CN101925441B - 经等离子处理的磨料制品及其制造方法 - Google Patents

经等离子处理的磨料制品及其制造方法 Download PDF

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Publication number
CN101925441B
CN101925441B CN2008801252939A CN200880125293A CN101925441B CN 101925441 B CN101925441 B CN 101925441B CN 2008801252939 A CN2008801252939 A CN 2008801252939A CN 200880125293 A CN200880125293 A CN 200880125293A CN 101925441 B CN101925441 B CN 101925441B
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CN
China
Prior art keywords
abrasive
structured abrasive
structured
abrasive article
article according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN2008801252939A
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English (en)
Chinese (zh)
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CN101925441A (zh
Inventor
斯科特·R·卡勒
摩西·M·戴维
威廉·C·奎德
布赖恩·J·布林克迈尔
爱德华·J·吴
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication date
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Publication of CN101925441A publication Critical patent/CN101925441A/zh
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Publication of CN101925441B publication Critical patent/CN101925441B/zh
Expired - Fee Related legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D2203/00—Tool surfaces formed with a pattern
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
CN2008801252939A 2007-12-31 2008-12-08 经等离子处理的磨料制品及其制造方法 Expired - Fee Related CN101925441B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US1804507P 2007-12-31 2007-12-31
US61/018,045 2007-12-31
US9648408P 2008-09-12 2008-09-12
US61/096,484 2008-09-12
PCT/US2008/085843 WO2009088606A2 (en) 2007-12-31 2008-12-08 Plasma treated abrasive article and method of making same

Publications (2)

Publication Number Publication Date
CN101925441A CN101925441A (zh) 2010-12-22
CN101925441B true CN101925441B (zh) 2013-08-14

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008801252939A Expired - Fee Related CN101925441B (zh) 2007-12-31 2008-12-08 经等离子处理的磨料制品及其制造方法

Country Status (5)

Country Link
US (1) US8444458B2 (enExample)
EP (1) EP2240298A4 (enExample)
JP (1) JP5597140B2 (enExample)
CN (1) CN101925441B (enExample)
WO (1) WO2009088606A2 (enExample)

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EP2692819A1 (de) * 2012-08-02 2014-02-05 Robert Bosch GmbH Schleifkorn mit Basisfläche und Erhebungen
CN102862128B (zh) 2012-09-20 2015-10-21 北京国瑞升科技股份有限公司 一种凹凸结构磨料制品及其制备方法
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CN105121096B (zh) * 2013-03-29 2018-10-16 3M创新有限公司 非织造磨料制品及其制备方法
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US9873180B2 (en) 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
CN113579992A (zh) 2014-10-17 2021-11-02 应用材料公司 使用加成制造工艺的具复合材料特性的cmp衬垫建构
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
US9776361B2 (en) 2014-10-17 2017-10-03 Applied Materials, Inc. Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
KR101944695B1 (ko) * 2014-10-28 2019-02-01 반도 카가쿠 가부시키가이샤 연마재 및 연마재의 제조방법
JP6940495B2 (ja) 2015-10-30 2021-09-29 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 所望のゼータ電位を有する研磨用物品を形成するための装置及び方法
US10593574B2 (en) 2015-11-06 2020-03-17 Applied Materials, Inc. Techniques for combining CMP process tracking data with 3D printed CMP consumables
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
GB201622439D0 (en) * 2016-12-30 2017-02-15 3M Innovative Properties Co Abrasive article and method of use
GB201622441D0 (en) * 2016-12-30 2017-02-15 3M Innovative Properties Co Abrasive article and method of use
US11471999B2 (en) 2017-07-26 2022-10-18 Applied Materials, Inc. Integrated abrasive polishing pads and manufacturing methods
WO2019032286A1 (en) * 2017-08-07 2019-02-14 Applied Materials, Inc. ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME
EP3924146A4 (en) * 2019-02-13 2022-11-09 3M Innovative Properties Company ABRASIVES WITH PRECISELY SHAPED FEATURES, ABRASIVES MADE THEREOF AND PROCESSES FOR THEIR MANUFACTURE
US20210171814A1 (en) * 2019-12-10 2021-06-10 Saint-Gobain Abrasives, Inc. Fixed abrasive article
TWI768692B (zh) * 2021-02-01 2022-06-21 中國砂輪企業股份有限公司 化學機械研磨拋光墊修整器及其製造方法
US11878389B2 (en) 2021-02-10 2024-01-23 Applied Materials, Inc. Structures formed using an additive manufacturing process for regenerating surface texture in situ
EP4301551A4 (en) 2021-03-05 2025-01-08 Saint-Gobain Abrasives, Inc. GRINDING ARTICLES AND METHODS FOR FORMING THEM
US12064850B2 (en) 2021-12-30 2024-08-20 Saint-Gobain Abrasives, Inc. Abrasive articles and methods for forming same
EP4457058A1 (en) 2021-12-30 2024-11-06 Saint-gobain Abrasives, Inc Abrasive articles and methods for forming same

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Publication number Priority date Publication date Assignee Title
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CN1882417A (zh) * 2003-09-23 2006-12-20 3M创新有限公司 结构化磨料制品

Also Published As

Publication number Publication date
US8444458B2 (en) 2013-05-21
US20100255254A1 (en) 2010-10-07
WO2009088606A3 (en) 2009-10-01
WO2009088606A2 (en) 2009-07-16
EP2240298A2 (en) 2010-10-20
EP2240298A4 (en) 2014-04-30
CN101925441A (zh) 2010-12-22
JP2011507717A (ja) 2011-03-10
JP5597140B2 (ja) 2014-10-01

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130814

Termination date: 20181208

CF01 Termination of patent right due to non-payment of annual fee