CA2720776C - X-ray generator with polycapillary optic - Google Patents
X-ray generator with polycapillary optic Download PDFInfo
- Publication number
- CA2720776C CA2720776C CA2720776A CA2720776A CA2720776C CA 2720776 C CA2720776 C CA 2720776C CA 2720776 A CA2720776 A CA 2720776A CA 2720776 A CA2720776 A CA 2720776A CA 2720776 C CA2720776 C CA 2720776C
- Authority
- CA
- Canada
- Prior art keywords
- optic
- ray
- graded
- baez
- focusing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000005855 radiation Effects 0.000 claims abstract description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 239000002041 carbon nanotube Substances 0.000 claims description 2
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 2
- 239000000523 sample Substances 0.000 description 15
- 238000002441 X-ray diffraction Methods 0.000 description 7
- 238000001228 spectrum Methods 0.000 description 7
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000003750 conditioning effect Effects 0.000 description 4
- 238000002050 diffraction method Methods 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000000333 X-ray scattering Methods 0.000 description 2
- 238000000441 X-ray spectroscopy Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000001143 conditioned effect Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 102000004169 proteins and genes Human genes 0.000 description 2
- 108090000623 proteins and genes Proteins 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 238000001634 microspectroscopy Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000000634 powder X-ray diffraction Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000010896 thin film analysis Methods 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/061—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements characterised by a multilayer structure
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US4414808P | 2008-04-11 | 2008-04-11 | |
| US61/044,148 | 2008-04-11 | ||
| PCT/US2009/040178 WO2009126868A1 (en) | 2008-04-11 | 2009-04-10 | X-ray generator with polycapillary optic |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2720776A1 CA2720776A1 (en) | 2009-10-15 |
| CA2720776C true CA2720776C (en) | 2013-07-02 |
Family
ID=40834348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2720776A Active CA2720776C (en) | 2008-04-11 | 2009-04-10 | X-ray generator with polycapillary optic |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7933383B2 (enExample) |
| EP (1) | EP2263238B1 (enExample) |
| JP (1) | JP5531009B2 (enExample) |
| CA (1) | CA2720776C (enExample) |
| WO (1) | WO2009126868A1 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2263238B1 (en) * | 2008-04-11 | 2012-06-20 | Rigaku Innovative Technologies, Inc. | X-ray generator with polycapillary optic |
| FR2958858B1 (fr) * | 2010-04-15 | 2012-06-29 | Joel Kerjean | Dispositif de guidage de photons pour appareil de radiotherapie |
| US8831175B2 (en) * | 2010-05-19 | 2014-09-09 | Eric H. Silver | Hybrid X-ray optic apparatus and methods |
| CN102543243B (zh) * | 2010-12-28 | 2016-07-13 | Ge医疗系统环球技术有限公司 | 集成毛细管式平行x射线聚焦透镜 |
| EP2740127B1 (en) * | 2011-08-06 | 2017-11-29 | Rigaku Innovative Technologies, Inc. | Nanotube based device for guiding x-ray photons and neutrons |
| US20130182827A1 (en) * | 2011-12-02 | 2013-07-18 | Canon Kabushiki Kaisha | X-ray waveguide and x-ray waveguide system |
| JP6016386B2 (ja) * | 2012-03-09 | 2016-10-26 | キヤノン株式会社 | Ｘ線光学装置 |
| JP5964705B2 (ja) * | 2012-09-14 | 2016-08-03 | 浜松ホトニクス株式会社 | ポリキャピラリレンズ |
| EP2898361A4 (en) | 2012-09-24 | 2016-06-01 | Convergent R N R Ltd | X-RAY REFLECTIVE LENS ARRANGEMENT |
| CN202905197U (zh) * | 2012-10-09 | 2013-04-24 | 北京师范大学 | 用于聚焦同步辐射光源的光学器件 |
| US20140161233A1 (en) | 2012-12-06 | 2014-06-12 | Bruker Axs Gmbh | X-ray apparatus with deflectable electron beam |
| US9846132B2 (en) | 2013-10-21 | 2017-12-19 | Kla-Tencor Corporation | Small-angle scattering X-ray metrology systems and methods |
| US9885962B2 (en) * | 2013-10-28 | 2018-02-06 | Kla-Tencor Corporation | Methods and apparatus for measuring semiconductor device overlay using X-ray metrology |
| JP6069609B2 (ja) * | 2015-03-26 | 2017-02-01 | 株式会社リガク | 二重湾曲ｘ線集光素子およびその構成体、二重湾曲ｘ線分光素子およびその構成体の製造方法 |
| US11189392B2 (en) * | 2015-09-25 | 2021-11-30 | Osaka University | X-ray microscope |
| US10677744B1 (en) * | 2016-06-03 | 2020-06-09 | U.S. Department Of Energy | Multi-cone x-ray imaging Bragg crystal spectrometer |
| DE112017003580T5 (de) * | 2016-07-15 | 2019-05-09 | Rigaku Corporation | Röntgeninspektionsvorrichtung, Röntgendünnfilminspektionsverfahren und Verfahren zum Messen einer Rocking-Kurve |
| JP6857400B2 (ja) * | 2018-03-01 | 2021-04-14 | 株式会社リガク | Ｘ線発生装置、及びｘ線分析装置 |
| US12209978B2 (en) | 2020-07-15 | 2025-01-28 | Danmarks Tekniske Universitet | Laboratory-based 3D scanning X-ray Laue micro-diffraction system and method (Lab3DμXRD) |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5497008A (en) | 1990-10-31 | 1996-03-05 | X-Ray Optical Systems, Inc. | Use of a Kumakhov lens in analytic instruments |
| US5175755A (en) | 1990-10-31 | 1992-12-29 | X-Ray Optical System, Inc. | Use of a kumakhov lens for x-ray lithography |
| US5192869A (en) | 1990-10-31 | 1993-03-09 | X-Ray Optical Systems, Inc. | Device for controlling beams of particles, X-ray and gamma quanta |
| EP0723272B1 (en) * | 1994-07-08 | 2001-04-25 | Muradin Abubekirovich Kumakhov | Method of guiding beams of neutral and charged particles and a device for implementing said method |
| US5570408A (en) | 1995-02-28 | 1996-10-29 | X-Ray Optical Systems, Inc. | High intensity, small diameter x-ray beam, capillary optic system |
| US5604353A (en) | 1995-06-12 | 1997-02-18 | X-Ray Optical Systems, Inc. | Multiple-channel, total-reflection optic with controllable divergence |
| US5745547A (en) | 1995-08-04 | 1998-04-28 | X-Ray Optical Systems, Inc. | Multiple channel optic |
| US6041099A (en) | 1998-02-19 | 2000-03-21 | Osmic, Inc. | Single corner kirkpatrick-baez beam conditioning optic assembly |
| GB9815968D0 (en) | 1998-07-23 | 1998-09-23 | Bede Scient Instr Ltd | X-ray focusing apparatus |
| US6333966B1 (en) * | 1998-08-18 | 2001-12-25 | Neil Charles Schoen | Laser accelerator femtosecond X-ray source |
| WO2000060610A1 (en) * | 1999-04-01 | 2000-10-12 | Mamea Imaging Ab | Method and apparatus for simplified alignment in x-ray imaging |
| US6704389B1 (en) | 1999-07-16 | 2004-03-09 | X-Ray Optical Systems, Inc. | Support device for a polycapillary optic |
| US6317483B1 (en) * | 1999-11-29 | 2001-11-13 | X-Ray Optical Systems, Inc. | Doubly curved optical device with graded atomic planes |
| US6697454B1 (en) | 2000-06-29 | 2004-02-24 | X-Ray Optical Systems, Inc. | X-ray analytical techniques applied to combinatorial library screening |
| DE10112928C1 (de) | 2001-03-12 | 2002-08-22 | Ifg Inst Fuer Geraetebau Gmbh | Kapillaroptisches Element bestehend aus Kanäle bildenden Kapillaren und Verfahren zu dessen Herstellung |
| ES2271277T3 (es) | 2001-06-19 | 2007-04-16 | X-Ray Optical Systems, Inc. | Sistema xrf dispersivo de longitud de onda que usa optica de enfoque para la excitacion y un monocromador de enfoque para la recogida. |
| WO2003012797A1 (en) | 2001-07-27 | 2003-02-13 | X-Ray Optical Systems, Inc. | Methods and devices for aligning and determining the focusing characteristics of x-ray optics |
| WO2003049510A2 (en) | 2001-12-04 | 2003-06-12 | X-Ray Optical Systems, Inc. | X-ray source assembly having enhanced output stability, and fluid stream analysis applications thereof |
| US7382856B2 (en) | 2001-12-04 | 2008-06-03 | X-Ray Optical Systems, Inc. | X-ray source assembly having enhanced output stability, and fluid stream analysis applications thereof |
| US6781060B2 (en) | 2002-07-26 | 2004-08-24 | X-Ray Optical Systems Incorporated | Electrical connector, a cable sleeve, and a method for fabricating an electrical connection |
| US7372880B2 (en) * | 2002-12-20 | 2008-05-13 | Alnair Labs Corporation | Optical pulse lasers |
| JP2007501503A (ja) | 2003-08-04 | 2007-01-25 | エックス−レイ オプティカル システムズ インコーポレーテッド | 管電力調節および遠隔較正を使用して出力安定性が向上したｘ線源アセンブリ |
| US7023955B2 (en) | 2003-08-12 | 2006-04-04 | X-Ray Optical System, Inc. | X-ray fluorescence system with apertured mask for analyzing patterned surfaces |
| US7991116B2 (en) * | 2005-08-04 | 2011-08-02 | X-Ray Optical Systems, Inc. | Monochromatic x-ray micro beam for trace element mapping |
| WO2008097345A2 (en) | 2006-08-10 | 2008-08-14 | X-Ray Optical Systems, Inc. | Wide parallel beam diffraction imaging method and system |
| JP4860418B2 (ja) * | 2006-10-10 | 2012-01-25 | 株式会社リガク | Ｘ線光学系 |
| EP2263238B1 (en) * | 2008-04-11 | 2012-06-20 | Rigaku Innovative Technologies, Inc. | X-ray generator with polycapillary optic |
-
2009
- 2009-04-10 EP EP09731087A patent/EP2263238B1/en active Active
- 2009-04-10 CA CA2720776A patent/CA2720776C/en active Active
- 2009-04-10 WO PCT/US2009/040178 patent/WO2009126868A1/en not_active Ceased
- 2009-04-10 JP JP2011504197A patent/JP5531009B2/ja active Active
- 2009-04-10 US US12/421,907 patent/US7933383B2/en active Active
-
2011
- 2011-03-18 US US13/051,708 patent/US20110280530A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| US7933383B2 (en) | 2011-04-26 |
| CA2720776A1 (en) | 2009-10-15 |
| WO2009126868A1 (en) | 2009-10-15 |
| EP2263238A1 (en) | 2010-12-22 |
| US20110280530A1 (en) | 2011-11-17 |
| EP2263238B1 (en) | 2012-06-20 |
| JP2011516892A (ja) | 2011-05-26 |
| US20090279670A1 (en) | 2009-11-12 |
| JP5531009B2 (ja) | 2014-06-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |