JP5472861B2 - 基板から層をへき開する方法及びデバイス - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/2658—Bombardment with radiation with high-energy radiation producing ion implantation of a molecular ion, e.g. decaborane
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- Crystals, And After-Treatments Of Crystals (AREA)
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
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Description
Claims (23)
- 基板から層をへき開する方法であって、
ガス種のイオンを前記基板に注入する段階と、
前記注入する段階の後に、アニールを行う段階と、
前記基板に超音波エネルギーを印加する段階と、
熱処理、機械的力、化学的力または流体力によって、前記基板をへき開する段階と、
を備え、
前記超音波エネルギーを印加する段階を、前記注入する段階の間に実行し、注入された前記イオンにより微小気泡が生成され、前記微小気泡が集塊する方法。 - 基板から層をへき開する方法であって、
ガス種のイオンを前記基板に注入する段階と、
前記注入する段階の後に、アニールを行う段階と、
前記基板に超音波エネルギーを印加する段階と、
を備え、
前記超音波エネルギーは、複数の周波数で印加され、
前記複数の周波数は、前記ガス種の拡散を促進する第1周波数と、前記注入する段階で発生した空格子点の移動を促進する第2周波数である方法。 - 前記超音波エネルギーを印加する段階を、前記アニールを行う段階の間に実行する請求項1または2に記載の方法。
- 前記超音波エネルギーは、10kHz〜100MHzである請求項1または3に記載の方法。
- 前記超音波エネルギーは、7MHzよりも小さい請求項4記載の方法。
- 前記超音波エネルギーは、複数の周波数で印加される請求項1に記載の方法。
- 前記超音波エネルギーは、前記ガス種の拡散を促進する第1周波数と、前記注入する段階で発生した空格子点の移動を促進する第2周波数とで印加される請求項6に記載の方法。
- 前記第1周波数は、2MHz未満である請求項7に記載の方法。
- 前記第2周波数は、前記第1周波数よりも大きく、且つ7MHz未満である請求項7または8に記載の方法。
- 前記超音波エネルギーを印加する段階は、所定の第1期間に第1の周波数でエネルギーを印加し、所定の第2期間に第2の周波数でエネルギーを印加する請求項6に記載の方法。
- 基板を支持し、前記基板のへき開を促進するデバイスであって、
前記基板と接触する上面、及び下面を有するプラテンと、
超音波振動子と、
ガス種のイオンを前記基板に注入するイオン注入装置と、
を備え、
前記超音波振動子は、前記基板へ注入されたイオンの拡散を促進する第1周波数と前記ガス種を注入する段階で発生した空格子点の移動を促進する第2周波数を有する複数の周波数で超音波エネルギーを印加する
デバイス。 - 基板を支持し、前記基板のへき開を促進するデバイスであって、
前記基板と接触する上面、及び下面を有するプラテンと、
超音波振動子と、
ガス種のイオンを前記基板に注入するイオン注入装置と、
を備え、
前記超音波振動子は、前記イオン注入装置が、前記ガス種のイオンを注入する間に、前記基板へ超音波エネルギーを印加し、注入された前記イオンにより微小気泡が生成され、前記微小気泡が集塊し、
前記基板は、熱処理、機械的力、化学的力または流体力によって、へき開されるデバイス。 - 前記超音波振動子は、前記下面に取り付けられている請求項11または12に記載のデバイス。
- 前記超音波振動子は、前記プラテンに埋め込まれている請求項11または12に記載のデバイス。
- 前記超音波振動子は、前記基板と接触する請求項14に記載のデバイス。
- 前記超音波振動子は、圧電素子を含む請求項11から15の何れか1項に記載のデバイス。
- 前記圧電素子は、ニオブ酸リチウム、硫化カドミニウム及び圧電セラミック材料からなる群から選択される請求項16に記載のデバイス。
- 前記超音波振動子は、10kHz〜100MHzの周波数でエネルギーを放出する請求項11から17の何れか1項に記載のデバイス。
- 前記超音波振動子は、複数の周波数でエネルギーを放出する請求項12に記載のデバイス。
- 前記超音波振動子は、所定の第1期間に第1周波数でエネルギーを放出し、所定の第2期間に第2周波数でエネルギーを印加する請求項19に記載のデバイス。
- 前記第1周波数は、2MHz未満であり、前記第2周波数は、前記第1周波数よりも大きく、且つ7MHz未満である請求項20に記載のデバイス。
- 基板から層をへき開して層を製造する製造方法であって、
ガス種のイオンを前記基板に注入する段階と、
前記注入する段階の後に、アニールを行う段階と、
前記基板に超音波エネルギーを印加する段階と
を備え、
前記超音波エネルギーは、複数の周波数で印加され、
前記複数の周波数は、前記ガス種のイオンの拡散を促進する第1周波数と、前記注入する段階で発生した空格子点の移動を促進する第2周波数である製造方法。 - 基板から層をへき開して層を製造する製造方法であって、
ガス種のイオンを前記基板に注入する段階と、
前記注入する段階の後に、アニールを行う段階と、
前記基板に超音波エネルギーを印加する段階と、
熱処理、機械的力、化学的力または流体力によって、前記基板をへき開する段階と、
を備え、
前記超音波エネルギーを印加する段階を、前記注入する段階の間に実行し、注入された前記イオンにより微小気泡が生成され、前記微小気泡が集塊する製造方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US8847508P | 2008-08-13 | 2008-08-13 | |
US61/088,475 | 2008-08-13 | ||
US12/538,903 | 2009-08-11 | ||
US12/538,903 US7902091B2 (en) | 2008-08-13 | 2009-08-11 | Cleaving of substrates |
PCT/US2009/053594 WO2010019700A2 (en) | 2008-08-13 | 2009-08-12 | Improved cleaving of substrates |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012500132A JP2012500132A (ja) | 2012-01-05 |
JP2012500132A5 JP2012500132A5 (ja) | 2012-02-16 |
JP5472861B2 true JP5472861B2 (ja) | 2014-04-16 |
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Application Number | Title | Priority Date | Filing Date |
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JP2011523146A Expired - Fee Related JP5472861B2 (ja) | 2008-08-13 | 2009-08-12 | 基板から層をへき開する方法及びデバイス |
Country Status (6)
Country | Link |
---|---|
US (2) | US7902091B2 (ja) |
JP (1) | JP5472861B2 (ja) |
KR (1) | KR20110063452A (ja) |
CN (1) | CN102150241A (ja) |
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WO (1) | WO2010019700A2 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
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US20100323113A1 (en) * | 2009-06-18 | 2010-12-23 | Ramappa Deepak A | Method to Synthesize Graphene |
WO2014164756A1 (en) | 2013-03-11 | 2014-10-09 | Temple University Of The Commonwealth System Of Higher Education | Novel 5-hydroxytryptamine receptor 7 activity modulators and their method of use |
US9523158B2 (en) * | 2014-02-07 | 2016-12-20 | Applied Materials, Inc. | Methods and apparatus for forming semiconductor |
EP3200589A4 (en) | 2014-09-10 | 2018-07-25 | Temple University Of The Commonwealth System Of Higher Education | Novel 5-hydroxytryptamine receptor 7 activity modulators and their method of use |
US9704835B2 (en) * | 2015-01-09 | 2017-07-11 | Silicon Genesis Corporation | Three dimensional integrated circuit |
JP6450637B2 (ja) * | 2015-04-21 | 2019-01-09 | 株式会社ディスコ | リフトオフ方法及び超音波ホーン |
CN105607311B (zh) * | 2016-01-04 | 2020-06-02 | 京东方科技集团股份有限公司 | 起角装置及其使用方法 |
CN105551943A (zh) * | 2016-02-26 | 2016-05-04 | 上海华力微电子有限公司 | 晶圆背面减薄方法 |
KR101936183B1 (ko) * | 2016-10-28 | 2019-01-08 | 주식회사 다원시스 | 플랙서블 기판의 제조 방법 및 플랙서블 소자 제조 장치 |
AU2017361078B2 (en) | 2016-11-15 | 2022-01-06 | Praeventix, Llc | Novel modulators of the 5-hydroxytryptamine receptor 7 and their method of use |
US10679908B2 (en) * | 2017-01-23 | 2020-06-09 | Globalwafers Co., Ltd. | Cleave systems, mountable cleave monitoring systems, and methods for separating bonded wafer structures |
US10991617B2 (en) | 2018-05-15 | 2021-04-27 | Applied Materials, Inc. | Methods and apparatus for cleaving of semiconductor substrates |
US11249067B2 (en) | 2018-10-29 | 2022-02-15 | Applied Materials, Inc. | Nanopore flow cells and methods of fabrication |
EP4058458A2 (en) | 2019-11-13 | 2022-09-21 | Temple University - Of The Commonwealth System of Higher Education | Novel functionalized lactones as modulators of the 5-hydroxytryptamine receptor 7 and their method of use |
TWI768349B (zh) * | 2020-05-22 | 2022-06-21 | 台灣愛司帝科技股份有限公司 | 晶片移轉系統以及晶片移轉模組 |
Family Cites Families (18)
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JPH0256928A (ja) * | 1988-08-22 | 1990-02-26 | Seiko Epson Corp | 半導体ウェーハの処理方法 |
FR2681472B1 (fr) * | 1991-09-18 | 1993-10-29 | Commissariat Energie Atomique | Procede de fabrication de films minces de materiau semiconducteur. |
US5670391A (en) * | 1995-08-07 | 1997-09-23 | Lucent Technologies Inc. | Process for reducing transient diffusion of dopant atoms |
US5972782A (en) * | 1995-10-10 | 1999-10-26 | Ostapenko; Serguei | Ultrasound treatment of polycrystalline silicon thin films to enhance hydrogenation |
FR2748851B1 (fr) * | 1996-05-15 | 1998-08-07 | Commissariat Energie Atomique | Procede de realisation d'une couche mince de materiau semiconducteur |
US5985742A (en) * | 1997-05-12 | 1999-11-16 | Silicon Genesis Corporation | Controlled cleavage process and device for patterned films |
US5948986A (en) * | 1997-12-26 | 1999-09-07 | Applied Materials, Inc. | Monitoring of wafer presence and position in semiconductor processing operations |
FR2774510B1 (fr) * | 1998-02-02 | 2001-10-26 | Soitec Silicon On Insulator | Procede de traitement de substrats, notamment semi-conducteurs |
US6410914B1 (en) * | 1999-03-05 | 2002-06-25 | Bruker Daltonics Inc. | Ionization chamber for atmospheric pressure ionization mass spectrometry |
US6387829B1 (en) * | 1999-06-18 | 2002-05-14 | Silicon Wafer Technologies, Inc. | Separation process for silicon-on-insulator wafer fabrication |
US6413789B2 (en) * | 2000-01-24 | 2002-07-02 | University Of South Florida | Method of detecting and monitoring stresses in a semiconductor wafer |
US6358823B1 (en) * | 2000-04-12 | 2002-03-19 | Institut Fuer Halbleiterphysik Frankfurt (Oder) Gmbh. | Method of fabricating ion implanted doping layers in semiconductor materials and integrated circuits made therefrom |
WO2004112093A2 (en) * | 2003-06-06 | 2004-12-23 | P.C.T. Systems, Inc. | Method and apparatus to process substrates with megasonic energy |
KR100548568B1 (ko) * | 2003-09-17 | 2006-02-02 | 주식회사 하이닉스반도체 | 이온주입방법 |
KR100711937B1 (ko) * | 2005-07-28 | 2007-05-02 | 삼성전자주식회사 | 초음파를 이용한 기판 검사 방법 및 이를 수행하기 위한장치 |
US7648582B2 (en) * | 2005-12-23 | 2010-01-19 | Lam Research Corporation | Cleaning of electrostatic chucks using ultrasonic agitation and applied electric fields |
JP5041714B2 (ja) * | 2006-03-13 | 2012-10-03 | 信越化学工業株式会社 | マイクロチップ及びマイクロチップ製造用soi基板 |
US20090181492A1 (en) * | 2008-01-11 | 2009-07-16 | Peter Nunan | Nano-cleave a thin-film of silicon for solar cell fabrication |
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2009
- 2009-08-11 US US12/538,903 patent/US7902091B2/en not_active Expired - Fee Related
- 2009-08-12 KR KR1020117005695A patent/KR20110063452A/ko not_active Application Discontinuation
- 2009-08-12 JP JP2011523146A patent/JP5472861B2/ja not_active Expired - Fee Related
- 2009-08-12 CN CN200980135988XA patent/CN102150241A/zh active Pending
- 2009-08-12 WO PCT/US2009/053594 patent/WO2010019700A2/en active Application Filing
- 2009-08-13 TW TW098127280A patent/TW201017737A/zh unknown
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2011
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WO2010019700A2 (en) | 2010-02-18 |
US7902091B2 (en) | 2011-03-08 |
TW201017737A (en) | 2010-05-01 |
JP2012500132A (ja) | 2012-01-05 |
US20110127885A1 (en) | 2011-06-02 |
KR20110063452A (ko) | 2011-06-10 |
US20100041246A1 (en) | 2010-02-18 |
CN102150241A (zh) | 2011-08-10 |
WO2010019700A3 (en) | 2010-06-03 |
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