JP4734185B2 - Substrate processing apparatus and substrate processing apparatus control method - Google Patents

Description

  The present invention relates to a substrate processing apparatus for processing a semiconductor substrate, a glass substrate, or the like.

  In this type of substrate processing apparatus, a plurality of files are handled. There are various types of these files such as process recipes and system recipes. The process recipe is a file in which detailed procedures for processing a substrate are described. In the substrate processing apparatus, for example, several hundred files are stored as process recipes. During operation, the substrate processing apparatus processes a substrate based on a procedure described in a predetermined process recipe.

  Generally, in the substrate processing apparatus, the operation authority of each user is set for each type of file. For example, when the user's operation authority regarding a process recipe is set to be editable, the user can refer to and edit all files that are process recipes. The operation authority is set by a predetermined operator such as an administrator (also referred to as a master user), and the password or the user name and the password corresponding to the user are confirmed when the user performs the operation.

  However, since the operation authority is set for all files that are process recipes, there is a possibility that unnecessary process recipe files may be edited without permission. Substrate processing is performed based on an incorrectly set process recipe, and the substrate may be lost.

It is an object of the present invention to provide a substrate processing apparatus and a method for controlling the substrate processing apparatus that can set operation authority for a plurality of stored files in more detail.

In order to achieve the above object, a substrate processing apparatus according to the present invention, a plurality of recipes steps for processing a substrate is described, any attribute value among the plurality of attribute values for the described procedures is set Storage means for storing; authority setting screen for setting authority to edit, refer to or prohibit each of a plurality of recipes stored in the storage means; a plurality of recipes stored in the storage means; and the plurality of recipes Display means for displaying a list of associated recipes with attribute values set for each of the recipes, and the recipe list display screen is one of a plurality of recipes displayed on the screen. If any one of a plurality of recipes displayed on the recipe list display screen is selected, the right to edit the selected recipe is set. When, further comprising updating means for updating the contents of the selected recipe.

The control method of a substrate processing apparatus according to the present invention, a plurality procedure for processing a substrate is described, a recipe or attribute value among the plurality of attribute values for the described procedures is set in the storage means And an authority setting screen for setting authority to edit, refer to, or prohibit each of the plurality of stored recipes, a plurality of recipes stored in the storage means, and each of the plurality of recipes. A recipe list display screen that displays a list of associated attribute values in association with each other. The recipe list display screen accepts an operation of selecting one of a plurality of recipes displayed on the screen, and displays the recipe list When one of the multiple recipes displayed on the screen is selected, the contents of the selected recipe are updated when the authority to edit the selected recipe is set

  According to the substrate processing apparatus of the present invention, the operation authority for a plurality of stored files can be set in more detail, so that only necessary processes are executed and unnecessary process recipes are not executed. I'm sorry. Therefore, since the substrate is not processed by a different recipe, the loss of the substrate is suppressed.

FIG. 1 is a diagram showing a configuration of a substrate processing system 1 including a substrate processing apparatus 10 according to an embodiment of the present invention.
As shown in FIG. 1, the substrate processing system 1 includes a substrate processing apparatus 10 and a host device 20. The substrate processing apparatus 10 and the host apparatus 20 are connected via a network 12 such as a LAN. Therefore, an instruction from the host apparatus 20 is transmitted to the substrate processing apparatus 10 via the network 12. The substrate processing system 1 may include a plurality of substrate processing apparatuses 10.

  In the substrate processing apparatus 10, the input / output device 16 is provided integrally with the substrate processing apparatus 10 or connected via the network 12 and has an operation screen 18. On the operation screen 18, an input screen for inputting predetermined data by a user (operator) and a display screen indicating the status of the apparatus are displayed. Further, a process module controller (PMC) 14 is provided in the substrate processing apparatus 10, and each device in the substrate processing apparatus 10 is controlled by the PMC 14.

As an example, the substrate processing apparatus 10 is configured as a semiconductor manufacturing apparatus that implements a processing apparatus in a semiconductor device (IC) manufacturing method. In the following description, an embodiment will be described in which a vertical apparatus that performs oxidation, diffusion processing, CVD processing, or the like is applied to a substrate as the substrate processing apparatus.
FIG. 2 is a perspective view of the substrate processing apparatus 10 according to the embodiment of the present invention.
FIG. 3 is a side perspective view of the substrate processing apparatus 10 shown in FIG.
As shown in FIGS. 2 and 3, an embodiment of the present invention in which a hoop (substrate container; hereinafter referred to as a pod) 110 is used as a wafer carrier containing a wafer (substrate) 200 made of silicon or the like. The substrate processing apparatus 10 according to FIG. A front maintenance port 103 as an opening provided for maintenance is opened at the front front portion of the front wall 111a of the casing 111, and front maintenance doors 104 and 104 for opening and closing the front maintenance port 103 are respectively built. It is attached.

  A pod loading / unloading port (substrate container loading / unloading port) 112 is opened on the front wall 111a of the casing 111 so as to communicate between the inside and the outside of the casing 111. The pod loading / unloading port 112 has a front shutter (substrate container loading / unloading port). The loading / unloading opening / closing mechanism 113 is opened and closed. A load port (substrate container delivery table) 114 is installed in front of the front side of the pod loading / unloading port 112, and the load port 114 is configured so that the pod 110 is placed and aligned. The pod 110 is carried onto the load port 114 by an in-process carrying device (not shown), and is also carried out from the load port 114.

  A rotary pod shelf (substrate container mounting shelf) 105 is installed at an upper portion of the casing 111 in a substantially central portion in the front-rear direction. The rotary pod shelf 105 stores a plurality of pods 110. It is configured. In other words, the rotary pod shelf 105 is vertically arranged and intermittently rotated in a horizontal plane, and a plurality of shelf boards (supported by a substrate container) that are radially supported by the support 116 at each of the upper, middle, and lower positions. And a plurality of shelf plates 117 are configured to hold the pods 110 in a state where a plurality of pods 110 are respectively placed.

  A pod transfer device (substrate container transfer device) 118 is installed between the load port 114 and the rotary pod shelf 105 in the housing 111, and the pod transfer device 118 moves up and down while holding the pod 110. A pod elevator (substrate container lifting mechanism) 118a and a pod transfer mechanism (substrate container transfer mechanism) 118b as a transfer mechanism are configured. The pod transfer device 118 includes a pod elevator 118a and a pod transfer mechanism 118b. The pod 110 is transported between the load port 114, the rotary pod shelf 105, and the pod opener (substrate container lid opening / closing mechanism) 121 by continuous operation.

  A sub-housing 119 is constructed across the rear end of the lower portion of the housing 111 at a substantially central portion in the front-rear direction. A pair of wafer loading / unloading ports (substrate loading / unloading ports) 120 for loading / unloading the wafer 200 into / from the sub-casing 119 are arranged on the front wall 119a of the sub-casing 119 in two vertical stages. A pair of pod openers 121 and 121 are installed at the wafer loading / unloading ports 120 and 120 at the upper and lower stages, respectively. The pod opener 121 includes mounting bases 122 and 122 on which the pod 110 is placed, and cap attaching / detaching mechanisms (lid attaching / detaching mechanisms) 123 and 123 for attaching and detaching caps (lids) of the pod 110. The pod opener 121 is configured to open and close the wafer loading / unloading port of the pod 110 by attaching / detaching the cap of the pod 110 placed on the placing table 122 by the cap attaching / detaching mechanism 123.

  The sub-housing 119 constitutes a transfer chamber 124 that is fluidly isolated from the installation space of the pod transfer device 118 and the rotary pod shelf 105. A wafer transfer mechanism (substrate transfer mechanism) 125 is installed in the front region of the transfer chamber 124, and the wafer transfer mechanism 125 rotates the wafer 200 in the horizontal direction or can move the wafer 200 in the horizontal direction. A substrate transfer device) 125a and a wafer transfer device elevator (substrate transfer device lifting mechanism) 125b for moving the wafer transfer device 125a up and down. As schematically shown in FIG. 2, the wafer transfer device elevator 125 b is installed between the right end of the pressure-resistant casing 111 and the right end of the front area of the transfer chamber 124 of the sub casing 119. By the continuous operation of the wafer transfer device elevator 125b and the wafer transfer device 125a, the tweezer (substrate holder) 125c of the wafer transfer device 125a is used as a placement portion for the wafer 200 with respect to the boat (substrate holder) 217. The wafer 200 is loaded (charged) and unloaded (discharged).

  In the rear region of the transfer chamber 124, a standby unit 126 that houses and waits for the boat 217 is configured. A processing furnace 202 is provided above the standby unit 126. The lower end portion of the processing furnace 202 is configured to be opened and closed by a furnace port shutter (furnace port opening / closing mechanism) 147.

  As schematically shown in FIG. 2, a boat elevator (substrate holder lifting / lowering) for raising and lowering the boat 217 is provided between the right end of the pressure-resistant casing 111 and the right end of the standby section 126 of the sub casing 119. Mechanism) 115 is installed. A seal cap 219 serving as a lid is horizontally installed on an arm 128 serving as a connecting tool connected to a lifting platform of the boat elevator 115, and the seal cap 219 supports the boat 217 vertically, and a lower end of the processing furnace 202. It is comprised so that a part can be obstruct | occluded. The boat 217 includes a plurality of holding members, and is configured to hold a plurality of (for example, about 50 to 125) wafers 200 horizontally in a state where the centers are aligned in the vertical direction. Has been.

  As schematically shown in FIG. 2, the left end of the transfer chamber 124 opposite to the wafer transfer device elevator 125b side and the boat elevator 115 side is a cleaned atmosphere or inert gas. A clean unit 134 composed of a supply fan and a dust-proof filter is installed so as to supply clean air 133. Between the wafer transfer device 125a and the clean unit 134, although not shown, the circumferential direction of the wafer A notch aligning device 135 is installed as a substrate aligning device for aligning the positions.

  The clean air 133 blown out from the clean unit 134 flows into the notch aligning device 135, the wafer transfer device 125a, and the boat 217 in the standby unit 126, and is then sucked in through a duct (not shown) to the outside of the housing 111. Exhaust is performed or it is circulated to the primary side (supply side) that is the suction side of the clean unit 134, and is again blown into the transfer chamber 124 by the clean unit 134.

Next, the operation of the substrate processing apparatus 10 according to the embodiment of the present invention will be described.
As shown in FIGS. 2 and 3, when the pod 110 is supplied to the load pot 114, the pod loading / unloading port 112 is opened by the front shutter 113, and the pod 110 above the load port 114 serves as a pod transfer device. 118 is carried into the housing 111 from the pod loading / unloading port 112.

  The loaded pod 110 is automatically transported and delivered by the pod transport device 118 to the designated shelf 117 of the rotary pod shelf 105, temporarily stored, and then one pod opener from the shelf 117. After being transferred to 121 and delivered and temporarily stored, it is transferred from the shelf 117 to one of the pod openers 121 and transferred to the mounting table 122 or directly transferred to the pod opener 121 and mounted. It is transferred to the mounting table 122. At this time, the wafer loading / unloading port 120 of the pod opener 121 is closed by the cap attaching / detaching mechanism 123, and the transfer chamber 124 is filled with clean air 133. For example, the transfer chamber 124 is filled with nitrogen gas as clean air 133, so that the oxygen concentration is set to 20 ppm or less, which is much lower than the oxygen concentration inside the casing 111 (atmosphere).

  The pod 110 mounted on the mounting table 122 has its opening-side end face pressed against the opening edge of the wafer loading / unloading port 120 on the front wall 119a of the sub-housing 119, and the cap is removed by the cap attaching / detaching mechanism 123. The wafer loading / unloading port is opened.

  When the pod 110 is opened by the pod opener 121, the wafer 200 is picked up from the pod 110 by the tweezer 125c of the wafer transfer device 125a through the wafer loading / unloading port, aligned with the notch alignment device 135 (not shown), and then transferred. It is carried into the standby section 126 behind the chamber 124 and loaded (charged) into the boat 217. The wafer transfer device 125 a that has delivered the wafer 200 to the boat 217 returns to the pod 110 and loads the next wafer 110 into the boat 217.

  During the loading operation of the wafer into the boat 217 by the wafer transfer mechanism 125 in the one (upper or lower) pod opener 121, another pod from the rotary pod shelf 105 is loaded into the other (lower or upper) pod opener 121. 110 is transferred and transferred by the pod transfer device 118, and the opening operation of the pod 110 by the pod opener 121 is simultaneously performed.

  When a predetermined number of wafers 200 are loaded into the boat 217, the lower end portion of the processing furnace 202 closed by the furnace port shutter 147 is opened by the furnace port shutter 147. Subsequently, the boat 217 holding the wafers 200 is loaded into the processing furnace 202 when the seal cap 219 is lifted by the boat elevator 115.

  After loading, arbitrary processing is performed on the wafer 200 in the processing furnace 202. After the processing, the wafer 200 and the pod 110 are ejected to the outside of the casing by the reverse procedure described above except for the wafer alignment process in the notch alignment device 135 (not shown).

Next, the PMC 14 that controls the components of the substrate processing apparatus 10 will be described.
FIG. 4 shows a hardware configuration centered on the PMC 14.
The PMC 14 includes a CPU 140, a ROM (read-only memory) 142, a RAM (random-access memory) 144, a transmission / reception processing unit 146 that transmits and receives data to and from the input / output device 16, a temperature control unit 150, and a gas control unit. 152, a pressure control unit 154, a transfer control unit (not shown), and an I / O control unit 148 that performs I / O control with the temperature control unit 150 and the like. The CPU 140 generates control data (control instructions) for processing the substrate based on the recipe created or edited on the operation screen 18 of the input / output device 16 and stored in the RAM 144 or the like, the temperature control unit 150, Output to the gas control unit 152 and the pressure control unit 154. The CPU 140 similarly outputs a control instruction to a conveyance control unit (not shown).

  The ROM 142 and RAM 144 store a sequence program, a plurality of recipes, input data (input instruction) input from the input / output device 16, recipe commands, recipe history data, and the like. Note that the PMC 14 may include a storage device (not shown) realized by a hard disk drive (HDD) or the like. In this case, data similar to the data stored in the RAM 144 is stored in the storage device. Is done.

  The input / output device 16 is received by the input unit 160 that receives operator (user) input data (input instruction) from the operation screen 18, the display unit 162 that displays data stored in the RAM 144, and the like, and the input unit 160. The input data (input instruction) from the temporary storage unit 166 and the input unit 160 stored until the input data is transmitted to the transmission / reception processing unit 146 by the display control unit 164 described later is received, and the input data is displayed on the display unit 162. Alternatively, a display control unit 164 that transmits to the transmission / reception processing unit 146 is included. As will be described later, the display control unit 164 receives an instruction (execution instruction) for executing an arbitrary recipe among a plurality of recipes stored in the ROM 142 or the RAM 144 by the CPU 140 via the transmission / reception processing unit 146. The display unit 162 displays an arbitrary recipe instructed by an instruction from the display control unit 164 on the operation screen 18. Further, as will be described later, the display unit 162 displays an authority setting screen for setting the authority of the operator (user), and constitutes display means.

  The temperature control unit 150 controls the temperature in the processing chamber 202 by the heater 338 provided on the outer periphery of the processing furnace 202 described above. The gas control unit 152 controls the supply amount of the reaction gas supplied into the processing furnace 202 based on the output value from the MFC (mass flow controller) 342 provided in the gas pipe 340 of the processing furnace 202. The pressure control unit 154 controls the pressure in the processing chamber 202 by opening and closing the valve 348 based on the output value of the pressure sensor 346 provided in the exhaust pipe 344 of the processing furnace 202. As described above, the temperature control unit 150 and the like control each unit (the heater 338, the MFC 342, the valve 348, and the like) of the substrate processing apparatus 10 based on a control instruction from the CPU 140.

  For example, when data for setting a recipe is input by the input unit 160 of the input / output device 16, the input data (input instruction) is stored in the storage unit 166 and displayed via the display control unit 164. And is transmitted to the transmission / reception processing unit 146 of the PMC 14 by the display control unit 164. The CPU 140 stores the input data in the RAM 144 and finalizes the recipe setting input stored in the ROM 142, for example. The CPU 140 activates the sequence program, and in accordance with the sequence program, for example, by calling and executing a recipe command stored in the RAM 144, the steps are sequentially executed, and the temperature control unit 150, the I / O control unit 148, and the like. A control instruction for processing the substrate is transmitted to the gas control unit 152, the pressure control unit 154, and the transfer control unit. The temperature control unit 150 and the like control each unit (the heater 338, the MFC 342, the valve 348, and the like) in the substrate processing apparatus 10 in accordance with a control instruction from the main control instruction. Thereby, the processing of the wafer 200 described above is performed.

Next, the management method of the user's operation authority for the recipe stored in the substrate processing apparatus 10 according to the embodiment of the present invention will be described in detail.
In the substrate processing apparatus 10, recipes such as process recipes and system recipes are stored and managed as files. For example, an attribute called an edit type is embedded in each file. For example, one of a plurality of attribute values such as product, maintenance, and test is set in the edit type. Note that the number of attribute values is not limited, and the name of the attribute value is arbitrarily set.

The substrate processing apparatus 10 stores and manages the user authority for each attribute value of the edit type. The user authority is managed by the administrator, and only the administrator can set the user authority.
FIG. 5 is a diagram illustrating user authority (user authority information) stored in the substrate processing apparatus 10 according to the embodiment of the invention.
As illustrated in FIG. 5, the user authority information includes a user name, a password corresponding to the user, and the authority of the user for each attribute value such as product, maintenance, and test. The user authority information may include an identifier (ID) made up of, for example, an employee number that uniquely identifies the user. Reserve 1, reserve 2, and reserve 3 are reserved attribute values, and their names are changed as necessary.

  In the user authority information, the user name represents the name of the user, and the password is, for example, a character string made up of alphanumeric characters. The authority is set for each of the plurality of attribute values, and is, for example, “edit”, “reference”, or “prohibition”. Here, “edit” is an authority to refer to and edit the file, “reference” is an authority to refer only to the file, and “inhibit” refers to the file reference and edit. It is an authority that cannot be performed. Note that other than these set values may be set as the authority.

  For example, the user 1 can refer to and edit a process recipe (file) in which “product” (attribute value) is set in the edit type (attribute), and a process in which “maintenance” is set in the edit type. You can refer to the recipe. On the other hand, the user 1 cannot edit the process recipe in which “maintenance” is set as the edit type, and cannot refer to or edit the process recipe in which “test” is set as the edit type. .

FIG. 6 is a diagram illustrating a user list screen 50 displayed as the operation screen 18 on the input / output device 16 of the substrate processing apparatus 10 and operated by an administrator.
As illustrated in FIG. 6, the user list screen 50 includes a user name 500 of each user, a password 502 of the user, and an authority setting button 504 for setting the authority of the user. The user name 500 and the password 502 are for user authority information stored in the substrate processing apparatus 10. The authority setting button 504 is a button for shifting to an authority setting screen for setting the authority of the user corresponding to the button. For example, when the authority setting button 504 corresponding to the user 1 is pressed, an authority setting screen for setting the authority of the user 1 is displayed on the input / output device 16. The subsequent screens are also displayed as operation screens 18 on the input / output device 16 of the substrate processing apparatus 10, similarly to the user list screen 50.

FIG. 7 is a diagram illustrating an authority setting screen 52 for setting user authority for each of a plurality of attribute values.
As illustrated in FIG. 7, the authority setting screen 52 includes a target user name 520, a plurality of attribute values 522 set for the edit type, and the authority 524 of the user for the file having the attribute value 522. It is. The user name 520, the edit type attribute value 522, and the authority 524 are for user authority information stored in the substrate processing apparatus 10. The authority 524 is realized, for example, as a pop-down menu, and is displayed so that one of “edit”, “reference”, and “prohibition” can be selected when the display area of the authority 524 is pressed. The authority 524 may be realized as a button, for example. In this case, when the button is pressed, a window for setting a setting value such as editing is newly displayed, and the setting value is set by the administrator. The When the administrator sets the user authority, the set authority is stored in the substrate processing apparatus 10. The administrator sets and manages the authority of each user via such an authority setting screen 52.

The user refers to and edits each process recipe via the process recipe list screen.
FIG. 8 is a diagram illustrating a process recipe list screen 54 that displays a list of process recipes stored in the substrate processing apparatus 10.
As illustrated in FIG. 8, the process recipe list screen 54 includes a process recipe name 540, an attribute value 548 set in the process recipe edit type, a cursor 550 for selecting a process recipe, and this cursor. An open button 542 for referring to the process recipe selected by 550, a rearrangement button 544 for rearranging a plurality of displayed process recipes, and an edit type button 546 for limiting the displayed process recipes And are included.

  In the process recipe list screen 54, when the user presses the edit type button 546, selects an edit type from product, maintenance, test, all, etc., and presses the sort button 544, the edit type is the selected attribute value. Are displayed on the process recipe list screen 54. If all is selected, all process recipes are displayed.

  The user confirms the plurality of process recipes and the edit type of each process recipe on the process recipe list screen 54. The user refers to the selected process recipe by moving the cursor 550 up and down, for example, via the input unit 160 of the input / output device 16 to select a process recipe and pressing an open button 542. When the user presses the open button 542, the authority information (FIG. 5) of the user is confirmed by the PMC 14. The PMC 14 controls operations (reference, edit, etc.) on the process recipe based on the authority of the user with respect to the edit type attribute value set in the selected professional wrestling recipe.

  For example, when the authority of the user is “edit” or “reference”, the PMC 14 permits the user to refer to the process recipe and displays a process recipe step list screen described later. For example, when the authority of the user is “prohibited”, the PMC 14 does not permit the user to refer to the process recipe, and displays a warning such as “no authority to execute the operation”.

  Further, when the user presses the open button 542, the PMC 14 requests the user to input the password of the user. When the password of the user is correctly input, the PMC 14 permits the reference of the process recipe. When the password of the user is not correctly input, the PMC 14 does not permit the reference of the process recipe. A warning such as “No” is displayed. Note that the PMC 14 may request input of a user name in addition to a password.

FIG. 9 is a diagram illustrating a process recipe step list screen 56 (hereinafter also referred to as a step list screen) that displays the procedure of the process recipe selected on the process recipe list screen 54.
As illustrated in FIG. 9, the step list screen 56 includes a displayed process recipe name 560, an attribute value 562 set for the edit type of the process recipe, a step of the process recipe, and a processing time. And detailed contents 564 of the process recipe procedure including processing contents, an edit button group 566 for editing the process recipe procedure, and a save button 568 for saving the edited process recipe. .

  On the step list screen 56, the user edits the procedure content 564 described in the process recipe by operating the edit button group 566 and presses the save button 568 to update the process recipe. The PMC 14 controls the update of the process recipe based on the authority of the user with respect to the edit type attribute value set in the professional wrestling recipe.

  For example, when the authority of the user is “edit”, the PMC 14 permits the user to update the process recipe, and updates the stored process recipe procedure to the edited one. Further, for example, when the authority of the user is “reference” or “prohibited”, the PMC 14 does not allow the user to update the process recipe, and warns that the user does not have authority to execute the operation. Is displayed.

  Further, when the user presses the save button 568, the PMC 14 requests the user to input the password of the user. When the password of the user is correctly input, the PMC 14 permits the process recipe to be updated. When the password of the user is not correctly input, the PMC 14 does not allow the process recipe to be updated. A warning such as “No” is displayed. Note that the PMC 14 may request input of a user name in addition to a password.

Next, the control program 40 for realizing the control method for the substrate processing apparatus 10 according to the embodiment of the present invention will be described.
FIG. 10 is a diagram showing a configuration of the control program 40 that operates on the PMC 14 of the substrate processing apparatus 10.
As illustrated in FIG. 10, the control program 40 includes a user interface (UI) unit 400, an authority setting unit 402, a recipe display unit 404, an update control unit 406, an authority storage unit 408, and a recipe storage unit 410. For example, the control program 40 is supplied from the host device 20 to the PMC 14 via the network 12, loaded into the RAM 144, and executed by the CPU 140 on the OS (not shown). The control program 40 may be supplied via a recording medium such as FD, CD, or DVD, or may be input via the input / output device 16.

  In the control program 40, the authority storage unit 408 stores the authority of the worker for each of a plurality of attribute values set in the process recipe edit type. Specifically, the authority storage unit 408 stores the user authority information shown in FIG. The authority storage unit 408 is realized by at least one of the RAM 114 and an HDD (not shown).

  The recipe storage unit 410 stores a process recipe in which a procedure for processing a substrate is described and any of a plurality of attribute values is set. The process recipe is realized as a file, and an edit type as an attribute is set in each file. The recipe storage unit 410 is realized in the same manner as the authority storage unit 408. Thus, the recipe memory | storage part 410 comprises a process recipe memory | storage means.

  The UI unit 400 accepts a user operation on the input / output device 16 and outputs it to each component of the control program 40. The UI unit 202 outputs information / data created by each component of the control program 40 and processing contents of each component to the input / output device 16.

  The authority setting unit 402 displays an authority setting screen 52 (FIG. 7) for setting the operator's authority for each of a plurality of attribute values based on the user authority information stored in the authority storage unit 408. The input via the authority setting screen 52 is accepted, and the user authority information stored in the authority storage unit 408 is updated based on the input. Specifically, upon receiving from the UI unit 400 that the authority setting button 504 corresponding to a predetermined user has been pressed on the user list screen 50 (FIG. 6), the authority setting unit 402 refers to the authority storage unit 408. To retrieve user authority information related to the user. The authority setting unit 402 generates an authority setting screen 52 based on the search result data, outputs the generated screen data to the UI unit 400, and causes the input / output device 16 to display the generated screen data. When the authority setting unit 402 receives from the UI unit 400 that the authority has been updated by pressing the authority 524 button on the authority setting screen 52, the authority setting unit 402 displays the user authority information stored in the authority storage unit 408. Update to the accepted authority.

  The recipe display unit 404 generates a process recipe list screen 54 (FIG. 8) by referring to the process recipe stored in the recipe storage unit 410, and outputs the generated screen data to the UI unit 400 for input / output. It is displayed on the device 16. When the recipe display unit 404 receives from the UI unit 400 that the open button 542 has been pressed on the process recipe list screen 54, the recipe display unit 404 creates a recipe based on the user authority information of the user stored in the authority storage unit 408. The reference by the user of the process recipe stored in the storage unit 410 is controlled. More specifically, when the user authority is, for example, “edit” or “reference” with respect to the attribute value set in the selected process recipe, the recipe display unit 404 displays the process recipe by the user. Allow browsing of In this case, the recipe display unit 404 generates the process recipe step list screen 56, outputs the generated screen data to the UI unit 400, and causes the input / output device 16 to display the generated screen data.

  Furthermore, the recipe display unit 404 accepts the input password (and user name) via the UI unit 400, checks the password stored in the authority storage unit 408, and determines whether the input password is correct. judge. The recipe display unit 404 determines whether or not to allow the user to refer to the process recipe based on the determination result.

  Upon receiving from the UI unit 400 that the save button 568 has been pressed on the step list screen 56, the update control unit 406, based on the user authority information of the user stored in the authority storage unit 408, the recipe storage unit 410. The updating of the process recipe stored in the user is controlled. More specifically, when the user authority is, for example, “edit” with respect to the attribute value set in the selected process recipe, the update control unit 406 permits the user to update the process recipe. Furthermore, the update control unit 406 receives the input password or the like via the UI unit 400, checks the password stored in the authority storage unit 408, determines whether the input password is correct, and determines Based on the result, it is determined whether or not to allow the user to update the process recipe. In addition, when the process recipe memorize | stored in recording media, such as FD, CD, DVD, is stored in PMC14, the update control part 406 is similar to said control method, and the process recipe memorize | stored in the recording medium is used as a recipe. You may determine whether it stores in the memory | storage part 410. FIG.

Next, control processing of the substrate processing apparatus 10 according to the embodiment of the present invention will be described.
FIG. 11 is a flowchart showing screen transition processing (S10) from the process recipe list screen 54 to the step list screen 56 by the substrate processing apparatus 10 according to the embodiment of the present invention.
As shown in FIG. 11, in step 100 (S100), the recipe display unit 404 of the control program 40 operating on the PMC 14 refers to the process recipe and its attributes (edit type) stored in the recipe storage unit 410. The process recipe list screen 54 is displayed on the input / output device 16. In the input / output device 16, the display unit 162 and the display control unit 164 receive screen data from the PMC 14 and display the process recipe list screen 54.

  In step 102 (S102), the recipe display unit 404 determines whether or not a process recipe is selected on the process recipe list screen 54 and the open button 542 is pressed. The recipe display unit 404 proceeds to the process of S104 when the open button 542 is pressed, and returns to the process of S102 otherwise.

  In step 104 (S104), the recipe display unit 404 displays “edit” and “reference” with respect to the attribute value set in the edit type of the selected process recipe for the user authority stored in the authority storage unit 408. It is determined whether or not any of the above. The recipe display unit 404 proceeds to the process of S108 when the authority of the user is “edit” or “reference”, and proceeds to the process of S106 otherwise.

In step 106 (S106), the recipe display unit 404 causes the input / output device 16 to display a first warning (for example, “no authority to operate”), and returns to the process of S102.
In step 108 (S108), the recipe display unit 404 requests input of a password, and accepts the password input by the user via the input / output device 16. Note that the recipe display unit 404 may request input of a user name in addition to the password.

  In step 110 (S110), the recipe display unit 404 determines whether the input password is correct based on the password stored in the authority storage unit 408. The recipe display unit 404 proceeds to the process of S114 if the input password is correct, and proceeds to the process of S112 otherwise.

In step 112 (S112), the recipe display unit 404 displays a second warning (for example, “password is incorrect”) on the input / output device 16, and returns to the process of S102.
In step 114 (S114), the recipe display unit 404 allows the user to refer to the process recipe, and refers to the file of the process recipe stored in the recipe storage unit 410 and selected by the user. A list screen 56 is displayed on the input / output device 16. In the input / output device 16, the display control unit 164 or the like receives screen data from the PMC 14 and displays the step list screen 56.

FIG. 12 is a flowchart showing permission / refusal determination processing (S20) related to process recipe update by the substrate processing apparatus 10 according to the embodiment of the present invention. Of the processes shown in FIG. 12, the same reference numerals are assigned to the processes that are substantially the same as those shown in FIG.
As shown in FIG. 12, in step 200 (S200), the update control unit 406 of the control program 40 operating on the PMC 14 accepts an editing operation by the user via the editing button group 566 on the step list screen 56.

  In step 202 (S202), the update control unit 406 determines whether the process recipe has been edited on the step list screen 56 and the save button 568 has been pressed. When the save button 568 is pressed, the update control unit 406 proceeds to the process of S204, and otherwise returns to the process of S200.

  In step 204 (S204), the update control unit 406 determines whether the authority of the user stored in the authority storage unit 408 is “edit” with respect to the attribute value set in the edit type of the selected process recipe. Determine whether or not. If the authority of the user is not “edit”, the update control unit 406 displays the first warning in the process of S106 and returns to the process of S200.

  If the authority of the user is “edit”, the update control unit 406 proceeds to the process of S110 and requests input of a password. Whether or not the input password is correct is determined in S110. If it is determined that the password is not correct, the update control unit 406 displays a second warning in S112 and displays S200. Return to processing.

  If it is determined that the password is correct, in step 208 (S208), the update control unit 406 permits the user to update the process recipe, and the recipe storage unit 410 is based on the process recipe procedure edited by the user. The process recipe stored in is updated. As a form different from the present embodiment, it is possible not to display a process recipe without “edit” authority.

  Therefore, according to the substrate processing apparatus of the present invention, the operation authority for a plurality of stored files (process recipes) is set as one of a plurality of attribute values as an attribute (edit type). Managed for each attribute value.

  Since the edit type is embedded in each file and stored in the substrate processing apparatus 10, the edit type can be displayed for each file. For this reason, the user can easily confirm the edit type of all process files (files).

  Since the process recipe list screen includes the edit type button 546 and the rearrangement button 544, the substrate processing apparatus 10 can display only the file of the edit type selected by the user. For this reason, even when the number of process recipes increases, the user can easily check and select a necessary process recipe.

  The substrate processing apparatus 10 requests at least a password when accepting reference and editing of a process recipe (file). Furthermore, according to the present embodiment, the operation authority is set for each edit type of the process recipe. Thereby, it is possible to prevent the process recipe from being updated unnecessarily, executing the process recipe, and processing the substrate wastefully.

  The substrate processing apparatus according to the present invention can be applied not only to a semiconductor manufacturing apparatus but also to an apparatus for processing a glass substrate such as an LCD device. In addition, the substrate processing apparatus according to the present invention does not limit the processing in the furnace, but performs film forming processing including processing for forming CVD, PVD, oxide film, nitriding diffusion, and processing for forming a film containing metal. be able to. The substrate processing apparatus according to the present invention can be applied not only to a vertical apparatus but also to a single wafer apparatus.

The user authority setting, file reference, and editing may be performed via an operation screen displayed on the host device 20. In this case, data for setting, reference, and editing is transmitted from the host apparatus 20 to the substrate processing apparatus 10 via the network 12, and screen data is transmitted from the substrate processing apparatus 10 to the host apparatus 20. The
Furthermore, although the process recipe is described in the present embodiment, the process recipe is also applied to a system recipe and other control information files. Even in this case, an edit type is set for each file.

1 is a diagram showing a configuration of a substrate processing system 1 including a substrate processing apparatus 10 according to an embodiment of the present invention. 1 is a perspective view of a substrate processing apparatus 10 according to an embodiment of the present invention. 1 is a side perspective view of a substrate processing apparatus 10 according to an embodiment of the present invention. 1 shows a hardware configuration centered on a PMC 14 of a substrate processing apparatus 10 according to an embodiment of the present invention. 3 is a diagram illustrating an authority of an operator stored in the substrate processing apparatus 10. FIG. FIG. 4 is a diagram illustrating a user list screen 50 displayed as an operation screen 18 on the input / output device 16 of the substrate processing apparatus 10. It is a figure which illustrates the authority setting screen 52 for setting the authority of the user with respect to each of a plurality of attribute values. It is a figure which illustrates the process recipe list screen 54 which displays the list of the process recipes stored in the substrate processing apparatus. It is a figure which illustrates the process recipe step list screen 56 which displays the detail of the process recipe selected in the process recipe list screen. 3 is a diagram showing a configuration of a control program 40 that operates on the PMC 14 of the substrate processing apparatus 10. FIG. It is a flowchart which shows the screen transition process (S10) from the process recipe list screen 54 by the substrate processing apparatus 10 which concerns on embodiment of this invention to the step list screen 56. FIG. It is a flowchart which shows the permission determination processing (S20) regarding the update of the process recipe by the substrate processing apparatus 10 which concerns on embodiment of this invention.

Explanation of symbols

10 Substrate processing equipment 14 PMC
16 Input / output device 18 Operation screen 40 Control program 50 User list screen 52 Authority setting screen 54 Process recipe list screen 56 Step list screen 56 Process recipe step list screen 400 UI unit 402 Authority setting unit 404 Recipe display unit 406 Update control unit 408 Authority Storage unit 410 Recipe storage unit

Claims (5)

A storage unit that describes a procedure for processing a substrate, stores a plurality of recipes in which any attribute value among a plurality of attribute values related to the described procedure is set;
An authority setting screen for setting authority to edit, refer to, or prohibit each of the plurality of recipes stored in the storage unit, a plurality of recipes stored in the storage unit, and a plurality of recipes are set. Display means for displaying a recipe list display screen for displaying a list in association with attribute values being
The recipe list display screen accepts an operation of selecting one of a plurality of recipes displayed on the screen,
When any of a plurality of recipes displayed on the recipe list display screen is selected, an update means for updating the contents of the selected recipe is set when the authority to edit the selected recipe is set Substrate processing equipment. A storage unit that describes a procedure for processing a substrate, stores a plurality of recipes in which any attribute value among a plurality of attribute values related to the described procedure is set;
An authority setting screen for setting authority to edit, refer to, or prohibit each of the plurality of recipes stored in the storage unit, a plurality of recipes stored in the storage unit, and a plurality of recipes are set. Display means for displaying a recipe list display screen for displaying the attribute values being displayed;
The recipe list display screen accepts an operation of selecting any of a plurality of recipes displayed on the screen, and the display means selects any of the plurality of recipes displayed on the recipe list display screen. In this case, the substrate processing apparatus further includes a step list display screen for displaying the selected recipe and the content of the recipe. The substrate processing apparatus according to claim 2, wherein the step list display screen accepts an operation for editing or saving the contents of the recipe displayed on the screen according to the authority set for the recipe displayed on the screen. A procedure for processing a substrate is described, and a plurality of recipes in which any attribute value among a plurality of attribute values related to the described procedure is set are stored in a storage unit,
Authority setting screen for setting authority to edit, refer to, or prohibit each of the plurality of stored recipes, a plurality of recipes stored in the storage means, and attributes set to the plurality of recipes Display a list of recipes that displays a list of values in association with each other,
The recipe list display screen receives an operation of selecting any of a plurality of recipes displayed on the screen, and is selected when any of the plurality of recipes displayed on the recipe list display screen is selected. A method for controlling a substrate processing apparatus, wherein the content of a selected recipe is updated when the authority to edit the recipe is set. The recipe list display screen receives an operation of selecting any of a plurality of recipes displayed on the screen, and is selected when any of the plurality of recipes displayed on the recipe list display screen is selected. A step list display screen for displaying the recipe and the contents of the recipe is further displayed.
5. The substrate processing apparatus according to claim 4, wherein the step list display screen accepts an operation for editing or saving the contents of the recipe displayed on the screen according to the authority set for the recipe displayed on the screen. Control method.

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