JPS63193453A - Ion implantation controlling device - Google Patents

Abstract

PURPOSE:To reduce abnormal operations due to faulty operations of an operator and to improve a working ratio by restricting executable processing menus every rank from a plurality of processing menus. CONSTITUTION:An ion implantation controlling device systematically controls an ion implantation device 13 of a mechanical scan type or an electrostatic scan type, and it is composed of a CPU 14, a key input device 15, a CRT display 16, and first and second special keys 11 and 12 which are protected so as not to be easily operated. While pass words are registered every rank, propriety of execution is registered every rank in accordance with existence of necessity for the execution of processing menus. Existence of registration of the pass words and the ranks are determined. Only upon the pass words being registered, names of items of executable processing menus corresponding to the ranks of the registered pass words are displayed so that only the executable processing menus are executed. Namely, processing menus executable from a plurality of processing menus are restricted every rank. Hence, abnormal operations due to faulty operations of an operator can be reduced to improve a working ratio.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an ion implantation control device for controlling a mechanical scan type or electrostatic scan type ion implantation device.

[Conventional technology]

An ion implanter selects a necessary ion species by passing an ion beam extracted from an ion source through a mass spectrometer, and performs ion implantation by irradiating a target with an ion beam of the selected ion species.

Mechanical scan type ion implantation equipment fixes the ion beam and mechanically moves the target.
The electrostatic scan type ion implanter is configured to implant ions approximately evenly over the entire surface of the target.The electrostatic scanning type ion implanter implants ions approximately uniformly over the entire surface of the target by fixing the target and electrostatically scanning the ion beam. It is configured to perform injections.

The above-mentioned ion implanter requires systematic control of various components (ion source, mass spectrometer, end station, etc.) during manual and automatic operation. computer, CR
An ion implantation control device consisting of a 7-display device, a key manual device, etc. is provided.

Such an ion implantation control device uses basic data settings for systematic control of the ion implantation device.

FD (floppy disk) management, injection condition setting.

Beam monitor, vacuum system, evacuation, ion source.

Interlock, injection translation, automatic operation setting (l), automatic operation setting (2), automatic operation setting (3), automatic operation setting (
4).

Manual operation settings, device information settings, maintenance and inspection (ion source),
Execute the processing menu indicated by each item name: maintenance/inspection (pump 1), maintenance/inspection (pump 2), and system status monitoring.

This ion implantation control device causes the CR7 display device to display a table of contents screen listing the item names of each of the above-mentioned processing menus by operating, for example, the table of contents key of the key manual device,
By moving the cursor on the table of contents screen and selecting a specific item name, the processing menu represented by that item name will be executed.

[Problem that the invention seeks to solve]

The ion implantation control device as described above executes all processing menus by the operator's key operations.

The above operators include the manufacturing engineer who manufactured this ion implantation control device, the maintenance worker who performs maintenance and inspection of this ion implantation device, and the operator who performs ion implantation work using the ion implantation control device. Manufacturing engineers have the highest technical rank for using ion implantation control equipment (
, the next is the maintenance and inspection worker, and the next is the operator.

On the other hand, the processing menu of the ion implantation control device includes various settings such as those for setting various data before actual operation, those for monitoring the implantation status, and those for performing maintenance inspections. However, among the processing menus for data settings, there are some that only need to be executed once at the time of shipment and do not need to be executed at the time of maintenance and inspection or ion implantation, and some that need to be executed at the time of shipment and maintenance and inspection. There are some operations that do not need to be performed during ion implantation, and others that need to be executed at the time of shipment, maintenance and inspection, and during ion implantation.

For example, if an operator with a low technical rank mistakenly executes a processing menu that only needs to be executed once during ion implantation, the data may be set incorrectly, causing the ion implantation control device to operate abnormally and ion implantation. There is a problem that the injection may not be performed correctly.

An object of the present invention is to provide an ion implantation control device that can reduce abnormal operations caused by operator's erroneous operations.

[Means for solving problems]

The ion implantation control device of the present invention includes a rank-specific password registration screen generation function that generates a rank-specific password registration screen having a rank-specific password display area for displaying passwords classified by rank in response to a special operation; A rank-specific password registration function that registers passwords set for each rank for each rank while the rank-specific password registration screen is occurring, and displays the registered password in the rank-specific password display area of the rank-specific password registration screen; Generates a rank-based process menu execution permission registration screen that has an item name display area that displays the item name of the process menu and a rank-based execution permission display area that displays whether each item can be executed by rank, generated in response to a special operation. A function to generate a rank-based processing menu execution possibility registration screen; A rank-based processing menu execution possibility registration function that registers and displays whether or not the items of a plurality of registered processing menus can be executed in a rank-based execution possibility display area of the rank-based processing menu execution possibility registration screen; a password setting request screen generation function that generates a password setting request screen that requests password setting in response to the start of actual operation; a password input function that inputs the password set while the password setting request screen is generated; a password input determination function that determines whether a password entered by the password input function is registered by the rank-based password registration function; and a rank-based password registration function that determines the rank of the password determined to be registered by the password input determination function. a password rank determination function that determines based on the registered rank; and whether or not the processing menu can be executed by rank, which is registered by the rank-based processing menu execution permission registration function, and the rank of the password determined by the password rank judgment function. A rank-based executable process menu display screen generation function that generates a rank-specific executable process menu display screen that displays the item name of the executable process menu based on It also has a processing menu execution function that executes an executable processing menu.

[Effect]

According to the configuration of the present invention, passwords are registered by rank, and whether execution is possible or not is registered by rank based on whether or not execution of a processing menu is necessary, and whether or not a password input during actual operation is registered and rank is registered. Determine,
Only when a password is registered, the item name of the executable process menu corresponding to the rank of the password is displayed, and only the executable process menu with the displayed item name is executed, so multiple process menus The executable processing menus in the system are restricted for each rank, which reduces abnormal operation due to operator error and increases the operating rate.

〔Example〕

An embodiment of the present invention will be described based on FIGS. 1 to 9. As shown in FIG. 2, this ion implantation control device systematically controls a mechanical scan type or electrostatic scan type ion implantation device 13.
4, a key manual device 15, a CR7 display device 16, and first and second special keys 11 and 12 that are protected so that they cannot be easily operated.

The ion implantation control device is shown in FIGS. 3 and 4F1.
! When the CPU 14 executes the operations shown in the flowchart J, the CPU 14 has the following functions as a whole.

As shown in FIG. 1, this ion implantation control device functionally includes a rank-based password registration screen generation function 1, a rank-based password registration function 2, and a process menu execution permission/inhibition registration screen generation function 3. , rank-based process menu execution possibility registration function 4, password setting request screen generation function 5, password input function 6, password input judgment function 7, password rank judgment function 8, rank-based executable process menu display screen generation It has a function 9 and a processing menu execution function 10.

The rank-based password registration screen generation function 1 generates a rank-based password registration screen 21 having a rank-based password display area 22 for displaying passwords divided into ranks A, B, and C as shown in FIG. This occurs on the CR7 display device 16 in response to the set operation of the special key 11 of No. 1.

The rank-based password registration function 2 is performed by pressing A and B while the rank-based password registration screen 21 is generated by the key manual device 15.
, C. Passwords (for example, A12345) set for each rank are registered in the storage device for each rank, and the registered passwords are displayed in the rank-based password display area 22 of the rank-based password registration screen 21.

The ordering operation and password registration operation on the rank-based password registration screen 21 are ended by resetting the first special key 11.

In this example, the above-mentioned rank-based password registration screen 21 can display 10 passwords for each rank of A, B, and C, and these numbers are registered by the rank-based password registration function 2. 23 is a frame that divides the rank-based password display area 22, and 24 is a numeric area. The password set by the key manual device 15 is once displayed in the numeric area 24, and is registered in the storage device by operating the registration key. , and is displayed at a location corresponding to the cursor position in the rank-specific password display area 22 of the password registration screen 21 in FIG.

Rank-based processing menu execution possibility registration screen generation function 3 is as follows:
The item name display area 32 displays the item names of a plurality of processing menus as shown in FIG.
In response to the set operation of the second special key 12, a rank-based process menu execution permission registration screen 31 having a rank-based execution permission display area 33 for displaying the ranks , B, and C is generated on the CR7 display device 16. do.

The rank-based processing menu execution possibility registration function 4 allows execution of a plurality of processing menu items set by the key human power device 15 depending on whether or not execution is necessary while the rank-based processing menu execution possibility registration screen 31 is generated. The feasibility is registered in the storage device for each rank of A, B, and C, and the feasibility of executing item 1 of the plurality of registered processing menus is displayed in the rank-specific execution capability display area 33 of the rank-specific processing menu execution capability registration screen 31. Display by rank of A, B, and C.

The operation of generating the rank-based processing menu execution permission registration screen 31 and the registration operation of whether or not the item of the processing menu can be executed are completed by resetting the second special key 12.

In this example, the rank-based processing menu execution possibility registration screen 31 includes processing menu item names (basic data setting, FD management, injection condition setting, beam monitor).

..., system status monitor? Item name display area 3
2, and adjacent to the display of each item name are A,
The possibility of execution in each rank of B and C is displayed with an Ox mark (O means possible, × means no).

The password setting request screen generation function 5 generates a password setting request screen (not shown) on the CR7 display device 16 to request the setting of a password in response to the start of actual operation of the ion implanter 13.

The password input function 6 operates by pressing the key manual device 15. while the password setting request screen is generated. Enter the password set using a magnetic card, etc. At this time, the entered password may be displayed on the password setting request screen.

The password input determination function 7 determines whether or not the password input by the password input function 6 has been registered by the rank-based password registration function 2.

Password rank judgment function 8 is password input judgment S
*The rank of the password determined to be registered by V is determined from the rank registered by the rank-based password registration function 2.

The rank-based executable process menu display screen generation function 9 is as follows:
A seventh screen that displays item names of executable processing menus based on whether or not the processing menus can be executed by rank, registered by the rank-based processing menu execution possibility registration function 4, and the password rank determined by the password rank determination function 8. This occurs on the rank-based executable process menu display screen 41.51.61@CRT display device 16 shown in FIGS.

Figure 7 shows CR when a rank A password is entered.
7 shows an example of a rank-based executable process menu display screen 41 appearing on the display device 16.

In FIG. 7, basic data is set in response to registration of whether or not the processing menu can be executed in rank A.

FD management, injection condition settings, beam monitor, vacuum system, evacuation, ion source, interlock, injection translation, automatic operation settings (1), automatic operation settings (2), automatic operation settings (3)
), automatic operation settings (4) 1 manual operation settings, maintenance and inspection (ion source), maintenance and inspection (pump l), maintenance and inspection (pump 2)
), maintenance and inspection (filament).

The name of each item of system status monitoring is displayed.

Figure 8 shows CR when a B rank password is entered.
7 shows an example of a rank-based executable process menu display screen 51 appearing on the display device 16.

In FIG. 8, item names other than the basic data setting and FD management in FIG. 7 are displayed.

Figure 9 shows CR when a C rank password is entered.
An example of a rank-based executable process menu display screen 61 appearing on the T display device 6 is shown.

In this FIG. 9, implantation condition settings and beam monitor are shown.

Only the item names of vacuum system, evacuation, ion source, implant translation, and system status monitoring are displayed.

The process menu execution function IO executes the executable process menu selected by the key human power device 15 during generation of the rank-based executable process menu display screen 41.51.61. The selection of processing menus to be executed is limited to the processing menus displayed on the rank-based executable processing menu display screens 41, 51.61, and it is not possible to select and execute other processing menus.

Next, the operation of the ion implantation control device will be explained with reference to the flowcharts of FIGS. 3 and 4.

This ion implantation control device performs pre-processing before actual operation.
As shown in Figure 3, the rank-based password registration screen 21
is generated to register a password for each rank (step S1), and then a rank-based process menu execution permission registration screen 31 is generated to register whether or not the rank-based process menu can be executed (step S2).

Then, when the actual operation starts, as shown in Fig. 4, a password setting request screen is displayed.In step v1), the user is prompted to enter the password set by the key human power device 15, etc.In step 2), the password has already been registered. Step 2) to determine whether or not this is the case. If the determination result is NO, step V.

Return to

If the determination result in step (3) above is YES, the rank of the password is determined (step (4)).

As a result of the above determination, if the password is rank A, the rank-based executable process menu display screen 4 shown in FIG.
1 (step v5) and executes the selected processing menu (step v6).

If the password is rank B, the screen 51 for displaying the rank-specific executable process menu shown in FIG. 8 is displayed (step v7), and the selected process menu is executed (step V8); if the password is rank C , the rank-specific executable process menu display screen 61 shown in FIG. 9 is generated, step V9), and the selected process menu is executed (step 2+o).The flowchart in FIG. 3 will now be explained a little more. Step s1 is started when the first special key 11 is pressed, and ends when the first special key 11 is re-centered. Similarly,
Step S2 is started by the set operation of the second special key 12, and is ended by the resent operation of the second special key 12. Note that step s1. s2
Control of the execution of is controlled by the first and second special keys 11.12
Although this is done by setting and resetting a operations, various other methods can be considered.

The ion implantation control device of this embodiment registers passwords for each rank using the rank-based password registration screen generation function 1 and the rank-based password registration function 2.
The rank-based processing menu execution permission registration screen generation function 3 and the rank-based processing menu execution permission registration function 4 register the execution permission for each rank based on whether or not there is a need to execute the processing menu, and create a password setting request screen during actual operation. The presence or absence and rank of the password entered by the generation function 5 and the password input function 6 are determined by the password input determination function 7 and the password rank determination function 8, and only when the password is registered, the rank of the password is supported. The executable process menu display screens 41, 51 and 61 are generated by the rank-based executable process menu display screen generation function 9, and only the displayed process menu is executed by the process menu execution function 10. The executable processing menus in the processing menus are limited to each rank of A, B, and C, thereby reducing abnormal operation due to operator's erroneous operation and increasing the operating rate.

In the above embodiment, the ranks of passwords are A, B,
Although the number of ranks is divided into three levels C, the number of ranks is not limited to this. Furthermore, the password can also be entered using a magnetic card or the like.

〔Effect of the invention〕

According to the ion implantation control device of the present invention, passwords are registered for each rank, and whether or not execution of a processing menu is necessary is registered for each rank based on whether or not execution of the processing menu is necessary.
The presence or absence and rank of the password entered during actual operation are determined, and only if the password is registered, the item name of the executable process menu corresponding to the password rank is displayed, and the displayed item name is Since only executable processing menus are executed, the executable processing menus among multiple processing menus are restricted for each rank, which reduces abnormal operation due to operator error and improves operating rate. can be raised.

[Brief explanation of the drawing]

FIG. 1 is a functional block diagram of an embodiment of the present invention, FIG. 2 is a block diagram similarly showing the hardware configuration, FIGS. 3 and 4 are flowcharts similarly showing the operation, and FIGS. 5 to 9 are FIG. 3 is a diagram showing an example of a screen appearing on a CRT display device. l... Rank-based password registration screen generation function, 2...
・Rank-based password registration function, 3... Rank-based processing menu execution permission registration screen generation function, 4... Rank-based processing menu execution permission registration function, 5... Password setting request screen generation function, 6... Password input function, 7
... Password input judgment function, 8... Password rank judgment function, 9... Executable process menu display screen generation function by rank, lO... Process menu execution function Fig. 2 Fig. 3 Fig. 4 Figure 5 Figure 8 Figure 9

Claims (1)

[Scope of Claims] A rank-specific password registration screen generation function that generates a rank-specific password registration screen having a rank-specific password display area for displaying passwords classified by rank in response to a special operation, and the rank-specific password. A rank-based password registration function that registers passwords set for each rank during the registration screen and displays registered passwords in the rank-based password display area of the rank-based password registration screen, and multiple processing menus. Rank-based process menu execution permission registration screen that has an item name display area that displays the item name and a rank-based execution permission display area that displays whether or not each item can be executed by rank. A function to generate a processing menu execution possibility registration screen, and registering whether or not items of multiple processing menus set according to whether or not execution is necessary are registered while the rank-based processing menu execution possibility registration screen is generated. A rank-based processing menu execution possibility registration function that displays whether or not the items of a plurality of completed processing menus can be executed is displayed in the rank-based execution possibility display area of the rank-based processing menu execution possibility registration screen; A password setting request screen generation function that generates a password setting request screen that requests password setting in response, a password input function that inputs the password set while the password setting request screen is generated, and this password input function A password input determination function that determines whether the entered password has been registered by the rank-based password registration function; and a password input determination function that determines whether or not the entered password has been registered by the rank-based password registration function; a password rank determination function that determines executable processing based on the rank-based execution feasibility of the processing menu registered by the rank-based processing menu execution feasibility registration function and the password rank determined by the password rank determination function; A rank-specific executable process menu display screen generation function that generates a rank-specific executable process menu display screen that displays menu item names, and an executable process menu that is selected while this rank-specific executable process menu display screen is generated. An ion implantation control device equipped with a processing menu execution function for executing.