JP5464932B2 - 形状測定方法及び形状測定装置 - Google Patents

形状測定方法及び形状測定装置 Download PDF

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Publication number
JP5464932B2
JP5464932B2 JP2009170606A JP2009170606A JP5464932B2 JP 5464932 B2 JP5464932 B2 JP 5464932B2 JP 2009170606 A JP2009170606 A JP 2009170606A JP 2009170606 A JP2009170606 A JP 2009170606A JP 5464932 B2 JP5464932 B2 JP 5464932B2
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probe
scanning
measured
shape
scanning condition
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Japanese (ja)
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JP2011027440A (ja
JP2011027440A5 (zh
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明徳 宮田
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Canon Inc
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Canon Inc
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  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2009170606A 2009-07-21 2009-07-21 形状測定方法及び形状測定装置 Expired - Fee Related JP5464932B2 (ja)

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JP2009170606A JP5464932B2 (ja) 2009-07-21 2009-07-21 形状測定方法及び形状測定装置

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JP2009170606A JP5464932B2 (ja) 2009-07-21 2009-07-21 形状測定方法及び形状測定装置

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JP2011027440A JP2011027440A (ja) 2011-02-10
JP2011027440A5 JP2011027440A5 (zh) 2012-08-30
JP5464932B2 true JP5464932B2 (ja) 2014-04-09

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JP2009170606A Expired - Fee Related JP5464932B2 (ja) 2009-07-21 2009-07-21 形状測定方法及び形状測定装置

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013007669A (ja) * 2011-06-24 2013-01-10 Ulvac Japan Ltd 表面形状測定用触針式段差計における針飛び抑制方法
JP6030339B2 (ja) * 2012-05-17 2016-11-24 株式会社ミツトヨ 形状測定装置
CN103884261A (zh) * 2012-12-19 2014-06-25 漳州市昌龙汽车附件有限公司 一种三维弧杆检具
DE102013225149B4 (de) * 2013-12-06 2018-05-30 Carl Zeiss Industrielle Messtechnik Gmbh Messung von Koordinaten einer Werkstückoberfläche zumindest eines Werkstücks unter Verwendung einer Sensoreinheit

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03248007A (ja) * 1990-02-27 1991-11-06 Komatsu Ltd 平面の段差計測装置
JPH0590305U (ja) * 1992-05-01 1993-12-10 株式会社東京精密 表面形状測定機
JP3992853B2 (ja) * 1998-09-30 2007-10-17 株式会社ミツトヨ 表面追従型測定機
JP2002213943A (ja) * 2001-01-16 2002-07-31 Mitsutoyo Corp 表面性状測定システム及び方法
JP5060915B2 (ja) * 2007-11-05 2012-10-31 株式会社ミツトヨ スタイラス、形状測定機及びパートプログラム

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