin torque oscillator
US9099107B1 (en) * 2015-01-23 2015-08-04 HGST Netherlands B.V. Stabilizing layer for a spin torque oscillator (STO)
US9355657B1 (en) 2015-06-05 2016-05-31 HGST Netherlands B.V. Implementing spin torque oscillator erasure prevention in microwave-assisted magnetic recording (MAMR) hard disk drives
US9697852B2 (en) * 2015-11-06 2017-07-04 Seagate Technology Llc Single coil turn data writer
US9824701B2 (en) 2016-04-26 2017-11-21 Tdk Corporation Microwave assisted magnetic recording head with spin torque oscillator corner angle relationship, head gimbal assembly, and magnetic recording device
US9711168B1 (en) 2016-05-17 2017-07-18 Western Digital (Fremont), Llc Method for providing a magnetic recording write apparatus by predefining side shields
US10204644B1 (en) 2016-05-23 2019-02-12 Seagate Technology Llc Magnetic write transducer with flat pole section
US10388307B1 (en) 2017-04-20 2019-08-20 Seagate Technology Llc Magnetic write transducer with first and second pole sections
US10339964B1 (en) * 2018-05-21 2019-07-02 Headway Technologies, Inc. Perpendicular magnetic recording (PMR) write head with patterned high moment trailing shield
JP2020140752A (ja) * 2019-02-28 2020-09-03 株式会社東芝 磁気ディスク装置及びライト処理方法
US20210027808A1 (en) * 2019-07-23 2021-01-28 Western Digital Technologies, Inc. Heat-assisted magnetic recording (hamr) head with tapered main pole and heat sink material adjacent the pole
US11087783B1 (en) * 2020-06-30 2021-08-10 Western Digital Technologies, Inc. Magnetic recording head soft error rate improvement with compact main pole

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3875019B2 (ja) * 2000-12-26 2007-01-31 アルプス電気株式会社 垂直磁気記録ヘッドおよびその製造方法
US7196871B2 (en) * 2003-09-26 2007-03-27 Hitachi Global Storage Technologies Netherlands B.V. Head for perpendicular recording with a floating trailing shield
US7193815B1 (en) 2004-04-06 2007-03-20 Western Digital (Fremont), Inc. Shielded pole magnetic head for perpendicular recording
JP2006004591A (ja) * 2004-05-20 2006-01-05 Alps Electric Co Ltd 垂直磁気記録ヘッド
US7251878B2 (en) 2004-06-30 2007-08-07 Hitachi Global Storage Technologies Netherlands B.V. Method and apparatus for defining leading edge taper of a write pole tip
US7394621B2 (en) 2004-06-30 2008-07-01 Headway Technologies, Inc. Using bilayer lithography process to define neck height for PMR
US7672079B2 (en) 2004-07-07 2010-03-02 Headway Technologies, Inc. Pole width control on plated bevel main pole design of a perpendicular magnetic recording head
JP4713174B2 (ja) * 2005-02-14 2011-06-29 株式会社日立グローバルストレージテクノロジーズ 垂直記録用磁気ヘッド及びそれを搭載した磁気ディスク装置
JP2010003353A (ja) * 2008-06-19 2010-01-07 Toshiba Corp 磁気記録ヘッド、磁気ヘッドアセンブリ及び磁気記録装置
US8264792B2 (en) * 2009-05-04 2012-09-11 Headway Technologies, Inc. PMR writer device with multi-level tapered write pole

Also Published As

Publication number Publication date
US20130286508A1 (en) 2013-10-31
US8625235B2 (en) 2014-01-07
US8477453B2 (en) 2013-07-02
US20110273800A1 (en) 2011-11-10
JP2011238343A (ja) 2011-11-24

Similar Documents

Publication Publication Date Title
JP5599752B2 (ja) 垂直磁気記録ヘッドおよびその製造方法
JP5596904B2 (ja) 複合シールド構造および垂直磁気記録ヘッド
JP5719097B2 (ja) 垂直磁気記録ヘッド
US10657988B2 (en) Method of forming a perpendicular magnetic recording (PMR) write head with patterned leading edge taper
US7549213B2 (en) Method for independent trackwidth and wall angle control and hexagonal write head
JP3892023B2 (ja) 垂直磁気記録ヘッドおよびその製造方法、ならびに磁気記録装置
JP6012668B2 (ja) 磁気記録ヘッドのための書き込みギャップ構造
US9390733B2 (en) Microwave-assisted magnetic recording (MAMR) head with an inclined and recessed main pole structure
JP2007294078A (ja) ノッチ付きトレーリングシールドを有する垂直磁気記録型書き込みヘッド及び製造方法
JP2014035785A (ja) 主磁極とシールドを備えた垂直磁気記録用磁気ヘッド
CN101178902A (zh) 垂直磁记录头及其制造方法以及磁记录装置
CN100485782C (zh) 垂直记录磁头及其制造方法
US7679862B2 (en) Perpendicular recording head with reduced thermal protrusion
US9653101B1 (en) Perpendicular magnetic recording (PMR) write head with hybrid side shield
JP2013235643A (ja) 帰磁路部を備えた垂直磁気記録用磁気ヘッド
JP4855108B2 (ja) 磁気再生記録ヘッドおよびその製造方法
JP2010061735A (ja) 磁気ヘッドとその製造方法および情報記憶装置
JP2007004958A (ja) 垂直磁気記録用薄膜磁気ヘッド
JP2005182897A (ja) 薄膜磁気ヘッドおよびその製造方法
JP2008186546A (ja) 垂直磁気記録ヘッドおよびその製造方法、ならびに磁気記録装置
US7382578B2 (en) Thin film magnetic head, method of manufacturing the same and magnetic recording apparatus
US7626785B2 (en) Thin film magnetic head, method of manufacturing the same, and magnetic recording apparatus
WO2009147729A1 (ja) 磁気ヘッドおよびその製造方法
JP2006302486A (ja) 薄膜磁気ヘッド及びその製造方法
US20110273798A1 (en) PMR writer with pi shaped shield

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140501

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140521

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20140521

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20140620

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140724

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140813

R150 Certificate of patent or registration of utility model

Ref document number: 5599752

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees