JP5597140B2 - プラズマ処理された研磨物品及び同物品の作製方法 - Google Patents

プラズマ処理された研磨物品及び同物品の作製方法 Download PDF

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Publication number
JP5597140B2
JP5597140B2 JP2010540733A JP2010540733A JP5597140B2 JP 5597140 B2 JP5597140 B2 JP 5597140B2 JP 2010540733 A JP2010540733 A JP 2010540733A JP 2010540733 A JP2010540733 A JP 2010540733A JP 5597140 B2 JP5597140 B2 JP 5597140B2
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Prior art keywords
abrasive
structured
particles
article
layer
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Expired - Fee Related
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JP2010540733A
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Japanese (ja)
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JP2011507717A (ja
JP2011507717A5 (enExample
Inventor
スコット アール． カラー，
モーゼス エム． デイビッド，
ウィリアム シー． クエイド，
ブライアン ジェイ． ブリンクメイヤー，
エドワード ジェイ． ウー，
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of JP2011507717A publication Critical patent/JP2011507717A/ja
Publication of JP2011507717A5 publication Critical patent/JP2011507717A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D2203/00—Tool surfaces formed with a pattern
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
JP2010540733A 2007-12-31 2008-12-08 プラズマ処理された研磨物品及び同物品の作製方法 Expired - Fee Related JP5597140B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US1804507P 2007-12-31 2007-12-31
US61/018,045 2007-12-31
US9648408P 2008-09-12 2008-09-12
US61/096,484 2008-09-12
PCT/US2008/085843 WO2009088606A2 (en) 2007-12-31 2008-12-08 Plasma treated abrasive article and method of making same

Publications (3)

Publication Number Publication Date
JP2011507717A JP2011507717A (ja) 2011-03-10
JP2011507717A5 JP2011507717A5 (enExample) 2011-09-22
JP5597140B2 true JP5597140B2 (ja) 2014-10-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010540733A Expired - Fee Related JP5597140B2 (ja) 2007-12-31 2008-12-08 プラズマ処理された研磨物品及び同物品の作製方法

Country Status (5)

Country Link
US (1) US8444458B2 (enExample)
EP (1) EP2240298A4 (enExample)
JP (1) JP5597140B2 (enExample)
CN (1) CN101925441B (enExample)
WO (1) WO2009088606A2 (enExample)

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WO2014022465A1 (en) * 2012-08-02 2014-02-06 3M Innovative Properties Company Abrasive articles with precisely shaped features and method of making thereof
EP2692819A1 (de) * 2012-08-02 2014-02-05 Robert Bosch GmbH Schleifkorn mit Basisfläche und Erhebungen
CN102862128B (zh) 2012-09-20 2015-10-21 北京国瑞升科技股份有限公司 一种凹凸结构磨料制品及其制备方法
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CN105121096B (zh) * 2013-03-29 2018-10-16 3M创新有限公司 非织造磨料制品及其制备方法
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US20160263722A1 (en) * 2013-10-18 2016-09-15 3M Innovative Properties Company Coated abrasive article and method of making the same
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US20170008143A1 (en) * 2014-01-24 2017-01-12 3M Innovative Properties Company Abrasive material having a structured surface
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JP6611414B2 (ja) * 2014-05-27 2019-11-27 スリーエム イノベイティブ プロパティズ カンパニー 塗装表面の仕上げ方法及び研磨材料
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CN113579992A (zh) 2014-10-17 2021-11-02 应用材料公司 使用加成制造工艺的具复合材料特性的cmp衬垫建构
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
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KR101944695B1 (ko) * 2014-10-28 2019-02-01 반도 카가쿠 가부시키가이샤 연마재 및 연마재의 제조방법
JP6940495B2 (ja) 2015-10-30 2021-09-29 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 所望のゼータ電位を有する研磨用物品を形成するための装置及び方法
US10593574B2 (en) 2015-11-06 2020-03-17 Applied Materials, Inc. Techniques for combining CMP process tracking data with 3D printed CMP consumables
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
GB201622439D0 (en) * 2016-12-30 2017-02-15 3M Innovative Properties Co Abrasive article and method of use
GB201622441D0 (en) * 2016-12-30 2017-02-15 3M Innovative Properties Co Abrasive article and method of use
US11471999B2 (en) 2017-07-26 2022-10-18 Applied Materials, Inc. Integrated abrasive polishing pads and manufacturing methods
WO2019032286A1 (en) * 2017-08-07 2019-02-14 Applied Materials, Inc. ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME
EP3924146A4 (en) * 2019-02-13 2022-11-09 3M Innovative Properties Company ABRASIVES WITH PRECISELY SHAPED FEATURES, ABRASIVES MADE THEREOF AND PROCESSES FOR THEIR MANUFACTURE
US20210171814A1 (en) * 2019-12-10 2021-06-10 Saint-Gobain Abrasives, Inc. Fixed abrasive article
TWI768692B (zh) * 2021-02-01 2022-06-21 中國砂輪企業股份有限公司 化學機械研磨拋光墊修整器及其製造方法
US11878389B2 (en) 2021-02-10 2024-01-23 Applied Materials, Inc. Structures formed using an additive manufacturing process for regenerating surface texture in situ
EP4301551A4 (en) 2021-03-05 2025-01-08 Saint-Gobain Abrasives, Inc. GRINDING ARTICLES AND METHODS FOR FORMING THEM
US12064850B2 (en) 2021-12-30 2024-08-20 Saint-Gobain Abrasives, Inc. Abrasive articles and methods for forming same
EP4457058A1 (en) 2021-12-30 2024-11-06 Saint-gobain Abrasives, Inc Abrasive articles and methods for forming same

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Also Published As

Publication number Publication date
US8444458B2 (en) 2013-05-21
US20100255254A1 (en) 2010-10-07
WO2009088606A3 (en) 2009-10-01
WO2009088606A2 (en) 2009-07-16
EP2240298A2 (en) 2010-10-20
EP2240298A4 (en) 2014-04-30
CN101925441A (zh) 2010-12-22
JP2011507717A (ja) 2011-03-10
CN101925441B (zh) 2013-08-14

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