JP5461778B2 - Substrate processing system, group management system, configuration management program, connection management program, terminal program, and connection management method for each hardware - Google Patents

Description

The present invention relates to a substrate processing system for processing a semiconductor substrate, a glass substrate, etc. , a group management system , a configuration management program, a connection management program, a terminal program, and a connection management method for each hardware .

  This type of substrate processing system includes a plurality of substrate processing apparatuses that perform processing on a substrate, and a group management apparatus that monitors operating states of the plurality of substrate processing apparatuses and stores production histories and the like. By using such a group management device, the efficiency of semiconductor production is improved.

  However, in the conventional substrate processing system, there is an upper limit on the number of substrate processing apparatuses connected to the group management apparatus, and when the number of substrate processing apparatuses exceeds this upper limit value, the substrate processing system itself It is necessary to adopt a configuration that divides the two. Further, when the number of substrate processing apparatuses exceeds the upper limit value, for example, one set of group management apparatus is required, so that the burden on the end user suddenly increases in terms of cost. Furthermore, when the connection configuration of the substrate processing apparatus is changed, it often takes time to transfer data, adjust system parameters, and the like.

The present invention provides a substrate processing system , group management system , and configuration management that can be connected to a large number of substrate processing apparatuses without increasing the number of group management apparatuses even when the number of connected substrate processing apparatuses is increased. It is an object to provide a program, a connection management program, a terminal program, and a connection management method for each hardware .

  In order to achieve the above object, a substrate processing system according to the present invention includes a plurality of substrate processing apparatuses for processing a substrate, and a group management system connected to the substrate processing apparatus. A configuration information storage device that stores configuration information that defines a connection configuration, a plurality of communication devices that communicate with at least one of the plurality of substrate processing apparatuses based on the configuration information, and based on the configuration information An apparatus information storage device that stores information related to the substrate processing apparatus that is connected to any one of the plurality of communication apparatuses and communicates with the communication apparatus;

  The group management system according to the present invention is a group management system connected to a plurality of substrate processing apparatuses for processing a substrate, and stores configuration information for defining a connection configuration in the substrate processing system. A plurality of communication apparatuses that communicate with the apparatus and at least one of the plurality of substrate processing apparatuses based on the configuration information; and the plurality of communications based on the configuration information stored in the configuration information storage apparatus An apparatus information storage device that stores information related to the substrate processing apparatus that is connected to any of the apparatuses and communicates with the communication apparatus.

  According to the substrate processing system of the present invention, a configuration information storage device that manages the connection configuration of the entire system, a communication device that communicates with the substrate processing device, and information that is transmitted from the substrate processing device via the communication device. Therefore, even when the number of connected substrate processing apparatuses increases, it is possible to connect to a large number of substrate processing apparatuses without increasing the group management apparatus.

First, the background of the present invention will be described with reference to FIGS.
FIG. 1 is a diagram showing a configuration of a substrate processing system 1 including a system A and a system B.
As shown in FIG. 1, the substrate processing system 1 includes a plurality of substrate processing apparatuses 10-1 to 10-n and a group management apparatus 100. The substrate processing apparatuses 10-1 to 10-n and the group management apparatus 100 are connected via a network 12 such as a LAN or a WAN. Therefore, data is transmitted and received via the network 12 between the substrate processing apparatuses 10-1 to 10-n and the group management apparatus 100. In addition, when it shows, without specifying any of several component parts, such as the substrate processing apparatus 10-1 to 10-n, it may be abbreviated simply as the substrate processing apparatus 10 or the like.

  The substrate processing apparatus 10 performs substrate processing based on a process recipe or the like. Specifically, the process recipe describes a procedure for processing a substrate, and the substrate processing apparatus 10 controls components in the apparatus based on this procedure. Further, the substrate processing apparatus 10 transmits data regarding the operation state of the apparatus itself including temperature information, pressure information, failure information, and the like to the group management apparatus via the network 12.

  As an example, the substrate processing apparatus 10 is configured as a semiconductor manufacturing apparatus that implements a processing apparatus in a semiconductor device (IC) manufacturing method. In the following description, an embodiment will be described in which a vertical apparatus that performs oxidation, diffusion processing, CVD processing, or the like is applied to a substrate as the substrate processing apparatus.

  The group management apparatus 100 receives data related to the operation state of the substrate processing apparatus 10 transmitted from the substrate processing apparatus 10 and performs storage and display on the screen. In addition, the group management apparatus 100 transmits data regarding the substrate processing apparatus 10 such as a process recipe to the substrate processing apparatus 10.

  In the group management apparatus 100, a maximum value of the number of substrate processing apparatuses 10 that can be connected is set in advance. When the number of substrate processing apparatuses 10 exceeds the maximum value, a second group management apparatus 100 is added and the system itself is divided.

  As shown in FIG. 1, each of the system A and the system B includes a group management apparatus 100 and a substrate processing apparatus 10. System A includes one group management apparatus 100-1 and N1 substrate processing apparatuses 10-1 to 10-N1, and system B includes one group management apparatus 100-2 and N2 substrate processing. Devices 10- (N1 + 1) -10- (N1 + N2) are included. For example, when the maximum value of the number of substrate processing apparatuses 10 that can be connected to one group management apparatus 100 is 32, the system A and the system B include a maximum of 32 substrate processing apparatuses 10. When the number of substrate processing apparatuses 10 is 64, for example, 32 substrate processing apparatuses 10 need to be included in each of the system A and the system B in this way. Note that systems included in the substrate processing system 1 such as the system A and the system B are also referred to as subsystems.

  When a plurality of subsystems are included in the substrate processing system 1, the substrate processing apparatus 10 is not connected to the substrate processing apparatus 10 included in the same subsystem as the subsystem including the substrate processing apparatus 10. Data can be transmitted and received. Therefore, the data is easily copied to another substrate processing apparatus 10 via the group management apparatus 100. On the other hand, the substrate processing apparatus 10 cannot transmit / receive data to / from the substrate processing apparatus 10 included in a subsystem different from the subsystem in which the substrate processing apparatus 10 is included. Therefore, the user cannot easily copy data when copying data between the substrate processing apparatuses 10 included in different subsystems. Therefore, for example, when a recipe is changed in the substrate processing apparatus 10 of the system A, it takes time to reflect this change on the substrate processing apparatus 10 of the system B, and the operation of the substrate processing system 1 is performed. There is a risk of rate decline.

  Further, the group management apparatus 100 displays a list of the substrate processing apparatuses 10 included in the subsystem including the group management apparatus 100 on the screen. The group management apparatus 100 cannot display the substrate processing apparatuses 10 included in different subsystems as a list on the screen. Therefore, since the user cannot browse the information regarding all the substrate processing apparatuses 10 contained in the substrate processing system 1 at a time, it is difficult to grasp the operating rate of the entire system. Further, the user cannot easily compare the substrate processing apparatuses 10 included in the substrate processing system 1.

  Furthermore, the user may be burdened even when the configuration of the substrate processing system 1 is changed. For example, in the configuration in which the number of substrate processing apparatuses 10 included in the subsystem is the maximum value, when one substrate processing apparatus 10 is added, the group management apparatus 100 also needs to be added one. . Therefore, the user needs to work a great amount of equipment expansion cost.

Further, for example, when the substrate processing apparatus 10 is moved to a subsystem different from the currently included subsystems, it is necessary to transfer data between the group management apparatuses 100 of these subsystems.
FIG. 2 is a diagram for explaining the transition of the substrate processing apparatus 10 between different subsystems.
As shown in FIG. 2, when the substrate processing apparatus 10 is moved from the system A to the system B, data regarding the substrate processing apparatus 10 is transferred from the group management apparatus 100-1 of the system A to the group management apparatus 100- of the system B. 2 needs to be migrated. In the group management apparatus 100-2, configuration information related to the substrate processing apparatus 10 of the system B is stored in advance. In addition to this configuration information, configuration information related to the substrate processing apparatus 10-k needs to be newly created in the group management apparatus 100-2 and stored in a hard disk drive (HDD) or the like. Moreover, since the configuration information is reflected when the group management apparatus 100 is activated, the group management apparatus 100-2 needs to be restarted. Therefore, the time required for the configuration change operation is the time required for the configuration information change operation stored in the group management apparatus 100-2 and the restart of the group management apparatus 100-2.

  The group management apparatus 100 uses the hard disk drive (the group management apparatus 100) to generate data related to the substrate processing apparatus 10 included in the subsystem, such as apparatus information including parameters unique to the apparatus and logging data. HDD). Therefore, when the substrate processing apparatus 10 is transferred to a different subsystem, the stored data is stored in the HDD of the group management apparatus 100 included in the transfer destination subsystem. Furthermore, when the substrate processing apparatus 10 is moved, it takes time to adjust the system parameters and confirm the operation. The system parameter is a parameter that defines the configuration of the substrate processing system 1 or the subsystem, and specifies the connection means, the number of connections, and the like of the substrate processing apparatus 10.

Next, the substrate processing system 2 according to the embodiment of the present invention will be described.
FIG. 3 is a diagram showing a configuration of the substrate processing system 2 according to the embodiment of the present invention.
As shown in FIG. 3, the substrate processing system 2 includes a plurality of substrate processing apparatuses 10-1 to 10-n, a terminal device 6 as display means and instruction means, and a group management system 7. In the group management system 7, one configuration management device 3 as a configuration information storage device that stores configuration information, one or more connection management devices 4 as communication devices, and device information storage that stores information related to the substrate processing device 10. One or more data management devices 5 as devices are included. The substrate processing apparatus 10, the configuration management apparatus 3, the connection management apparatus 4, the data management apparatus 5, and the terminal apparatus 6 are connected via a network 12. In the substrate processing system 2, each of the substrate processing apparatus 10, the configuration management apparatus 3, the connection management apparatus 4, the data management apparatus 5, and the terminal apparatus 6 is also referred to as hardware. The configuration management device 3, the connection management device 4, and the data management device 5 may be abbreviated as GDB, EDS, and EDB, respectively.

  In the group management system 7, the configuration management device (GDB) 3 stores configuration information of the substrate processing system 2. The configuration information includes the name of each hardware, the connection configuration of each hardware, and the like. The configuration information is used by other hardware such as the connection management device 4 to recognize its role and the relationship with other hardware. Further, the configuration management apparatus 3 accumulates information (shared information) shared by the entire substrate processing system 2. The shared information is information that occurs less frequently in the substrate processing apparatus 10 or information that occurs suddenly, such as failure information or event information of the substrate processing apparatus 10.

  The connection management device (EDS) 4 communicates with at least one of the plurality of substrate processing apparatuses 10 based on the configuration information stored in the configuration management device 3. The connection management device 4 receives information from the substrate processing apparatus 10 and transmits information related to the substrate processing apparatus 10 to the hardware in response to a request from other hardware. When the connection management device 4 receives a notification that the configuration information has been updated from the configuration management device 3, the connection management device 4 is connected to at least one of the plurality of substrate processing apparatuses 10 and the data management device 5 based on the updated configuration information. Establish a connection with.

  The data management device (EDB) 5 is connected to one of the plurality of connection management devices 4 based on the configuration information stored in the configuration management device 3. The data management apparatus 5 stores information related to the substrate processing apparatus 10 that communicates with the connected connection management apparatus 4. The data management apparatus 5 acquires and stores data (event information and process information) transmitted from the substrate processing apparatus 10 via the connection management apparatus 4. The information is information that has a higher occurrence frequency and includes a lot of data than information stored in the configuration management apparatus 3, and is, for example, temperature information, pressure information, or the like of the substrate processing apparatus 10.

The terminal device 6 constitutes an interface for displaying information stored by each hardware on the screen and providing information to the user. More specifically, the terminal device 6 receives a user's request via a keyboard or a mouse, determines whether the information related to the request is stored in which hardware, and based on this determination result , Obtain information from the target hardware and display the information on the screen.
The configuration information stored in the configuration management apparatus 3 and the program that operates on the hardware will be described in detail later.

Next, a detailed configuration of the substrate processing apparatus 10 will be described.
FIG. 4 is a perspective view of the substrate processing apparatus 10 according to the embodiment of the present invention. FIG. 5 is a side perspective view of the substrate processing apparatus 10 shown in FIG.
As shown in FIGS. 4 and 5, an embodiment of the present invention in which a hoop (substrate container; hereinafter referred to as a pod) 110 is used as a wafer carrier containing a wafer (substrate) 200 made of silicon or the like. The substrate processing apparatus 10 according to FIG. A front maintenance port 103 as an opening provided for maintenance is opened at the front front portion of the front wall 111a of the casing 111, and front maintenance doors 104 and 104 for opening and closing the front maintenance port 103 are respectively built. It is attached.

  A pod loading / unloading port (substrate container loading / unloading port) 112 is opened on the front wall 111a of the casing 111 so as to communicate between the inside and the outside of the casing 111. The pod loading / unloading port 112 has a front shutter (substrate container loading / unloading port). The loading / unloading opening / closing mechanism 113 is opened and closed. A load port (substrate container delivery table) 114 is installed in front of the front side of the pod loading / unloading port 112, and the load port 114 is configured so that the pod 110 is placed and aligned. The pod 110 is loaded onto the load port 114 by an in-process transfer device (not shown) and unloaded from the load port 114.

  A rotary pod shelf (substrate container mounting shelf) 105 is installed at an upper portion of the casing 111 in a substantially central portion in the front-rear direction. The rotary pod shelf 105 stores a plurality of pods 110. It is configured. In other words, the rotary pod shelf 105 is vertically arranged and intermittently rotated in a horizontal plane, and a plurality of shelf boards (supported by a substrate container) that are radially supported by the support 116 at each of the upper, middle, and lower positions. And a plurality of shelf plates 117 are configured to hold the pods 110 in a state where a plurality of pods 110 are respectively placed.

  A pod transfer device (substrate container transfer device) 118 is installed between the load port 114 and the rotary pod shelf 105 in the housing 111, and the pod transfer device 118 moves up and down while holding the pod 110. A pod elevator (substrate container lifting mechanism) 118a and a pod transfer mechanism (substrate container transfer mechanism) 118b as a transfer mechanism are configured. The pod transfer device 118 includes a pod elevator 118a and a pod transfer mechanism 118b. The pod 110 is transported between the load port 114, the rotary pod shelf 105, and the pod opener (substrate container lid opening / closing mechanism) 121 by continuous operation.

  A sub-housing 119 is constructed across the rear end of the lower portion of the housing 111 at a substantially central portion in the front-rear direction. A pair of wafer loading / unloading ports (substrate loading / unloading ports) 120 for loading / unloading the wafer 200 into / from the sub-casing 119 are arranged on the front wall 119a of the sub-casing 119 in two vertical stages. A pair of pod openers 121 and 121 are installed at the wafer loading / unloading ports 120 and 120 at the upper and lower stages, respectively. The pod opener 121 includes mounting bases 122 and 122 on which the pod 110 is placed, and cap attaching / detaching mechanisms (lid attaching / detaching mechanisms) 123 and 123 for attaching and detaching caps (lids) of the pod 110. The pod opener 121 is configured to open and close the wafer loading / unloading port of the pod 110 by attaching / detaching the cap of the pod 110 placed on the placing table 122 by the cap attaching / detaching mechanism 123.

  The sub-housing 119 constitutes a transfer chamber 124 that is fluidly isolated from the installation space of the pod transfer device 118 and the rotary pod shelf 105. A wafer transfer mechanism (substrate transfer mechanism) 125 is installed in the front region of the transfer chamber 124, and the wafer transfer mechanism 125 rotates the wafer 200 in the horizontal direction or can move the wafer 200 in the horizontal direction. A substrate transfer device) 125a and a wafer transfer device elevator (substrate transfer device lifting mechanism) 125b for moving the wafer transfer device 125a up and down. As schematically shown in FIG. 4, the wafer transfer device elevator 125 b is installed between the right end of the pressure-resistant casing 111 and the right end of the front area of the transfer chamber 124 of the sub casing 119. By the continuous operation of the wafer transfer device elevator 125b and the wafer transfer device 125a, the tweezer (substrate holder) 125c of the wafer transfer device 125a is used as a placement portion for the wafer 200 with respect to the boat (substrate holder) 217. The wafer 200 is loaded (charged) and unloaded (discharged).

  In the rear region of the transfer chamber 124, a standby unit 126 that houses and waits for the boat 217 is configured. A processing furnace 202 is provided above the standby unit 126. The lower end portion of the processing furnace 202 is configured to be opened and closed by a furnace port shutter (furnace port opening / closing mechanism) 147.

  As schematically shown in FIG. 4, a boat elevator (substrate holder lifting / lowering) for raising / lowering the boat 217 between the right end of the pressure-resistant casing 111 and the right end of the standby section 126 of the sub casing 119 is illustrated. Mechanism) 115 is installed. A seal cap 219 serving as a lid is horizontally installed on an arm 128 serving as a connecting tool connected to a lifting platform of the boat elevator 115, and the seal cap 219 supports the boat 217 vertically, and a lower end of the processing furnace 202. It is comprised so that a part can be obstruct | occluded. The boat 217 includes a plurality of holding members, and is configured to hold a plurality of (for example, about 50 to 125) wafers 200 horizontally in a state where the centers are aligned in the vertical direction. Has been.

  As schematically shown in FIG. 4, the left end of the transfer chamber 124 opposite to the wafer transfer device elevator 125b side and the boat elevator 115 side is a cleaned atmosphere or an inert gas. A clean unit 134 composed of a supply fan and a dust-proof filter is installed so as to supply clean air 133. Between the wafer transfer device 125a and the clean unit 134, although not shown, the circumferential direction of the wafer A notch aligning device 135 is installed as a substrate aligning device for aligning the positions.

  The clean air 133 blown out from the clean unit 134 flows into the notch aligning device 135, the wafer transfer device 125a, and the boat 217 in the standby unit 126, and is then sucked in through a duct (not shown) to the outside of the housing 111. Exhaust is performed or it is circulated to the primary side (supply side) that is the suction side of the clean unit 134, and is again blown into the transfer chamber 124 by the clean unit 134.

Next, a process module controller (PMC) 14 that is provided in the substrate processing apparatus 10 and controls each apparatus in the substrate processing apparatus 10 will be described.
FIG. 6 shows a functional configuration of the substrate processing apparatus 10 centering on the PMC 14.
As shown in FIG. 6, the PMC 14 has a CPU 140, a ROM 142, a RAM 144, a hard disk drive (HDD) 158 for storing data, a display device such as a display, and an input means 147 including an input device such as a keyboard. An input / output interface (IF) 146 that performs transmission / reception, a communication control unit 156 that controls data communication with other hardware (such as the connection management device 4) via the network 12, a temperature control unit 150, and gas control The I / O control unit 148 performs I / O control with the unit 152, the pressure control unit 154, the temperature control unit 150, and the like. These components are connected to each other via a bus 160, and data is input and output between the components via the bus 160.

  In the PMC 14, the CPU 140 processes the substrate based on a predetermined recipe. Specifically, the CPU 140 outputs control data (control instruction) to the temperature control unit 150, the gas control unit 152, the pressure control unit 154, and the like. The ROM 142, RAM 144, and HDD 158 store a sequence program, data input from the input / output IF 146, data input via the communication control unit 156, and the like.

  The temperature control unit 150 controls the temperature in the processing chamber 202 by the heater 338 provided on the outer periphery of the processing furnace 202 described above. The gas control unit 152 controls the supply amount of the reaction gas supplied into the processing furnace 202 based on the output value from the MFC (mass flow controller) 342 provided in the gas pipe 340 of the processing furnace 202. The pressure control unit 154 controls the pressure in the processing chamber 202 by opening and closing the valve 348 based on the output value of the pressure sensor 346 provided in the exhaust pipe 344 of the processing furnace 202. The transfer control unit 159 controls transfer systems such as the pod opener 121, the boat elevator 115, and the wafer transfer mechanism 125. As described above, the control controller such as the temperature control unit 150 controls each unit (the heater 338, the MFC 342, the valve 348, and the like) of the substrate processing apparatus 10 based on the control instruction from the CPU 140.

  Therefore, the CPU 140 starts the sequence program, and calls and executes the recipe command according to the sequence program, so that the steps in which the target values of the control parameters are set are sequentially executed, and the I / O control unit 148, A control instruction for processing the substrate is transmitted to the temperature control unit 150, the gas control unit 152, the pressure control unit 154, and the transfer control unit 159 via the 149. A control controller such as the temperature control unit 150 controls each unit (the heater 338, the MFC 342, the valve 348, etc.) in the substrate processing apparatus 10 in accordance with the control instruction. Thereby, processing of the wafer 200 is performed.

  The CPU 140 transmits data regarding the state of the substrate processing apparatus 10 such as temperature information and pressure information to the connection management apparatus 4 via the communication control unit 156. Further, the CPU 140 transmits information on events and failures that have occurred in the substrate processing apparatus 10 and process information to the connection management apparatus 4 in the same manner.

FIG. 7 is a diagram illustrating a hardware configuration of the terminal device 6.
As illustrated in FIG. 7, the terminal device 6 includes a control device 16 including a CPU 18 and a memory 20, a communication interface (IF) 22 that transmits and receives data to and from external hardware via the network 12, and the like. A storage device 26 such as a hard disk drive and a display / input device 24 including a display device such as a liquid crystal display and a pointing device such as a keyboard and a mouse are included. The configuration management device 3, the connection management device 4, and the data management device 5 include the communication IF 22 and the control device 16 described above, and are configured to be connected to the display / input device 24 as necessary. . Thus, for example, a configuration management program 30 described later is installed in the configuration management apparatus 3 and the like.

Next, hardware that communicates with each other in the substrate processing system 2 according to the embodiment of the present invention will be described.
FIG. 8 is a diagram for explaining the hardware and the number of connections that communicate with each other in the substrate processing system 2. The numbers shown in the figure indicate the upper limit value of hardware that can be connected. Here, n1 to n6 are integers of 1 or more, and are predetermined values.
As shown in FIG. 8, the configuration management device 3 communicates with a plurality of connection management devices 4 whose upper limit value is n1. The connection management apparatus 4 communicates with a plurality of data management apparatuses 5 having an upper limit value n2, a plurality of substrate processing apparatuses 10 having an upper limit value n3, and a plurality of terminal apparatuses 6 having an upper limit value n4. Do. The substrate processing apparatus 10 and the data management apparatus 5 communicate with a predetermined connection management apparatus 4 among the plurality of connection management apparatuses 4. The plurality of terminal devices 6 communicate with one configuration management device 3 and a plurality of connection management devices 4 whose upper limit value is n5.

FIG. 9 is a diagram illustrating an upper limit parameter table in which upper limit values (maximum number of connections) in which each piece of hardware and hardware that communicates with each piece of hardware are connected are described.
As illustrated in FIG. 9, the upper limit parameter table includes the maximum values that each hardware can connect to other hardware. The upper limit parameter table is stored in the configuration management device 3 and edited via the display / input device 24 connected to the configuration management device 3. That is, the maximum value included in the upper limit parameter table is a value that can be changed by the user. The upper limit parameter table may be changed by transmitting data input via the display / input device 24 of the terminal device 6 to the configuration management device 3 via the network 12. Further, the upper limit parameter table may be included in the configuration information.

  For example, in the substrate processing system 2, the configuration management device 3 is connected to and communicates with a maximum of eight connection management devices 4. Each of the connection management apparatuses 4 is connected to and communicates with one configuration management apparatus 3, a maximum of eight data management apparatuses 5, and a maximum of 32 substrate processing apparatuses 10. Each data management device 5 is connected to and communicates with one connection management device 4.

Each hardware connection relationship is managed by configuration information stored in the configuration management device 3.
FIG. 10 is a diagram illustrating configuration information stored in the configuration management apparatus 3.
As illustrated in FIG. 10, the configuration information is described in an XML (Extensible Markup Language) format. In the configuration information, the setting (type, name, address (position information)) of the configuration management device 3 is described in the area indicated by the arrow A in the figure, and the connection indicated in the area indicated by the arrow B in the figure The settings (type, name, address (position information)) of the management apparatus 4 are described, and the settings (type, name, address (position information)) of the data management apparatus 5 are stored in the area indicated by the arrow C in the figure. Have been described. In the area indicated by an arrow D in the drawing, settings (type (type), name, address (position information)) of the connection configuration between the substrate processing apparatus 10 and the group management system 7 are described.

  In this example, the “nodes” tag indicates that setting information of the configuration management device 3, the connection management device 4, and the data management device 5 is described. The “node” tag indicates setting information of each hardware, and “node_type” of the tag indicates the type of the hardware. For example, “GDB” indicates that the hardware is the configuration management device 3, “EDS” indicates that the hardware is the connection management device 4, and “EDB” indicates that the hardware is data It shows that it is the management apparatus 5. Further, “node_id” of the tag is an identifier for uniquely identifying hardware in the type. The “node_name” tag indicates the name of the hardware. The “ip_addr” tag indicates an ip address set in the hardware.

  Therefore, in the area indicated by the arrow A, the type of the hardware is the configuration management device 3 (GDB), the name of the hardware is “GDB”, and the ip address set in the hardware is It is described that it is 192.168.11.1. In the area indicated by the arrow B, the type of the hardware is the connection management device 4 (EDS), the identifier in the connection management device 4 is “1”, and the name of the hardware is “EDS # 2”. It is described that the ip address set in the hardware is 192.168.11.2. In the area indicated by the arrow C, the type of the hardware is the data management device 5 (EDB), the identifier in the data management device 5 is “1”, and the name of the hardware is “EDB # 2”. It is described that the ip address set in the hardware is 192.168.11.10.

  Further, in this example, the “eq” tag indicates setting information of the substrate processing apparatus 10, and “eq_type” of the tag indicates the type of the substrate processing apparatus 10. The “eq_name” tag indicates the name of the substrate processing apparatus 10. The “eds_name” tag indicates the name of the connection management device 4 that is connected to the substrate processing apparatus 10 and performs communication. The “edb_name” tag is connected to the connection management device 4 indicated by “eds_name”. The name of the data management apparatus 5 which accumulate | stores the information regarding the said substrate processing apparatus 10 is shown. Here, the names shown in the “eds_name” tag and the “edb_name” tag are the names shown in the “node_name” tag described above. The “eq_addr” tag indicates an ip address set in the substrate processing apparatus 10.

  Therefore, in this example, the type of the substrate processing apparatus 10 is “system1”, the name of the hardware is “apparatus 1”, and the substrate processing apparatus 10 is named “EDS # 2”. 4 is connected to the connection management device 4 and communicates with the connection management device 4. The data management device 5 whose name is “EDB # 1” is connected to the connection management device 4. It is described that the data is stored in the data management device 5.

  In addition, the name of a tag, setting content, etc. are not limited to this example. The description format of the configuration information may be any format that can describe the hardware connection configuration as data, and is not limited to the XML format. A plurality of EDSs and EDBs may be provided. Such configuration information is edited by text editing software (not shown). The text editing software, for example, operates on the configuration management apparatus 3, reads configuration information stored in the configuration management apparatus 3, displays it on the screen, and accepts editing contents.

FIG. 11 is a diagram schematically illustrating a connection relationship configured based on such configuration information.
As illustrated in FIG. 11, the configuration management device 3 is connected to and communicates with the connection management devices 4-1 to 4-n. For example, the connection management apparatus 4-1 is connected to and communicates with the configuration management apparatus 3, the two substrate processing apparatuses 10, and the two data management apparatuses 5 that store information related to the two substrate processing apparatuses 10. . Further, for example, the connection management apparatus 4-2 is connected to the configuration management apparatus 3, one substrate processing apparatus 10, and one data management apparatus 5 to perform communication.

  The terminal device 6 is connected to and communicates with the configuration management device 3 and the connection management devices 4-1 to 4-n. Accordingly, the terminal device 6 transmits information related to the substrate processing apparatus 10 connected to the connection management devices 4-1 to 4-n from the data management device 5 connected to the connection management devices 4-1 to 4-n. Acquire and display the information on the screen. Therefore, the user browses information regarding the substrate processing apparatus 10 via the terminal device 6. The terminal device 6 may acquire and display information regarding the substrate processing apparatus 10 included in the configuration information.

In the substrate processing system 2 according to the embodiment of the present invention, information related to the substrate processing apparatus 10 and viewable by the user is set for each user.
As shown in FIG. 12, in this example, the user is connected to the information related to the substrate processing apparatus 10 connected to the connection management apparatus 4-1 and the connection management apparatus 4-n via the terminal device 6. Information about the substrate processing apparatus 10 can be browsed. Such browsing authority is stored in the configuration management device 3. For example, when the user logs in to the terminal device 6, the terminal device 6 confirms the browsing authority stored in the configuration management device 3.

FIG. 12 is a diagram showing a substrate processing apparatus selection screen 70 for setting the browsing authority for information related to the substrate processing apparatus 10 for each user.
As shown in FIG. 12, the substrate processing apparatus selection screen 70 includes an apparatus list display area 72, a browseable apparatus display area 74, an add button 76, and a delete button 78. In the apparatus list display area 72, a list of, for example, 256 substrate processing apparatuses 10 included in the substrate processing system 2 is displayed. In this example, for each substrate processing apparatus 10, the identification number of the substrate processing apparatus 10, the name of the substrate processing apparatus 10, and the name of the connection management apparatus 4 to which the substrate processing apparatus 10 is connected (server name). Is displayed.

  In the browseable device display area 74, the identification number of the substrate processing apparatus 10 included in the substrate processing system 2 that can be browsed by the target user, the name of the substrate processing apparatus 10, and the relevant The name of the connection management device 4 to which the substrate processing apparatus 10 is connected is displayed.

  The add button 76 is a button for adding the substrate processing apparatus 10 selected in the apparatus list display area 72 to the viewable apparatus display area 74. When the substrate processing apparatus 10 is added to the browseable apparatus display area 74, the user can browse information regarding the substrate processing apparatus 10. The delete button 78 is a button for deleting the substrate processing apparatus 10 selected in the browseable apparatus display area 74 from the browseable apparatus display area 74. When the substrate processing apparatus 10 is deleted from the browseable apparatus display area 74, the user cannot browse information regarding the substrate processing apparatus 10.

  The substrate processing apparatus selection screen 70 is displayed on the display / input device 24 of the configuration management apparatus 3, and the set contents are stored in the configuration management apparatus 3. The substrate processing apparatus selection screen 70 is displayed on the display / input device 24 of the terminal device 6, and data input via the display / input device 24 of the terminal device 6 is transferred to the configuration management apparatus 3 via the network 12. Browsing authority may be set by transmitting.

  For example, the user A can browse information on the first to 128th substrate processing apparatuses 10, and the user B can browse information on the 129th to 256th substrate processing apparatuses 10. When the setting is made so that the user A can log in to the terminal device 6, a list of 128 substrate processing apparatuses 10 to which authority is given out of the 256 substrate processing apparatuses 10 is displayed on the screen. Although not described in detail, it goes without saying that both the user A and the user B can view information on the same substrate processing apparatus 10.

Next, a program that operates on hardware included in the substrate processing system 2 according to the embodiment of the present invention will be described with reference to FIGS.
FIG. 13 is a diagram illustrating the functional configuration of the configuration management program 30 executed by the configuration management apparatus 3.
As shown in FIG. 13, the configuration management program 30 includes a communication unit 300, a configuration information storage unit 302, a system information storage unit 304, an authority storage unit 306, a configuration information update unit 308, a configuration information management unit 310, and a system information management unit. 312, an authority setting unit 314 and an authority management unit 316. The configuration management program 30 is stored in the storage device 26 via a recording medium 28 (FIG. 7) such as FD, CD, or DVD, supplied to the configuration management device 3, loaded into the memory 20, and the control device 16 It is executed on the OS (not shown) that operates above. Note that the configuration management program 30 may be supplied from the external computer connected to the network 12 to the control device 16 via the communication IF 22. Further, the subsequent programs are also supplied to the respective hardware and executed in the same manner.

  In the configuration management program 30, the communication unit 300 performs communication processing required for communication with each hardware. Specifically, the communication unit 300 changes the data generated by each component of the configuration management program 30 to a format suitable for communication processing, and outputs the data to the network 12 via the communication IF 22. The communication unit 300 outputs data in a predetermined format received from the network 12 to other components.

  The configuration information storage unit 302 stores configuration information (FIG. 10) and an upper limit parameter table (FIG. 9) of the substrate processing system 2 in which the configuration management device 3 is included. The configuration information storage unit 302 is realized by at least one of the memory 20 and the storage device 26.

  The system information storage unit 304 stores shared information such as failure information shared in the substrate processing system 2. The authority storage unit 306 stores the browsing authority set for each user via the substrate processing apparatus selection screen 70 (FIG. 12). The system information storage unit 304 and the authority storage unit 306 are realized in the same manner as the configuration information storage unit 302.

  The configuration information update unit 308 accepts a change operation such as addition or deletion to the configuration information made via the display / input device 24 of the configuration management device 3 or the terminal device 6, and the configuration information based on the change contents The configuration information stored in the storage unit 302 is updated. Similarly, the configuration information update unit 308 receives a change operation for the upper limit parameter table, and updates the upper limit parameter table stored in the configuration information storage unit 302 based on the change contents.

  The configuration information management unit 310 accepts configuration information reference requests from other hardware such as the terminal device 6 and the connection management device 4, and sends the configuration information stored in the configuration information storage unit 302 to the requesting hardware. To send.

  The system information management unit 312 accepts the shared information transmitted from the substrate processing apparatus 10 to the connection management apparatus 4 from the connection management apparatus 4 and stores it in the system information storage unit 304.

The authority setting unit 314 refers to the browsing authority stored in the authority storage unit 306, displays the substrate processing apparatus selection screen 70 on the display / input device 24, and accepts setting contents input via the screen, Based on the setting contents, the browsing authority stored in the authority storage unit 306 is updated.
The authority management unit 316 receives a browsing authority reference request from the terminal device 6 and transmits the browsing authority stored in the authority storage unit 306 to the requesting terminal device 6.

FIG. 14 is a diagram illustrating the functional configuration of the connection management program 40 executed by the connection management device 4.
As illustrated in FIG. 14, the connection management program 40 includes a communication unit 300, a configuration information storage unit 302, a configuration information acquisition unit 400, a connection establishment unit 402, a device information storage unit 404, and a device information management unit 406. 14 that are substantially the same as those shown in FIG. 13 are denoted by the same reference numerals.

In the connection management program 40, the configuration information acquisition unit 400 requests configuration information from the configuration management device 3 after the connection management device 4 is activated, receives the configuration information transmitted from the configuration management device 3, and receives the configuration information. Store in the storage unit 302.
When the configuration information is acquired by the configuration information acquisition unit 400, the connection establishment unit 402 connects between the substrate processing apparatus 10 and the data management apparatus 5 based on the configuration information stored in the configuration information storage unit 302. Establish. More specifically, the connection establishment unit 402 recognizes the connection configuration based on the name of each piece of hardware described in the configuration information, and establishes a connection with the hardware with that name.

  The apparatus information storage unit 404 stores information related to the substrate processing apparatus 10 transmitted by the substrate processing apparatus 10 connected to the connection management apparatus 4. This information includes information regarding the operating state of the apparatus itself, including temperature information, pressure information, gas flow rate information, and the like. The device information storage unit 404 is realized by at least one of the memory 20 and the storage device 26.

  The apparatus information management unit 406 receives information related to the substrate processing apparatus 10 transmitted by the substrate processing apparatus 10 connected to the connection management apparatus 4 and stores the information in the apparatus information storage unit 404. The device information management unit 406 transmits information such as failure information with low occurrence frequency to the configuration management device 3 among such information. Furthermore, the device information management unit 406 transmits information with high occurrence frequency such as temperature information and pressure information to the data management device 5 connected to the connection management device 4. Further, such information may be transmitted to each of the configuration management device 3 and the data management device 5 without being stored in the device information storage unit 404. Further, various forms such as a form in which information is directly transmitted from the apparatus information management unit 406 only to the configuration management apparatus 3 are implemented.

FIG. 15 is a diagram illustrating the functional configuration of the data management program 50 executed by the data management apparatus 5.
As illustrated in FIG. 15, the data management program 50 includes a communication unit 300, a configuration information storage unit 302, a configuration information acquisition unit 400, a connection establishment unit 402, a data information storage unit 500, and a data information management unit 502. 15 that are substantially the same as those shown in FIGS. 13 and 14 are denoted by the same reference numerals.

  In the data management program 50, the data information storage unit 500 stores information regarding the substrate processing apparatus 10 connected to the connection management apparatus 4 to which the data management apparatus 5 is connected. The information includes, for example, temperature information and pressure information. The data information storage unit 500 is realized by at least one of the memory 20 and the storage device 26.

  The data information management unit 502 receives information transmitted from the substrate processing apparatus 10 to the connection management apparatus 4 from the connection management apparatus 4 and stores the information in the data information storage unit 500.

FIG. 16 is a diagram illustrating a functional configuration of the terminal program 60 executed by the terminal device 6.
As illustrated in FIG. 16, the terminal program 60 includes a communication unit 300, a configuration information storage unit 302, a configuration information acquisition unit 400, a connection establishment unit 402, a user interface (UI) unit 600, and an authority acquisition unit 602. In addition, among each structure shown by FIG. 16, the same code | symbol is attached | subjected to the substantially same thing as the structure shown by FIG.13 and FIG.14.

  In the terminal program 60, the UI unit 600 displays a substrate processing apparatus selection screen 70, a screen (not shown) for updating the configuration information and the upper limit parameter, a screen (not shown) for displaying information about the substrate processing apparatus 10, and the like. The information is displayed on the display / input device 24. Also, the UI unit 600 transmits the content input via the display / input device 24 to other hardware via the communication unit 300.

  When the user logs in to the terminal device 6, the authority acquisition unit 602 requests the user's authority from the configuration management apparatus 3, receives the authority transmitted from the configuration management apparatus 3, and sends the authority to the connection establishment unit 402. Output. The connection establishment unit 402 establishes a connection within a range where the user can connect.

Next, the operation of the substrate processing system 2 according to the embodiment of the present invention will be described.
FIG. 17 is a sequence diagram showing an operation (S10) at the time of starting up the connection management device 4.
As shown in FIG. 17, when the connection management device 4 is activated, the connection management program 40 operates on the connection management device 4, and in step 100 (S100), the configuration information acquisition unit 400 of the connection management program 40 Requests the configuration management apparatus 3 to transmit configuration information. In the configuration management apparatus 3, when the configuration information management unit 310 of the configuration management program 30 receives this request, the stored configuration information is transmitted to the connection management apparatus 4. In the connection management device 4, the configuration information acquisition unit 400 of the connection management program 40 receives the transmitted configuration information and stores it in the configuration information storage unit 302.

In step 102 (S102), the connection establishment unit 402 refers to the stored configuration information, recognizes one or more substrate processing apparatuses 10 to establish connection based on the configuration information, and performs the substrate processing. A connection is established with the device 10.
In step 104 (S104), the connection establishment unit 402 recognizes one or more data management devices 5 to establish a connection based on the configuration information, and establishes a connection with the data management device 5. .
Similarly, the data management device 5 performs an operation of establishing a connection at startup.

FIG. 18 is a sequence diagram showing an operation (S 20) at the time of browsing information related to the substrate processing apparatus 10 using the terminal device 6.
As shown in FIG. 18, when the user logs in to the terminal device 6, in step 200 (S200), the configuration information acquisition unit 400 of the terminal program 60 requests the configuration management device 3 to transmit configuration information, Get configuration information. Further, the authority acquisition unit 602 requests the configuration management apparatus 3 to transmit the authority of the user, and acquires the authority.

In step 202 (S202), the connection establishment unit 402 recognizes one or more connection management devices 4 to establish a connection based on the stored configuration information and the authority acquired by the authority acquisition unit 602. A connection is established with the connection management device 4.
In step 204 (S204), the connection establishment unit 402 recognizes one or more data management devices 5 to establish a connection based on the configuration information and authority, and the data management device via the connection management device 4 Establish a connection with 5.

When the connection is established in the substrate processing system 2 in this way, information on the substrate processing executed by the substrate processing apparatus 10 can be received or accumulated.
Next, the substrate processing by the substrate processing apparatus 10 will be described in detail.
As shown in FIGS. 4 and 5, when the pod 110 is supplied to the load pot 114, the pod loading / unloading port 112 is opened by the front shutter 113, and the pod 110 above the load port 114 is a pod transfer device. 118 is carried into the housing 111 from the pod loading / unloading port 112.

  The loaded pod 110 is automatically transported and delivered by the pod transport device 118 to the designated shelf 117 of the rotary pod shelf 105, temporarily stored, and then one pod opener from the shelf 117. After being transferred to 121 and delivered and temporarily stored, it is transferred from the shelf 117 to one of the pod openers 121 and transferred to the mounting table 122 or directly transferred to the pod opener 121 and mounted. It is transferred to the mounting table 122. At this time, the wafer loading / unloading port 120 of the pod opener 121 is closed by the cap attaching / detaching mechanism 123, and the transfer chamber 124 is filled with clean air 133. For example, the transfer chamber 124 is filled with nitrogen gas as clean air 133, so that the oxygen concentration is set to 20 ppm or less, which is much lower than the oxygen concentration inside the casing 111 (atmosphere).

  The pod 110 mounted on the mounting table 122 has its opening-side end face pressed against the opening edge of the wafer loading / unloading port 120 on the front wall 119a of the sub-housing 119, and the cap is removed by the cap attaching / detaching mechanism 123. The wafer loading / unloading port is opened.

  When the pod 110 is opened by the pod opener 121, the wafer 200 is picked up from the pod 110 by the tweezer 125c of the wafer transfer device 125a through the wafer loading / unloading port, aligned with the notch alignment device 135 (not shown), and then transferred. It is carried into the standby section 126 behind the chamber 124 and loaded (charged) into the boat 217. The wafer transfer device 125 a that has transferred the wafer 200 to the boat 217 returns to the pod 110 and loads the next wafer 200 into the boat 217.

  During the loading operation of the wafer into the boat 217 by the wafer transfer mechanism 125 in the one (upper or lower) pod opener 121, another pod from the rotary pod shelf 105 is loaded into the other (lower or upper) pod opener 121. 110 is transferred and transferred by the pod transfer device 118, and the opening operation of the pod 110 by the pod opener 121 is simultaneously performed.

  When a predetermined number of wafers 200 are loaded into the boat 217, the lower end portion of the processing furnace 202 closed by the furnace port shutter 147 is opened by the furnace port shutter 147. Subsequently, the boat 217 holding the wafers 200 is loaded into the processing furnace 202 when the seal cap 219 is lifted by the boat elevator 115.

  After loading, processing is performed on the wafer 200 in the processing furnace 202 based on a predetermined recipe. After the processing, the wafer 200 and the pod 110 are ejected to the outside of the casing by the reverse procedure described above except for the wafer alignment process in the notch alignment device 135 (not shown).

  The substrate processing apparatus 10 transmits data regarding the state of the substrate processing apparatus 10 such as temperature information and pressure information to the connection management apparatus 4 during such substrate processing. Further, the substrate processing apparatus 10 transmits event information, failure information, and logging information to the connection management apparatus 4.

Next, a method for reflecting the edited configuration information on the substrate processing system 2 will be described.
FIG. 19 is a diagram illustrating a system management screen 80 for managing the system configuration of the substrate processing system 2.
As illustrated in FIG. 19, the system management screen 80 includes a notification button 82, an import button 84, a restore button 86, a node button 88, a user edit button 90, a group edit button 92, an authority edit button 94, and an end button 96. included. The system management screen 80 is displayed on the display / input device 24 connected to the configuration management device 3, and the configuration management device 3 accepts an operation input through the system management screen 80 using, for example, a mouse and a keyboard.

  In the system management screen 80, an import button 84 is a button for placing the configuration information in a state in which the configuration management device 3 can be notified. When the import button 84 is pressed, the configuration information is updated to the edited content and stored in the storage device 26 of the configuration management device 3. The notification button 82 is a button for changing the connection configuration based on the configuration information. When the notification button 82 is pressed, the configuration information change notification is transmitted to other hardware such as the connection management device 4. The buttons other than the import button 84 and the notification button 82 are not directly related to the present invention, and thus description thereof is omitted.

  The system management screen 80 is displayed on the display / input device 24 of the terminal device 6, and the setting content input via the display / input device 24 of the terminal device 6 is transmitted to the configuration management device 3 via the network 12. By doing so, the configuration information may be updated. In this case, the text editing software also operates on the terminal device 6.

FIG. 20 is a diagram for explaining a switching operation when a failure occurs in the connection management device 4.
As shown in FIG. 20A, when a failure occurs in the connection management device 4-1, the operator edits the configuration information stored in the configuration management device 3 in the display / input device 24, and the system The edited configuration information is reflected on the substrate processing system 2 via the management screen 80. Accordingly, the terminal device 6 or the like instructs the reflection of the changed configuration information and the notification to the connection management device 4.

  When the notification button 82 is pressed on the system management screen 80, a configuration information change notification is transmitted from the configuration management apparatus 3 to the connection management apparatus 4-2 as shown in FIG. When the connection management device 4-2 receives the configuration information change notification, the connection management device 4-2 acquires the configuration information from the configuration management device 3, and establishes a connection between the substrate processing apparatus 10 and the data management device 5 based on the configuration information. . Therefore, the substrate processing apparatus 10 and the data management apparatus 5 connected to the connection management apparatus 4-1 establish a connection with the connection management apparatus 4-2 and communicate with the connection management apparatus 4-2.

FIG. 21 is a sequence diagram showing the switching operation (S30) when the configuration information is updated.
As shown in FIG. 21, in step 300 (S300), the user edits the configuration information stored in the configuration management device 3 on the text editing software using the display / input device 24 of the terminal device 6, for example. To do. When the user presses the import button 84 on the system management screen 80, the configuration information update unit 308 of the configuration management program 30 operating on the configuration management apparatus 3 reflects the changed contents in the configuration information storage unit 302.

In step 302 (S 302), when the user presses the notification button 82 on the system management screen 80, the configuration information management unit 310 of the configuration management program 30 receives a configuration information change notification from the terminal device 6.
In step 304 (S304), the configuration information management unit 310 transmits a notification that the configuration information has been changed to the connection management device 4.

  In step 306 (S306), the configuration information acquisition unit 400 of the connection management program 40 operating on the connection management device 4 requests the configuration management device 3 to transmit configuration information. In the configuration management apparatus 3, when the configuration information management unit 310 of the configuration management program 30 receives this request, the stored configuration information is transmitted to the connection management apparatus 4. In the connection management device 4, the configuration information acquisition unit 400 of the connection management program 40 receives the transmitted configuration information and stores it in the configuration information storage unit 302.

In step 308 (S308), the connection establishment unit 402 refers to the stored configuration information, recognizes one or more data management devices 5 to establish a connection based on the configuration information, and manages the data management. A connection is established with the device 5 and an initialization process is executed.
In step 310 (S310), the connection establishment unit 402 receives an initialization completion notification from the data management device 5.

In step 312 (S312), the connection establishment unit 402 refers to the stored configuration information, recognizes one or more substrate processing apparatuses 10 to establish connection based on the configuration information, and performs the substrate processing. A connection is established with the device 10.
When the connection is established in the substrate processing system 2 in this way, the substrate processing is executed by the substrate processing apparatus 10.

  As described above, the substrate processing system 2 according to the present invention includes a plurality of substrate processing apparatuses 10 for processing a substrate and the group management system 7 connected to the substrate processing apparatus 10, and the group management system 7 communicates between a configuration information storage device (configuration management device 3) that stores configuration information and at least one of the plurality of substrate processing apparatuses based on the configuration information stored in the configuration information storage device. A plurality of communication devices (connection management device 4) to be performed and a substrate that is connected to any of the plurality of communication devices based on configuration information stored in the configuration information storage device and communicates with the communication devices A device information storage device (data management device 5) for storing information on the processing device. Therefore, according to the present invention, even when the number of substrate processing apparatuses to be connected increases, it is possible to connect to a large number of substrate processing apparatuses without increasing the group management apparatus. Further, even when a substrate processing apparatus is added, it is not necessary to increase the group management apparatus, so that the cost can be reduced.

  Preferably, the configuration information includes a connection relationship among the substrate processing apparatus, the configuration information storage apparatus, the communication apparatus, and the apparatus information storage apparatus. According to the present invention, it is possible to easily change and expand connected devices, and to shorten the time required for maintenance. Thereby, the operation rate of a substrate processing system can be improved.

  The configuration information includes the maximum number of connections that the configuration management device 3, the connection management device 4, and the data management device 5 can connect to each other, and further includes setting means for setting the maximum number of connections. For this reason, since the hardware in the substrate processing system 2 can be increased by changing the maximum number of connections, the configuration can be changed more easily. In particular, when hardware performance is improved in the future, it is possible to improve the specifications of the entire system only by changing this parameter. Moreover, the configuration change can be realized at a lower cost.

  Since the configuration information is centrally managed in the configuration management device 3, each hardware can recognize the connection configuration by acquiring the configuration information from the configuration management device 3 at the time of activation. For this reason, the activation sequence can be fixed in each hardware.

  In the configuration information, each hardware is given a unique name, and the connection form is defined by this name. For this reason, it became possible to respond to the configuration change simply by changing the name of the hardware. As a result, it is possible to reduce the time required for configuration change, hardware replacement, and the like.

  The configuration management apparatus 3 stores information related to the plurality of substrate processing apparatuses 10 that is different from the information stored in the data management apparatus 5. In particular, the configuration management device 3 stores information with a low occurrence frequency, and the data management device 5 stores information with a high occurrence frequency. Therefore, even when the load on the entire substrate processing system 2 increases, it is not necessary to review the configuration of the entire system, and the performance of the entire substrate processing system 2 can be improved only by adding the data management device 5. .

  For example, when the substrate processing apparatus 10 generates more information about the substrate processing apparatus 10 and the load on the data management apparatus 5 that stores information about the substrate processing apparatus 10 increases, the substrate processing apparatus 10 By increasing the number of data management devices 5 that store information about the system, the system can be easily expanded and the load on the data management device 5 can be reduced.

  Preferably, the apparatus further includes display means for displaying information on the substrate processing apparatus included in the configuration information. In the substrate processing system 2 according to the present invention, the authority to enable browsing of information related to the substrate processing apparatus 10 using the terminal device 6 is set for each user and stored in the configuration management apparatus 3. For this reason, even when an upper limit value (for example, 128) is provided for the number of substrate processing apparatuses 10 that can be connected from the terminal device 6, the number of substrates exceeding the upper limit value can be obtained by using a plurality of users. Information about the processing apparatus 10 can be browsed. Preferably, the information processing apparatus further includes instruction means for instructing reflection of the changed configuration information and notification to the communication apparatus.

  The substrate processing apparatus 10 according to the present invention can be applied not only to a semiconductor manufacturing apparatus but also to an apparatus for processing a glass substrate such as an LCD apparatus. Moreover, the substrate processing apparatus 10 according to the present invention does not limit the processing in the furnace, but includes film forming processing including processing for forming CVD, PVD, oxide film, nitriding diffusion, and processing for forming a film containing metal. It can be carried out. Further, the substrate processing apparatus 10 according to the present invention can be applied not only to a vertical apparatus but also to a single wafer apparatus.

1 is a diagram illustrating a configuration of a substrate processing apparatus 1 including a system A and a system B. FIG. It is a figure explaining transfer of substrate processing apparatus 10 between different subsystems. It is a figure which shows the structure of the substrate processing system 2 which concerns on embodiment of this invention. 1 is a perspective view of a substrate processing apparatus 10 according to an embodiment of the present invention. 1 is a side perspective view of a substrate processing apparatus 10 according to an embodiment of the present invention. A functional configuration of the substrate processing apparatus 10 centering on the PMC 14 is shown. It is a figure which shows the hardware constitutions of the terminal device 6. It is a figure explaining the hardware and the number of connections which mutually communicate in the substrate processing system. It is a figure which illustrates the upper limit parameter table in which the upper limit value in which each hardware and the hardware which communicates between each hardware are connected is described. 4 is a diagram illustrating configuration information stored in a configuration management device 3. FIG. It is a figure which illustrates typically the connection relation constituted based on composition information. It is a figure which shows the substrate processing apparatus selection screen 70 which sets the browsing authority of the information regarding the substrate processing apparatus 10 for every user. It is a figure explaining the function structure of the configuration management program 30 performed by the configuration management apparatus 3. FIG. It is a figure explaining the function structure of the connection management program 40 performed by the connection management apparatus 4. It is a figure explaining the function structure of the data management program 50 performed by the data management apparatus 5. FIG. It is a figure explaining the function structure of the terminal program 60 performed by the terminal device 6. FIG. It is a sequence diagram which shows the operation | movement (S10) at the time of starting of the connection management apparatus 4. It is a sequence diagram which shows the operation | movement (S20) at the time of browsing the information regarding the substrate processing apparatus 10 using the terminal device 6. FIG. It is a figure which illustrates the system management screen 80 which manages the system configuration | structure of the substrate processing system. It is a figure explaining the switching operation when a failure occurs in the connection management device. It is a sequence diagram which shows the switching operation (S30) in the case where configuration information is updated.

Explanation of symbols

2 substrate processing system 3 configuration management device 4 connection management device 5 data management device 6 terminal device 7 group management system 10 substrate processing device 12 network 30 configuration management program 40 connection management program 50 data management program 60 terminal program 300 communication unit 302 configuration information Storage unit 304 System information storage unit 306 Authority storage unit 308 Configuration information update unit 310 Configuration information management unit 312 System information management unit 314 Authority setting unit 316 Authority management unit 400 Configuration information acquisition unit 402 Connection establishment unit 404 Device information storage unit 406 Device Information management unit 500 Data information storage unit 502 Data information management unit 600 UI unit 602 Authority acquisition unit

Claims (21)

A substrate processing apparatus for processing a substrate ;
A group management system connected to the substrate processing apparatus,
The group management system includes:
A configuration information storage device that stores configuration information defining a connection configuration;
A communication device that communicates with the substrate processing apparatus based on the configuration information;
An apparatus information storage device that stores information related to a substrate processing apparatus that is connected to the communication apparatus based on the configuration information and communicates with the communication apparatus ;
The configuration information storage device includes a connection relationship between the substrate processing device, the configuration information storage device, the communication device, and the device information storage device, and the configuration information storage device, the communication device, and the device information storage device. A substrate processing system having configuration information including the number of connections that can be connected to each other . In the configuration information storage device, a failure occurs in the communication device, and the substrate processing device connected to the communication device in which the failure has occurred and another communication device in which no failure has occurred in the device information storage device When the configuration information is updated to connect to the other communication device, the configuration information is updated and notified to the other communication device,
The other communication apparatus establishes a connection between the substrate processing apparatus connected to the communication apparatus in which the failure has occurred and the apparatus information storage apparatus based on the updated configuration information.
The substrate processing system according to claim 1. The substrate processing system according to claim 1, wherein the configuration information includes a maximum number of connections that the configuration information storage device, the communication device, and the device information storage device can connect to each other. The substrate processing system according to claim 1, wherein the configuration information storage device stores information related to the substrate processing apparatus , which is different from information stored in the apparatus information storage device. The substrate processing system according to claim 1, further comprising display means for displaying information on the substrate processing apparatus included in the configuration information. The substrate processing system according to claim 1, further comprising instruction means for instructing reflection of the changed configuration information and notification to the communication apparatus. A group management system connected to a plurality of substrate processing apparatuses for processing a substrate,
A configuration information storage device that stores configuration information defining a connection configuration ;
A communication device that communicates with the substrate processing apparatus based on the configuration information;
An apparatus information storage device that stores information about a substrate processing apparatus that is connected to the communication apparatus based on the configuration information stored in the configuration information storage apparatus and communicates with the communication apparatus ;
The configuration information storage device includes a connection relationship between the substrate processing device, the configuration information storage device, the communication device, and the device information storage device, and the configuration information storage device, the communication device, and the device information storage device. A group management system having configuration information including the number of connections that can be connected to each other . In the configuration information storage device, a failure occurs in the communication device, and the substrate processing device connected to the communication device in which the failure has occurred and another communication device in which no failure has occurred in the device information storage device When the configuration information is updated to connect to the other communication device, the configuration information is updated and notified to the other communication device,
The other communication apparatus establishes a connection between the substrate processing apparatus connected to the communication apparatus in which the failure has occurred and the apparatus information storage apparatus based on the updated configuration information.
The group management system according to claim 7. The group management system according to claim 7, wherein the configuration information includes a maximum number of connections that the configuration information storage device, the communication device, and the device information storage device can connect to each other. The group management system according to claim 7, wherein the configuration information storage device stores information related to the substrate processing apparatus , which is different from information stored in the apparatus information storage apparatus. The configuration information storage device is configured to execute a configuration management program,
The configuration management program includes:
A communication unit that performs communication processing between hardware including the substrate processing device, the configuration information storage device, the communication device, and the device information storage device;
A system information storage unit for storing shared information shared between the substrate processing apparatus, the configuration information storage apparatus, the communication apparatus, and the apparatus information storage apparatus;
A configuration information storage unit for storing the configuration information;
When the configuration information is edited, a configuration information update unit that receives the edited content and updates the configuration information;
A configuration information management unit that receives a configuration information reference request from other hardware and transmits the configuration information stored in the configuration information storage unit to the requesting hardware;
A system information management unit for storing shared information transmitted from the substrate processing apparatus to the communication apparatus in the system information storage unit;
The group management system according to claim 7. The configuration management program further includes an authority storage unit that stores the browsing authority set for each user, and an authority setting unit that refers to the browsing authority stored in the authority storage unit.
The group management system according to claim 11. The communication device is configured to execute a connection management program;
The connection management program includes:
A communication unit that performs communication processing between hardware including the substrate processing device, the configuration information storage device, the communication device, and the device information storage device;
A configuration information storage unit for storing the configuration information;
A configuration information acquisition unit that requests configuration information from the configuration information storage device when the communication device is activated, receives the configuration information, and stores the configuration information in the configuration information storage unit;
When the configuration information is acquired by the configuration information acquisition unit, a connection establishment unit that establishes a connection between the substrate processing apparatus and the apparatus information storage device,
An apparatus information storage unit for storing information on the substrate processing apparatus including temperature information, pressure information, and fault information transmitted from the substrate processing apparatus to the communication apparatus;
A device information management unit that transmits information with a low occurrence frequency among the information to the configuration information storage device, and transmits information with a high occurrence frequency among the information to the device information storage device;
The group management system according to claim 7. A communication unit that performs communication processing between hardware including a substrate processing device, a configuration information storage device, a communication device, and a device information storage device;
A system information storage unit for storing shared information shared between the substrate processing apparatus, the configuration information storage apparatus, the communication apparatus, and the apparatus information storage apparatus;
The connection relationship among the substrate processing apparatus, the configuration information storage apparatus, the communication apparatus, and the apparatus information storage apparatus, and the number of connections that the configuration information storage apparatus, the communication apparatus, and the apparatus information storage apparatus can connect to each other. A configuration information storage unit for storing configuration information including:
When the configuration information is edited, a configuration information update unit that receives the edited content and updates the configuration information;
A configuration information management unit that receives a configuration information reference request from other hardware and transmits the configuration information stored in the configuration information storage unit to the requesting hardware;
A system information management unit for storing shared information transmitted from the substrate processing apparatus to the communication apparatus in the system information storage unit;
A configuration management program. A communication unit that performs communication processing between hardware including a substrate processing device, a configuration information storage device, a communication device, and a device information storage device;
The connection relationship among the substrate processing apparatus, the configuration information storage apparatus, the communication apparatus, and the apparatus information storage apparatus, and the number of connections that the configuration information storage apparatus, the communication apparatus, and the apparatus information storage apparatus can connect to each other. A configuration information storage unit for storing configuration information including:
A configuration information acquisition unit that requests configuration information from the configuration information storage device when the communication device is activated, receives the configuration information, and stores the configuration information in the configuration information storage unit;
When the configuration information is acquired by the configuration information acquisition unit, a connection establishment unit that establishes a connection between the substrate processing apparatus and the apparatus information storage device,
An apparatus information storage unit for storing information on the substrate processing apparatus including temperature information, pressure information, and fault information transmitted from the substrate processing apparatus to the communication apparatus;
A device information management unit that transmits information with a low occurrence frequency among the information to the configuration information storage device, and transmits information with a high occurrence frequency among the information to the device information storage device;
A connection management program. The substrate processing system according to claim 1, further comprising a terminal device,
The said terminal device is a substrate processing system which acquires the information regarding the said substrate processing apparatus from the said communication apparatus or the said structure information storage device. The substrate processing system according to claim 1, further comprising a terminal device,
The said terminal device is a substrate processing system which sets the browsing authority of the information regarding the said substrate processing apparatus for every user. The terminal device is configured to execute a terminal program;
The terminal program includes a communication unit that performs communication processing between hardware including a substrate processing device, a configuration information storage device, a communication device, a terminal device, and a device information storage device;
A configuration information storage unit for storing the configuration information;
A configuration information acquisition unit that requests configuration information from the configuration information storage device upon activation of the terminal device, receives the configuration information, and stores the configuration information in the configuration information storage unit;
When the configuration information is acquired by the configuration information acquisition unit, a connection establishment unit that establishes a connection between the substrate processing apparatus and the apparatus information storage device,
A user interface for transmitting contents input via the terminal device from a screen for selecting a substrate processing apparatus, a screen for updating the configuration information, and a screen for displaying information on the substrate processing apparatus to other hardware And
When a user logs in to the terminal device, the authority acquisition unit that requests the authority of the user from the configuration information storage device, receives the authority transmitted from the configuration information storage device, and outputs the authority to the connection establishment unit;
The substrate processing system of Claim 16 or 17 which has these. The terminal device has the substrate processing apparatus selection screen for setting the perusal of browsing information on the substrate processing apparatus for each user,
The substrate processing system according to claim 18, wherein the substrate processing apparatus selection screen includes an apparatus list display area, a browseable apparatus display area, an add button, and a delete button. A communication unit that performs communication processing between hardware including a substrate processing device, a configuration information storage device, a communication device, a terminal device, and a device information storage device
Connection relationship between the substrate processing apparatus, the configuration information storage apparatus, the communication apparatus, the terminal apparatus, and the apparatus information storage apparatus, and the configuration information storage apparatus, the communication apparatus, the terminal apparatus, and the apparatus information storage apparatus A configuration information storage unit that stores configuration information including the number of connections that can be connected to each other;
A configuration information acquisition unit that requests configuration information from the configuration information storage device upon activation of the terminal device, receives the configuration information, and stores the configuration information in the configuration information storage unit;
When the configuration information is acquired by the configuration information acquisition unit, a connection establishment unit that establishes a connection between the substrate processing apparatus and the apparatus information storage device,
Substrate processing device selection screen, screen for updating the configuration information, content input via the display device from the screen for displaying information related to the substrate processing device, to other hardware via the communication unit A user interface part to send;
When a user logs in to the terminal device, the authority acquisition unit that requests the authority of the user from the configuration information storage device, receives the authority transmitted from the configuration information storage device, and outputs the authority to the connection establishment unit;
A terminal program. A configuration information storage device that stores configuration information defining a connection configuration;
A communication device that communicates with the substrate processing apparatus based on the configuration information;
An apparatus information storage device that stores information related to a substrate processing apparatus that is connected to the communication apparatus based on the configuration information and communicates with the communication apparatus;
A connection management method for each hardware constituting a group management system including:
The configuration information storage device includes a connection relationship between the substrate processing device, the configuration information storage device, the communication device, and the device information storage device, and the configuration information storage device, the communication device, and the device information storage device. Each has configuration information that includes the number of connections that can be connected to each other
Connection management method for each hardware.

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