JP5563059B2 - 二台のミラーの走査システム - Google Patents
二台のミラーの走査システム Download PDFInfo
- Publication number
- JP5563059B2 JP5563059B2 JP2012502155A JP2012502155A JP5563059B2 JP 5563059 B2 JP5563059 B2 JP 5563059B2 JP 2012502155 A JP2012502155 A JP 2012502155A JP 2012502155 A JP2012502155 A JP 2012502155A JP 5563059 B2 JP5563059 B2 JP 5563059B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- scanning
- substrate
- folding
- folding mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000758 substrate Substances 0.000 claims description 58
- 238000006073 displacement reaction Methods 0.000 claims description 12
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 230000003287 optical effect Effects 0.000 description 79
- 230000007246 mechanism Effects 0.000 description 16
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- 230000009467 reduction Effects 0.000 description 4
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Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
- H04N9/3129—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] scanning a light beam on the display screen
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
- H04N9/3141—Constructional details thereof
- H04N9/3173—Constructional details thereof wherein the projection device is specially adapted for enhanced portability
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Optical Scanning Systems (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/413,201 US8107147B2 (en) | 2009-03-27 | 2009-03-27 | Two-mirror scanning system |
US12/413,201 | 2009-03-27 | ||
PCT/US2010/028229 WO2010111216A2 (fr) | 2009-03-27 | 2010-03-23 | Système de balayage à deux miroirs |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012522266A JP2012522266A (ja) | 2012-09-20 |
JP5563059B2 true JP5563059B2 (ja) | 2014-07-30 |
Family
ID=42781809
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012502155A Active JP5563059B2 (ja) | 2009-03-27 | 2010-03-23 | 二台のミラーの走査システム |
Country Status (6)
Country | Link |
---|---|
US (2) | US8107147B2 (fr) |
EP (1) | EP2411859B1 (fr) |
JP (1) | JP5563059B2 (fr) |
KR (1) | KR101721047B1 (fr) |
CN (1) | CN102365573B (fr) |
WO (1) | WO2010111216A2 (fr) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8992028B2 (en) * | 2011-04-14 | 2015-03-31 | Microvision, Inc. | Free form optical redirection apparatus and devices using same |
IN2014CN04026A (fr) | 2011-12-06 | 2015-07-10 | Ostendo Technologies Inc | |
US8928969B2 (en) | 2011-12-06 | 2015-01-06 | Ostendo Technologies, Inc. | Spatio-optical directional light modulator |
US8854724B2 (en) | 2012-03-27 | 2014-10-07 | Ostendo Technologies, Inc. | Spatio-temporal directional light modulator |
GB201222370D0 (en) * | 2012-01-24 | 2013-01-23 | Grahmann Jan | Scanning device |
JP5868226B2 (ja) * | 2012-03-12 | 2016-02-24 | 住友重機械工業株式会社 | ガルバノスキャナ |
US9179126B2 (en) | 2012-06-01 | 2015-11-03 | Ostendo Technologies, Inc. | Spatio-temporal light field cameras |
WO2014144989A1 (fr) | 2013-03-15 | 2014-09-18 | Ostendo Technologies, Inc. | Affichages et procédés à champ lumineux 3d à angle de visualisation, profondeur et résolution améliorés |
WO2014203110A1 (fr) * | 2013-06-19 | 2014-12-24 | Primesense Ltd. | Projecteur intégré de lumière structurée |
JP6087788B2 (ja) * | 2013-10-31 | 2017-03-01 | アルプス電気株式会社 | 車載用投影装置 |
CN104914571A (zh) * | 2014-03-12 | 2015-09-16 | 南京理工大学 | 太阳模拟器光学系统 |
GB2528102B (en) * | 2014-07-10 | 2020-04-29 | Optos Plc | Ophthalmoscopes |
US9891430B2 (en) | 2015-02-10 | 2018-02-13 | Opus Microsystems Corporation | Laser projector |
US10281715B2 (en) | 2015-06-16 | 2019-05-07 | Young Optics Inc. | Imaging displacement module |
US11609427B2 (en) | 2015-10-16 | 2023-03-21 | Ostendo Technologies, Inc. | Dual-mode augmented/virtual reality (AR/VR) near-eye wearable displays |
US11106273B2 (en) | 2015-10-30 | 2021-08-31 | Ostendo Technologies, Inc. | System and methods for on-body gestural interfaces and projection displays |
US10345594B2 (en) | 2015-12-18 | 2019-07-09 | Ostendo Technologies, Inc. | Systems and methods for augmented near-eye wearable displays |
US10578882B2 (en) | 2015-12-28 | 2020-03-03 | Ostendo Technologies, Inc. | Non-telecentric emissive micro-pixel array light modulators and methods of fabrication thereof |
US10353203B2 (en) | 2016-04-05 | 2019-07-16 | Ostendo Technologies, Inc. | Augmented/virtual reality near-eye displays with edge imaging lens comprising a plurality of display devices |
US10453431B2 (en) | 2016-04-28 | 2019-10-22 | Ostendo Technologies, Inc. | Integrated near-far light field display systems |
US10522106B2 (en) | 2016-05-05 | 2019-12-31 | Ostendo Technologies, Inc. | Methods and apparatus for active transparency modulation |
CN106092970B (zh) * | 2016-06-07 | 2018-09-11 | 京东方科技集团股份有限公司 | 一种光学检测系统及光学检测设备 |
JP6724663B2 (ja) * | 2016-09-01 | 2020-07-15 | 船井電機株式会社 | スキャナミラー |
US10153614B1 (en) | 2017-08-31 | 2018-12-11 | Apple Inc. | Creating arbitrary patterns on a 2-D uniform grid VCSEL array |
TWI717604B (zh) * | 2017-09-11 | 2021-02-01 | 宏達國際電子股份有限公司 | 光學基站 |
US11047985B2 (en) | 2017-09-11 | 2021-06-29 | Htc Corporation | Optical base station |
US11487105B2 (en) | 2018-12-18 | 2022-11-01 | Microsoft Technology Licensing, Llc | Modified slow-scan drive signal |
US10930275B2 (en) | 2018-12-18 | 2021-02-23 | Microsoft Technology Licensing, Llc | Natural language input disambiguation for spatialized regions |
CN115267802A (zh) | 2018-12-29 | 2022-11-01 | 华为技术有限公司 | 一种激光测量模组和激光雷达 |
US20230098021A1 (en) * | 2021-09-29 | 2023-03-30 | Prysm Systems Inc. | Two-axis beam scanning systems and display systems with multiple beam scanners |
CN116519032B (zh) * | 2023-04-28 | 2024-02-20 | 广东顺德西安交通大学研究院 | 一种双镜反射的视觉检测设备 |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4761056A (en) * | 1987-03-27 | 1988-08-02 | Kaiser Aerospace And Electronics Corporation | Compact helmet mounted display |
JP2643722B2 (ja) * | 1992-04-24 | 1997-08-20 | キヤノン株式会社 | 画像複写装置 |
US6655597B1 (en) * | 2000-06-27 | 2003-12-02 | Symbol Technologies, Inc. | Portable instrument for electro-optically reading indicia and for projecting a bit-mapped color image |
JPH11183807A (ja) * | 1997-02-12 | 1999-07-09 | Univ Leland Stanford Jr | 小型走査共焦点顕微鏡 |
US6246504B1 (en) * | 1999-06-30 | 2001-06-12 | The Regents Of The University Of Caifornia | Apparatus and method for optical raster-scanning in a micromechanical system |
US7310174B2 (en) * | 1999-08-05 | 2007-12-18 | Microvision, Inc. | Method and apparatus for scanning regions |
US6590710B2 (en) * | 2000-02-18 | 2003-07-08 | Yokogawa Electric Corporation | Fabry-Perot filter, wavelength-selective infrared detector and infrared gas analyzer using the filter and detector |
US6795605B1 (en) * | 2000-08-01 | 2004-09-21 | Cheetah Omni, Llc | Micromechanical optical switch |
JP2002148554A (ja) * | 2000-11-03 | 2002-05-22 | Samsung Electronics Co Ltd | 光スキャナ及びこれを適用したレーザ映像投射装置並びにその駆動方法 |
US6657765B2 (en) * | 2001-03-01 | 2003-12-02 | Ricoh Company, Ltd. | Optical deflecting unit, optical scanning unit, image forming apparatus, and method of producing optical unit |
US6643053B2 (en) * | 2002-02-20 | 2003-11-04 | The Regents Of The University Of California | Piecewise linear spatial phase modulator using dual-mode micromirror arrays for temporal and diffractive fourier optics |
JP2004045496A (ja) * | 2002-07-09 | 2004-02-12 | Olympus Corp | 2次元光走査装置及び映像表示装置 |
JP3774715B2 (ja) * | 2002-10-21 | 2006-05-17 | キヤノン株式会社 | 投射型表示装置 |
JP2004326083A (ja) * | 2003-04-09 | 2004-11-18 | Seiko Instruments Inc | ミラーの製造方法とミラーデバイス |
US7061618B2 (en) * | 2003-10-17 | 2006-06-13 | Axsun Technologies, Inc. | Integrated spectroscopy system |
EP1693696A4 (fr) * | 2003-12-10 | 2008-02-06 | Matsushita Electric Ind Co Ltd | Unite d'affichage et procede de balayage correspondant |
EP1797472A1 (fr) * | 2004-09-28 | 2007-06-20 | Koninklijke Philips Electronics N.V. | Micro-scanner bidimensionnel |
US20090051228A1 (en) * | 2005-03-30 | 2009-02-26 | Nabtesco Corporation | Actuator unit |
US7342701B2 (en) * | 2005-04-19 | 2008-03-11 | Asml Holding N.V. | Multiple illumination source exposure apparatus |
US7130095B1 (en) * | 2005-06-24 | 2006-10-31 | Symbol Technologies, Inc. | Correcting for image distortion in image projectors |
US7307650B2 (en) * | 2005-06-24 | 2007-12-11 | Symbol Technologies, Inc. | Arrangement for, and a method of, reducing image distortion due to electrical interference |
US7416126B2 (en) * | 2005-06-24 | 2008-08-26 | Symbol Technologies, Inc. | Taut, torsional flexure and a compact drive for, and method of, scanning light using the flexure |
US7327507B2 (en) * | 2005-08-02 | 2008-02-05 | Kabushiki Kaisha Toshiba | Optical beam scanning device having two sets of fθ mirrors where the mirror base and mirror face have differing coefficients of linear expansion |
KR100765765B1 (ko) * | 2005-11-15 | 2007-10-15 | 삼성전자주식회사 | 프로젝터/프로젝션 겸용 디스플레이 장치 |
US7733493B2 (en) * | 2005-12-23 | 2010-06-08 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Fourier transform spectrometer |
JP2007178944A (ja) | 2005-12-28 | 2007-07-12 | Brother Ind Ltd | 光学装置及び画像表示装置 |
US7859567B2 (en) * | 2006-03-31 | 2010-12-28 | Microvision, Inc. | Arrangement for and method of projecting a color image by switching scan directions in alternate frames |
US20080037090A1 (en) * | 2006-04-11 | 2008-02-14 | Microvision, Inc. | Mems-based projector suitable for inclusion in portable user devices |
JP2009069457A (ja) * | 2007-09-13 | 2009-04-02 | Seiko Epson Corp | 光走査素子及び画像表示装置 |
-
2009
- 2009-03-27 US US12/413,201 patent/US8107147B2/en active Active
-
2010
- 2010-03-23 JP JP2012502155A patent/JP5563059B2/ja active Active
- 2010-03-23 KR KR1020117025135A patent/KR101721047B1/ko active IP Right Grant
- 2010-03-23 EP EP10756686.1A patent/EP2411859B1/fr active Active
- 2010-03-23 WO PCT/US2010/028229 patent/WO2010111216A2/fr active Application Filing
- 2010-03-23 CN CN2010800140647A patent/CN102365573B/zh active Active
-
2011
- 2011-12-21 US US13/333,291 patent/US20120092741A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CN102365573B (zh) | 2013-09-25 |
EP2411859B1 (fr) | 2020-04-22 |
EP2411859A4 (fr) | 2016-07-20 |
KR101721047B1 (ko) | 2017-03-29 |
US20120092741A1 (en) | 2012-04-19 |
EP2411859A2 (fr) | 2012-02-01 |
KR20120012459A (ko) | 2012-02-10 |
JP2012522266A (ja) | 2012-09-20 |
WO2010111216A2 (fr) | 2010-09-30 |
WO2010111216A3 (fr) | 2011-01-13 |
CN102365573A (zh) | 2012-02-29 |
US20100245957A1 (en) | 2010-09-30 |
US8107147B2 (en) | 2012-01-31 |
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