JP5531009B2 - ポリキャピラリ光学系を有するｘ線発生装置 - Google Patents

ポリキャピラリ光学系を有するｘ線発生装置 Download PDF

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JP5531009B2
JP5531009B2 JP2011504197A JP2011504197A JP5531009B2 JP 5531009 B2 JP5531009 B2 JP 5531009B2 JP 2011504197 A JP2011504197 A JP 2011504197A JP 2011504197 A JP2011504197 A JP 2011504197A JP 5531009 B2 JP5531009 B2 JP 5531009B2
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optical system
ray
ray generator
generator according
gradient
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JP2011516892A5 (enExample
JP2011516892A (ja
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ボリス ヴァーマン、
リカイ ジャン、
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リガク イノベイティブ テクノロジーズ インコーポレイテッド
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    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/061—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements characterised by a multilayer structure

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2011504197A 2008-04-11 2009-04-10 ポリキャピラリ光学系を有するｘ線発生装置 Active JP5531009B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US4414808P 2008-04-11 2008-04-11
US61/044,148 2008-04-11
PCT/US2009/040178 WO2009126868A1 (en) 2008-04-11 2009-04-10 X-ray generator with polycapillary optic

Publications (3)

Publication Number Publication Date
JP2011516892A JP2011516892A (ja) 2011-05-26
JP2011516892A5 JP2011516892A5 (enExample) 2014-04-10
JP5531009B2 true JP5531009B2 (ja) 2014-06-25

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JP2011504197A Active JP5531009B2 (ja) 2008-04-11 2009-04-10 ポリキャピラリ光学系を有するｘ線発生装置

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US (2) US7933383B2 (enExample)
EP (1) EP2263238B1 (enExample)
JP (1) JP5531009B2 (enExample)
CA (1) CA2720776C (enExample)
WO (1) WO2009126868A1 (enExample)

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FR2958858B1 (fr) * 2010-04-15 2012-06-29 Joel Kerjean Dispositif de guidage de photons pour appareil de radiotherapie
US8831175B2 (en) * 2010-05-19 2014-09-09 Eric H. Silver Hybrid X-ray optic apparatus and methods
CN102543243B (zh) * 2010-12-28 2016-07-13 Ge医疗系统环球技术有限公司 集成毛细管式平行x射线聚焦透镜
EP2740127B1 (en) * 2011-08-06 2017-11-29 Rigaku Innovative Technologies, Inc. Nanotube based device for guiding x-ray photons and neutrons
US20130182827A1 (en) * 2011-12-02 2013-07-18 Canon Kabushiki Kaisha X-ray waveguide and x-ray waveguide system
JP6016386B2 (ja) * 2012-03-09 2016-10-26 キヤノン株式会社 Ｘ線光学装置
JP5964705B2 (ja) * 2012-09-14 2016-08-03 浜松ホトニクス株式会社 ポリキャピラリレンズ
EP2898361A4 (en) 2012-09-24 2016-06-01 Convergent R N R Ltd X-RAY REFLECTIVE LENS ARRANGEMENT
CN202905197U (zh) * 2012-10-09 2013-04-24 北京师范大学 用于聚焦同步辐射光源的光学器件
US20140161233A1 (en) 2012-12-06 2014-06-12 Bruker Axs Gmbh X-ray apparatus with deflectable electron beam
US9846132B2 (en) 2013-10-21 2017-12-19 Kla-Tencor Corporation Small-angle scattering X-ray metrology systems and methods
US9885962B2 (en) * 2013-10-28 2018-02-06 Kla-Tencor Corporation Methods and apparatus for measuring semiconductor device overlay using X-ray metrology
JP6069609B2 (ja) * 2015-03-26 2017-02-01 株式会社リガク 二重湾曲ｘ線集光素子およびその構成体、二重湾曲ｘ線分光素子およびその構成体の製造方法
US11189392B2 (en) * 2015-09-25 2021-11-30 Osaka University X-ray microscope
US10677744B1 (en) * 2016-06-03 2020-06-09 U.S. Department Of Energy Multi-cone x-ray imaging Bragg crystal spectrometer
DE112017003580T5 (de) * 2016-07-15 2019-05-09 Rigaku Corporation Röntgeninspektionsvorrichtung, Röntgendünnfilminspektionsverfahren und Verfahren zum Messen einer Rocking-Kurve
JP6857400B2 (ja) * 2018-03-01 2021-04-14 株式会社リガク Ｘ線発生装置、及びｘ線分析装置
US12209978B2 (en) 2020-07-15 2025-01-28 Danmarks Tekniske Universitet Laboratory-based 3D scanning X-ray Laue micro-diffraction system and method (Lab3DμXRD)

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US5604353A (en) 1995-06-12 1997-02-18 X-Ray Optical Systems, Inc. Multiple-channel, total-reflection optic with controllable divergence
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US6781060B2 (en) 2002-07-26 2004-08-24 X-Ray Optical Systems Incorporated Electrical connector, a cable sleeve, and a method for fabricating an electrical connection
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JP2007501503A (ja) 2003-08-04 2007-01-25 エックス−レイ オプティカル システムズ インコーポレーテッド 管電力調節および遠隔較正を使用して出力安定性が向上したｘ線源アセンブリ
US7023955B2 (en) 2003-08-12 2006-04-04 X-Ray Optical System, Inc. X-ray fluorescence system with apertured mask for analyzing patterned surfaces
US7991116B2 (en) * 2005-08-04 2011-08-02 X-Ray Optical Systems, Inc. Monochromatic x-ray micro beam for trace element mapping
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JP4860418B2 (ja) * 2006-10-10 2012-01-25 株式会社リガク Ｘ線光学系
EP2263238B1 (en) * 2008-04-11 2012-06-20 Rigaku Innovative Technologies, Inc. X-ray generator with polycapillary optic

Also Published As

Publication number Publication date
CA2720776C (en) 2013-07-02
US7933383B2 (en) 2011-04-26
CA2720776A1 (en) 2009-10-15
WO2009126868A1 (en) 2009-10-15
EP2263238A1 (en) 2010-12-22
US20110280530A1 (en) 2011-11-17
EP2263238B1 (en) 2012-06-20
JP2011516892A (ja) 2011-05-26
US20090279670A1 (en) 2009-11-12

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