JP5593671B2 - 波長可変干渉フィルター、測色センサー、測色モジュール - Google Patents
波長可変干渉フィルター、測色センサー、測色モジュール Download PDFInfo
- Publication number
- JP5593671B2 JP5593671B2 JP2009231219A JP2009231219A JP5593671B2 JP 5593671 B2 JP5593671 B2 JP 5593671B2 JP 2009231219 A JP2009231219 A JP 2009231219A JP 2009231219 A JP2009231219 A JP 2009231219A JP 5593671 B2 JP5593671 B2 JP 5593671B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- substrate
- support protrusion
- interference filter
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- 208000002925 dental caries Diseases 0.000 claims 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 63
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- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
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- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
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- 239000012466 permeate Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Landscapes
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Filters (AREA)
- Micromachines (AREA)
- Spectrometry And Color Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009231219A JP5593671B2 (ja) | 2009-10-05 | 2009-10-05 | 波長可変干渉フィルター、測色センサー、測色モジュール |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009231219A JP5593671B2 (ja) | 2009-10-05 | 2009-10-05 | 波長可変干渉フィルター、測色センサー、測色モジュール |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011081055A JP2011081055A (ja) | 2011-04-21 |
| JP2011081055A5 JP2011081055A5 (cg-RX-API-DMAC7.html) | 2012-10-04 |
| JP5593671B2 true JP5593671B2 (ja) | 2014-09-24 |
Family
ID=44075199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009231219A Expired - Fee Related JP5593671B2 (ja) | 2009-10-05 | 2009-10-05 | 波長可変干渉フィルター、測色センサー、測色モジュール |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5593671B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5716412B2 (ja) | 2011-01-24 | 2015-05-13 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光モジュール、及び光分析装置 |
| JP6007029B2 (ja) * | 2012-08-21 | 2016-10-12 | 株式会社アルバック | 基板加工方法 |
| JP6160055B2 (ja) * | 2012-10-01 | 2017-07-12 | セイコーエプソン株式会社 | 波長可変干渉フィルター、波長可変干渉フィルターの製造方法、光学装置および光学部品 |
| JP2025035965A (ja) * | 2023-09-01 | 2025-03-14 | 浜松ホトニクス株式会社 | ファブリペロー干渉フィルタ |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002221678A (ja) * | 2001-01-25 | 2002-08-09 | Seiko Epson Corp | 光スイッチングデバイス、その製造方法および画像表示装置 |
| JP2003195189A (ja) * | 2001-12-25 | 2003-07-09 | Fuji Photo Film Co Ltd | 光変調素子およびその作製方法 |
| JP2005017468A (ja) * | 2003-06-24 | 2005-01-20 | Myotoku Ltd | 干渉型ディテクタ及び検出方法 |
| EP1855142A3 (en) * | 2004-07-29 | 2008-07-30 | Idc, Llc | System and method for micro-electromechanical operating of an interferometric modulator |
| JP4561728B2 (ja) * | 2006-11-02 | 2010-10-13 | セイコーエプソン株式会社 | 光学デバイス、光学デバイスの製造方法、波長可変フィルタ、波長可変フィルタモジュール、および光スペクトラムアナライザ |
| JP5369515B2 (ja) * | 2008-06-26 | 2013-12-18 | セイコーエプソン株式会社 | 光フィルタとその製造方法及び光学フィルタ装置モジュール |
-
2009
- 2009-10-05 JP JP2009231219A patent/JP5593671B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011081055A (ja) | 2011-04-21 |
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