JP2011081055A5 - - Google Patents

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Publication number
JP2011081055A5
JP2011081055A5 JP2009231219A JP2009231219A JP2011081055A5 JP 2011081055 A5 JP2011081055 A5 JP 2011081055A5 JP 2009231219 A JP2009231219 A JP 2009231219A JP 2009231219 A JP2009231219 A JP 2009231219A JP 2011081055 A5 JP2011081055 A5 JP 2011081055A5
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JP
Japan
Prior art keywords
substrate
mirror
interference filter
wavelength
plan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009231219A
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English (en)
Japanese (ja)
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JP2011081055A (ja
JP5593671B2 (ja
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Priority to JP2009231219A priority Critical patent/JP5593671B2/ja
Priority claimed from JP2009231219A external-priority patent/JP5593671B2/ja
Publication of JP2011081055A publication Critical patent/JP2011081055A/ja
Publication of JP2011081055A5 publication Critical patent/JP2011081055A5/ja
Application granted granted Critical
Publication of JP5593671B2 publication Critical patent/JP5593671B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2009231219A 2009-10-05 2009-10-05 波長可変干渉フィルター、測色センサー、測色モジュール Expired - Fee Related JP5593671B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009231219A JP5593671B2 (ja) 2009-10-05 2009-10-05 波長可変干渉フィルター、測色センサー、測色モジュール

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009231219A JP5593671B2 (ja) 2009-10-05 2009-10-05 波長可変干渉フィルター、測色センサー、測色モジュール

Publications (3)

Publication Number Publication Date
JP2011081055A JP2011081055A (ja) 2011-04-21
JP2011081055A5 true JP2011081055A5 (cg-RX-API-DMAC7.html) 2012-10-04
JP5593671B2 JP5593671B2 (ja) 2014-09-24

Family

ID=44075199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009231219A Expired - Fee Related JP5593671B2 (ja) 2009-10-05 2009-10-05 波長可変干渉フィルター、測色センサー、測色モジュール

Country Status (1)

Country Link
JP (1) JP5593671B2 (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5716412B2 (ja) 2011-01-24 2015-05-13 セイコーエプソン株式会社 波長可変干渉フィルター、光モジュール、及び光分析装置
JP6007029B2 (ja) * 2012-08-21 2016-10-12 株式会社アルバック 基板加工方法
JP6160055B2 (ja) * 2012-10-01 2017-07-12 セイコーエプソン株式会社 波長可変干渉フィルター、波長可変干渉フィルターの製造方法、光学装置および光学部品
JP2025035965A (ja) * 2023-09-01 2025-03-14 浜松ホトニクス株式会社 ファブリペロー干渉フィルタ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002221678A (ja) * 2001-01-25 2002-08-09 Seiko Epson Corp 光スイッチングデバイス、その製造方法および画像表示装置
JP2003195189A (ja) * 2001-12-25 2003-07-09 Fuji Photo Film Co Ltd 光変調素子およびその作製方法
JP2005017468A (ja) * 2003-06-24 2005-01-20 Myotoku Ltd 干渉型ディテクタ及び検出方法
EP1855142A3 (en) * 2004-07-29 2008-07-30 Idc, Llc System and method for micro-electromechanical operating of an interferometric modulator
JP4561728B2 (ja) * 2006-11-02 2010-10-13 セイコーエプソン株式会社 光学デバイス、光学デバイスの製造方法、波長可変フィルタ、波長可変フィルタモジュール、および光スペクトラムアナライザ
JP5369515B2 (ja) * 2008-06-26 2013-12-18 セイコーエプソン株式会社 光フィルタとその製造方法及び光学フィルタ装置モジュール

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