JP5514663B2 - 圧電振動デバイスおよび圧電振動デバイスの製造方法 - Google Patents

圧電振動デバイスおよび圧電振動デバイスの製造方法 Download PDF

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JP5514663B2
JP5514663B2 JP2010174098A JP2010174098A JP5514663B2 JP 5514663 B2 JP5514663 B2 JP 5514663B2 JP 2010174098 A JP2010174098 A JP 2010174098A JP 2010174098 A JP2010174098 A JP 2010174098A JP 5514663 B2 JP5514663 B2 JP 5514663B2
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metal ring
piezoelectric
metal
wafer
vibration device
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JP2012034302A5 (enExample
JP2012034302A (ja
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賢一 菊池
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Nihon Dempa Kogyo Co Ltd
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Nihon Dempa Kogyo Co Ltd
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2010174098A 2010-08-03 2010-08-03 圧電振動デバイスおよび圧電振動デバイスの製造方法 Active JP5514663B2 (ja)

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JP2010174098A JP5514663B2 (ja) 2010-08-03 2010-08-03 圧電振動デバイスおよび圧電振動デバイスの製造方法

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JP2010174098A JP5514663B2 (ja) 2010-08-03 2010-08-03 圧電振動デバイスおよび圧電振動デバイスの製造方法

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JP2012034302A JP2012034302A (ja) 2012-02-16
JP2012034302A5 JP2012034302A5 (enExample) 2013-08-15
JP5514663B2 true JP5514663B2 (ja) 2014-06-04

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Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6570379B2 (ja) * 2015-09-07 2019-09-04 株式会社東芝 電子部品
JP2017212612A (ja) * 2016-05-26 2017-11-30 京セラ株式会社 圧電デバイス及びその製造方法
US11342897B2 (en) * 2016-06-29 2022-05-24 Daishinku Corporation Piezoelectric resonator device and method for manufacturing piezoelectric resonator device
JP6358293B2 (ja) * 2016-07-27 2018-07-18 株式会社大真空 圧電振動デバイスの製造方法
JP2018019417A (ja) * 2017-09-25 2018-02-01 株式会社大真空 圧電振動デバイス
JP7406341B2 (ja) * 2019-10-21 2023-12-27 太陽誘電株式会社 電子部品、フィルタおよびマルチプレクサ
JP7591434B2 (ja) 2021-03-09 2024-11-28 太陽誘電株式会社 電子部品、フィルタおよびマルチプレクサ

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