JP5505340B2 - 力学量センサ及びその製造方法 - Google Patents

力学量センサ及びその製造方法 Download PDF

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Publication number
JP5505340B2
JP5505340B2 JP2011053761A JP2011053761A JP5505340B2 JP 5505340 B2 JP5505340 B2 JP 5505340B2 JP 2011053761 A JP2011053761 A JP 2011053761A JP 2011053761 A JP2011053761 A JP 2011053761A JP 5505340 B2 JP5505340 B2 JP 5505340B2
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movable electrode
mechanical quantity
fixed
quantity sensor
semiconductor substrate
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Japanese (ja)
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JP2011209283A5 (enExample
JP2011209283A (ja
Inventor
雅朗 浅野
司 米川
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Dai Nippon Printing Co Ltd
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Dai Nippon Printing Co Ltd
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Publication of JP2011209283A5 publication Critical patent/JP2011209283A5/ja
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  • Pressure Sensors (AREA)
JP2011053761A 2011-03-11 2011-03-11 力学量センサ及びその製造方法 Active JP5505340B2 (ja)

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JP2011053761A JP5505340B2 (ja) 2011-03-11 2011-03-11 力学量センサ及びその製造方法

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JP2011053761A JP5505340B2 (ja) 2011-03-11 2011-03-11 力学量センサ及びその製造方法

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JP2010071318A Division JP4707763B1 (ja) 2010-03-26 2010-03-26 力学量センサ及びその製造方法

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JP2011209283A JP2011209283A (ja) 2011-10-20
JP2011209283A5 JP2011209283A5 (enExample) 2013-04-04
JP5505340B2 true JP5505340B2 (ja) 2014-05-28

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014173955A (ja) * 2013-03-07 2014-09-22 Seiko Instruments Inc 変位検知装置及び変位検知装置の製造方法
JP6085757B2 (ja) * 2013-03-13 2017-03-01 国立研究開発法人産業技術総合研究所 微小構造体の作製方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH069499Y2 (ja) * 1987-06-23 1994-03-09 黒谷 信子 半導体材料の水切乾燥装置
US5786553A (en) * 1996-11-01 1998-07-28 Zakutin; David Inertial switch
JPH11230984A (ja) * 1998-02-17 1999-08-27 Denso Corp 加速度センサ
JPH11242052A (ja) * 1998-02-26 1999-09-07 Denso Corp 半導体加速度センサ

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