JP5465469B2 - エピタキシャル基板、半導体デバイス基板、およびhemt素子 - Google Patents
エピタキシャル基板、半導体デバイス基板、およびhemt素子 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 128
- 239000004065 semiconductor Substances 0.000 title claims description 19
- 239000010410 layer Substances 0.000 claims description 222
- 239000013078 crystal Substances 0.000 claims description 64
- 238000005259 measurement Methods 0.000 claims description 33
- 239000002346 layers by function Substances 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 30
- 230000015572 biosynthetic process Effects 0.000 claims description 24
- 230000004888 barrier function Effects 0.000 claims description 19
- 150000004767 nitrides Chemical class 0.000 claims description 19
- 230000007704 transition Effects 0.000 claims description 18
- 230000006835 compression Effects 0.000 claims description 6
- 238000007906 compression Methods 0.000 claims description 6
- 238000009826 distribution Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 description 13
- 238000003917 TEM image Methods 0.000 description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 5
- 229910002704 AlGaN Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 4
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- 238000000089 atomic force micrograph Methods 0.000 description 2
- 230000005587 bubbling Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 230000000877 morphologic effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000009751 slip forming Methods 0.000 description 2
- 230000005533 two-dimensional electron gas Effects 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- MGYGFNQQGAQEON-UHFFFAOYSA-N 4-tolyl isocyanate Chemical compound CC1=CC=C(N=C=O)C=C1 MGYGFNQQGAQEON-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
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- H01L21/02494—Structure
- H01L21/02513—Microstructure
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
- H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
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- Junction Field-Effect Transistors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Description
図1は、本発明の実施の形態に係るエピタキシャル基板10を含んで構成されるFETの一態様としての、HEMT素子20の断面構造を模式的に示す図である。エピタキシャル基板10は、基材1の上に、緩衝層2をエピタキシャル形成してなる構成を有する。HEMT素子20は、係るエピタキシャル基板10の上に(緩衝層2の上に)、III族窒化物半導体層であるチャネル層3と障壁層4とが積層された構成を有する。なお、以降において、チャネル層3と障壁層4とを機能層と総称することがある。また、HEMT素子20においては、障壁層4の上にゲート電極5とソース電極6とドレイン電極7とが設けられてなる。なお、図1における各層の厚みの比率は、実際のものを反映したものではない。
次に、緩衝層2について、より詳細に説明する。図2および図3は、緩衝層2の構成をより詳細に示す図である。図2(a)および図3(a)は、HEMT素子20の断面のTEM(透過型電子顕微鏡)による撮像結果(TEM像)である。図2(a)は、緩衝層2の近傍についてのTEM像であり、図3(a)のTEM像は、基材1と緩衝層2との界面近傍をより拡大したものである。図2(b)および図3(b)は、主として対応するTEM像において確認される結晶粒界(本明細書においては、単結晶ドメイン領域の境界をも含むものとする)の様子を簡略的に再現した図である。なお、図2および図3は、緩衝層2をAlNにて形成した場合のエピタキシャル基板10、および、該エピタキシャル基板10の上に、チャネル層3をGaNにて形成し、障壁層4をAl0.20Ga0.80Nにて形成した場合のHEMT素子20を対象として得られたものである。
次に、エピタキシャル基板10の上に機能層などを形成してFETを作製した場合における、緩衝層2とFETとの関係について説明する。具体的には、HEMT素子20を作製した場合を対象に説明する。
2 緩衝層
2a 緩衝層下部
2b 緩衝層上部
3 チャネル層
3e 二次元電子ガス領域
4 障壁層
5 ゲート電極
6 ソース電極
7 ドレイン電極
10 エピタキシャル基板
20 HEMT素子
Claims (17)
- α型SiC単結晶を基材とし、AlNからなる緩衝層を前記基材の上にエピタキシャル成長してなるエピタキシャル基板であって、
前記緩衝層においては、前記エピタキシャル基板の表面部分を含む緩衝層上部が、前記基材の上に基板面に対して略垂直方向に存在する粒界を含むとともにc軸に配向した柱状多結晶からなっているとともに、前記基材との界面近傍部分である緩衝層下部は、前記緩衝層上部よりも多くの粒界を有してなり、
前記緩衝層下部と前記緩衝層上部との間で結晶粒の形態が遷移する遷移構造を有してなり、
前記緩衝層上部についてのX線ロッキングカーブ(0002)ωスキャンの半値幅が300秒以上3000秒以下である、
ことを特徴とするエピタキシャル基板。 - 請求項1に記載のエピタキシャル基板であって、
原子間力顕微鏡による測定結果に基づいて得られる前記緩衝層の表面の二乗平均粗さRMSが0.2nm以上6nm以下である、
ことを特徴とするエピタキシャル基板。 - 請求項1または請求項2に記載のエピタキシャル基板であって、
前記緩衝層上部に存在する結晶粒の前記基材の表面に平行な方向についての粒界の幅と、前記緩衝層の形成厚みとの比が0.5以上1.5以下である、
ことを特徴とするエピタキシャル基板。 - 請求項2または請求項3に記載のエピタキシャル基板であって、
前記結晶粒の粒界の幅が100nm以上300nm以下である、
ことを特徴とするエピタキシャル基板。 - 請求項2ないし請求項4のいずれかに記載のエピタキシャル基板であって、
前記緩衝層下部の平均的な形成厚みが35nm以上60nm以下である、
ことを特徴とするエピタキシャル基板。 - 請求項1ないし請求項5のいずれかに記載のエピタキシャル基板であって、
前記緩衝層が面内圧縮方向に格子歪みを内在している、
ことを特徴とするエピタキシャル基板。 - 請求項6に記載のエピタキシャル基板であって、
前記緩衝層が前記基材との界面から30nmの範囲内で面内圧縮方向に絶対値で0.5%以上2.5%以下の格子歪みの分布を有する、
ことを特徴とするエピタキシャル基板。 - 請求項7に記載のエピタキシャル基板であって、
前記緩衝層が前記基材との界面から100nm以上離れた範囲で面内圧縮方向に絶対値で0.5%以上1.0%以下の略一定の格子歪みを有する、
ことを特徴とするエピタキシャル基板。 - 請求項1ないし請求項8のいずれかに記載のエピタキシャル基板であって、
前記III族窒化物がAlNである、
ことを特徴とするエピタキシャル基板。 - 請求項1ないし請求項9のいずれかに記載のエピタキシャル基板であって、
前記緩衝層の表面の二乗平均粗さが0.2nm以上1nm以下である、
ことを特徴とするエピタキシャル基板。 - 請求項10に記載のエピタキシャル基板であって、
前記緩衝層上部に存在する結晶粒の前記基材の表面に平行な方向についての粒界の幅と、前記緩衝層の形成厚みとの比が0.8以上1.4以下である、
ことを特徴とするエピタキシャル基板。 - 請求項10または請求項11に記載のエピタキシャル基板であって、
前記緩衝層下部の平均的な形成厚みが40nm以上50nm以下である、
ことを特徴とするエピタキシャル基板。 - 請求項10ないし請求項12のいずれかに記載のエピタキシャル基板であって、
前記緩衝層下部の前記基材から少なくとも15nm以下の範囲に存在する結晶粒が、面内引張方向に1%以上の格子歪みを内在している、
ことを特徴とするエピタキシャル基板。 - 請求項2ないし請求項5のいずれか、または請求項10ないし請求項13のいずれかに記載のエピタキシャル基板の上に、一または複数の機能層を形成してなり、前記一または複数の機能層はInxAlyGazN(0≦x<1,0≦y≦1,0≦z≦1,x+y+z=1、x、y、zは前記一または複数の機能層の各々に応じて定まる)なる組成のIII族窒化物からなる、
ことを特徴とする半導体デバイス基板。 - 請求項2ないし請求項5のいずれか、または請求項10ないし請求項13のいずれかに記載のエピタキシャル基板の上に、一または複数の機能層を用いて形成したトランジスタ構造を有してなり、前記一または複数の機能層はInxAlyGazN(0≦x<1,0≦y≦1,0≦z≦1,x+y+z=1、x、y、zは前記一または複数の機能層の各々に応じて定まる)なる組成のIII族窒化物からなる、
ことを特徴とする半導体デバイス基板。 - 請求項15に記載の半導体デバイス基板であって、
前記複数の機能層としてチャネル層と障壁層とが形成されたHEMT構造を有してなり、
前記チャネル層がGaNにて形成されてなり、前記障壁層がInx3Aly3Gaz3N(0≦x3<1,0<y3≦1,0≦z3<1,x3+y3+z3=1)にて形成されてなる、
ことを特徴とする半導体デバイス基板。 - 請求項16に記載の半導体デバイス基板を用いて形成したHEMT素子。
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US12/535,859 US7982241B2 (en) | 2008-09-04 | 2009-08-05 | Epitaxial substrate, semiconductor device substrate, and HEMT device |
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JP2011222969A (ja) * | 2010-03-26 | 2011-11-04 | Ngk Insulators Ltd | 半導体素子用エピタキシャル基板の製造方法、半導体素子用エピタキシャル基板、および半導体素子 |
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