JPH03223901A - Semiconductor manufacturing equipment - Google Patents

Abstract

PURPOSE:To reduce the possibility of misoperation by providing a control means which makes invisible an action command of a high order access right level and an action parameter via a display means. CONSTITUTION:A control part 33 consists of a microprocessor, a RAM, an I/O interface, etc., and performs its processing based on the program transferred to the RAM from a disk 34 at the time of applying a power supply. Then a user name inputted by a user via a key is collated with the pass words which are successively read out of a 2nd storage part at the beginning of operation exerted on a semiconductor manufacturing equipment. Thus an access right level of the user is decided to the device. At the same time, an action command exectable to the user and an action parameter settable to the user are limited to the value lower than the access right level of the user by reference to a 1st storage part. Thus the action commands and action parameters of higher access right levels are made invisible via a CRT 32. In such constitution, the misoperations are surely prevented with the semiconductor manufacturing equipment.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for manufacturing semiconductor devices such as LSI-VLSI, and particularly to a reduction projection exposure apparatus having a large number of operation commands and operation parameters.

[Prior Art] In general, the commands and parameters that semiconductor manufacturing equipment has are: ■ Parameters that define the configuration of the equipment; ■ Parameters that compensate for the positioning accuracy of various actuators and measurement accuracy of various sensors; ■ Parameters that define the configuration of the equipment; Parameters and commands necessary to maintain operation and performance, ■ Parameters and their setting commands that define the operating conditions of the equipment in order to manufacture the target semiconductor device, ■ Based on the parameters set in ■ Classified into commands necessary to process wafers, etc. Parameters belonging to ■ include, for example, parameters that define the type of wafer orientation flat;
It is set by the equipment manufacturer at the time of factory shipment to be compatible with the hardware of the wafer transport device installed in the semiconductor manufacturing equipment.

Generally, operations belonging to categories ① to ③ require a high level of specialized knowledge and caution regarding semiconductor manufacturing equipment. In addition, erroneous operations such as setting of the parameters are directly linked to deterioration of the basic performance of the semiconductor manufacturing equipment and generation of defective products. Therefore, this type of operation during the operation period is limited to maintenance personnel from the equipment manufacturer and experienced operators from the semiconductor manufacturer, and is not allowed to be performed by simple operators whose job is to start and stop operations on a daily basis. I tried not to let it happen. For particularly important commands and parameters, users were required to enter specific passwords in advance, making it impossible to access them unless they matched.

[Problems to be Solved by the Invention] FIG. 6 is a schematic diagram of a stepper which is an example of a semiconductor manufacturing device, in which 1 is a console consisting of a keyboard and CRT for inputting commands and parameters, 2 is a CRT
PU, 3 is a disk device for storing parameters;
4 is a rack for mounting the CPU 2, disk device 3, etc., 5 is a lighting device, 6 is a resicle on which a circuit pattern is drawn, 7 is a projection lens, 8 is a wafer, and 9 is a wafer stage. In order to cause the stepper to process a wafer, the simple operator reads out the parameters (2) previously stored in the disk device 3 and inputs a command from the console 1 to start the operation. The stepper operates according to the read parameters such as exposure conditions.
The circuit pattern on the reticle 6 is transferred onto the wafer 8 while being reduced by the projection lens 7, and the above process is repeated while the wafer stage 9 is driven in steps.

On the other hand, in this stepper, since the operations related to (1) to (3) above are performed from the console 1 in the same way, a simple operator who is not informed of the contents may operate the steps incorrectly, resulting in deterioration of the basic performance of the stepper or the production of defective products. For example, if the parameters related to the wafer orientation flat described above are changed incorrectly, the wafer may be damaged. It is not practical to add passwords to all of these parameters and commands because it complicates the original operation, but it is an effective way to hide unnecessary information and prevent erroneous operations depending on the operator's duties. A new method was desired.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a semiconductor manufacturing apparatus that can reliably prevent erroneous operations.

[Means for Solving the Problems] The present invention provides a semiconductor manufacturing apparatus that operates according to a large number of operation commands and operation parameters in order to achieve the above-mentioned object, and which is based on the purpose of use of the apparatus by the user and the required expertise. A display means capable of displaying a group of operation commands and a group of operation parameters classified into at least two or more access privilege levels according to the level of knowledge, and each operation command and each operation! - A memory having a first storage part that stores the access right level assigned to the parameter, and a second storage part that stores in advance a plurality of combinations of user name, password, and user access right level for each user. means, and the user name and password key-input by the user at the beginning of the operation for the device are checked against those sequentially read out from the second storage portion, and the access right level of the user to the device is determined. The access right level of the user is stored by referring to the first storage section and the access section of the user, together with the storage means, the operation commands that the user can execute and the operation parameters that can be set. and control means for making the operation commands and operation parameters invisible on the display means.

[Example] The present invention will be explained below based on drawings showing embodiments thereof.

FIG. 1 is a flowchart outlining the processing procedure of a semiconductor manufacturing apparatus according to an embodiment of the present invention, and FIG. 2 is a general block diagram of the same apparatus. In FIG. 2, 31 is a keyboard for inputting information from the user to the control section 33, and 32 is a CRT for displaying output information from the control section 33.
It is.

The control unit 33 is a microprocessor/RAM-1 (not shown).
It is composed of 10 interfaces, etc., and performs the processing described below in accordance with the program transferred from the disk 34 to the RAM when the power is turned on. Reference numeral 35 denotes a main body of the semiconductor manufacturing apparatus in which various actuators and sensors controlled by a microprocessor through the l10 interface of the control unit 33 are mounted.

In addition to programs, the disk 34 contains a file in which multiple user names and passwords and corresponding access privilege levels are registered (hereinafter referred to as user access privilege file), and command names and correspondences of all executable operation commands. A file that describes the access privilege level to be used (hereinafter referred to as the command access privilege file), and a file that describes the parameter names and corresponding access privilege levels of all settable operation hole parameters (hereinafter referred to as the parameter access privilege file). remembered.

FIG. 3 shows the code for the contents of each access right file, where (a) is the user access right record, (
b) is a command access right record, and (C) is a parameter access right record. The access right level field of each record stores integer values from O to N, where 0 is the highest access right level and N is the lowest access right level. Note that in the device of this embodiment, N=2,
The access privilege level is: ■The level of maintenance personnel at the semiconductor manufacturing equipment manufacturer (level 0)
) ■ Skilled operator level on the semiconductor manufacturer's side (Level 1) ■ Simple operator level on the semiconductor manufacturer's side (Level 2).

Now, the processing contents of the control section 33 will be explained according to the flowchart of FIG. After the power is turned on and the initialization of the entire device including the main unit 35 (step 11) is completed, step 1
In step 2, a prompt message as indicated by the dotted line 41 in FIG. 4 is displayed on the CRT 32, prompting the user to input the user's name.

When the user enters a user name, for example, as indicated by the dotted line 42 in the figure, from the keyboard 31, a prompt message as indicated by the dotted line 43 in the same figure is further displayed, prompting the user to enter a password. When the user inputs a password from the keyboard 31, the user access rights file stored on the disk 34 is searched (step 13), and if a record matching the input user name and password is found, all records in the same record are searched. RAMJ in the control unit 33 uses the access right level value as the user's access right level.
Set the second variable AL (step 15). If no matching record is found, the CRT 32 issues a message to the effect that the user is not recognized, and the process returns to step 12 to wait for the user's name and password to be re-entered.

In step 16, a prompt message "%j" as indicated by the dotted line 44 in FIG. It is determined whether a command processing routine to be assigned exists or not (Step 17). If it exists, the access privilege level value of the corresponding command access record is compared with the variable AL that holds the user's access privilege level (Step 19).
), if they are equal, or if the variable A L is smaller (if the levels are the same or if the user is at a higher level), then the command is executed (step 20).
. If the command I/processing routine to be assigned does not exist or is at a lower level than the user, a message "No command to assigned command 1" will be displayed on the CRT 32 (step 2).
1), the process returns to step 16 and waits for the command to be input again. Therefore, as a result of the above, usable operation commands are limited to those below the user's access privilege level.

Further, in step 16, when a command to relinquish the right to use the device is input on the keyboard 31, step 1
As a result of the determination in step 8, the process returns to step 12, so that the device can be used by a user with another access right level.

The operation parameters are usually set using the parameter setting commands I to (
For example, 5ET) is input from the keyboard 31, thereby executing a parameter setting command processing routine, and the names and current setting values of a plurality of parameters serving as setting items are displayed on the CRT 32. At this time,
In the present invention, by referring to the parameter access right file and comparing the access right level value of each record with the variable AL, only parameters that are at or below the user's access right level are displayed.

For example, the parameter setting screen for the laser device (not shown) installed in the main body 35 is as shown in FIG.
(a) shows the setting screen for the maintenance personnel level, (b) shows the setting screen for the skilled operator level, and (C) shows the setting screen for the simple operator level. In the same figure, 'La5er IJ'Tiger
'Mode' is maintenance personnel level, 'Repetiton'
l1ate"'Pu1se Energy"'+Iig
h VolgaLe” Haju M This is a parameter that has an access right level of the operator level. The current setting value to the right of the "two" symbol is usually displayed in reverse font to indicate that the setting value can be changed.

According to the above, parameters that are higher than the user's access privilege level are completely invisible on the CRT32, but in order to set a certain parameter, it is necessary to check the current setting values of correlated higher-level parameters. There are times when you want to. In such cases, you can resolve this by breaking down the parameter access privilege level into a read access privilege level and a write access privilege level, and setting the read access privilege level to a level lower than the write access privilege level. can. For users below the write access level but above the read access level, the current value of that parameter is not highlighted and is recognized as a confirmation.

By the way, there is an aspect in which the device manufacturer cannot necessarily determine all the access right levels. In particular, regarding the boundary between skilled operators and simple operators, it is unclear how much duties the semiconductor manufacturer will assign to the simple operators. In such a case, give access rights and set the bell setting command [・,
The deviation does not need to be a fixed value since the user can change the access rights to the access rights file using the keyboard 31 and change anything below the bell.

[Effects of the Invention] As explained above, by providing the access right determination mechanism of the present invention, the operating environment is limited according to the user's purpose of use and the degree of expertise regarding the device, and unnecessary By hiding the information, it is possible to provide an optimal operating environment for users 841J and reduce the possibility of erroneous operations.

[Brief explanation of drawings]

FIG. 1 is a flowchart 1 showing an overview of the processing procedure of a semiconductor manufacturing device according to an embodiment of the present invention, and FIG. 2 is a schematic block diagram of a general semiconductor manufacturing device to which the invention can be applied. Figure 3 is an access rights record format diagram, Figure 4 is a diagram showing an example of the input screen for usage and passwords, and Figure 5 is the same operating parameters with different access rights levels applying the tree invention. FIG. 6, which is a diagram showing a setting screen, is a schematic diagram showing an example of a stepper. In the figure, 31 is a keyboard, 32 is a CRT, 33 is a control section, 34 is a disk, and 35 is a main body. JP-A-3 223901 (7) 4r'7E/X7 ・Town

Claims (5)

[Claims] (1) In semiconductor manufacturing equipment that operates according to a large number of operating commands and operating parameters, access rights are classified into at least two levels depending on the user's purpose for using the equipment and the level of specialized knowledge required. A display means capable of displaying a group of operation commands and a group of operation parameters, and rights assigned to each operation command and each operation parameter. storage means having a first storage part that stores access rights levels assigned to the device; and a second storage part that stores in advance a plurality of combinations of user names, passwords, and user access rights levels for each user; The user name and password key-input by the user at the beginning of the operation are compared with those read out sequentially from the second storage section to determine the access right level of the user to the device, and limits the executable operation commands and settable operation parameters to those below the access right level of the user by referring to the first storage portion, and displays the operation commands and operation parameters of a higher access right level. A semiconductor manufacturing apparatus comprising: a control means for making the means invisible. (2) The semiconductor manufacturing apparatus according to claim 1, wherein the first storage section stores the access right level of the operating parameter separately into a read access right level and a write access right level. (3) The control means registers and deletes other user names, passwords, and access rights levels lower than the user's access rights level in response to key inputs in the second storage portion (1). ) or the semiconductor manufacturing apparatus according to (2). (4) The control means resets the access right level of the operation command and the operation parameter, which are lower than the user's access right level, in the first storage portion in response to a key input. 2) or the semiconductor manufacturing apparatus according to (3). (5) Commands and parameters with higher access privilege levels include commands for maintenance, maintenance, and inspection aimed at maintenance personnel at semiconductor manufacturing equipment manufacturers, and parameters related to equipment configuration that should be set at the time of factory shipment. and parameters for performance compensation, and commands and parameters with intermediate access privilege levels are commands and parameters for maintenance, maintenance, and inspection left to experienced operators on the semiconductor manufacturer's side, and commands and parameters for performance maintenance. Claims (1) and (2) wherein the commands and parameters having a lower access right level are commands and parameters necessary for processing wafers intended for simple operators on the semiconductor manufacturer's side. ,(3)
, or the semiconductor manufacturing apparatus according to (4).