JP5562353B2 - 気体軸受およびその製造方法 - Google Patents

気体軸受およびその製造方法 Download PDF

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Publication number
JP5562353B2
JP5562353B2 JP2011546945A JP2011546945A JP5562353B2 JP 5562353 B2 JP5562353 B2 JP 5562353B2 JP 2011546945 A JP2011546945 A JP 2011546945A JP 2011546945 A JP2011546945 A JP 2011546945A JP 5562353 B2 JP5562353 B2 JP 5562353B2
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Japan
Prior art keywords
bearing
bearing surface
gas
pores
bearing housing
Prior art date
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Active
Application number
JP2011546945A
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English (en)
Japanese (ja)
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JP2012515887A (ja
Inventor
デュポン，ラルフ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Bearings Ltd
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Air Bearings Ltd
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Filing date
Publication date
Application filed by Air Bearings Ltd filed Critical Air Bearings Ltd
Publication of JP2012515887A publication Critical patent/JP2012515887A/ja
Application granted granted Critical
Publication of JP5562353B2 publication Critical patent/JP5562353B2/ja
Active legal-status Critical Current
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/10—Construction relative to lubrication
    • F16C33/1005—Construction relative to lubrication with gas, e.g. air, as lubricant
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2220/00—Shaping
    • F16C2220/60—Shaping by removing material, e.g. machining
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0685—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for radial load only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Laser Beam Processing (AREA)
JP2011546945A 2009-01-26 2010-01-26 気体軸受およびその製造方法 Active JP5562353B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0901250.1 2009-01-26
GB0901250A GB2467168B (en) 2009-01-26 2009-01-26 Gas bearing and method of manufacturing the same
PCT/GB2010/000115 WO2010084332A1 (en) 2009-01-26 2010-01-26 Gas bearing and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JP2012515887A JP2012515887A (ja) 2012-07-12
JP5562353B2 true JP5562353B2 (ja) 2014-07-30

Family

ID=40469094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011546945A Active JP5562353B2 (ja) 2009-01-26 2010-01-26 気体軸受およびその製造方法

Country Status (8)

Country Link
US (1) US8882353B2 (ko)
EP (1) EP2382399B1 (ko)
JP (1) JP5562353B2 (ko)
KR (1) KR101613333B1 (ko)
CN (1) CN102292560B (ko)
GB (1) GB2467168B (ko)
TW (1) TWI507618B (ko)
WO (1) WO2010084332A1 (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2467168B (en) 2009-01-26 2011-03-16 Air Bearings Ltd Gas bearing and method of manufacturing the same
KR102234726B1 (ko) * 2014-06-24 2021-04-02 엘지전자 주식회사 리니어 압축기
US9995175B2 (en) * 2016-06-29 2018-06-12 General Electric Company System and method for gas bearing support of turbine
US10247017B2 (en) * 2016-06-29 2019-04-02 General Electric Company System and method for gas bearing support of turbine
WO2018057717A1 (en) * 2016-09-24 2018-03-29 Radiant Physics Inc. Pressurized gas bearings for rotating machinery
CN106640971B (zh) * 2017-03-09 2019-06-28 中国工程物理研究院机械制造工艺研究所 一种静压气体止推轴承
WO2020106279A1 (en) 2018-11-20 2020-05-28 Dresser-Rand Company Bearing and/or seal assembly including permeable body with features engineered to form a desired distribution pattern for a pressurized gas conveyed therethrough
EP4006367B1 (en) 2020-11-27 2024-05-22 European Space Agency Gas bearing system
CN112828485B (zh) * 2020-12-31 2023-03-24 南昌航空大学 一种用于止推顶箔微激光点焊的装置

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US6439773B1 (en) * 1909-11-09 2002-08-27 Ntn Corporation Externally pressurized gas bearing spindle assembly
US3013845A (en) * 1959-06-26 1961-12-19 Escher Wyss Ag Supplying supporting gas to a gas pressure bearing
US3472565A (en) * 1967-09-05 1969-10-14 Harold E G Arneson Externally pressurized bearing structure
JPS4833296B1 (ko) * 1970-01-21 1973-10-13
FR2087434A5 (ko) * 1970-05-20 1971-12-31 Cit Alcatel
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
DE3666272D1 (en) * 1985-06-10 1989-11-16 Interatom Aerostatic bearing
JPS63297734A (ja) * 1987-05-29 1988-12-05 Canon Inc タ−ボ過給機
US6744010B1 (en) * 1991-08-22 2004-06-01 United Technologies Corporation Laser drilled holes for film cooling
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DE4403340A1 (de) 1994-02-03 1995-08-10 Heinzl Joachim Verfahren zum Herstellen zumindest einer Mikrodüse eines aerostatischen Lagers
DE4436156C1 (de) 1994-10-10 1996-03-21 Heinzl Joachim Aerostatisches Lager und Verfahren zur Herstellung eines aerostatischen Lagers
FR2734744B1 (fr) * 1995-05-31 1998-02-20 Ntn Toyo Bearing Co Ltd Broche de palier a air comprime en continu pour des machines de forage, des machines-outils de precision ou analogues
DE19528623A1 (de) 1995-08-04 1997-02-06 Fritz Stahlecker Axiallagerung für einen Schaft eines OE-Spinnrotors
US5653479A (en) * 1996-02-02 1997-08-05 Vlsi Technology, Inc. Vacuum seal for a ball junction
JP3860253B2 (ja) * 1996-04-30 2006-12-20 黒田精工株式会社 静圧気体軸受
US5872875A (en) 1997-12-11 1999-02-16 Cooper Cameron Corporation Hydrodynamic shaft bearing with concentric outer hydrostatic bearing
JP3752422B2 (ja) * 1998-03-13 2006-03-08 株式会社 日立インダストリイズ 遠心圧縮機及びそれに用いる軸封装置
DE19915983A1 (de) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung
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DE10062603B4 (de) 2000-12-12 2011-05-19 Dr. Johannes Heidenhain Gmbh Aerostatisches Lager
DE10062106B4 (de) * 2000-12-13 2011-01-13 Rieter Ingolstadt Gmbh Offenend-Spinnvorrichtung mit einem aerostatischen Axiallager
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JP3779186B2 (ja) 2001-08-30 2006-05-24 株式会社千葉精密 静圧気体軸受
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ATE362051T1 (de) * 2004-01-29 2007-06-15 Pfeiffer Vacuum Gmbh Gasreibungspumpe
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JP2007285386A (ja) * 2006-04-14 2007-11-01 Ntn Corp 空気軸受スピンドルおよび空気軸受スピンドルの制御方法
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DE102006048718A1 (de) * 2006-10-16 2008-04-17 Robert Bosch Gmbh Injektor mit lasergebohrtem Filter
GB0621699D0 (en) * 2006-10-31 2006-12-06 Gsi Group Ltd Aerostatic bearing spindles
GB2467168B (en) 2009-01-26 2011-03-16 Air Bearings Ltd Gas bearing and method of manufacturing the same

Also Published As

Publication number Publication date
CN102292560B (zh) 2015-11-25
KR101613333B1 (ko) 2016-04-18
JP2012515887A (ja) 2012-07-12
EP2382399A1 (en) 2011-11-02
EP2382399B1 (en) 2016-04-27
WO2010084332A1 (en) 2010-07-29
GB2467168A (en) 2010-07-28
US20120020596A1 (en) 2012-01-26
KR20110123749A (ko) 2011-11-15
GB2467168B (en) 2011-03-16
CN102292560A (zh) 2011-12-21
GB0901250D0 (en) 2009-03-11
TW201037182A (en) 2010-10-16
TWI507618B (zh) 2015-11-11
US8882353B2 (en) 2014-11-11

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