JP5516951B2 - ガス精製方法 - Google Patents
ガス精製方法 Download PDFInfo
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- JP5516951B2 JP5516951B2 JP2009537029A JP2009537029A JP5516951B2 JP 5516951 B2 JP5516951 B2 JP 5516951B2 JP 2009537029 A JP2009537029 A JP 2009537029A JP 2009537029 A JP2009537029 A JP 2009537029A JP 5516951 B2 JP5516951 B2 JP 5516951B2
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- 238000000746 purification Methods 0.000 title claims description 37
- 238000000034 method Methods 0.000 title claims description 15
- 239000007789 gas Substances 0.000 claims description 171
- 239000012528 membrane Substances 0.000 claims description 157
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 110
- 229910052799 carbon Inorganic materials 0.000 claims description 110
- 239000012535 impurity Substances 0.000 claims description 58
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 46
- 239000012510 hollow fiber Substances 0.000 claims description 25
- 229910021529 ammonia Inorganic materials 0.000 claims description 23
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 14
- 229920006380 polyphenylene oxide Polymers 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 11
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 10
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 10
- 239000000460 chlorine Substances 0.000 claims description 10
- 229910052801 chlorine Inorganic materials 0.000 claims description 10
- 238000007873 sieving Methods 0.000 claims description 7
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 claims description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 5
- 229910052736 halogen Inorganic materials 0.000 claims description 5
- 150000002367 halogens Chemical class 0.000 claims description 5
- 150000004678 hydrides Chemical class 0.000 claims description 5
- 229910000073 phosphorus hydride Inorganic materials 0.000 claims description 5
- 229910000077 silane Inorganic materials 0.000 claims description 5
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 3
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 3
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052794 bromium Inorganic materials 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- 239000011737 fluorine Substances 0.000 claims description 3
- 150000004820 halides Chemical class 0.000 claims description 3
- 229910000042 hydrogen bromide Inorganic materials 0.000 claims description 3
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims description 3
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 3
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 3
- 229920000620 organic polymer Polymers 0.000 description 35
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 22
- 238000000926 separation method Methods 0.000 description 22
- 239000012466 permeate Substances 0.000 description 18
- 229920001721 polyimide Polymers 0.000 description 17
- 239000004642 Polyimide Substances 0.000 description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
- 239000001257 hydrogen Substances 0.000 description 11
- 229910052739 hydrogen Inorganic materials 0.000 description 11
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 10
- 239000001307 helium Substances 0.000 description 10
- 229910052734 helium Inorganic materials 0.000 description 10
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 10
- 239000011347 resin Substances 0.000 description 10
- 229920005989 resin Polymers 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 239000002994 raw material Substances 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 125000003118 aryl group Chemical group 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 5
- 239000001569 carbon dioxide Substances 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 4
- 229910002091 carbon monoxide Inorganic materials 0.000 description 4
- 238000010000 carbonizing Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 229920003235 aromatic polyamide Polymers 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000011550 stock solution Substances 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 229910021536 Zeolite Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 229920002301 cellulose acetate Polymers 0.000 description 2
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 2
- 238000004817 gas chromatography Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012433 hydrogen halide Substances 0.000 description 2
- 229910000039 hydrogen halide Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010457 zeolite Substances 0.000 description 2
- SYNPRNNJJLRHTI-UHFFFAOYSA-N 2-(hydroxymethyl)butane-1,4-diol Chemical compound OCCC(CO)CO SYNPRNNJJLRHTI-UHFFFAOYSA-N 0.000 description 1
- 208000035404 Autolysis Diseases 0.000 description 1
- 206010057248 Cell death Diseases 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001112 coagulating effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000001165 gas chromatography-thermal conductivity detection Methods 0.000 description 1
- 229920005610 lignin Polymers 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 229920000368 omega-hydroxypoly(furan-2,5-diylmethylene) polymer Polymers 0.000 description 1
- 238000005373 pervaporation Methods 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 230000028043 self proteolysis Effects 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
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- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
- B01D53/228—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion characterised by specific membranes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
- B01D63/02—Hollow fibre modules
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
- B01D63/06—Tubular membrane modules
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/04—Tubular membranes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/08—Hollow fibre membranes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/021—Carbon
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- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/02—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen
- C01B3/04—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by decomposition of inorganic compounds, e.g. ammonia
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- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/501—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion
- C01B3/503—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion characterised by the membrane
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- C01C—AMMONIA; CYANOGEN; COMPOUNDS THEREOF
- C01C1/00—Ammonia; Compounds thereof
- C01C1/02—Preparation, purification or separation of ammonia
- C01C1/024—Purification
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
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- Separation Using Semi-Permeable Membranes (AREA)
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Description
本願は、2007年10月12日に日本に出願された特願2007−266495号、2008年9月17日に日本に出願された特願2008−238357号に基づき優先権を主張し、その内容をここに援用する。
また、炭素膜は、他の分子ふるい作用を持つ気体分離膜(ゼオライト膜やシリカ膜)に比べて、耐薬品性が優れているので、腐食性の強い半導体材料ガスの精製に適している。さらに、炭素膜は、分離性能に優れているので、10ppm以下の不純物を含むガスを効率良く精製することが可能である。更にまた、炭素膜を中空糸状に成形することで、平膜状、螺旋巻状と比べて、膜モジュールをコンパクトに設計することができる。
図1において、符号1は炭素膜モジュールを示す。この炭素膜モジュール1は、密閉容器6とこの密閉容器6内に設けられた炭素膜ユニット2とから概ね構成されている。
なお、膜の細孔径は、炭化時の焼成温度を変えることで調整することができる。
実施例1では、図1に記載の炭素膜モジュールを用いて、高濃度の不純物を含むガスの精製を行った。炭素膜モジュールの仕様は、以下の通りであった。中空糸状炭素膜チューブ外径:0.525mm、中空糸状炭素膜チューブ長さ:85mm、中空糸状炭素膜チューブ本数:13本、中空糸状炭素膜チューブ総表面積:18.22cm2。中空糸状炭素膜は、ポリイミド(芳香族ポリイミド)を原料とした有機高分子膜を製膜し、炭化させることで製造した。
(b) アンモニア500sccmに不純物としてヘリウム500sccmを混合したガスを炭素膜モジュールに供給し、透過ガス中の不純物であるヘリウムの体積濃度を測定した。
(c) アンモニア500sccmにメタン500sccmを混合したガスを炭素膜モジュールに供給し、透過ガス中の不純物であるメタンの体積濃度を測定した。
実施例2では、図1に記載の炭素膜モジュールを用いて、低濃度の不純物を含むガスの精製を行った。炭素膜モジュールの仕様は、以下の通りであった。中空糸状炭素膜チューブ外径:0.39mm、中空糸状炭素膜チューブ長さ:117mm、中空糸状炭素膜チューブ本数:38本、中空糸状炭素膜チューブ総表面積:54.9cm2。中空糸状炭素膜は、ポリフェニレンオキサイド(PPO)を原料とした有機高分子膜を製膜し、加熱処理後に炭化させることで製造した。
(b) アンモニア450sccmに不純物として窒素(12150ppb)/ヘリウム50sccmを混合したガスを炭素膜モジュールに供給し、透過ガスの組成を測定した。
(c) アンモニア450sccmに不純物として二酸化炭素(9960ppb)/ヘリウム50sccmを混合したガスを炭素膜モジュールに供給し、透過ガスの組成を測定した。
(d) アンモニア450sccmにメタン(12230ppb)/ヘリウム50sccmを混合したガスを炭素膜モジュールに供給し、透過ガスの組成を測定した。
実施例3では、図1に記載の炭素膜モジュールを用いて、低濃度の不純物を含むガスの精製を行った。炭素膜モジュールの仕様は、以下の通りであった。中空糸状炭素膜チューブ外径:0.20mm、中空糸状炭素膜チューブ長さ:120mm、中空糸状炭素膜チューブ本数:100本で、中空糸状炭素膜チューブ総表面積:76.9cm2。中空糸状炭素膜は、ポリフェニレンオキサイド(PPO)を原料とした有機高分子膜を製膜し、加熱処理後に炭化させることで製造した。
比較例1では、有機高分子膜モジュールを用いて、低濃度の不純物を含むガスの精製を行った。この有機高分子膜モジュールは、炭素膜の代わりに有機高分子膜を使用したことを除いては、図1に記載の炭素膜モジュールと同型であった。有機高分子膜モジュールの仕様は、以下の通りであった。中空糸状有機高分子膜チューブ外径:0.41mm、中空糸状有機高分子膜チューブ長さ:138mm、中空糸状有機高分子膜チューブ本数:10本で、中空糸状有機高分子膜チューブ総表面積:17.5cm2。中空糸状有機高分子膜は、ポリイミド(芳香族ポリイミド)を原料として製造した。
比較例2では、有機高分子膜モジュールを用いて、低濃度の不純物を含むガスの精製を行った。この有機高分子膜モジュールは、炭素膜の代わりに有機高分子膜を使用したことを除いては、図1に記載の炭素膜モジュールと同型であった。有機高分子膜モジュールの仕様は、以下の通りであった。中空糸状有機高分子膜チューブ外径:0.20mm、中空糸状有機高分子膜チューブ長さ:138mm、中空糸状有機高分子膜チューブ本数:30本、中空糸状有機高分子膜チューブ総表面積:26.0cm2。中空糸状有機高分子膜は、ポリシリコンを原料として製造した。
Claims (2)
- 水素化物ガス、ハロゲン化物ガス、及びハロゲンガスからなる群から選択される少なくとも1種の精製対象ガスと不純物とを分子ふるい作用をもつ炭素膜を用いて分離するガス精製方法であって、
前記炭素膜の原料がポリフェニレンオキサイドであり、
前記精製対象ガスに含まれる前記不純物の総量が10ppm以下であり、
精製後の不純物濃度を1ppm以下とし、
前記炭素膜の透過側に掃引ガスを供給することを特徴とするガス精製方法。 - 前記精製対象ガスが、アンモニア、シラン、ホスフィン、弗化水素、塩化水素、臭化水素、弗素、塩素及び臭素から選択される少なくとも1種のガスであり、
前記炭素膜が中空糸状または管状である請求項1に記載のガス精製方法。
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JP2011230036A (ja) * | 2010-04-26 | 2011-11-17 | Taiyo Nippon Sanso Corp | 気体分離装置の運転方法 |
JP5686527B2 (ja) * | 2010-04-26 | 2015-03-18 | 大陽日酸株式会社 | 残存ガスの回収方法 |
KR20130000412A (ko) * | 2010-04-26 | 2013-01-02 | 독립행정법인 산업기술종합연구소 | 기체 분리 장치의 운전 방법 |
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US10843127B2 (en) * | 2017-11-15 | 2020-11-24 | Generon Igs, Inc. | Compact membrane module system for gas separation |
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