JP5497996B2 - 導波路型デバイスにおける導波路終端方法 - Google Patents
導波路型デバイスにおける導波路終端方法 Download PDFInfo
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- JP5497996B2 JP5497996B2 JP2008136823A JP2008136823A JP5497996B2 JP 5497996 B2 JP5497996 B2 JP 5497996B2 JP 2008136823 A JP2008136823 A JP 2008136823A JP 2008136823 A JP2008136823 A JP 2008136823A JP 5497996 B2 JP5497996 B2 JP 5497996B2
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12126—Light absorber
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12195—Tapering
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Description
また、請求項7に記載の発明は、請求項1から6のいずれかに記載の導波路型デバイスであって、前記終端構造は、クラッド層のギャップを介して前記導波路端部と接続されていることを特徴とする。
また、請求項8に記載の発明は、請求項1から7のいずれかに記載の導波路型デバイスであって、マッハツェンダ型の光スイッチ、可変減衰器、光スプリッタ、およびアレイ導波路回折格子の少なくともいずれか1つを含むことを特徴とする。
102 光ファイバアレイ
104−1〜N VOA
106−1〜N 光カプラ
108 PD
110 AWG
112 光ファイバ
120 基板
130 基板
202−1〜N MZI
204−1〜N MZI
206a メインポート
206b タップポート
208−1〜N ダミーポート
210−1〜N 終端構造
702 入射光
704 終点
706 反射光
710 終端構造
712 終端構造
714 構造
802 光導波路
804 光導波路
810 終端構造
812 終端構造
900a,900b 導波路型デバイス
902 VOA
904 WINC
906 ダミーポート
908a,908b 終端構造
920a,920b 基板
930 基板
1102 VOA
1104 WINC
1106 ダミーポート
1108 終端構造
1110 ダミーポート
1112 終端構造
1120 基板
1130 基板
1200 1×8スプリッタ
1202 光導波路
1204 終端構造
1302 AWG
1304 終端構造
1400 モジュール
1402 光カプラ
1404 波長合分波フィルタ
1406 波長合分波フィルタ
1408−1〜N 光スイッチ
1410−1〜N VOA
1412−1〜N 光カプラ
1414−1〜N PD
1416 波長合分波フィルタ
1420 基板
1430 基板
1500 VOA
1502a,1502b ポート
1504 方向性結合器
1506a,1506b アーム導波路
1508 方向性結合器
1510a,1510b ポート
1512a,1512b 薄膜ヒータ
1514 断熱溝
1516 電極パッド
1518 電極パッド
1520 シリコン基板
1522 クラッド
1524 コア
1602 VOA
1604 光カプラ
1606 基板
1608 基板
1610 光導波路
Claims (10)
- 導波路型デバイスにおいて、導波路端部からの光を終端するために遮光材が充填された終端構造を備え、前記導波路端部は、終端に向かってその幅が狭くなる直線テーパもしくはその幅が広くなる直線テーパ、パラボラ状のテーパまたはマルチモード干渉計の形状であることを特徴とする導波路型デバイス。
- 請求項1に記載の導波路型デバイスであって、前記終端構造は、前記導波路端部からの光に対する入射角が傾くように構成されたことを特徴とする導波路型デバイス。
- 請求項2に記載の導波路型デバイスであって、前記入射角は、ブリュースタ角であることを特徴とする導波路型デバイス。
- 請求項1から3のいずれかに記載の導波路型デバイスであって、前記終端構造は、基板平面での形状が、頂点を持たず、曲線で構成された溝として構成されたことを特徴とする導波路型デバイス。
- 請求項1から4のいずれかに記載の導波路型デバイスであって、前記終端構造は、前記導波路端部を囲うように構成されたことを特徴とする導波路型デバイス。
- 請求項1から5のいずれかに記載の導波路型デバイスであって、前記終端構造は、前記導波路端部のコアの側壁に近接または接して配置されていることを特徴とする導波路型デバイス。
- 請求項1から6のいずれかに記載の導波路型デバイスであって、前記終端構造は、クラッド層のギャップを介して前記導波路端部と接続されていることを特徴とする導波路型デバイス。
- 請求項1から7のいずれかに記載の導波路型デバイスであって、マッハツェンダ型の光スイッチ、可変減衰器、光スプリッタ、およびアレイ導波路回折格子の少なくともいずれか1つを含むことを特徴とする導波路型デバイス。
- 請求項1から8のいずれかに記載の導波路型デバイスであって、前記遮光材は、前記導波路端部からの光を吸収または散乱する材料からなることを特徴とする導波路型デバイス。
- 請求項1から9のいずれかに記載の導波路デバイスを用いたことを特徴とするマルチチップ集積化したモジュール。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008136823A JP5497996B2 (ja) | 2008-05-26 | 2008-05-26 | 導波路型デバイスにおける導波路終端方法 |
CN200980119556.XA CN102047159B (zh) | 2008-05-26 | 2009-05-26 | 波导器件及模块 |
US12/994,280 US8625943B2 (en) | 2008-05-26 | 2009-05-26 | Waveguide device and module |
PCT/JP2009/059624 WO2009145199A1 (ja) | 2008-05-26 | 2009-05-26 | 導波路型デバイスおよびモジュール |
Applications Claiming Priority (1)
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JP2008136823A JP5497996B2 (ja) | 2008-05-26 | 2008-05-26 | 導波路型デバイスにおける導波路終端方法 |
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JP2009282449A JP2009282449A (ja) | 2009-12-03 |
JP2009282449A5 JP2009282449A5 (ja) | 2010-04-02 |
JP5497996B2 true JP5497996B2 (ja) | 2014-05-21 |
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US (1) | US8625943B2 (ja) |
JP (1) | JP5497996B2 (ja) |
CN (1) | CN102047159B (ja) |
WO (1) | WO2009145199A1 (ja) |
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2008
- 2008-05-26 JP JP2008136823A patent/JP5497996B2/ja active Active
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2009
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- 2009-05-26 WO PCT/JP2009/059624 patent/WO2009145199A1/ja active Application Filing
- 2009-05-26 US US12/994,280 patent/US8625943B2/en active Active
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Publication number | Publication date |
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CN102047159A (zh) | 2011-05-04 |
CN102047159B (zh) | 2015-03-25 |
US8625943B2 (en) | 2014-01-07 |
JP2009282449A (ja) | 2009-12-03 |
WO2009145199A1 (ja) | 2009-12-03 |
US20110064355A1 (en) | 2011-03-17 |
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